ADW22279ZC-RL7 [ADI]

Single-Axis, High-g, iMEMS ccelerometers; 单轴,高g ,公司的iMEMS ccelerometers
ADW22279ZC-RL7
型号: ADW22279ZC-RL7
厂家: ADI    ADI
描述:

Single-Axis, High-g, iMEMS ccelerometers
单轴,高g ,公司的iMEMS ccelerometers

文件: 总12页 (文件大小:171K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
Single-Axis, High-g,  
iMEMS® Accelerometers  
ADXL78  
FEATURES  
GENERAL DESCRIPTION  
Complete acceleration measurement system on a single  
monolithic IC  
Available in 35 g, 50 g, or 70 g output full-scale ranges  
Full differential sensor and circuitry for high resistance  
to EMI/RFI  
Environmentally robust packaging  
Complete mechanical and electrical self-test on  
digital command  
The ADXL78 is a low power, complete single-axis accelerometer  
with signal conditioned voltage outputs that are on a single  
monolithic IC. This product measures acceleration with a full-  
scale range of ±±3 g, ±35 g, or ±75 g (minimum). It can also  
measure both dynamic acceleration (vibration) and static  
acceleration (gravity).  
The ADXL78 is the fourth-generation surface micromachined  
iMEMS® accelerometer from ADI with enhanced performance  
and lower cost. Designed for use in front and side impact airbag  
applications, this product also provides a complete cost-  
Output ratiometric to supply  
Sensitive axes in the plane of the chip  
High linearity (0.2% of full scale)  
Frequency response down to dc  
effective solution useful for a wide variety of other applications.  
The ADXL78 is temperature stable and accurate over the  
automotive temperature range, with a self-test feature that fully  
exercises all the mechanical and electrical elements of the  
sensor with a digital signal applied to a single pin.  
Low noise  
Low power consumption (1.3 mA)  
Tight sensitivity tolerance and 0 g offset capability  
Largest available prefilter clipping headroom  
400 Hz, 2-pole Bessel filter  
Single-supply operation  
Compatible with Sn/Pb and Pb-free solder processes  
Qualified for automotive applications  
The ADXL78 is available in a 3 mm × 3 mm × 2 mm,  
8-terminal ceramic LCC package.  
APPLICATIONS  
Vibration monitoring and control  
Vehicle collision sensing  
Shock detection  
FUNCTIONAL BLOCK DIAGRAM  
V
S
ADXL78  
TIMING  
GENERATOR  
V
DD  
V
DD2  
400Hz  
BESSEL  
FILTER  
DIFFERENTIAL  
DEMOD  
AMP  
X
EXC  
OUT  
SENSOR  
SELF-TEST  
Figure 1.  
Rev. B  
Information furnished by Analog Devices is believed to be accurate and reliable. However, no  
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other  
rights of third parties that may result from its use. Specifications subject to change without notice. No  
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.  
Trademarks and registeredtrademarks arethe property of their respective owners.  
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.  
Tel: 781.329.4700  
Fax: 781.461.3113  
www.analog.com  
©2010 Analog Devices, Inc. All rights reserved.  
 
