6MBI450U-120 [ETC]

IGBTs ; IGBT的\n
6MBI450U-120
型号: 6MBI450U-120
厂家: ETC    ETC
描述:

IGBTs
IGBT的\n

晶体 晶体管 功率控制 双极性晶体管 局域网
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SPECIFICATION  
IGBT Module  
Device Name :  
6MBI450U-120  
MS5F 5359  
Type Name  
Spec. No.  
:
:
Fuji Electric Co.,Ltd.  
Matsumoto Factory  
S.Yoshiwatari  
Feb. 12 '03  
Feb. 12 '03  
T.Miyasaka  
K.Yamada  
T.Fujihira  
1
MS5F 5359  
14  
H04-004-07  
R e v i s e d R e c o r d s  
Classi-  
Applied  
date  
Date  
fication  
Ind.  
Content  
Drawn  
Checked  
Approved  
T.Fujihira  
T.Miyasaka  
K.Yamada  
Issued  
date  
enactment  
Feb.-12-'03  
2
MS5F 5359  
14  
H04-004-06  
6MBI450U-120  
1. Outline Drawing ( Unit : mm )  
NOTE)  
2. Equivalent circuit  
ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ  
ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ
[Inverter]  
[Thermistor]  
ꢀꢀꢀꢀꢀ②ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ ④ꢀꢀꢀꢀꢀꢀꢀꢀ ꢀꢀꢀ⑥  
⑪ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ⑨ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ⑦  
⑫ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ⑩ꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀꢀ⑧  
ꢀꢀꢀꢀꢀ①ꢀꢀꢀꢀꢀꢀꢀꢀ ꢀꢀ ③ꢀꢀꢀ ꢀꢀ ꢀꢀꢀ ꢀꢀ⑤  
3
MS5F 5359  
14  
H04-004-03  
3.Absolute Maximum Ratings ( at Tc= 25unless otherwise specified )  
Maximum  
Ratings  
Items  
Symbols  
Conditions  
Units  
Collector-Emitter voltage  
VCES  
VGES  
1200  
±20  
600  
450  
1200  
900  
V
V
Gate-Emitter voltage  
Collector current  
Tc=25  
Ic  
Continuous  
1ms  
Tc=80℃  
Tc=25℃  
Tc=80℃  
Icp  
A
-Ic  
-Ic pluse  
Pc  
Tj  
Tstg  
450  
900  
2100  
150  
-40+125  
Collector Power Dissipation  
Junction temperature  
Storage temperature  
1 device  
W
between terminal and copper base *1  
between thermistor and others *2  
Mounting *3  
Isolation  
voltage  
Viso  
-
AC : 1min.  
2500  
VAC  
3.5  
4.5  
Screw  
Torque  
Nm  
Terminals *4  
(*1) All terminals should be connected together when isolation test will be done.  
(*2) Two thermistor terminals should be connected together, each other terminals should be connected together  
and shorted to base plate when isolation test will be done.  
(*3) Recommendable Value : 2.5~3.5 Nm (M5)  
(*4) Recommendable Value : 3.5~4.5 Nm (M6)  
4. Electrical characteristics ( at Tj= 25unless otherwise specified)  
Characteristics  
Items  
Symbols  
ICES  
Conditions  
VGE = 0V  
VCE = 1200V  
VCE = 0V  
VGE=±20V  
VCE = 20V  
Ic = 450mA  
Units  
min.  
typ.  
max.  
