SFM3000-200 [ETC]
Fully calibrated & temperature compensated;
| 型号： | SFM3000-200 |
| 厂家： | 
ETC |
| 描述： | Fully calibrated & temperature compensated |
| 文件： | 总7页 (文件大小：590K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Datasheet SFM3000
Low Pressure Drop Digital Flow Meter
. Low pressure drop
. Flow range: +/- 200 slm (bidirectional)
. Accuracy 1.5% m.v. (typical)
. Very fast update time (0.5ms)
. Fully calibrated & temperature compensated
. Zero offset, no drift
Product Summary
The SFM3000 sensor is Sensirion’s digital flow meter
designed for high-volume applications. It measures the flow
rate of air, oxygen and other non-aggressive gases with
superb accuracy. A special design of the flow channel
results in the very low pressure drop through the flow body
of the sensor making it extremely suitable for very
demanding applications, such as medical ventilation and
respiratory applications.
The outstanding performance of this sensor is based on
Sensirion’s patented CMOSens® sensor technology,
which combines the sensor element, signal processing
and digital calibration on a single microchip. The flow rate
of the gas is measured by a thermal sensor element which
assures very fast signal processing time and bi-
directional measurement with best-in-class accuracy.
The well-proven CMOS technology is perfectly suited for
high-quality mass production and is the ideal choice for
demanding and cost-sensitive OEM applications.
The SFM3000 operates from a 5 Volt supply voltage and
features a digital 2-wire I2C interface. The measurement
results are internally linearized and temperature
compensated.
Applications
Sensor chip
The SFM3000 flow meter features a fifth-generation silicon
sensor chip SF05. In addition to a thermal mass flow
sensor element, the chip contains an amplifier, A/D
converter, EEPROM memory, digital signal processing
circuitry, and interface. Due to seamless integration of
signal acquisition and processing on the single silicon die
significant performance and cost benefits are achieved.
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Medical
Process automation
Burner control
Fuel cell control
Spectroscopy
Environment monitoring
Laboratory
Connection diagram
OEM options
A variety of custom options can be implemented for high-
volume OEM applications (custom flow rates, calibration
for other gases, different body form factor etc.). Contact us
for more information.
VDD
5V
Micro
controller
(master)
SDA
SCL
SFM3000
(slave)
GND
SFM3000 with bidirectional digital communication (I2C bus)
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1. Sensor Performance
1.1 Physical specifications 1
Parameter
Condition
Air/N2/O2
14 bit
Value
-200 … +200 2
0.5
Unit
slm 3
ms
Flow Ranges
Update Time
Max.
±2.5
± 0.1
±1
Typ.
±1.5
span
offset
% m.v. 8
slm
Accuracy 4,5,6,7
Repeatability 4,7
Noise Level 4,7
± 0.05
±0.5
span
% m.v.
slm
offset
± 0.05
±1
± 0.02
±0.5
span
% m.v.
slm
offset
± 0.1
± 0.75
± 0.0
± 0.05
± 0.25
± 0.0
span
Accuracy Shift Due to
Temperature Variation 9
% m.v./10°C
slm
offset
Position sensitivity 10
Pressure Drop
non-horizontal position
@60slm
@200slm
< 0.05
slm
< 100 / < 0.4
< 600 / < 2.4
Pa / inH2O
1.2 Media compatibility
Parameter
Calibration 11
Value
Air, N2, O2
Air, N2, O2, other non- aggressive gases
Media Compatibility
Wetted Materials
PPE+PS blend (Noryl HN731SE, medical grade: biocompatible; ISO 10993 or USP
Class VI), Si, Si3N4, SiOx, Gold, Epoxy (FR04, FP4401), , Polyurethane, stainless
steel (DIN 1.4301/AISI 304, annealed),
RoHS, REACH, WEEE
RoHS, REACH and WEEE compliant
1.3 Ambient conditions
Parameter
Condition
Value
Unit
Calibrated Temperature Range
15-95% rel. hum. (non cond.)