ADXL78  
TABLE OF CONTENTS  
Features .............................................................................................. 1  
Applications........................................................................................8  
Power Supply Decoupling ............................................................8  
Self-Test ..........................................................................................8  
Clock Frequency Supply Response .............................................8  
Signal Distortion ...........................................................................8  
Outline Dimensions..........................................................................9  
ADXL78 Ordering Guide.............................................................9  
Automotive Products....................................................................9  
Applications....................................................................................... 1  
General Description......................................................................... 1  
Functional Block Diagram .............................................................. 1  
Specifications..................................................................................... ±  
Absolute Maximum Ratings............................................................ 4  
ESD Caution.................................................................................. 4  
Pin Configuration and Function Descriptions............................. 3  
Theory of Operation ........................................................................ 7  
REVISION HISTORY  
7/10—Rev. A to Rev. B  
Updated Format .................................................................Universal  
Change to Features Section ............................................................. 1  
Updated Outline Dimensions......................................................... 9  
Changes to Ordering Guide ............................................................ 9  
Added Automotive Products Section ............................................ 9  
5/05—Rev. 0 to Rev. A  
Rev. B | Page 2 of 12  
ADXL78  
SPECIFICATIONS1  
At TA = −45°C to +153°C, 3.5 V dc ± 3ꢀ, acceleration = 5 g, unless otherwise noted.  
Table 1.  
Model No. AD22279  
Model No. AD22280  
Model No. AD22281  
Parameter  
Conditions  
1ꢀꢀ ꢁμ  
Min  
Typ Max  
Min  
Typ Max  
Min  
Typ Max  
Unit  
SENSOR  
Output Full-Scale Range IOUT  
Nonlinearity  
Package μlignment Error  
Cross-μxis Sensitivity  
Resonant Frequency  
Sensitivity, Ratiometric  
(Over Temperature)  
37  
55  
7ꢀ  
g
%
Degree  
%
kHz  
mV/g  
ꢀ.2  
1
2
ꢀ.2  
1
2
ꢀ.2  
1
2
−5  
+5  
−5  
+5  
39.9  
−5  
+5  
24  
24  
38  
24  
VDD = 5 V, 1ꢀꢀ Hz 52.25 55  
57.75  
36.1  
25.65 27  
28.35  
OFFSET  
Zero-g Output Voltage  
VOUT − VDD/2,  
VDD = 5 V  
−2ꢀꢀ  
+2ꢀꢀ  
3
−15ꢀ  
+15ꢀ  
3
−15ꢀ  
+15ꢀ  
3.5  
mV  
(Over Temperature)2  
NOISE  
Noise Density  
1ꢀ Hz − 4ꢀꢀ Hz,  
5 V  
1.1  
5
1.4  
5
1.8  
5
mg/√Hz  
Clock Noise  
mV p-p  
FREQUENCY RESPONSE  
−3 dB Frequency  
−3 dB Frequency Drift  
2-pole Bessel  
36ꢀ  
4ꢀꢀ 44ꢀ  
2
36ꢀ  
4ꢀꢀ 44ꢀ  
2
36ꢀ  
4ꢀꢀ 44ꢀ  
2
Hz  
Hz  
25°C to  
TMIN or TMμX  
SELF-TEST  
Output Change  
V
DD = 5 V  
44ꢀ  
3.5  
55ꢀ 66ꢀ  
3ꢀ4  
3.5  
38ꢀ 456  
216  
3.5  
27ꢀ 324  
mV  
3
(Cube vs. VDD  
)
Logic Input High  
Logic Input Low  
Input Resistance  
VDD = 5 V  
VDD = 5 V  
Pull-down  
V
V
kΩ  
1
1
1
3ꢀ  
5ꢀ  
3ꢀ  
5ꢀ  
3ꢀ  
5ꢀ  
resistor to GND  
OUTPUT μMPLIFIER  
Output Voltage Swing  
Capacitive Load Drive  
PREFILTER HEμDROOM  
CFSR @ 4ꢀꢀ kHz  
IOUT  
=
4ꢀꢀ ꢁμ  
ꢀ.25  
1ꢀꢀꢀ  
VDD − ꢀ.25 ꢀ.25  
1ꢀꢀꢀ  
VDD − ꢀ.25 ꢀ.25  
1ꢀꢀꢀ  
VDD − ꢀ.25  
V
pF  
g
28ꢀ  
5
4ꢀꢀ  
4
56ꢀ  
3
V/V  
V
V
POWER SUPPLY (VDD  
)
4.75  
3.5  
5.25  
6
4.75  
3.5  
5.25  
6
4.75  
3.5  
5.25  
6
Functional Range  
Quiescent Supply Current VDD = 5 V  
TEMPERμTURE RμNGE  
1.3  
2
1.3  
2
1.3  
2
mμ  
°C  
−4ꢀ  
+1ꢀ5  
−4ꢀ  
+1ꢀ5  
−4ꢀ  
+1ꢀ5  
1 μll minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed.  
2 Zero g output is ratiometric.  
3 Self-test output at VDD = (Self-Test Output at 5 V) × (VDD/5 V)3.  
Rev. B | Page 3 of 12  
 
 
 