Zero gate voltage  
Collector current  
-
-
3.0  
mA  
nA  
V
Gate-Emitter  
leakage current  
IGES  
-
-
600  
8.5  
Gate-Emitter  
threshold voltage  
VGE(th)  
4.5  
6.5  
Tj= 25℃  
Tj=125℃  
Tj= 25℃  
Tj=125℃  
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
2.20  
2.45  
1.75  
2.00  
50  
0.36  
0.21  
0.03  
0.37  
0.07  
2.05  
2.15  
1.60  
1.70  
-
2.55  
-
2.1  
-
VCE(sat)  
VGE=15V  
Ic = 450A  
(terminal)  
Collector-Emitter  
saturation voltage  
V
VCE(sat)  
(chip)  
Cies  
ton  
tr  
tr (i)  
toff  
tf  
Input capacitance  
Turn-on time  
VCE=10V,VGE=0V,f=1MHz  
Vcc = 600V  
-
nF  
1.20  
0.60  
-
1.00  
0.30  
3.00  
-
2.55  
-
0.35  
-
Ic = 450A  
VGE=±15V  
Rg = 1.1 Ω  
μs  
Turn-off time  
Tj= 25℃  
VGE=0V  
VF  
(terminal)  
Tj=125℃  
Forward on voltage  
V
Tj= 25℃  
Tj=125℃  
VF  
(chip)  
IF = 450A  
Reverse recovery time  
Lead resistance, terminal-chip*  
IF = 450A  
μs  
mΩ  
trr  
R lead  
1.0  
T = 25  
T =100℃  
T = 25/50℃  
-
5000  
495  
3375  
-
Resistance  
R
Ω
465  
3305  
520  
3450  
B value  
B
K
(*)  
Biggest internal terminal resistance among arm.  
4
MS5F 5359  
14  
H04-004-03  
5. Thermal resistance characteristics  
Characteristics  
Items  
Symbols  
Conditions  
Units  
min.  
typ.  
max.  
0.06  
0.10  
-
IGBT  
FWD  
-
-
-
-
-
Thermal resistance(1device)  
Contact Thermal resistance  
Rth(j-c)  
Rth(c-f)  
/W  
with Thermal Compound ()  
0.0167  
This is the value which is defined mounting on the additional cooling fin with thermal compound.  
6.Recommend way of module mounting to Heat sink Clamping  
(1)Initial : 1/3 specified torque, sequence (1)(2)(3)(4)(5)(6)(7)(8)  
2Final Full specified torque (3.5 Nm),sequence(4)(3)(2)(1)(8)(7)(6)(5)  
Mounting holes  
(7)  
(6)  
(3)  
(2)  
(1)  
(4)  
(5)  
(8)  
Heat sink  
Module  
7. Indication on module  
6MBI450U-120  
450A 1200V  
Lot.No.  
Place of manufacturing (code)  
8.Applicable category  
This specification is applied to IGBT Module named 6MBI450U-120 .  
9.Storage and transportation notes  
and humidity of 45 to 75% .  
The module should be stored at a standard temperature of 5 to 35  
Store modules in a place with few temperature changes in order to avoid condensation on the module surface.  
Avoid exposure to corrosive gases and dust.  
Avoid excessive external force on the module.  
Store modules with unprocessed terminals.  
Do not drop or otherwise shock the modules when transporting.  
5
MS5F 5359  
14  
H04-004-03  
10. Definitions of switching time  
90%  
0V  
0V  
V
GE  
t
rr  
L
I
rr  
V
Ic  
CE  
90%  
90%  
Vcc  
10%  
10%  
10%  
VCE  
Ic  
0V  
0A  
R
G
VCE  
t
r(i)  
t
f
VGE  
t
r
Ic  
t
off  
t
on  
11. Packing and Labeling  
Display on the packing box  
- Logo of production  
- Type name  
- Lot No  
- Products quantity in a packing box  
6
MS5F 5359  
14  
H04-004-03  
11. Reliability test results  
Reliability Test Items  
Reference  
norms  
Test  
Number Accept-  
of ance  
sample number  
cate-  
Test items  
Test methods and conditions  
EIAJ  
gories  
ED-4701  
A - 111  
Method 1  
1 Terminal Strength Pull force  
(Pull test)  
: 20N (Control terminal)  
40N (Main terminal)  
: 10±1 sec.  
: 2.5 ~ 3.5 Nm (M5)  
3.5 ~ 4.5 Nm (M6)  
: 10±1 sec.  
5
5
5
( 1 : 0 )  
( 1 : 0 )  
( 1 : 0 )  
Test time  
2 Mounting StrengthScrew torque  
A - 112  
Method 2  
Test time  
3 Vibration  
Range of frequency : 10 ~ 500Hz  
A - 121  
Sweeping time  
Acceleration  
: 15 min.  
: 10G  
Sweeping direction : Each X,Y,Z axis  
Test time  
: 6 hr. (2hr./direction)  
4 Shock  
Maximum acceleratio : 1000G  
A - 122  
A - 131  
5
5
( 1 : 0 )  
( 1 : 0 )  
Pulse width  
Direction  
Test time  
: 0.5msec.  