-20 … +85
°C
Operating Temperature Range
Storage Temperature
15-95% rel. hum. (non cond.)
10-95% rel. hum. (non cond.)
-40 … +85
-40 … +85
°C
°C
Operating Pressure Range
Burst Overpressure
absolute
gauge
0.7 – 1.3
bar
bar
> 1
1 Unless otherwise noted, all sensor specifications are valid at 25°C with Vdd = 5V and absolute pressure = 966 mbar.
2 Optional calibration up to ±300 slm range is available for large volume projects
3 In standard liter per minute at 20°C and 1013 mbar
4
With ideal inlet and outlet conditions, at VDD = 5V, 25°C, absolute pressure = 966 mbar
5 Including offset, non-linearity, hysteresis
6 Sensor position horizontal (see Section 4.1)
7 Span or offset value, whichever is larger
8 In % of measured value (m.v.) = of rate = of reading
9 Shift due to temperature variation compared to calibration temperature
10 See Section 4.1
11 Contact Sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures.
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2. Electrical Specifications
2.1 Electrical characteristics
Electrical properties
Interface
Condition
Value
I2C
Unit
Default Sensor Address
Soft Reset Time
64 (h40)
80
100
ms
ms
V
Start-up Time 12
Max.
Supply Voltage (VDD)
5V +/-5%
Min.
2.5
GND
Max.
VDD
1.1
Communication Level
High
Low
V
Power Consumption
Electrical Connector
Output signal resolution
< 50
mW
2 mm pitch, 4 pins in a row
13
14
bit
140
142.8
32’000
Air, N2
O2
Scale Factor Flow
Offset Flow
1/slm
12 After 4.75V is reached
13 16 bit with two least significant bits always zero
connection please order the SFM3000 with a cap
(according to the ordering information in Chapter 5).
Diverse 4-core flat ribbon cables with crimp fittings can be
used for electrical connection.
2.2 Pin layout and mechanical concept of the
electrical connection
2.2.2 PCB soldering
Standard selective soldering systems may be used for
soldering SFM3000 sensors. Reflow soldering is not
feasible and may damage the sensor. The sensor ports
must be protected from solder splash and flux during
soldering. The characteristics of selective soldering
machines vary, so any soldering setup must be tested
before production use.
2.3 Conversion to Physical Values
In order to obtain the measured flow in [slm], the
measured value needs to be converted using the following
formula:
Positive flow direction
(as marked on the sensor body)
ꢊꢋꢌꢍꢎꢏꢋꢐꢃꢑꢌꢀꢎꢋ ꢒ ꢁ ꢍꢋꢓꢃ ꢀꢁꢂ
ꢀꢁꢂꢃꢄꢅꢆꢇꢈ ꢉ
The SFM3000 is designed for both connector attachment
and through-hole technology hand-soldering to a PCB.
ꢍꢔꢌꢀꢋꢃ ꢌꢔꢓꢁꢏꢃ ꢀꢁꢂ
Please note that the first measurement performed directly
after chip initialization is not valid.
2.2.1 Connector attachment
The SFM3000 sensor’s 4-pin 2 mm pitch electrical
connector is compatible with Molex DuraClik™ socket
(Molex product number: 502351-0400). For this type of
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3. Mechanical Specifications
All dimensions are in millimeters (mm).
3.1 SFM3000 without cover (PCB mount version)
3.2 SFM3000 with cover
3.3 Footprint
If used with cover, sensor height is 34.4 mm instead of 33
mm. All the other dimensions remain the same
Please refer to the mask given below for reliable PCB
attachment using the dedicated snap-in feet.
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3.4 Mechanical fitting
It is also possible to insert O-rings in the grooves and
attach tubes with an inner diameter of 23 mm to the
SFM3000.
