XFGM-3050KPGSR-P3 [FUJIKURA]

Peizoresistive Sensor, Gage, 0Psi Min, 5.8Psi Max, Square, Surface Mount, PACKAGE-8;
XFGM-3050KPGSR-P3
型号: XFGM-3050KPGSR-P3
厂家: FUJIKURA LTD.    FUJIKURA LTD.
描述:

Peizoresistive Sensor, Gage, 0Psi Min, 5.8Psi Max, Square, Surface Mount, PACKAGE-8

文件: 总26页 (文件大小:306K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
June 24, 2004  
No. V-7437  
Messrs.  
SPECIFICATION  
Model:  
XFPM-050KPG(R)-P3  
RoHS compliance  
Project:  
Reference:  
Fujikura Ltd.  
7437_XFPM-050KPGR-P3_specs  
V-7437  
1. General;  
This document details the performance specifications of FUJIKURA's XFPM-050KPG(R)-P3 high level  
output, on-chip signal conditioned, temperature compensated and calibrated pressure transducers.  
2. Principle;  
FUJIKURA's integrated semiconductor pressure sensor has four pressure sensitive piezoresistors which are  
formed on the diaphragm surface of a silicon chip. This chip includes a constant current drive circuit, signal  
amplification circuitry and resistors for calibration of offset and sensitivity and temperature compensation.  
These are achieved using silicon planer technique.  
When the applied pressure deforms the diaphragm, the piezoresistors change their resistance due to the  
piezoresistance effect. The resistance change of the four resisters, which constitute a whetstone bridge  
circuit, results in a pressure proportional voltage because there is an internally supplied constant current  
excitation. The surrounding circuit then amplifies the low-level voltage to provide a linear, repeatable  
high-level output voltage.  
Table shown below is revision records of this specification  
V
IV  
III  
II  
Rev.I 04.6.24  
Est. 00.07.28 M.Hashimoto  
Date Name  
H. Nishida Add noise screening information  
(A)  
Comments  
Remark  
3. Pressure range & rating;  
Model  
Rated (Measurable) pressure range  
XFPM-050KPG(R)-P3  
0 ~ +300 mmHgGauge (0 ~ +40.00 kPaGauge)  
4. Package outline dimensions, Electrical pin connections, Marking and Weight;  
Refer the attached drawings.  
The following table shows the drawing No.  
Model  
Package  
Electrical pin connections  
Marking  
outline dimensions  
XFPM-050KPG-P3  
XFPM-050KPGR-P3  
No.9-751-044  
No.9-751-048  
No.9-751-048  
No.9-751-076  
No.9-751-076  
No.9-751-045  
Weight  
approximately 1.2g  
1
7437_XFPM-050KPGR-P3_specs  
V-7437  
5. Absolute maximum rating;  
Item  
Symbol  
Pmax+  
Vccmax  
Topt1  
Topt2  
Tstg  
Rating  
Unit  
Maximum load pressure  
Maximum input voltage  
Twice of rated pressure  
8
VDC  
Compensated temperature range  
Operating temperature range  
Storage temperature range  
Insulation durability  
0
-40  
-40  
~
50  
~
125  
125  
~
AC500V, 1minute.  
Insulation impedance  
100MΩ min. (DC500V)  
6. Recommended operating conditions;  
Item  
Symbol  
Condition  
Unit  
Rated pressure  
Popt  
0 ~ +300  
(0 ~ +40.00)  
mmHg  
(kPa)  
Type of pressure  
Pressure media  
Gauge pressure  
Non-corrosive gases  
Supply Voltage (const.)  
Vcc  
5.0±0.25  
VDC  
Note  
7. Electrical characteristics;  
( Vcc=5VDC constant, ambient temperature Ta =25 )  
Item  
Symbol  
Rating  
10 mA max. (typ 7mA)  
10 Ω max.  