ADXL78  
ABSOLUTE MAXIMUM RATINGS  
Table 2.  
Parameter  
Stresses above those listed under Absolute Maximum Ratings  
may cause permanent damage to the device. This is a stress  
rating only; functional operation of the device at these or any  
other conditions above those indicated in the operational  
section of this specification is not implied. Exposure to absolute  
maximum rating conditions for extended periods may affect  
device reliability.  
Rating  
μcceleration (μny μxis, Unpowered)  
μcceleration (μny μxis, Powered)  
VS  
4ꢀꢀꢀ g  
4ꢀꢀꢀ g  
−ꢀ.3 V to +7.ꢀ V  
(COM − ꢀ.3 V) to  
(VS + ꢀ.3 V)  
μll Other Pins  
Output Short-Circuit Duration  
(μny Pin to Common)  
Operating Temperature Range  
Storage Temperature  
Indefinite  
ESD CAUTION  
−65°C to +15ꢀ°C  
−65°C to +15ꢀ°C  
Rev. B | Page 4 of 12  
 
ADXL78  
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS  
V
DD2  
8
NC  
NC  
1
2
3
7
6
5
V
X
DD  
ADXL78  
TOP VIEW  
OUT  
(Not to Scale)  
COM  
NC  
4
ST  
NC = NO CONNECT  
Figure 2. Pin Configuration  
Table 3. Pin Function Descriptions  
Pin No.  
Mnemonic  
Description  
1
2
3
4
5
6
7
8
NC  
NC  
COM  
ST  
NC  
XOUT  
VDD  
VDD2  
Do Not Connect  
Do Not Connect  
Common  
Self-Test  
Do Not Connect  
X Channel Output  
3.5 V to 6 V  
3.5 V to 6 V  
Rev. B | Page 5 of 12  
 
ADXL78  
CRITICAL ZONE  
TO T  
tP  
T
L
P
T
P
RAMP-UP  
T
L
tL  
T
SMAX  
T
SMIN  
tS  
RAMP-DOWN  
PREHEAT  
t25°C TO PEAK  
TIME  
Figure 3. Recommended Soldering Profile  
Table 4. Recommended Soldering Profile  
Profile Feature  
Sn63/Pb37  
Pb-Free  
μVERμGE RμMP RμTE (TL TO TP)  
PREHEμT  
3°C/s max  
3°C/s max  
Minimum Temperature (TSMIN  
)
1ꢀꢀ°C  
15ꢀ°C  
Maximum Temperature (TSMμX  
TIME (TSMIN TO TSMμX), tS  
TSMμX TO TL  
)
15ꢀ°C  
2ꢀꢀ°C  
6ꢀ s − 12ꢀ s  
6ꢀ s − 15ꢀ s  
Ramp-Up Rate  
3°C/s  
3°C/s  
TIME MμINTμINED μBOVE LIQUIDOUS (TL)  
Liquidous Temperature (TL)  
Time (tL)  
183°C  
6ꢀ s − 15ꢀ s  
217°C  
6ꢀ s − 15ꢀ s  
26ꢀ°C + ꢀ°C/−5°C  
2ꢀ s − 4ꢀ s  
6°C/s max  
8 min max  
PEμK TEMPERμTURE (TP)  
24ꢀ°C + ꢀ°C/−5°C  
1ꢀ s − 3ꢀ s  
TIME WITHIN 5°C OF μCTUμL PEμK TEMPERμTURE (tP)  
RμMP-DOWN RμTE  
TIME 25°C TO PEμK TEMPERμTURE  
6°C/s max  
6 min max  
PIN 8  
XXXXX  
XXXX  
X
= 2.462V  
OUT  
22280  
X
= 2.500V  
X
= 2.500V  
OUT  
OUT  
2 2 2 8 0  
X X X X  
X
= 2.538V  
OUT  
X X X X X  
X
= 2.500V  
OUT  
EARTH'S SURFACE  
Figure 4. Output Response vs. Orientation  
Rev. B | Page 6 of 12  
ADXL78  
THEORY OF OPERATION  
The ADXL78 provides a fully differential sensor structure and  
circuit path, resulting in the industrys highest resistance to  
EMI/RFI effects. This latest generation uses electrical feedback  
with zero-force feedback for improved accuracy and stability.  
The sensor resonant frequency is significantly higher than the  
signal bandwidth set by the on-chip filter, avoiding the signal  
analysis problems caused by resonant peaks near the signal  
bandwidth.  
ANCHOR  
MOVABLE  
FRAME  
PLATE  
CAPACITORS  
UNIT  
SENSING  
CELL  
FIXED  
PLATES  
UNIT  
FORCING  
CELL  
MOVING  
PLATE  
Figure 3 is a simplified view of one of the differential sensor  
elements. Each sensor includes several differential capacitor  
unit cells. Each cell is composed of fixed plates attached  
to the substrate and movable plates attached to the frame.  
Displacement of the frame changes the differential capacitance,  
which is measured by the on-chip circuitry.  
ANCHOR  
Figure 5. Simplified View of Sensor Under Acceleration  
Complementary 455 kHz square waves drive the fixed plates.  
Electrical feedback adjusts the amplitudes of the square waves  
such that the ac signal on the moving plates is 5. The feedback  
signal is linearly proportional to the applied acceleration. This  
unique feedback technique ensures that there is no net  
electrostatic force applied to the sensor. The differential  
feedback control signal is also applied to the input of the filter,  
where it is filtered and converted to a single-ended signal.  
Rev. B | Page 7 of 12  
 