Fittings of the SFM3000 sensor correspond to the
international standard ISO5356-1:2004. Details about this
type of connection can be found in the description of the
standard. To minimize the risk of connectors being
accidentally disconnected, latching connectors can be
suggested.
d1 = 19mm
d2 = 2mm
Cross section of recommended O-ring
4.4 Sensor handling
4. Instructions for Use
The SFM3000 sensor is designed to be robust and shock
resistant. Nevertheless, the accuracy of the high-precision
SFM3000 can be degraded by rough handling. Sensirion
does not guarantee proper operation in case of improper
handling. Note: avoid applying any mechanical stress to
the solder joints of the sensor during or as a result of PCB
assembly.
4.1 Calibration orientation
The sensors are calibrated horizontally as depicted in the
following graph:
4.5 ESD
The electronics of the SFM3000 sensor consist of a single
automotive qualified chip. It complies with the following
ESD norms:
-
-
AEC Q 100 002 (4kV HBM)
AEC Q 100 003 (200V MM)
Although the sensor complies with these norms, it does
not mean the sensor is immune against ESD.
The sensor is shipped in an antistatic tray to prevent
electrostatic discharge. To avoid damage to the sensor,
ground yourself using a grounding strap or by touching a
grounded object before touching the sensor. Furthermore,
store the parts in an antistatic package when not in use.
4.2 Inlet flow conditions
In order to provide good flow conditions, the inner
diameter of the connecting tube has to be approximately
the same as the inner diameter of the SFM3000 main flow
channel. The inlet tube has to be straight and at least 10
cm in length. The SFM3000 is equipped with meshes on
the in- and outlets of the flow channel to reduce
turbulences and thus improve the stability.
4.6 I2C Interface and communication
Due to I2C interface restrictions, the cable length from the
sensor to the microprocessor is recommended to be as
short as possible and certainly not above 30 cm. For wires
longer than 10 cm it is mandatory to shield the SDA and
SCL.
In case data is read from the sensor, the first data byte of
the transaction must always be acknowledged by the
master.
Please refer to the application note “Inlet conditions for the
SFM3000 Mass flow meters” for more information.
4.3 Temperature compensation
The SFM3000 sensor features digital temperature
compensation. The temperature is measured on the
CMOSens® chip by an on-chip temperature sensor. This
data is fed to a compensation circuit that is also integrated
on the CMOSens® sensor chip. Thus, no external
temperature compensation is necessary.
It must be possible to reset the sensor through a hard
reset, i.e. powering off and on the sensor, in case the
sensor freezes.
I2C Communication details are given in the application
note “I2C Functional Description for SFM3000”.
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5. Ordering Information
Use the part names and product numbers shown in the
table below when ordering SFM3000 sensors. For the
latest product information and local distributors, visit
www.sensirion.com.
Product Number
1-100xxx-xx
Part name
Cap
With
SFM3000-200-C
SFM3000-200
932-01
Without
934-01
Packaging units: 20 items/tray.
Every sensor is traceable by a unique Serial Number.
Revision history
Date
Author
ANB
Version
Changes
July 2013
1
2
First release
February 2014 ANB
Updated material to Noryl
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Important Notices
Warning, personal injury
This warranty does not apply to any equipment which has not been
installed and used within the specifications recommended by
SENSIRION for the intended and proper use of the equipment.
EXCEPT FOR THE WARRANTIES EXPRESSLY SET FORTH
HEREIN, SENSIRION MAKES NO WARRANTIES, EITHER EXPRESS
OR IMPLIED, WITH RESPECT TO THE PRODUCT. ANY AND ALL
WARRANTIES, INCLUDING WITHOUT LIMITATION, WARRANTIES
Do not use this product as safety or emergency stop devices or in
any other application where failure of the product could result in
personal injury (including death). Do not use this product for
applications other than its intended and authorized use. Before
installing, handling, using or servicing this product, please
consult the datasheet and application notes. Failure to comply
with these instructions could result in death or serious injury.
