SM5812-060-G-5-N [ETC]
Amplified Pressure Sensor; 放大压力传感器
| 型号： | SM5812-060-G-5-N |
| 厂家： | 
ETC |
| 描述： | Amplified Pressure Sensor |
| 文件： | 总4页 (文件大小：216K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
SILICON
SM5812/SM5852
MICROSTRUCTURES
Amplified Pressure Sensor
I N C O R P O R A T E D
•
•
•
•
NOW WITH ACCESS TO DIGITAL TEMPERATURE AND CORRECTED DIGITAL PRESSURE
LOW-COST, FULLY AMPLIFIED, CALIBRATED, AND COMPENSATED IN A SINGLE PACKAGE
AVAILABLE FOR DIFFERENTIAL, SINGLE-ENDED DIFFERENTIAL, GAGE & ABSOLUTE APPLICATIONS
MULTIPLE PRESSURE RANGES AVAILABLE TO MEASURE PRESSURE DOWN TO 0.15 PSI FULL-SCALE
AND UP TO 100 PSI FULL-SCALE
DESCRIPTION
The Silicon Microstructures SM5812 and
SM5852 series of OEM pressure sensors
combines state-of-the-art pressure sensor
technology with CMOS digital signal
processing technology to produce an
amplified, fully conditioned, multi-order
pressure and temperature compensated
sensor in a dual in-line package (DIP)
configuration.
Combining the pressure sensor with a
custom signal conditioning ASIC in a single
package simplifies the use of advanced
silicon micromachined pressure sensors.
Now, the pressure sensor can be mounted
directly to a standard printed circuit board
and an amplified, high level, calibrated
pressure signal can be acquired from the
digital interface or analog output. This
eliminates the need of additional circuitry,
such as a compensation network or micro-
controller containing a custom correction
algorithm.
FEATURES
•
Amplified, calibrated, fully signal
conditioned output span of 4.0 VDC FS
(0.5 to 4.5 V signal)
Digital temperature and calibrated
pressure available through I2C interface
Output ratiometric with supply voltage
Multi-order correction for pressure non-
linearity (factory programmed)
Multi-order correction for temperature
coefficient of span and offset (factory
programmed)
Gage, differential, and absolute versions
SMI’s unique low-pressure die allows for
a full-scale pressure range of 0-0.15 PSI
•
•
•
•
The SM5812/SM5852 Series pressure
sensors are based on SMI's highly stable,
piezoresistive pressure sensor chips
mounted on a ceramic substrate. An
electronically programmable ASIC is
contained in the same package to provide
calibration and temperature compensation.
•
•
TYPICAL APPLICATIONS
•
•
•
•
•
•
Barometric measurement
Medical instrumentation
Pneumatic control
The model SM5812 is designed for
operating pressure ranges from 0-5 PSI up
to 0-100 PSI. The model SM5852 is
designed for operating pressure ranges from
0-0.15 PSI up to 0-3 PSI. For both models,
the sensor output is ratiometric with the
supply voltage.
Gas flow
Respirators and ventilators
Heating, Ventilation and Air Conditioning
(HVAC)
Rev 1.4 6_05
2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com
SM5812/SM5852
THEORY OF OPERATION
The operation of the signal processor is
depicted in the block diagram below. The
external pressure sensor is a piezoresistive
bridge. This transduces the applied pressure
into an electronic signal, which is then inputted
into the integrating amplifier of the ASIC.
coefficients are available for correcting
pressure and temperature non-linearity. The
unique coefficients are determined during a
calibration process performed at the factory.
Factory calibration is the last step performed
which means the effect of the package on
the pressure signal will also be taken into
account. This provides a great advantage
over conventional laser-trimming
During the amplification step an offset
correction factor is added in order to allow
maximum gain for a given pressure while
minimizing the offset error.
approaches.
The DSP outputs a corrected digital word,
which travels to a 12-bit digital to analog
converter (DAC) to provide a calibrated
analog output. In addition to the analog
output, the corrected pressure signal is
accessible through an I2C digital interface.
The signal is then passed to an 11-bit analog
to digital converter (ADC). The ADC samples
the signal multiple times and uses the sum of
those samples as a 13-bit word.
A digital signal processor (DSP) is then used
to correct and calibrate the pressure signal.
The DSP provides multi-order correction of
both pressure and temperature non-linearity
through the use of factory-programmed
coefficients. A combined total of twenty
See SMI application note AN05-001 for a
detailed description of how to read out the
digital corrected pressure signal using the
I2C bus interface.
SMI Multi-Order Pressure and
+ 5 VDC
Temperature Correction ASIC
+ 5 VDC
Band-gap
External
Piezoresistive
V
Temp
Bridge
DSP
(multi-order
correction of
pressure and
temperature
non-
12-bit
Sigma-
Switched
MUX
11-bit ADC
Capacitor
Delta DAC
Ground
Integrateing
Amplifier
linearities)
Analog
Output
Buffer
Analog
Output
Power-On
Timing
Reset
EEPROM
Array
Control
Digital Timing
and Control
Management
2
SDA
SCL
2 MHz
I C Digital
Oscillator
Interface
Analog Component
Digital Component
Ground
Rev 1.4 6_05
2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com
SILICON
SM5812/SM5852
MICROSTRUCTURES
I N C O R P O R A T E D
CHARACTERISTICS FOR SM5812/SM5852 – SPECIFICATIONS
All parameters are measured at room temperature while applying 5.000V supply, unless otherwise specified.