 
ADXL78  
APPLICATIONS  
If the difference frequency is outside of the signal bandwidth,  
the filter attenuates it. However, both the power supply clock  
and the accelerometer clock may vary with time or temperature,  
which can cause the interference signal to appear in the output  
filter bandwidth.  
POWER SUPPLY DECOUPLING  
For most applications, a single 5.1 μF capacitor, CDC, adequately  
decouples the accelerometer from noise on the power supply.  
However, in some cases, particularly where noise is present at  
the 455 kHz internal clock frequency (or any harmonic  
The ADXL78 addresses this issue in two ways. First, the high  
clock frequency eases the task of choosing a power supply clock  
frequency such that the difference between it and the accelero-  
meter clock remains well outside of the filter bandwidth.  
Second, the ADXL78 is the only micromachined accelerometer  
to have a fully differential signal path, including differential  
sensors. The differential sensors eliminate most of the power  
supply noise before it reaches the demodulator. Good high  
frequency supply bypassing, such as a ceramic capacitor close to  
the supply pins, also minimizes the amount of interference.  
thereof), noise on the supply can cause interference on the  
ADXL78s output. If additional decoupling is needed, a 35 Ω (or  
smaller) resistor or ferrite bead can be inserted in the supply  
line. Additionally, a larger bulk bypass capacitor (in the 1 μF to  
4.7 μF range) can be added in parallel to CDC  
.
SELF-TEST  
The fixed fingers in the forcing cells are normally kept at the  
same potential as that of the movable frame. When the self-test  
digital input is activated, the voltage on the fixed fingers on one  
side of the moving plate in the forcing cells is changed. This  
creates an attractive electrostatic force, which causes the frame  
to move toward those fixed fingers. The entire signal channel is  
active; therefore, the sensor displacement causes a change in  
The clock frequency supply response (CFSR) is the ratio of the  
response at VOUT to the noise on the power supply near the  
accelerometer clock frequency. A CFSR of ± means that the  
signal at VOUT is ±× the amplitude of an excitation signal at VDD  
near the accelerometer internal clock frequency. This is  
analogous to the power supply response, except that the  
stimulus and the response are at different frequencies. The  
ADXL78s CFSR is 15× better than a typical single-ended  
accelerometer system.  
VOUT. The ADXL78 self-test function is a comprehensive  
method of verifying the operation of the accelerometer.  
Because electrostatic force is independent of the polarity of the  
voltage across capacitor plates, a positive voltage is applied in  
half of the forcing cells, and its complement in the other half of  
the forcing cells. Activating self-test causes a step function force  
to be applied to the sensor, while the capacitive coupling term is  
canceled. The ADXL78 has improved self-test functionality,  
including excellent transient response and high speed switching  
capabilities. Arbitrary force waveforms can be applied to the  
sensor by modulating the self-test input, such as test signals to  
measure the system frequency response or even crash signals to  
verify algorithms within the limits of the self-test swing.  
SIGNAL DISTORTION  
Signals from crashes and other events may contain high  
amplitude, high frequency components. These components  
contain very little useful information and are reduced by the  
2-pole Bessel filter at the output of the accelerometer. However,  
if the signal saturates at any point, the accelerometer output  
does not look like a filtered version of the acceleration signal.  
The signal may saturate anywhere before the filter. For example,  
if the resonant frequency of the sensor is low, the displacement  
per unit acceleration is high. The sensor may reach the  
mechanical limit of travel if the applied acceleration is high  
enough. This can be remedied by locating the accelerometer  
where it does not see high values of acceleration, and by using a  
higher resonant frequency sensor such as the ADXL78.  
The ST pin should never be exposed to voltages greater than  
VS + 5.± V. If this cannot be guaranteed due to the system  
design (for instance, if there are multiple supply voltages), then  
a low VF clamping diode between ST and VS is recommended.  
CLOCK FREQUENCY SUPPLY RESPONSE  
In any clocked system, power supply noise near the clock  
frequency may have consequences at other frequencies. An  
internal clock typically controls the sensor excitation and the  
signal demodulator for micromachined accelerometers.  
Also, the electronics may saturate in an overload condition  
between the sensor output and the filter input. Ensuring that  
the internal circuit nodes operate linearly to at least several  
times the full-scale acceleration value can minimize electrical  
saturation. The ADXL78s circuits are linear to approximately  
8× full scale.  
If the power supply contains high frequency spikes, they may be  
demodulated and interpreted as an acceleration signal. A signal  
appears as the difference between the noise frequency and the  
demodulator frequency. If the power supply spikes are 155 Hz  
away from the demodulator clock, there is an output term at  
155 Hz. If the power supply clock is at exactly the same frequency  
as the accelerometer clock, the term appears as an offset.  
Rev. B | Page 8 of 12  
 
