ADXRS645 [ADI]

High Temperature, Vibration Rejecting plus,minus2000temperature/sec Gyroscope;
ADXRS645
型号: ADXRS645
厂家: ADI    ADI
描述:

High Temperature, Vibration Rejecting plus,minus2000temperature/sec Gyroscope

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High Temperature, Vibration Rejecting  
2000°/sec Gyroscope  
Data Sheet  
ADXRS645  
FEATURES  
GENERAL DESCRIPTION  
Innovative ceramic vertical mount package can be oriented  
for pitch or roll rate response  
The ADXRS645 is a high performance angular rate sensor  
with excellent vibration immunity for use in high temperature  
environments. The ADXRS645 is manufactured using the  
Analog Devices, Inc., patented high volume BiMOS surface-  
micromachining process with years of proven field reliability.  
An advanced, differential, quad sensor design provides superior  
acceleration and vibration rejection.  
Wide temperature range: −40°C to +175°C  
Long life: guaranteed 1000 hours at TA = 175°C  
High vibration rejection over wide frequency  
10,000 g powered shock survivability  
Ratiometric to referenced supply  
5 V single-supply operation  
Self-test on digital command  
Temperature sensor output  
The output signal, RATEOUT, is a voltage proportional to the  
angular rate about the axis normal to the package lid. The  
measurement range is a minimum of 2000°/sec, and may be  
extended to 5000°/sec with the addition of a single external  
resistor. The output is ratiometric with respect to a provided  
reference supply. Other external capacitors are required for  
operation.  
APPLICATIONS  
Down hole measurements for geological exploration  
Extreme high temperature industrial applications  
Severe mechanical environments  
A temperature output is provided for compensation techniques.  
Two digital self-test inputs electromechanically excite the sensor  
to test proper operation of both the sensor and the signal  
conditioning circuits. The ADXRS645 is available in a 8 mm ×  
9 mm × 3 mm, 15-lead brazed lead tri in-line package.  
FUNCTIONAL BLOCK DIAGRAM  
5V  
(ADC REF)  
100nF  
5V  
ST2 ST1  
TEMP  
V
RATIO  
ADXRS645  
AV  
CC  
100nF  
25kΩ  
SELF-TEST  
25kΩ  
@ 25°C  
AGND  
DEMOD  
MECHANICAL  
SENSOR  
DRIVE  
AMP  
AC  
AMP  
VGA  
5V  
180kΩ ±1%  
V
DD  
CHARGE PUMP  
AND VOLTAGE  
REGULATOR  
100nF  
PGND  
CP1 CP2 CP3 CP4 CP5 SUMJ  
RATEOUT  
100nF  
22nF  
22nF  
C
OUT  
Figure 1.  
Rev. A  
Document Feedback  
Information furnished by Analog Devices is believed to be accurate and reliable. However, no  
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other  
rightsof third parties that may result fromits use. Specifications subject to change without notice. No  
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.  
Trademarks andregisteredtrademarks are the property of their respective owners.  
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.  
Tel: 781.329.4700  
©2014 Analog Devices, Inc. All rights reserved.  
Technical Support  
www.analog.com  
 
 
 
 
ADXRS645  
Data Sheet  
TABLE OF CONTENTS  
Features .............................................................................................. 1  
Theory of Operation .........................................................................9  
Setting Bandwidth.........................................................................9  
Temperature Output and Calibration.........................................9  
Supply Ratiometricity ...................................................................9  
Range Extension ............................................................................9  
Self-Test Function .........................................................................9  
Continuous Self-Test.....................................................................9  
Outline Dimensions....................................................................... 10  
Ordering Guide .......................................................................... 10  
Applications....................................................................................... 1  
General Description......................................................................... 1  
Functional Block Diagram .............................................................. 1  
Revision History ............................................................................... 2  
Specifications..................................................................................... 3  
Absolute Maximum Ratings............................................................ 4  
Rate Sensitive Axis ....................................................................... 4  
ESD Caution.................................................................................. 4  
Pin Configuration and Function Descriptions............................. 5  
Typical Performance Characteristics ............................................. 6  
REVISION HISTORY  
9/14—Rev. 0 to Rev. A  
Changes to Features Section............................................................ 1  
Added Usable Life Expectancy Parameter, Table 1...................... 3  
7/14—Revision 0: Initial Version  
Rev. A | Page 2 of 10  
 