Power consumption  
Output impedance  
Source current  
Sink current  
Icc  
Imp  
Isource  
Isink  
Voff  
0.2 mA max.  
2 mA max.  
Offset voltage  
(Output at 0mmHg)  
Output voltage at full scale  
(Output at 300mmHg)  
Output span voltage  
0.5±0.1 V  
1  
1  
1  
Vfs  
SV  
4.0±0.1 V  
1.75±0.05 V (0 - 150mmHg)  
3.50±0.10 V (0 - 300mmHg)  
±2.0mmHg/0 – 50℃  
Output span error at 150mmHg  
Output span error at 300mmHg  
Maximum Temperature Error  
SVErr150  
SVErr300  
TCErrMax  
1, 2  
1, 3  
1, 4  
±2.5mmHg/0 - 50℃  
±0.2 V/0 – 50℃  
Nonlinearity  
NL  
Tr  
±0.4%FS/0 - 50℃  
5  
6  
Response time  
1 ms. typ.  
Noise screening  
0.033mmHg p-p  
(A)  
(for the detail, please refer to page 4)  
2
7437_XFPM-050KPGR-P3_specs  
V-7437  
Notes;1) The error excludes the ratio metric effect of changes in input voltage.  
2) Output Span Error at 150mmHg is defined as deviations of the 150mmHg output span  
voltage at 0 and 50referenced to 150mmHg output span voltage at 25.  
3) Output Span Error at 300mmHg is defined as deviations of the 300mmHg output span  
voltage at 0, 25 and 50referenced to twice of 150mmHg output span voltage at 25.  
4) Maximum output error of all over the temperature range 0 to 50.  
5) Nonlinearity is evaluated at 150mmHg from the best straight line goes from 0mmHg  
through 300mmHg over the temperature range 0 to 50.  
6) Response time is defined as the time for the change in output voltage from 10% to 90%  
of its final value when the input pressure make a step change.  
8. Transfer Function;  
Vout = Vs × ( P × α + β ) ± (Pressure Error×Temperature Error Multiplier× α× Vs )  
Vs : 5Volts.  
Note: Out put Vout is not perfectly ratiometric with power supply voltage Vs.  
P : Input Pressure  
α,β, Pressure Error and Temperature error multiplier are shown below.  
Model  
Pressure Range  
α
β
Pressure Error1)  
(mmHg)  
XFPM-050KPG(R)-P3  
0 - +300mmHg  
0.00233  
0.1  
8.57  
1) Pressure error includes Non-linearity, pressure hysteresis, span calibration error and  
offset calibration error at room temperature.  
2) Temperature Error Multiplier is shown below graph.  
3
2
1
0
0
25  
50  
Temperature (degree C)  
3) Output Span Error at 150mmHg over the temperature range 0 to 50is within  
+/-2.0mmHg.  
And Output Span Error at 300mmHg over the temperature range 0 to 50is within  
+/-2.5mmHg.  
3
7437_XFPM-050KPGR-P3_specs  
V-7437  
8. Noise screening; (A)  
5VDC  
no pressure  
Vref +  
Vref -  
HPF  
fc = 0.08Hz  
LPF  
fc = 48Hz  
Amplifier  
gain = 65.7  
Window comparator  
Pressure sensor  
0 ~ 300mmHg  
0.5 ~ 4.0V  
+/- 0.033mmHg p-p  
x 65.7 amplified  
= 766mV/mmHg  
Vref+ = +12.5mV  
Vref- = -12.5mV  
11.7mV/mmHg  
= 25mV/0.033mmHg  
over 30sec continuously measurement  
4
7
5.4  
2
5
5.4  
2
.4  
8.  
6.  
0
0φ  
) i l 0 m 6 ( 0 4 2 . 5 1  
5
.
φ 3  
R0  
5
1
x
a
m
5
2
.
0
5
8
R 1 .  
2
4
.2  
5
5 0 .  
8 6 .  
8 2 .  
5
2
.
1.  