Absolute1, Gage & Single2
Differential
TYP
MIN
TYP
MAX
MIN
MAX
UNITS
V
V
NOTES
Zero output (absolute and gauge)
Zero output (differential)
Output Span
0.42
0.50
0.58
3
3
3, 4
3, 4
5
2.42
1.96
1.90
-0.5
-2.5
-0.1
-0.3
-1.0
-2.5
-1.0
-2.0
-0.1
2
2.50
2.00
2.00
2.58
2.04
2.10
+0.5
+2.5
+0.1
+0.3
+1.0
+2.5
+1.0
+2.0
+0.1
3.92
3.80
-0.5
-2.5
-0.1
-0.3
-1.0
-2.5
-1.0
-2.0
-0.1
2
4.00
4.00
4.08
4.20
+0.5
+2.5
+0.1
+0.3
+1.0
+2.5
+1.0
+2.0
+0.1
V FS
V FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
%FS
msec
V
0.15 PSI
Linearity
0.15 PSI
5
Pressure hysteresis
5812
5852
Temperature coefficient - Zero
0.15 PSI
Temperature coefficient – Span
0.15 PSI
Thermal hysteresis
Response Time
Supply voltage
4.75
5.00
5.25
10
4.75
5.00
5.25
10
3, 7
Current consumption
Overpressure
mA
5812
5852
3X
15X
-40
0
3X
15X
-40
0
%FS
%FS
°C
6
6
Operating temperature range
25
25
25
+125
+70
+135
25
25
25
+125
+70
Compensated temperature range
Storage temperature range
Media compatibility
°C
-55
-55
+135
°C
8
Weight
3
3
gram
Notes:
1. Absolute parts are only offered in the SM5812 Series.
2. Single-ended parts (Pressure Type - S) have 2 ports and are for higher gain differential applications where the
differential pressure is always positive.
3. Sensor output is ratiometric to supply.
4. Full-scale (FS) is defined as zero pressure to rated pressure; differential parts can be used ±FS. Absolute and Gauge
zero output is 0.5 V typical and full-scale output is 4.5 V. Span is the difference between Full-scale output and zero
output, (4 V). For Differential parts, the negative full-scale is typically at 0.5 V, zero is typically 2.5 V, and positive full-
scale is 4.5 volts to give a span of 2.0 V.
5. Defined as best fit straight line for positive pressure applied to the part
6. Or 225 PSI, whichever is less. Output amplifier will saturate at about 0.25 V for applied pressure below the rated Zero
and at about 4.75 V for applied pressure above the rated Full-scale.
7. A 100 nF filter capacitor must be placed between Vsupply and Ground.
8. Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy,
RTV, gold, aluminum, and nickel.
Rev 1.4 6_05
2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com
SM5812/SM5852
ADDITIONAL INFORMATION
Package Dimensions & Pin-Out
PIN
1
2
DESCRIPTION
NC
GROUND
Pin Numbers
Dual Inline Pin (DIP) Option
(for both DIP & Surface Mount)
3
NC
4
5
6
SERIAL DATA (SDA)
SERIAL CLOCK (SCL)
NC
7
8
Vexc = 5.000 VDC
ANALOG OUTPUT
NOTES:
•
•
Do not connect to NC pins.
External connections to NC pins will
cause part malfunction.
•
•
All dimensions are shown in inches.
Tolerance on all dimensions
+0.005” unless otherwise specified.
Surface Mountable Pin Option
Ordering Information
Full-Scale Pressure Ranges
SM5812 PSI [kPa] SM5852 PSI [kPa]
Pin Configuration
3 : DIP pins, opposite direction of tubes
5 : Surface mountable pins,
005
015
030
060
100
5
[34.5]
001
003
008
015
030
0.15 [1.0]
0.30 [2.1]
0.80 [5.5]
1.50 [10.3]
3.00 [20.7]
Model Number
Pin Configuration
opposite direction of tubes
15 [103.4]
30 [206.8]
60 [413.7]
100 [689.5]
Tube Length
L : Long (0.480" ± 0.005")
N : No tube
SM5852 - 003 - D - 3 - L
Pressure Type
A : Absolute (1 port)
D : Differential (2 ports)
G : Gauge (1 port)
Pressure Pressure
Range Type
Tube
S : Single-ended (2 ports)
Length
Notes
1. Absolute configuration only available in SM5822.
2. Single-ended configuration is for higher gain differential applications where differential pressure
is always positive.
3. Other configurations available on large orders. Consult SMI for details.
Wiring Diagrams
SERIAL CLOCK (SCL)
SERIAL DATA (SDA)
Vexc = + 5.000 VDC
ANALOG OUTPUT
Vexc = + 5.000 VDC
SM5812/SM5852
SM5812/SM5852
100 nF
100 nF
GROUND
GROUND
GROUND
GROUND
Wiring diagram for digital output
Wiring diagram for analog output
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the
use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement.
While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably
be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.4 6_05
2005 SMI
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@si-micro.com ♦ www.si-micro.com
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