Data Sheet  
ADXRS645  
SPECIFICATIONS  
All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. TA = 25°C, VS = AVCC = VDD = 5 V,  
V
RATIO = AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (COUT = 0.01 µF), and IOUT = 100 µA, unless otherwise noted.  
Table 1.  
Parameter  
Test Conditions/Comments  
Min  
Typ  
2000  
Max  
Unit  
SENSITIVITY1  
Measurement Range2, 3  
Initial  
Clockwise rotation is positive output  
°/sec  
mV/°/sec  
%
%
% of FS  
TA = 25°C  
1
Temperature Drift  
Uncompensated, −40°C to +150°C4  
Uncompensated, 150°C to 175°C  
Best fit straight line  
5
−35  
0.1  
Nonlinearity  
NULL1  
Initial  
Temperature Drift  
TA = 25°C  
2.4  
2.5  
50  
150  
0.1  
0.0006  
2.6  
V
Uncompensated, −40°C to +150°C4  
Uncompensated, 150°C to 175°C  
Any axis  
°/sec  
°/sec  
°/sec/g  
°/sec/g2  
Linear Acceleration Effect  
Vibration Rectification  
NOISE PERFORMANCE  
Rate Noise Density  
25 g rms, 50 Hz to 5 kHz  
TA ≤ 25°C  
TA = 25°C, 1 minute to 1 hour in-run  
TA = 150°C, 1 minute to 1 hour in-run  
0.25  
100  
150  
°/sec/√Hz  
°/hr  
°/hr  
Resolution Floor  
FREQUENCY RESPONSE  
Bandwidth ( 3 dB)5  
Sensor Resonant Frequency  
SELF-TEST1  
No external filter  
2000  
17.5  
Hz  
kHz  
15.5  
20  
ST1 RATEOUT Response  
ST2 RATEOUT Response  
ST1 to ST2 Mismatch6  
Logic 1 Input Voltage  
Logic 0 Input Voltage  
Input Impedance  
ST1 pin from Logic 0 to Logic 1  
ST2 pin from Logic 0 to Logic 1  
−1300  
1300  
2
°/sec  
°/sec  
%
V
V
3.3  
40  
1.7  
100  
To common  
50  
kΩ  
TEMPERATURE SENSOR1  
VTEMP at 25°C  
Load = 10 MΩ  
25°C, VRATIO = 5 V  
2.3  
2.4  
9
2.5  
V
Scale Factor7  
mV/°C  
ms  
TURN-ON TIME8  
Power on to 2°/sec of final with CP5 = 100 nF  
50  
OUTPUT DRIVE CAPABILITY  
Current Drive  
Capacitive Load Drive  
POWER SUPPLY  
For rated specifications  
200  
1000  
µA  
pF  
Operating Voltage (VS)  
Quiescent Supply Current  
TEMPERATURE RANGE  
Specified Performance  
LIFESPAN  
4.75  
5.00  
3.5  
5.25  
V
mA  
−40  
+175  
°C  
Usable Life Expectancy  
TA = 175°C  
1000  
Hours  
1 Parameter is linearly ratiometric with VRATIO  
.
2 Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies.  
3 Measurement range can be extended to as much as 5000°/s by adding a single 120 kΩ resistor between the RATEOUT and SUMJ pins.  
4 Maximum deviation from +25°C to −40°C or +25°C to +150°C, see the Typical Performance Characteristics section for typical behavior over temperature.  
5 Adjusted by the external capacitor, COUT. Reducing bandwidth below 0.01 Hz does not result in further noise improvement.  
6 Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2).  
7 Scale factor for a change in temperature from 25°C to 26°C. VTEMP is ratiometric to VRATIO  
8 Based on characterization.  
.
Rev. A | Page 3 of 10  
 
 
 