.254  
2
10  
.254  
1 2  
1 4  
06  
7
R 1 . 5  
.254  
5
.254  
.4  
8
6.  
0φ.  
0
)
m i l 6 ( 0 0 4 5 1 . 2  
φ 3  
0.5  
C
8
R 1 . 5  
5
.
2
.
4
2
60゚  
5
.0  
5
2
.
0
5
5
1
x
a
m
2
10  
6
.
0
R
1 2  
1 4  
2 . 8  
8 6 .  
August 17, 2007  
No. V-7563  
Messrs.  
SPECIFICATION  
Model:  
XFGM-6050KPGSR-P3-(TP)  
RoHS compliance  
Project:  
Reference:  
Fujikura Ltd.  
7563C_XFM-6050KPGSR-P3_specs  
V-7563  
1. General;  
This document details the performance specifications of FUJIKURA's XFGM-6050KPGSR-P3-(TP) high  
level output, on-chip signal conditioned, temperature compensated and calibrated pressure transducers.  
2. Principle;  
FUJIKURA's integrated semiconductor pressure sensor has four pressure sensitive piezoresistors which are  
formed on the diaphragm surface of a silicon chip. This chip includes a constant current drive circuit, signal  
amplification circuitry and resistors for calibration of offset and sensitivity and temperature compensation.  
These are achieved using silicon planer technique.  
When the applied pressure deforms the diaphragm, the piezoresistors change their resistance due to the  
piezoresistance effect. The resistance change of the four resisters, which constitute a whetstone bridge  
circuit, results in a pressure proportional voltage because there is an internally supplied constant current  
excitation. The surrounding circuit then amplifies the low-level voltage to provide a linear, repeatable  
high-level output voltage.  
Table shown below is revision records of this specification  
V
IV  
III  
II  
8-17-07  
H. Nishida New plastic (PPSÎEpoxy) for 250degC reflow soldering  
H. Nishida Marking drawing 9-757-015 Î 9-757-094  
H. Nishida Add tape & reel model, noise screening information  
H. Nishida  
(C )  
(B)  
(A)  
12-07-06  
Rev.I 6-22-04  
Est.  
6-01-01  
Date  
Name  
Comments  
Remark  
3. Pressure range & rating;  
Model  
Rated (Measurable) pressure range  
XFGM-6050KPGSR-P3-(TP) (A)  
0 ~ +300 mmHgGauge (0 ~ +40.00 kPaGauge)  
4. Package outline dimensions, Electrical pin connections, Marking and Weight;  
(A), (B), (C)  
Refer the attached drawings. The following table shows the drawing No.  
Model  
Package  
outline dimensions  
Electrical pin  
connections  
Marking  
Delivery  
Style  
XFGM-6050KPGSR-P3  
Bulk  
9-757-119  
9-757-003  
9-757-094  
XFGM-6050KPGSR-P3-TP  
Tape & reel  
Weight  
approximately 0.3g  
5. Absolute maximum rating;  
1
7563C_XFM-6050KPGSR-P3_specs  
V-7563  
Item  
Symbol  
Rating  
Unit  
Maximum load pressure  
Maximum input voltage  
Compensated temperature range  
Operating temperature range  
Storage temperature range  
Insulation durability  
Pmax+  
Vccmax  
Topt1  
Topt2  
Tstg  
Twice of rated pressure  
8
VDC  
0
-40  
-40  
~
50  
~
125  
125  
~
AC500V, 1minute.  
Insulation impedance  
100MΩ min. (DC500V)  
6. Recommended operating conditions;  
Item  
Symbol  
Condition  
Unit  
Rated pressure  
Popt  
0 ~ +300  
(0 ~ +40.00)  
mmHg  
(kPa)  
Type of pressure  
Pressure media  
Gauge pressure  
Non-corrosive gases  
Supply Voltage (const.)  