: Each X,Y,Z axis  
: 3 times/direction  
: 235±5 ℃  
5 Solderabitlity  
Solder temp.  
Immersion time  
Test time  
: 5±1sec.  
: 1 time  
Each terminal should be Immersed in solder  
within 1~1.5mm from the body.  
6 Resistance to  
Soldering Heat  
Solder temp.  
Immersion time  
Test time  
: 260±5 ℃  
: 10±1sec.  
: 1 time  
A - 132  
5
( 1 : 0 )  
Each terminal should be Immersed in solder  
within 1~1.5mm from the body.  
1 High Temperature Storage temp.  
Storage Test duration  
: 125±5 ℃  
: 1000hr.  
: -40±5 ℃  
: 1000hr.  
: 85±3 ℃  
: 85±5%  
: 1000hr.  
: 121 ℃  
B - 111  
B - 112  
B - 121  
5
5
5
( 1 : 0 )  
( 1 : 0 )  
( 1 : 0 )  
2 Low Temperature Storage temp.  
Storage  
Test duration  
Storage temp.  
Relative humidity  
Test duration  
Test temp.  
3 Temperature  
Humidity  
Storage  
4 Unsaturated  
Pressure Cooker  
B - 123  
B - 131  
5
5
( 1 : 0 )  
( 1 : 0 )  
Atmospheric pressure : 2.03×105 Pa  
(Reference value)  
: 20hr.  
Test duration  
Test temp.  
5 Temperature  
Cycle  
+3  
Low temp. -40 -5  
+5  
:
High temp. 125 -5  
RT 5 ~ 35 ℃  
Dwell time  
: High ~ RT ~ Low ~ RT  
1hr. 0.5hr. 1hr. 0.5hr.  
: 100 cycles  
Number of cycles  
Test temp.  
6 Thermal Shock  
+0  
B - 141  
5
( 1 : 0 )  
:
High temp. 100 -5  
Low temp. 0 -+05  
Used liquid : Water with ice and boiling water  
Dipping time  
Transfer time  
Number of cycles  
: 5 min. par each temp.  
: 10 sec.  
: 10 cycles  
7
MS5F 5359  
14  
H04-004-03  
Reliability Test Items  
Reference  
norms  
Test  
cate-  
gories  
Number Accept-  
of ance  
sample number  
Test items  
Test methods and conditions  
EIAJ  
ED-4701  
D - 313  
1 High temperature  
Reverse Bias  
5
( 1 : 0 )  
+0  
-5  
Test temp.  
: Ta = 125  
(Tj 150 )  
: VC = 0.8×VCES  
: Applied DC voltage to C-E  
VGE = 0V  
Bias Voltage  
Bias Method  
Test duration  
Test temp.  
: 1000hr.  
2 High temperature  
Bias  
D - 323  
5
( 1 : 0 )  
+0  
-5  
: Ta = 125  
(Tj
150
)  
: VC = VGE = +20V or -20V  
: Applied DC voltage to G-E  
VCE = 0V  
Bias Voltage  
Bias Method  
Test duration  
: 1000hr.  
3 Temperature  
Humidity Bias  
B - 121  
D - 322  
5
5
( 1 : 0 )  
85 +-3oC  
:
: 85 +-5%  
Test temp.  
Relative humidity  
Bias Voltage  
Bias Method  
: VC = 0.8×VCES  
: Applied DC voltage to C-E  
VGE = 0V  
Test duration  
ON time  
: 1000hr.  
4 Intermitted  
Operating Life  
(Power cycle)  
( for IGBT )  
: 2 sec.  
( 1 : 0 )  
OFF time  
: 18 sec.  
Test temp.  