ADXRS645  
Data Sheet  
ABSOLUTE MAXIMUM RATINGS  
RATE SENSITIVE AXIS  
Table 2.  
The ADXRS645 produces a positive output voltage for clockwise  
rotation about the axis normal to the package lid, that is,  
clockwise when looking at the package lid.  
Z-AXIS  
Parameter  
Acceleration (Any Axis, 0.5 ms)  
Unpowered  
Powered  
VDD, AVCC  
VRATIO  
Rating  
10,000 g  
10,000 g  
−0.3 V to +6.6 V  
AVCC  
ST1, ST2  
AVCC  
Output Short-Circuit Duration (Any Pin to  
Common)  
Operating Temperature Range  
Storage Temperature Range  
Indefinite  
RATE  
AXIS  
−55°C to +175°C  
−65°C to +185°C  
Figure 2. RATEOUT Signal Increases with Clockwise Rotation  
Stresses at or above those listed under Absolute Maximum  
Ratings may cause permanent damage to the product. This is a  
stress rating only; functional operation of the product at these  
or any other conditions above those indicated in the operational  
section of this specification is not implied. Operation beyond  
the maximum operating conditions for extended periods may  
affect product reliability.  
ESD CAUTION  
Drops onto hard surfaces can cause shocks of greater than  
10,000 g and can exceed the absolute maximum rating of the  
device. Exercise care in handling to avoid damage.  
Rev. A | Page 4 of 10  
 
 
 
 
 
 
 
 
 
 
 
Data Sheet  
ADXRS645  
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS  
ST1  
A
ST2  
B
TEMP  
C
3
2
A
B
C
D
E
F
1
A
B
C
D
E
F
ADXRS645  
TOP VIEW  
(Not to Scale)  
Figure 3. Pin Configuration (Top View)  
Figure 4. Pin Configuration (3D View)  
Table 3. Pin Function Descriptions  
Pin Number  
Mnemonic  
Description  
A1  
A2  
A3  
B1  
B2  
B3  
C1  
C2  
C3  
D1  
D2  
E1  
E2  
F1  
F2  
CP3  
CP5  
ST1  
CP4  
VDD  
ST2  
CP1  
PGND  
TEMP  
CP2  
RATEOUT  
AVCC  
SUMJ  
AGND  
VRATIO  
Charge Pump Capacitor, 22 nF  
HV Filter Capacitor, 100 nF  
Positive Self-Test  
Charge Pump Capacitor, 22 nF  
Positive Charge Pump Supply  
Negative Self-Test  
Charge Pump Capacitor, 22 nF  
Charge Pump Supply Return  
Temperature Voltage Output  
Charge Pump Capacitor, 22 nF  
Rate Signal Output  
Positive Analog Supply  
Output Amplifier Summing Junction  
Analog Supply Return  
Reference Supply for Ratiometric Output  
Rev. A | Page 5 of 10  
 
ADXRS645  
Data Sheet  
TYPICAL PERFORMANCE CHARACTERISTICS  
2700  
2650  
2600  
2550  
2500  
2450  
2400  
50  
40  
30  
20  
10  
0
–50  
0
50  
100  
150  
200  
200  
200  
TEMPERATURE (°C)  
NULL OUTPUT (mV)  
Figure 5. Null Output at 25°C  
Figure 8. Null Output Over Temperature  
1.2  
1.0  
0.8  
0.6  
0.4  
0.2  
0
50  
45  
40  
35  
30  
25  
20  
15  
10  
5
0
–50  
0
50  
100  
150  
TEMPERATURE (°C)  
SENSITIVITY (mV/°/sec)  
Figure 6. Sensitivity at 25°C  
Figure 9. Sensitivity Over Temperature  
0
–200  
35  
30  
25  
20  
15  
10  
5
–400  
–600  
–800  
–1000  
–1200  
–1400  
–1600  
–1800  
–2000  
0
–50  
0
50  
100  
150  
TEMPERATURE (°C)  
ST1 OUTPUT CHANGE (°/sec)  
Figure 7. ST1 Output Change at 25°C (VRATIO = 5 V)  
Figure 10. ST1 Output Over Temperature  
Rev. A | Page 6 of 10  
 