Vcc  
5.0±0.25  
VDC  
Note  
7. Electrical characteristics;  
( Vcc=5VDC constant, ambient temperature Ta =25 )  
Item  
Symbol  
Rating  
10 mA max. (typ 7mA)  
10 Ω max.  
Power consumption  
Output impedance  
Source current  
Sink current  
Icc  
Imp  
Isource  
Isink  
Voff  
0.2 mA max.  
2 mA max.  
Offset voltage  
(Output at 0mmHg)  
Output voltage at full scale  
(Output at 300mmHg)  
Output span voltage  
0.5±0.1 V  
1  
1  
1  
Vfs  
SV  
4.0±0.1 V  
1.75±0.05 V (0 - 150mmHg)  
3.50±0.10 V (0 - 300mmHg)  
±2.0mmHg/0 – 50℃  
Output span error at 150mmHg  
Output span error at 300mmHg  
Maximum Temperature Error  
SVErr150  
SVErr300  
TCErrMax  
1, 2  
1, 3  
1, 4  
±2.5mmHg/0 - 50℃  
±0.2 V/0 – 50℃  
Nonlinearity  
Response time  
Noise screening  
NL  
Tr  
±0.4%FS/0 - 50℃  
5  
6  
(A)  
1 ms. typ.  
0.033mmHg p-p  
(for the detail, please refer to page 4)  
2
7563C_XFM-6050KPGSR-P3_specs  
V-7563  
Notes;1) The error excludes the ratio metric effect of changes in input voltage.  
2) Output Span Error at 150mmHg is defined as deviations of the 150mmHg output span  
voltage at 0 and 50referenced to 150mmHg output span voltage at 25.  
3) Output Span Error at 300mmHg is defined as deviations of the 300mmHg output span  
voltage at 0, 25 and 50referenced to twice of 150mmHg output span voltage at 25.  
4) Maximum output error of all over the temperature range 0 to 50.  
5) Nonlinearity is evaluated at 150mmHg from the best straight line goes from 0mmHg  
through 300mmHg over the temperature range 0 to 50.  
6) Response time is defined as the time for the change in output voltage from 10% to 90%  
of its final value when the input pressure make a step change.  
8. Transfer Function;  
Vout = Vs × ( P × α + β ) ± (Pressure Error×Temperature Error Multiplier× α× Vs )  
Vs : 5Volts.  
Note: Out put Vout is not perfectly ratiometric with power supply voltage Vs.  
P : Input Pressure  
α,β, Pressure Error and Temperature error multiplier are shown below.  
Model  
Pressure Range  
α
β
Pressure Error1)  
(mmHg)  
XFGM-6050KPGSR-(F)-P3-(TP)  
0 - +300mmHg  
0.00233  
0.1  
8.57  
1) Pressure error includes Non-linearity, pressure hysteresis, span calibration error and  
offset calibration error at room temperature.  
2) Temperature Error Multiplier is shown below graph.  
3
2
1
0
0
25  
50  
Temperature (degree C)  
3) Output Span Error at 150mmHg over the temperature range 0 to 50is within  
+/-2.0mmHg.  
And Output Span Error at 300mmHg over the temperature range 0 to 50is within  
+/-2.5mmHg.  
3
7563C_XFM-6050KPGSR-P3_specs  
9. Noise screening; (A)  
V-7563  
5VDC  
no pressure  
Vref +  
Vref -  
HPF  
LPF  
Amplifier  
fc = 0.08Hz  
fc = 48Hz  
gain = 65.7  
Window comparator  
Pressure sensor  
0 ~ 300mmHg  
0.5 ~ 4.0V  
+/- 0.033mmHg p-p  
x 65.7 amplified  
= 766mV/mmHg  
Vref+ = +12.5mV  
Vref- = -12.5mV  
11.7mV/mmHg  
= 25mV/0.033mmHg  
over 30sec continuously measurement  
(C)  
10. Recommended soldering conditions ;  
10.1 XFGM-6050KPGSR-P3-(TP) without “#” marking for Pb reflow soldering  
230degC : within 10sec  
230degC  
1~2degC/sec  
1~2degC/sec  
150degC Max 60sec  
150degC  
1~2degC/sec  
RT  
Reflow: Two(2) times maximum.  