:
Tj=100±5 deg  
Tj
150 , Ta=25±5 ℃  
Number of cycles  
: 15000 cycles  
Failure Criteria  
Item  
Characteristic  
Symbol  
Failure criteria  
Lower limit Upper limit  
Unit  
Note  
Electrical  
characteristic  
Leakage current  
ICES  
±IGES  
-
-
USL×2  
USL×2  
mA  
µA  
Gate threshold voltage VGE(th) LSL×0.8  
USL×1.2 mA  
Saturation voltage  
Forward voltage  
VCE(sat)  
VF  
VGE  
or VCE  
VF  
-
-
-
USL×1.2  
USL×1.2  
V
V
Thermal  
IGBT  
USL×1.2 mV  
resistance  
FWD  
-
USL×1.2 mV  
Isolation voltage  
Visual inspection  
Peeling  
Viso  
Broken insulation  
-
-
Visual  
inspection  
-
The visual sample  
Plating  
and the others  
LSL : Lower specified limit.  
USL : Upper specified limit.  
Note :  
Each parameter measurement read-outs shall be made after stabilizing the components  
at room ambient for 2 hours minimum, 24 hours maximum after removal from the tests.  
And in case of the wetting tests, for example, moisture resistance tests, each component  
shall be made wipe or dry completely before the measurement.  
8
MS5F 5359  
14  
H04-004-03  
Reliability Test Results  
Test  
cate-  
gorie  
s
Reference  
Number  
of  
failure  
sample  
Number  
of test  
sample  
norms  
Test items  
EIAJ ED-  
4701  
1 Terminal Strength  
(Pull test)  
2 Mounting Strength  
A - 111  
Method 1  
A - 112  
Method 2  
A - 121  
5
5
5
5
5
5
5
5
5
5
5
5
5
5
5
5
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
3 Vibration  
4 Shock  
A - 122  
A - 131  
A - 132  
B - 111  
B - 112  
B - 121  
B - 123  
B - 131  
B - 141  
D - 313  
D - 323  
B - 121  
D - 322  
5 Solderabitlity  
6 Resistance to Soldering Heat  
1 High Temperature Storage  
2 Low Temperature Storage  
3 Temperature Humidity  
Storage  
4 Unsaturated  
Pressure Cooker  
5 Temperature Cycle  
6 Thermal Shock  
1 High temperature Reverse Bias  
2 High temperature Bias  
( for gate )  
3 Temperature Humidity Bias  
4 Intermitted Operating Life  
(Power cycling)  
( for IGBT )  
9
MS5F 5359  
14  
H04-004-03  
Collector current vs. Collector-Emitter voltage  
Collector current vs. Collector-Emitter voltage  
Tj= 25/ chip  
Tj= 125/ chip  
1200  
1000  
800  
600  
400  
200  
0
1200  
1000  
800  
600  
400  
200  
0
15V  
VGE=20V  
VGE=20V 15V  
12V  
12V  
10V  
8V  
10V  
8V  
0
1
2
3
4
5
0
1
2
3
4
5
Collector-Emitter voltage : VCE [V]  
Collector-Emitter voltage : VCE [V]  
Collector current vs. Collector-Emitter voltage  
VGE=15V (typ.) / chip  
Collector-Emitter voltage vs. Gate-Emitter voltage  
Tj=25C / chip  
1200  
1000  
800  
600  
400  
200  
0
10  
8
Tj=25  
6
Tj=125℃  
4
Ic=900A  
2
Ic=450A  
Ic=225A  
0
0
1
2
3
4
5
10  
15  
20  
25  
Gate - Emitter voltage : VGE [ V ]  
Collector-Emitter voltage : VCE [V]  
Capacitance vs. Collector-Emitter voltage (typ.)  
Dynamic Gate charge (typ.)  
VGE=0V, f= 1MHz, Tj= 25℃  
Vcc=600VIc=450ATj= 25℃  
1000.0  
100.0  
10.0  
1.0  
Cies  
VGE  
Cres  
Coes  
VCE  
0.1  
0
500  
1000  
1500  
2000  
2500  
0
10  
20  
30  
Collector-Emitter voltage : VCE [V]  
Gate charge : Qg [ nC ]  
10  
MS5F 5359  
14  
H04-004-03  
Switching time vs. Collector current (typ.)  
Switching time vs. Collector current (typ.)  
Vcc=600V, VGE=±15V, Rg=1.1, Tj= 25℃  
Vcc=600V, VGE=±15V, Rg=1.1, Tj=125℃  
10000  
1000  
100  
10000  
1000  
100  
toff  
ton  
tr  
ton  
toff  
tr  
tf  
tf  
10  
10  
0
200  
400  
600  
800  
0
200  
400  
600  
800  
Collector current : Ic [ A ]  
Collector current : Ic [ A ]  
Switching time vs. Gate resistance (typ.)  
