LG16-0430A [ETC]
Compact Liquid Flow Meter for OEM Applications;
| 型号： | LG16-0430A |
| 厂家： | 
ETC |
| 描述： | Compact Liquid Flow Meter for OEM Applications |
| 文件： | 总8页 (文件大小：593K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
LG16 Liquid Flow Meter Series
Compact Liquid Flow Meter for OEM Applications
. Liquid flow rates up to 5000 µl/min
. Resolutions down to sub nl/min
. Totally non-invasive, pressures up to 200 bar
. Digital I²C interface or analog out 0-5 V
Product Summary
Interface Options
The LG16 Liquid Flow Meter series enables fast, non-
invasive measurements of very low liquid flow rates
below 5 ml/min. This product line is especially suited
for OEM volume applications requiring small sized
components with high performance at low cost.
Digital
- I2C-Bus
Analog
- Voltage Output (0-5 V)
For more information on communication, please refer
to section 3 of this document.
Excellent chemical resistance and bio-compatibility
are ensured: The flow path of the LG16 Liquid Flow
Sensor is formed by a straight-thru glass capillary
and end fittings. There are no obstacles in the flow
path
1 Sensing Performance
Table 1: Model specific performance of LG16 (all data for medium H2O, 23°C)
Parameter
H2O full scale flow ratea
H2O sensor output limitb for digital version
LG16-0025 LG16-0150 LG16-0430 LG16-1000 LG16-2000
Unit
µl/min
µl/min
1.50
1.70
10
7
8
80
120
1000
1100
5.0
5000
5500
5.0
5.0
5.0
% of m.v.c
% of full scale
% of m.v.
% of full scale
% m.v. / °C
% full scale / °C
% of full scale
ms
Accuracy below full scale
(whichever error is larger)
0.5
0.3
0.15
0.5
0.2
0.2
<1
0.5
0.5
0.5
Repeatability below full scale
(whichever error is larger)
0.06
0.15
0.007
-
0.05
0.09
0.005
<0.4
0.01
0.13
0.003
<0.4
40
0.02
0.1
0.02
0.1
Temperature coefficient
(additional error / °C; whichever is larger)
Mounting orientation sensitivityd
Flow detection response time 63
Response time on power-up
Operating temperature
0.004
1.0
0.004
1.5
120
ms
+10…+50
-10…+60
100
°C
Ambient storage temperaturee
°C
Operating pressure
200
400
15
30
15
30
bar
Proof pressure
200
bar
aCorresponds with 4.8 V in analog version
bFlow rate at which the sensor output saturates. See section 2 for performance between full scale and saturation point.
cMeasured value
dMaximum additional offset when mounted vertically
eNon-condensing, flow path empty
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Table 2: Model specific performance of LG16, digital version only (all data for medium IPA, 23°C)
LG16-
2000HC-D
Parameter
LG16-0150D LG16-0430D LG16-1000D
Unit
70
500
10’000
µl/min
ml/min
IPA full scale flow rate
IPA sensor output limita
80
100
600
11’000
µl/min
90
10
ml/min
20
0.3
1
20
1
20
1
% of m.v.b
% of full scale
% of m.v.
Accuracy below full scale
(whichever error is larger)
0.5
1
1
1.5
Repeatability below full scale
(whichever error is larger)
0.01
0.4
0.05
0.5
0.05
0.4
0.02
0.03
0.35
% of full scale
% m.v. / °C
% full scale / °C
Temperature coefficient
(additional error / °C; whichever is larger)
0.025
aFlow rate at which the sensor output saturates
bMeasured value
1.1 Switching between calibration fields
Different calibrations are available in calibration fields (CF) on digital versions of the flow meter. The factory default is
CF0. If the medium to be measured is different to the factory default calibration field, this has to be changed using
the Sensirion Viewer Software or using digital commands via the I2C or RS485 interface.
Table 3: Available calibrations on CF0 and CF1
Sensor
CF0 (default)
CF1
LG16-0025D
LG16- 0150D
LG16-0430D
LG16-1000D
LG16-2000D
LG16-2000-HC-D
H2O
H2O
IPA
IPA
IPA
H2O
H2O
H2O
IPA
Analog flow meter variants only feature H2O calibration. For communication with the analog variant see section 3.4.