Data Sheet  
ADXRS645  
2000  
1800  
1600  
1400  
1200  
1000  
800  
40  
35  
30  
25  
20  
15  
10  
5
600  
400  
200  
0
–50  
0
0
50  
100  
150  
200  
TEMPERATURE (°C)  
ST2 OUTPUT CHANGE (°/sec)  
Figure 14. ST2 Output Over Temperature  
Figure 11. ST2 Output Change at 25°C (VRATIO = 5 V)  
10000  
1000  
100  
10  
45  
40  
35  
30  
25  
20  
15  
10  
5
AVERAGE  
+1σ  
–1σ  
1
0.01  
0
0.1  
1
10  
100  
1000  
10000  
AVERAGING TIME (Seconds)  
SELF-TEST MISMATCH (%)  
Figure 12. Self-Test Mismatch at 25°C (VRATIO = 5 V)  
Figure 15. Allan Variance at 25°C vs. Averaging Time  
40  
35  
30  
25  
20  
15  
10  
5
4.0  
3.5  
3.0  
2.5  
2.0  
1.5  
0
–50  
0
50  
100  
150  
200  
TEMPERATURE (°C)  
V
OUTPUT (V)  
TEMP  
Figure 16. VTEMP Output Over Temperature  
Figure 13. VTEMP Output at 25°C  
Rev. A | Page 7 of 10  
ADXRS645  
Data Sheet  
35  
30  
25  
20  
15  
10  
5
0
–3  
0
–30  
–60  
–90  
–120  
–150  
–6  
–9  
–12  
–15  
–18  
–180  
10  
0
0.1  
1
FREQUENCY (kHz)  
CURRENT CONSUMPTION (mA)  
Figure 17. Current Consumption at 25°C (VRATIO = 5 V)  
Figure 19. Typical Rate and Phase Response vs. Frequency (COUT = 470 pF  
with a Series RC Low-Pass Filter of 3.3 kΩ and 22 nF)  
1
0.04  
0.03  
0.02  
0.01  
0
0.1  
0.01  
0.02  
0.03  
0.04  
0.05  
0.06  
0.01  
0.001  
0.1  
1
10  
100  
1k  
10k  
–2000  
–1000  
0
1000  
2000  
FREQUENCY (Hz)  
RATE (°/sec)  
Figure 18. Typical Noise Spectral Density (COUT = 0.01 µF)  
Figure 20. Typical Output Nonlinearity  
Rev. A | Page 8 of 10  
Data Sheet  
ADXRS645  
THEORY OF OPERATION  
The ADXRS645 operates on the principle of a resonator gyroscope.  
Two polysilicon sensing structures each contain a dither frame that  
is electrostatically driven to resonance, producing the necessary  
velocity element to produce a Coriolis force during angular rate.  
At two of the outer extremes of each frame, orthogonal to the  
dither motion, are movable fingers that are placed between  
fixed pickoff fingers to form a capacitive pickoff structure that  
senses Coriolis motion. The resulting signal is fed to a series of  
gain and demodulation stages that produce the electrical rate  
signal output. The dual sensor design rejects external g-forces and  
vibration. Fabricating the sensor with the signal conditioning  
electronics preserves signal integrity in noisy environments.  
SUPPLY RATIOMETRICITY  
The RATEOUT, ST1, ST2, and TEMP signals of the ADXRS645  
are ratiometric to the VRATIO voltage, that is, the null voltage, rate  
sensitivity, and temperature outputs are proportional to VRATIO  
.
Therefore, it is most easily used with a supply ratiometric analog-  
to-digital converter (ADC), which results in self cancellation of  
errors due to minor supply variations. There is some small, usually  
negligible, error due to nonratiometric behavior. Note that, to  
guarantee full rate range, VRATIO must not be greater than AVCC  
.
RANGE EXTENSION  
The ADXRS645 scale factor can be reduced to extend the  
measurement range to as much as 5000°/sec by adding a single  
120 kΩ resistor between the RATEOUT and SUMJ pins. If an  
external resistor is added between the RATEOUT and SUMJ  
pins, proportionally increase COUT to maintain correct  
bandwidth (that is, if adding a 180 kΩ resistor, double COUT).  
The electrostatic resonator requires 15 V for operation. Because  
only 5 V is typically available in most applications, a charge  
pump is included on chip. If an external 17 V to 22 V supply is  
available, the two capacitors on CP1 to CP4 can be omitted, and  
this supply can be connected to CP5 (Pin A2) through a 1 kΩ  
series resistor. Do not ground CP5 when power is applied to the  
ADXRS645. No damage occurs, but under certain conditions,  
the charge pump may fail to start up after the ground is  
SELF-TEST FUNCTION  
The ADXRS645 includes a self-test feature that actuates each of  
the sensing structures and associated electronics in the same  
manner, as if subjected to angular rate. It is activated by standard  
logic high levels applied to ST1 (Pin A3), ST2 (Pin B3), or both.  
ST1 causes the voltage at RATEOUT to change about −1.3 V,  
and ST2 causes an opposite change of +1.3 V. The self-test  
response follows the viscosity temperature dependence of the  
package atmosphere, approximately 0.25%/°C.  
removed without first removing power from the ADXRS645.  
SETTING BANDWIDTH  
The external capacitor, COUT, is used in combination with the  
on-chip resistor, ROUT, to create a low-pass filter to limit the  
bandwidth of the ADXRS645 rate response. The −3 dB  
frequency set by ROUT and COUT is  
Activating both ST1 and ST2 simultaneously is not damaging.  
ST1 and ST2 are fairly closely matched ( 1%), but actuating  
both simultaneously may result in a small apparent null bias  
shift proportional to the degree of self-test mismatch.  
f
OUT = 1/(2 × π × ROUT × COUT)  
This frequency can be well controlled because ROUT has been  
trimmed during manufacturing to be 180 kΩ 1%. Any external  
resistor applied between the RATEOUT pin (D2) and SUMJ pin  
(E2) results in ROUT = (180 kΩ × REXT)/(180 kΩ × REXT).  
ST1 and ST2 are activated by applying a voltage equal to VRATIO  
to the ST1 pin and the ST2 pin. The voltage applied to ST1 and  
In general, an additional filter (in either hardware or software)  
is added to attenuate high frequency noise arising from  
demodulation spikes at the 18 kHz resonant frequency of the  
gyroscope. An RC output filter consisting of a 3.3 kΩ series  
resistor and 22 nF shunt capacitor (2.2 kHz pole) is recommended.  
ST2 must never be greater than AVCC  
.
CONTINUOUS SELF-TEST  
The on-chip integration of the ADXRS645 gives it higher reliability  
than is obtainable with any other high volume manufacturing  
method. In addition, it is manufactured under a mature BiMOS  
process that has field proven reliability. As an additional failure  
detection measure, power-on self-test can be performed.  
However, some applications may warrant continuous self-test  
while sensing rate.  
TEMPERATURE OUTPUT AND CALIBRATION  
It is common practice to temperature calibrate gyroscopes to  
improve their overall accuracy. The ADXRS645 has a temperature  
proportional voltage output that provides input to such a calibration  
method. The temperature sensor structure is shown in Figure 21.  
The voltage at TEMP (Pin C3) is nominally 2.4 V at 25°C, and  
V
RATIO = 5 V. The temperature coefficient is ~9 mV/°C at 25°C.  
Although the TEMP output is highly repeatable, it has only  
modest absolute accuracy.  
V
RATIO  
V
TEMP  
R
R
FIXED  
TEMP  
Figure 21. Temperature Sensor Structure  
Rev. A | Page 9 of 10  
 