4
7563C_XFM-6050KPGSR-P3_specs  
V-7563  
10.2 XFGM-6050KPGSR-P3-(TP) with “#” marking for Pb free reflow soldering  
250degC : within 10sec  
230degC~ : within 45sec  
250degC  
230degC  
2~4degC/sec  
2~4degC/sec  
150degC  
150~180degC  
90+/-30sec  
2~4degC/sec  
RT  
Reflow: Two(2) times maximum.  
5
( 9 . 5 )  
3 . 5  
0 . 5  
6
m
0.1m  
は±  
m)  
公差  
寸法  
±0.1  
+
-.05  
:
e
部位  
3φ  
無き  
ranc  
0R.5  
Tole  
:指定  
ral  
cFplaet  
0 . 2 5  
0 2 ± 0 .  
Gne  
(
グン面  
aLlbed  
ーマキ  
4
3
.05  
-2R  
±.03  
0.1  
Pin  
8
iPn  
0.  
90゚±  
2.54  
0 4 0 A L  
X F G M 6  
6 1 1 2  
2
5
0+  
.-05  
7
0
-0.1  
iPn  
iPn  
.32  
.03  
±0  
1
6
port  
7
1
n
- 0 . 0 5  
+ 0  
置位め決ピン  
2.54  
re  
置位め決ピン  
iPn  
iP  
Presu  
rPjetocin  
rPjetocin  
x
Inde  
AMX.  
1 5 0 .  
± 0 . 1  
51゚  
5
0±.  
01.3  
.
AMX  
ohle  
0±.2  
導圧入口  
8
01゚  
.0  
Vent  
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ont  
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の他イラン  
od  
ohle  
/MN  
dn  
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ip  
rf  
近の傍に続て接しさ下  
/MN  
.o5  
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N
irng  
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erlfo  
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flow  
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e
0degC  
a
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with  
December 12, 2007  
No. V-7695  
Messrs.  
SPECIFICATION  
Model:  
XFGM-3050KPGSR-P3-(TP)  
RoHS compliance  
Project:  
Reference:  
Fujikura Ltd.  
7695A_XFM-3050KPGSR-P3_specs  
V-7695  
1. General;  
This document details the performance specifications of FUJIKURA's XFGM-3050KPGSR-P3-(TP) high  
level output, on-chip signal conditioned, temperature compensated and calibrated pressure transducers.  
2. Principle;  
FUJIKURA's integrated semiconductor pressure sensor has four pressure sensitive piezoresistors which are  
formed on the diaphragm surface of a silicon chip. This chip includes a constant current drive circuit, signal  
amplification circuitry and resistors for calibration of offset and sensitivity and temperature compensation.  
These are achieved using silicon planer technique.  
When the applied pressure deforms the diaphragm, the piezoresistors change their resistance due to the  
piezoresistance effect. The resistance change of the four resisters, which constitute a whetstone bridge  
circuit, results in a pressure proportional voltage because there is an internally supplied constant current  
excitation. The surrounding circuit then amplifies the low-level voltage to provide a linear, repeatable  
high-level output voltage.  
Table shown below is revision records of this specification  
V
IV  
III  
II  
Rev.I 12-12-07  
Est. 12-07-06  
H. Nishida To add reflow soldering profile.  
H. Nishida  
(A)  
Date  
Name  
Comments  
Remark  
3. Pressure range & rating;  
Model  
Rated (Measurable) pressure range  
0 ~ +300 mmHgGauge (0 ~ +40.00 kPaGauge)  
XFGM-3050KPGSR-P3-(TP)  
4. Package outline dimensions, Electrical pin connections, Marking and Weight;  
Refer the attached drawings.  