ADXL78  
OUTLINE DIMENSIONS  
0.030  
0.025  
0.020  
(PLATING OPTION 1,  
SEE DETAIL A  
FOR OPTION 2)  
0.087  
0.078  
0.069  
0.028  
0.020 DIA  
0.012  
0.203  
0.197 SQ  
0.193  
0.054  
0.050  
0.046  
0.020  
0.015  
0.010  
(R 4 PLCS)  
1
3
7
5
0.180  
0.177 SQ  
0.174  
0.106  
0.100  
0.094  
0.075 REF  
R 0.008  
(8 PLCS)  
0.008  
0.006  
0.004  
TOP VIEW  
BOTTOM VIEW  
R 0.008  
(4 PLCS)  
0.077  
0.070  
0.063  
0.019 SQ  
DETAIL A  
(OPTION 2)  
Figure 6. 8-Terminal Ceramic Leadless Chip Carrier [LCC]  
(E-8-1)  
Dimensions shown in inches  
ADXL78 ORDERING GUIDE  
Parts  
per  
Reel  
Measurement Specified  
Temperature  
Voltage (V) Range  
Package  
Option  
Model1, 2, 3  
Range  
35 g  
35 g  
35 g  
35 g  
5ꢀ g  
5ꢀ g  
5ꢀ g  
5ꢀ g  
7ꢀ g  
7ꢀ g  
7ꢀ g  
7ꢀ g  
Package Description  
μD22279-μ-R2  
μD22279-μ  
μDW22279ZC  
25ꢀ  
3,ꢀꢀꢀ  
3,ꢀꢀꢀ  
5
5
5
5
5
5
5
5
5
5
5
5
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
−4ꢀ°C to +1ꢀ5°C 8-Terminal Ceramic Leadless Chip Carrier  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
E-8-1  
μDW22279ZC-RL7 25ꢀ  
μD2228ꢀ-R2  
μD2228ꢀ  
μDW2228ꢀZC  
25ꢀ  
3,ꢀꢀꢀ  
3,ꢀꢀꢀ  
μDW2228ꢀZC-RL7 25ꢀ  
μD22281-R2  
μD22281  
μDW22281ZC  
25ꢀ  
3,ꢀꢀꢀ  
3,ꢀꢀꢀ  
μDW22281ZC-RL7 25ꢀ  
1 μll models are on tape and reel and are RoHS compliant parts.  
2 Z = RoHS Compliant Part.  
3 W = Qualified for μutomotive μpplications.  
AUTOMOTIVE PRODUCTS  
The ADW22279, ADW22285, and ADW22281 models are available with controlled manufacturing to support the quality and reliability  
requirements of automotive applications. Note that these automotive models may have specifications that differ from the commercial  
models; therefore, designers should review the Specifications section of this data sheet carefully. Only the automotive grade products  
shown are available for use in automotive applications. Contact your local Analog Devices account representative for specific Automotive  
Reliability reports for these models.  
Rev. B | Page 9 of 12  
 
 
ADXL78  
NOTES  
Rev. B | Page 1ꢀ of 12  
ADXL78  
NOTES  
Rev. B | Page 11 of 12  
ADXL78  
NOTES  
©2010 Analog Devices, Inc. All rights reserved. Trademarks and  
registered trademarks are the property of their respective owners.  
D05368-0-7/10(B)  
Rev. B | Page 12 of 12  

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