 
 
 
 
 
 
 
ADXRS645  
Data Sheet  
OUTLINE DIMENSIONS  
8.20  
8.00  
7.80  
SIDE VIEW  
3.30  
2.85  
2.40  
FRONT VIEW  
BACK VIEW  
5.00  
BSC  
9.20  
9.00  
8.80  
0.30  
6.30  
0.25  
0.20  
6.00  
5.70  
1.30  
BSC  
0.625  
BSC  
3.00  
BSC  
2.00  
BSC  
1.48  
1.35  
1.22  
0.55  
0.50  
0.45  
2.83  
2.70  
2.57  
TOP VIEW  
Figure 22. 15-Lead Brazed Lead Tri In-line Package [BL_TIP]  
(DY-15-1)  
Dimensions shown in millimeters  
ORDERING GUIDE  
Model1  
Temperature Range  
Package Description  
Package Option  
ADXRS645HDYZ  
−40°C to +175°C  
15-Lead Brazed Lead Tri In-line Package [BL_TIP]  
DY-15-1  
1 Z = RoHS Compliant Part.  
©2014 Analog Devices, Inc. All rights reserved. Trademarks and  
registered trademarks are the property of their respective owners.  
D11958-0-9/14(A)  
Rev. A | Page 10 of 10  
 
 
 

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