The following table shows the drawing No.  
Model  
Package  
outline dimensions  
Electrical pin  
connections  
Marking  
Delivery  
style  
XFGM-3050KPGSR-P3  
Bulk  
No.9-757-014  
No.9-757-003  
No.9-757-094  
XFGM-3050KPGSR-P3-TP  
Tape&reel  
Weight  
approximately 0.3g  
1
7695A_XFM-3050KPGSR-P3_specs  
V-7695  
5. Absolute maximum rating;  
Item  
Symbol  
Rating  
Unit  
Maximum load pressure  
Maximum input voltage  
Compensated temperature range  
Operating temperature range  
Storage temperature range  
Insulation durability  
Pmax+  
Vccmax  
Topt1  
Topt2  
Tstg  
Twice of rated pressure  
8
VDC  
0
-40  
-40  
~
50  
~
125  
125  
~
AC500V, 1minute.  
Insulation impedance  
100MΩ min. (DC500V)  
6. Recommended operating conditions;  
Item  
Symbol  
Condition  
Unit  
Rated pressure  
Popt  
0 ~ +300  
(0 ~ +40.00)  
mmHg  
(kPa)  
Type of pressure  
Pressure media  
Gauge pressure  
Non-corrosive gases  
Supply Voltage (const.)  
Vcc  
5.0±0.25  
VDC  
Note  
7. Electrical characteristics;  
( Vcc=5VDC constant, ambient temperature Ta =25 )  
Item  
Symbol  
Rating  
10 mA max. (typ 7mA)  
10 Ω max.  
Power consumption  
Output impedance  
Source current  
Sink current  
Icc  
Imp  
Isource  
Isink  
Voff  
0.2 mA max.  
2 mA max.  
Offset voltage  
(Output at 0mmHg)  
Output voltage at full scale  
(Output at 300mmHg)  
Output span voltage  
0.5±0.1 V  
1  
1  
1  
Vfs  
SV  
4.0±0.1 V  
1.75±0.05 V (0 - 150mmHg)  
3.50±0.10 V (0 - 300mmHg)  
±2.0mmHg/0 – 50℃  
Output span error at 150mmHg  
Output span error at 300mmHg  
Maximum Temperature Error  
SVErr150  
SVErr300  
TCErrMax  
1, 2  
1, 3  
1, 4  
±2.5mmHg/0 - 50℃  
±0.2 V/0 – 50℃  
Nonlinearity  
Response time  
Noise screening  
NL  
Tr  
±0.4%FS/0 - 50℃  
5  
6  
1 ms. typ.  
0.033mmHg p-p  
(for the detail, please refer to page 4)  
2
7695A_XFM-3050KPGSR-P3_specs  
V-7695  
Notes;1) The error excludes the ratio metric effect of changes in input voltage.  
2) Output Span Error at 150mmHg is defined as deviations of the 150mmHg output span  
voltage at 0 and 50referenced to 150mmHg output span voltage at 25.  
3) Output Span Error at 300mmHg is defined as deviations of the 300mmHg output span  
voltage at 0, 25 and 50referenced to twice of 150mmHg output span voltage at 25.  
4) Maximum output error of all over the temperature range 0 to 50.  
5) Nonlinearity is evaluated at 150mmHg from the best straight line goes from 0mmHg  
through 300mmHg over the temperature range 0 to 50.  
6) Response time is defined as the time for the change in output voltage from 10% to 90%  
of its final value when the input pressure make a step change.  
8. Transfer Function;  
Vout = Vs × ( P × α + β ) ± (Pressure Error×Temperature Error Multiplier× α× Vs )  
Vs : 5Volts.  
Note: Out put Vout is not perfectly ratiometric with power supply voltage Vs.  
P : Input Pressure  
α,β, Pressure Error and Temperature error multiplier are shown below.  