Switching loss vs. Collector current (typ.)  
Vcc=600V, Ic=450A, VGE=±15V, Tj= 25℃  
Vcc=600V, VGE=±15V, Rg=1.1Ω  
10000  
1000  
100  
100  
80  
60  
40  
20  
0
Eoff(125
)  
ton  
toff  
Eon(125)  
Eoff(25)  
tr  
Eon(25)  
tf  
Err(125)  
Err(25)  
10  
0.1  
1.0  
10.0  
100.0  
0
200  
400  
600  
800  
1000  
Collector current : Ic [ A ]  
Gate resistance : Rg [ ]  
Switching loss vs. Gate resistance (typ.)  
Reverse bias safe operating area  
Vcc=600V, Ic=450A, VGE=±15V, Tj= 125℃  
+VGE=15V,-VGE15V, RG1.1,Tj125℃  
Stray inductance100nH  
300  
250  
200  
150  
100  
50  
1200  
1000  
800  
600  
400  
200  
0
Eon  
Eoff  
Err  
0
0.1  
1.0  
10.0  
100.0  
0
200  
400  
600  
800 1000 1200 1400  
Gate resistance : Rg [ ]  
Collector - Emitter voltage : VCE [ V ]  
11  
MS5F 5359  
14  
H04-004-03  
Forward current vs. Forward on voltage (typ.)  
chip  
Reverse recovery characteristics (typ.)  
Vcc=600V, VGE=±15V, Rg=1.1Ω  
1200  
1000  
800  
600  
400  
200  
0
1000  
100  
10  
Irr (125)  
Irr (25)  
Tj=25℃  
trr (125)  
trr (25)  
Tj=125℃  
0
200  
400  
600  
800  
1000  
0
1
2
3
4
Forward on voltage : VF [ V ]  
Forward current : IF [ A ]  
Transient thermal resistance  
Temperature characteristic (typ.)  
1.000  
100  
FWD  
IGBT  
0.100  
0.010  
0.001  
10  
1
0.1  
0.001  
0.010  
0.100  
1.000  
-60 -40 -20  
0
20 40 60 80 100 120 140 160 180  
Temperature []  
Pulse width : Pw [ sec ]  
12  
MS5F 5359  
14  
H04-004-03  
Warnings  
-
-
-
-
This product shall be used within its absolute maximum rating (voltage, current, and temperature).  
This product may be broken in case of using beyond the ratings.  
製品の絶対最大定格(電圧,電流,温度等)の範囲内で御使用下さい。  
絶対最大定格を超えて使用すると、素子が破壊する場合があります。  
Connect adequate fuse or protector of circuit between three-phase line and  
this product to prevent the equipment from causing secondary destruction.  
万一の不慮の事故で素子が破壊した場合を考慮し、商用電源と本製品の間に適切な容量のヒューズ  
又はブレーカーを必ず付けて2次破壊を防いでください。  
Use this product after realizing enough working on environment and considering of product's reliability life.  
This product may be broken before target life of the system in case of using beyond the product's reliability life.  
製品の使用環境を十分に把握し、製品の信頼性寿命が満足できるか検討の上、本製品を適用して下さい。  
製品の信頼性寿命を超えて使用した場合、装置の目標寿命より前に素子が破壊する場合があります。  
If the product had been used in the environment with acid, organic matter, and corrosive gas ( hydrogen sulfide,  
sulfurous acid gas), the product's performance and appearance can not be ensured easily.  
酸・有機物・腐食性ガス(硫化水素,亜硫酸ガス等)を含む環境下で使用された場合、製品機能・外観などの保証は  
致しかねます。  
Use this product within the power cycle curve (Technical Rep.No. : MT5F12959)  
-
-
本製品は、パワーサイクル寿命カーブ以下で使用下さい(技術資料No.: MT5F12959)  
Never add mechanical stress to deform the main or control terminal.  
The deformed terminal may cause poor contact problem.  