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2 Specifications Charts
Figure 1: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/min (right column) for H2O
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Figure 2: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and
absolute error in µl/min or ml/min (LG16-2000-HC) (right column) for IPA
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3 Communication with the Sensor
The OEM flow sensor LG16 shows bi-directional,
linear transfer characteristics. It can be ordered as
analog or digital output version. Please see the
following section for more details and the table on
page 7 for an overview of the available options.
3.3 Digital Communication via I²C-Bus
Digital communication between a master and the
LG16 sensor runs via the standard I²C-interface. The
physical interface consists of two bus lines, a data line
(SDA) and a clock line (SCL) which need to be
connected via pull-up resistors to the bus voltage of
the system.
Digital Sampling Time, 16 bit
Digital Sampling Time, 9 bit
74 ms
1 ms
These lines can be used on 3.3V or 5.0V level with a
clock frequency of 100 kHz. For the detailed
specifications of this I²C communication, please refer
to specific I²C Application Notes from Sensirion.
3.1 Electrical Specifications
Table 4: DC Characteristics
Parameter
Min. Typ. Max. Units
Power Supply DC, VDD
Digital version
3.4 Analog Communication
The LG16 is available as analog version, with the
voltage output representing the current flow rate.
4.0
6.0
5.0
7.0
12a
12a
V
V
Analog version
Operating Current,
VDD = 4.0-12 V, no load
6.8
mA
Analog Out Voltage Range
Negative full scale flow
Zero flow
0.2 V
2.5 V
4.8 V
10 k
aUse 9 V max. for best performance
3.2 Electrical Connector and Sensor Pinout
Positive full scale flow
Minimum load resistance
Connector Type: 5 pin Molex PCB Header 53261-
0590 (right angle). Assembled flat ribbon cable Molex
1.25 mm Pitch Receptacle Type 51021-0500
(PicoBlade™ 51021) included.
The analog sensor’s output limit is 5V, thus the actual
flow rate output limit is lower than the corresponding
digital version’s output limit (noted in Table 1).
Pin
1
2
3
4
5
SDA (bi-directional)
SCL
VDD
GND
1
2
3
4
5
Analog out
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4 Fluidic Connection
Table 5: Fluidic Specifications and Pressure Rating
Parameter
LG16-0025
LG16-0150
LG16-0430
LG16-1000
LG16-2000
Wetted materials:
Quartz Glass (Fused Silica)
PEEK
Borosilicate Glass 3.3
FEP
Internal sensor tube material
Fitting material
Sealing material
None
¼-28 flat-bottom
for 1/16” or 1/8” OD plastic
tubinga
UNF 6-40 for 1/32” OD tubing
VICI® Nanovolume™ compatible
Fluid connector ports (Fittings)
Pressure drop (at full scale flow rate, H2O, 23°C)
Pressure drop (at full scale flow rate, IPA, 23°C)
Total internal volume
1 bar
3 mbar
60 mbar
1.5 µl
1 mbar
>1 mbar
5 mbar
25 µl
>1 mbar
2 mbar
80 µl
n.a.
1 µl
7 mbar
5 µl
a1/8” OD tubing with 2 mm minimum ID is recommended for the LG16-2000.
For more information on the fluidic connection please find: “Application Note Sensor Ports and Tubing Connections” in the
Download Center on our webpage (www.sensirion.com/liquidflow-download).
5 Mechanical Specifications
Table 6: Mechanical Specifications
Parameter
LG16-0025
LG16-0150
LG16-0430
53 x 22 x 9 mm
6 g
LG16-1000
LG16-2000
Largest dimensions
Total mass
Inner diameter d
25 µm
150 µm
430 µm
1.0 mm
1.8 mm
LG16-0025 / LG16-0150 / LG16-0430
LG16-1000 / LG16-2000
53±1
All dimensions in mm
Attention Fragile
Mechanical shocks and connecting to the fittings without suitable tools leads to stress on the internal thin-walled
glass capillary and can cause it to break.
While tightening the fittings, fix the fluidic ports position with a wrench.
Test for leakage after every time new connections are made.
!
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6 Ordering Information
For OEM applications the sensor can be purchased in larger quantities without any additional parts (25 pcs. minimum
order quantity). Each model is available with analog output (ending “A”) or with digital output (ending “D”). Fluid
connection material is not included.