Model  
Pressure Range  
α
β
Pressure Error1)  
(mmHg)  
XFGM-3050KPGSR-P3-(TP)  
0 - +300mmHg  
0.00233  
0.1  
8.57  
1) Pressure error includes Non-linearity, pressure hysteresis, span calibration error and  
offset calibration error at room temperature.  
2) Temperature Error Multiplier is shown below graph.  
3
2
1
0
0
25  
50  
Temperature (degree C)  
3) Output Span Error at 150mmHg over the temperature range 0 to 50is within  
+/-2.0mmHg.  
And Output Span Error at 300mmHg over the temperature range 0 to 50is within  
+/-2.5mmHg.  
3
7695A_XFM-3050KPGSR-P3_specs  
V-7695  
9. Noise screening;  
5VDC  
no pressure  
Vref +  
Vref -  
HPF  
LPF  
Amplifier  
fc = 0.08Hz  
fc = 48Hz  
gain = 65.7  
Window comparator  
Pressure sensor  
0 ~ 300mmHg  
0.5 ~ 4.0V  
+/- 0.033mmHg p-p  
x 65.7 amplified  
= 766mV/mmHg  
Vref+ = +12.5mV  
Vref- = -12.5mV  
11.7mV/mmHg  
= 25mV/0.033mmHg  
over 30sec continuously measurement  
9. Recommended soldering conditions; (A)  
230degC : within 10sec  
230degC  
1~2degC/sec  
1~2degC/sec  
150degC : max 60sec  
150degC  
1~2degC/sec  
RT  
Reflow: two(2) times maximum  
4
9 . 4  
nt  
pri  
f
08  
.5  
4
1.  
comned  
7 1 .  
Re  
A
5 ) ( 6 .  
3 . 5  
3
5
0
.
0
-
0
+
3
.
φ
nos  
5
.
tai  
0
R
g
ic  
n
cif  
e
a
spe  
t
a
g
d
l
p
e
0 . 2 5  
n
ile  
2 0 . 0 ±  
c
a
F
r
eta  
d
d
e
e
i
e
ht  
3
0
.
0
for  
b
4
a
L
ーマンキグ  
e
3
±
iPn  
8
iPn  
0.  
.54  
2
5 2 0 3  
M G F X  
6 2 1 8  
5
0
.
0
2
5
0
-
7
iPn  
iPn  
3
0
.
0
±
1
6
port  
7
1
5 0 . 0 -  
0 +  
2.54  
iPn  
ure  
iPn  
導入口  
a
Pres  
id  
sh  
dex  
Ni  
In  
H.  
.
X
A
M
07  
0 . 1 5  
5
1
1 . 0 ±  
,
1
1
c
De  
.05  
±
ut  
01.3  
yo  
la  
ad  
p
2
e
.
0
.
X
A
M
r
e
d
ohl  
±
0
1
ol  
s
.08  
Vent  
d
d
a
o
T
A
。い  
ont  
。い  
)
の他イラン  
od  
ohle  
/MN  
dn  
a
eVnt  
FXG  
n
)
om  
ip  
rf  
近の傍に続て接しさ下  
/MN  
.o5  
N
ons.  
G
2cm  
i
n
近の傍に続て接しさ下  
m
in  
a
n
cfi  
rf  
4
tih  
a
e
にロフーティングとし、  
w
oN.  
n
e
2cm  
tc  
mar  
ht  
deta  
e
h
t
n
ne  
iw  
for  
し続なで下いさ。  
e
Se  
t
(Co  
nig  
を上子端らか2以cm内  
e
t
e
.
tyh  
oM  
en  
na  
hter  
をF子端らか2以cm内  
Fceplat  
r
o
(Co  
h
cet  
Fu  
Fp  
aec  
no  
Labled  
c
0
.01  
6
0
tc  
t
o
n
はいNCン士ピ同接を  
;
:
:
en  
o
D
μ
ある  
;
1
2
co  
事意項  
)
3
e
)
2)  
3)45ピ、番ン  
C)1:608p  
N

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