OF MERCHANTABILITY OR FITNESS FOR
A PARTICULAR
PURPOSE, ARE EXPRESSLY EXCLUDED AND DECLINED.
If the Buyer shall purchase or use SENSIRION products for any
unintended or unauthorized application, Buyer shall defend, indemnify
and hold harmless SENSIRION and its officers, employees,
subsidiaries, affiliates and distributors against all claims, costs,
damages and expenses, and reasonable attorney fees arising out of,
directly or indirectly, any claim of personal injury or death associated
with such unintended or unauthorized use, even if SENSIRION shall be
allegedly negligent with respect to the design or the manufacture of the
product.
SENSIRION is only liable for defects of this product arising under the
conditions of operation provided for in the datasheet and proper use of
the goods. SENSIRION explicitly disclaims all warranties, express or
implied, for any period during which the goods are operated or stored
not in accordance with the technical specifications.
SENSIRION does not assume any liability arising out of any application
or use of any product or circuit and specifically disclaims any and all
liability, including without limitation consequential or incidental damages.
All operating parameters, including without limitation recommended
parameters, must be validated for each customer’s applications by
customer’s technical experts. Recommended parameters can and do
vary in different applications.
ESD Precautions
The inherent design of this component causes it to be sensitive to
electrostatic discharge (ESD). To prevent ESD-induced damage and/or
degradation, take customary and statutory ESD precautions when
handling this product.
SENSIRION reserves the right, without further notice, (i) to change the
product specifications and/or the information in this document and (ii) to
improve reliability, functions and design of this product.
Warranty
Copyright © 2001-2014, SENSIRION.
CMOSens® is a trademark of Sensirion
All rights reserved
SENSIRION warrants solely to the original purchaser of this product for
a period of 12 months (one year) from the date of delivery that this
product shall be of the quality, material and workmanship defined in
SENSIRION’s published specifications of the product. Within such
period, if proven to be defective, SENSIRION shall repair and/or
replace this product, in SENSIRION’s discretion, free of charge to the
Buyer, provided that:
REACH, RoHS and WEEE Statement
The SFM3000 sensor complies with requirements of the following
directives:
.
notice in writing describing the defects shall be given to
SENSIRION within fourteen (14) days after their appearance;
.
.
.
EU Directive 1907/2006/EC concerning Registration, Evaluation,
Authorization and Restriction of Chemicals (REACH)
. such defects shall be found, to SENSIRION’s reasonable
satisfaction, to have arisen from SENSIRION’s faulty design,
material, or workmanship;
EU Directive 2002/96/EC on waste electrical and electronic
equipment (WEEE), OJ13.02.2003; esp. its Article 6 (1) with Annex II.
EU Directive 2002/65/EC on the restriction of certain hazardous
substances in electric and electronic equipment (RoHS),
OJ01.01.2011
. the defective product shall be returned to SENSIRION’s factory at
the Buyer’s expense; and
.
the warranty period for any repaired or replaced product shall be
limited to the unexpired portion of the original period.
Headquarters and Subsidiaries
SENSIRION AG
Laubisruetistr. 50
CH-8712 Staefa ZH
Switzerland
Sensirion Inc., USA
Sensirion Korea Co. Ltd.
phone: +82 31 345 0031 3
info@sensirion.co.kr
phone: +1 805 409 4900
info_us@sensirion.com
www.sensirion.com
www.sensirion.co.kr
phone: +41 44 306 40 00
Sensirion Japan Co. Ltd.
phone: +81 3 3444 4940
info@sensirion.co.jp
Sensirion China Co. Ltd.
phone: +86 755 8252 1501
info@sensirion.com.cn
www.sensirion.com.cn
fax:
+41 44 306 40 30
info@sensirion.com
www.sensirion.com
www.sensirion.co.jp
Sensirion AG (Germany)
phone: +41 44 927 11 66
info@sensirion.com
www.sensirion.com
To find your local representative, please visit www.sensirion.com/contact
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