Signal output
analog digital
Calibration
H2O IPA
Product
Article Number
LG16-0025A
LG16-0025D
LG16-0150A
LG16-0150D
LG16-0430A
LG16-0430D
LG16-1000A
LG16-1000D
LG16-2000A
LG16-2000D
LG16-2000HC-D
●
●
●
1-100427-01
1-100428-01
1-100409-01
1-100410-01
1-100852-02
1-100853-02
1-100405-01
1-100406-01
1-100403-01
1-100404-01
1-100840-01
●
●
●
●
●
●
●
●
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Important Notices
Warning, personal injury
This warranty does not apply to any equipment which has not been
installed and used within the specifications recommended by
SENSIRION for the intended and proper use of the equipment.
EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH
HEREIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS
OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL
WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES
Do not use this product as safety or emergency stop devices or in
any other application where failure of the product could result in
personal injury (including death). Do not use this product for
applications other than its intended and authorized use. Before
installing, handling, using or servicing this product, please
consult the datasheet and application notes. Failure to comply
with these instructions could result in death or serious injury.
OF MERCHANTABILITY OR FITNESS FOR
A PARTICULAR
PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED.
If the Buyer shall purchase or use SENSIRION products for any
unintended or unauthorized application, Buyer shall defend, indemnify
and hold harmless SENSIRION and its officers, employees,
subsidiaries, affiliates and distributors against all claims, costs,
damages and expenses, and reasonable attorney fees arising out of,
directly or indirectly, any claim of personal injury or death associated
with such unintended or unauthorized use, even if SENSIRION shall be
allegedly negligent with respect to the design or the manufacture of the
product.
SENSIRION is only liable for defects of this product arising under the
conditions of operation provided for in the datasheet and proper use of
the goods. SENSIRION explicitly disclaims all warranties, express or
implied, for any period during which the goods are operated or stored
not in accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application
or use of any product or circuit and specifically disclaims any and all
liability, including without limitation consequential or incidental
damages. All operating parameters, including without limitation
recommended parameters, must be validated for each customer’s
applications by customer’s technical experts. Recommended
parameters can and do vary in different applications.
ESD Precautions
The inherent design of this component causes it to be sensitive to
electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when
handling this product.
SENSIRION reserves the right, without further notice, (i) to change the
product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Warranty
Copyright © 2001-2015, SENSIRION.
CMOSens® is a trademark of Sensirion
SENSIRION warrants solely to the original purchaser of this product for
a period of 12 months (one year) from the date of delivery that this
product shall be of the quality, material and workmanship defined in
SENSIRION’s published specifications of the product. Within such
period, if proven to be defective, SENSIRION shall repair and/or
replace this product, in SENSIRION’s discretion, free of charge to the
Buyer, provided that:
All rights reserved
REACH, RoHS and WEEE Statement
The flow meters of the LG16 Series comply with requirements of the
following directives:
.
notice in writing describing the defects shall be given to
SENSIRION within fourteen (14) days after their appearance;
. such defects shall be found, to SENSIRION’s reasonable
satisfaction, to have arisen from SENSIRION’s faulty design,
material, or workmanship;
.
.
.
EU Directive 1907/2006/EC concerning Registration, Evaluation,
Authorization and Restriction of Chemicals (REACH)
EU Directive 2002/96/EC on waste electrical and electronic
equipment (WEEE), OJ13.02.2003; esp. its Article 6 (1) with Annex II.
. the defective product shall be returned to SENSIRION’s factory at
the Buyer’s expense; and
EU Directive 2002/65/EC on the restriction of certain hazardous
substances in electric and electronic equipment (RoHS),
OJ01.01.2011
.
the warranty period for any repaired or replaced product shall be
limited to the unexpired portion of the original period.
Headquarters and Subsidiaries
SENSIRION AG
Laubisruetistr. 50
CH-8712 Staefa ZH
Switzerland
Sensirion Inc., USA
Sensirion Korea Co. Ltd.
phone: +82 31 345 0031 3
info@sensirion.co.kr
phone: +1 805 409 4900
info_us@sensirion.com
www.sensirion.com
www.sensirion.co.kr
phone: +41 44 306 40 00
Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info@sensirion.co.jp
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info@sensirion.com.cn
www.sensirion.com.cn
fax:
+41 44 306 40 30
info@sensirion.com
www.sensirion.com
www.sensirion.co.jp
Sensirion AG (Germany)
phone: +41 44 927 11 66
info@sensirion.com
www.sensirion.com
To find your local representative, please visit www.sensirion.com/contact
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