主端子及び制御端子に応力を与えて変形させないで下さい。ꢀ端子の変形により、接触不良などを引き起こす場合  
があります。  
-
-
According to the outline drawing, select proper length of screw for main terminal.  
Longer screws may break the case.  
本製品に使用する主端子用のネジの長さは、外形図に従い正しく選定下さい。ꢀ  
ネジが長いとケースが破損する場合があります。  
Use this product with keeping the cooling fin's flatness between screw holes within 100um at 100mm and the  
roughness within 10um. Also keep the tightening torque within the limits of this specification.  
Improper handling may cause isolation breakdown and this may lead to a critical accident.  
冷却フィンはネジ取り付け位置間で平坦度を100mm100um以下、表面の粗さは10um以下にして下さい。ꢀ誤った取り扱  
いをすると絶縁破壊を起こし、重大事故に発展する場合があります。  
-
It shall be confirmed that IGBT's operating locus of the turn-off voltage and current are within the RBSOA  
specification. This product may be broken if the locus is out of the RBSOA.  
ターンオフ電圧・電流の動作軌跡がRBSOA仕様内にあることを確認して下さい。  
RBSOAの範囲を超えて使用すると素子が破壊する可能性があります。  
-
-
-
If excessive static electricity is applied to the control terminals, the devices may be broken.  
Implement some countermeasures against static electricity.  
制御端子に過大な静電気が印加された場合、素子が破壊する場合があります。  
取り扱い時は静電気対策を実施して下さい。  
Never add the excessive mechanical stress to the main or control terminals  
when the product is applied to Equipments. The module structure may be broken.  
素子を装置に実装する際に、主端子や制御端子に過大な応力を与えないで下さい。  
端子構造が破壊する可能性があります。  
In case of insufficient -VGE, erroneous turn-on of IGBT may occur.  
-VGE shall be set enough value to prevent this malfunction. (Recommended value : -VGE = -15V)  
逆バイアスゲート電圧-VGEが不足しますと誤点弧を起こす可能性があります。  
誤点弧を起こさない為に-VGEは十分な値で設定して下さい。ꢀ(推奨値 : -VGE = -15V)  
13  
MS5F 5359  
14  
H04-004-03  
Cautions  
-
Fuji Electric is constantly making every endeavor to improve the product quality and reliability.However,  
semiconductor products may rarely happen to fail or malfunction. To prevent accidents causing injury or  
death, damage to property like by fire, and other social damage resulted from a failure or malfunction of  
the Fuji Electric semiconductor products, take some measures to keep safety such as redundant design,  
spread-fire-preventive design, and malfunction-protective design.  
富士電機は絶えず製品の品質と信頼性の向上に努めています。しかし、半導体製品は故障が発生したり、  
誤動作する場合があります。富士電機製半導体製品の故障または誤動作が、結果として人身事故・火災  
等による財産に対する損害や社会的な損害を起こさないように冗長設計・延焼防止設計・誤動作防止設計  
など安全確保のための手段を講じて下さい。  
-
-
The application examples described in this specification only explain typical ones that used the Fuji Electric  
products. This specification never ensure to enforce the industrial property and other rights, nor license the  
enforcement rights.  
本仕様書に記載してある応用例は、富士電機製品を使用した代表的な応用例を説明するものであり、本仕様書  
によって工業所有権、その他権利の実施に対する保障または実施権の許諾を行うものではありません。  
The product described in this specification is not designed nor made for being applied to the equipment or  
systems used under life-threatening situations. When you consider applying the product of this specification  
to particular used, such as vehicle-mounted units, shipboard equipment, aerospace equipment, medical devices,  
atomic control systems and submarine relaying equipment or systems,please apply after confirmation  
of this product to be satisfied about system construction and required reliability.  
本仕様書に記載された製品は、人命にかかわるような状況下で使用される機器あるいはシステムに用いられることを  
目的として設計・製造されたものではありません。本仕様書の製品を車両機器、船舶、航空宇宙、医療機器、原子力  
制御、海底中継機器あるいはシステムなど、特殊用途へのご利用をご検討の際は、システム構成及び要求品質に  
満足することをご確認の上、ご利用下さい。  
If there is any unclear matter in this specification, please contact Fuji Electric Co.,Ltd.  
14  
MS5F 5359  
14  
H04-004-03  

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