L11798_15 [HAMAMATSU]
H2D2 LIGHT SOURCE UNIT;
| 型号： | L11798_15 |
| 厂家： | 
HAMAMATSU CORPORATION |
| 描述： | H2D2 LIGHT SOURCE UNIT |
| 文件： | 总4页 (文件大小：255K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
VUV
LIGHT
H2D2 LIGHT SOURCE UNIT
SOURCE
L11798/-01, L11799/-01
OVERVIEW
The H2D2 light source unit contains a high-brightness,
high-end deuterium lamp (H2D2 lamp) that emits light
at a brightness 6 times higher than our current deuteri-
um lamps (L2D2 lamps). Despite its high brightness,
the H2D2 is highly stable, has a long service life, and
allows air-cooled operation by a specially designed
housing. This feature makes it much more convenient
and easy to use than ordinary water-cooled lamps.
The H2D2 can be used in various applications and en-
hances equipment sensitivity and throughput.
TLSZF0047
Left: Light source, Right: Power supply
FEATURES
BRIGHTNESS DISTRIBUTION
TLS B0007EC
650
GHigh brightness: 6 times
(compared to conventional model)
GHigh stability: Fluctuation 0.05 %p-p (Max.)
Drift 0.3 %h (Max.)
600
550
500
450
400
350
300
250
200
150
100
High
brightness
×6
GLong Life: Warranty of 1000 hours
GAir cooling (needs no cooling water)
GExternal control
H2D2 lamp
Conventional model
X2D2 lamp
GReplaceable lamp
L2D2 lamp ( 0.5 mm)
APPLICATIONS
GSemiconductor inspection
GFilm thickness measurement
GElectrostatic remover
50
0
-2.5
-2
-1.5
-1
-0.5
0
0.5
1
1.5
2
2.5
GSpectrophotometry
GEnvironmental measurement
GOptical component inspection
DISTANCE FROM APERTURE CENTER (mm)
PACKAGE CONTENTS
Light source to
power supply cable
Type No.
Built-in lamp
Power supply
AC cable
L11798
L11798-01
L11799
(L12098)
(L12098)
(L12099)
(L12099)
L11799-01
SPECIFICATIONS
GGENERAL RATINGS
Parameter
Spectral distribution
L11798
L11798-01
115 to 400
MgF2
L11799
L11799-01
160 to 400
Synthetic silica
Unit
nm
—
Window material
Aperture size (arc point)
Cooling method 1
0.6
mm
—
Fan cooling
Compressed air cooling
Fan cooling
Compressed air cooling
Operating temperature range
Storage temperature range
Operating humidity range
Storage Humidity range
+10 to +40
0 to +60
Below 80 % (no condensation)
Below 85 % (no condensation)
°C
°C
—
—
1A cooling fan is supplied as standard. High pressure air should be prepared by the users.
GRECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Parameter
Warm-up time
Output stability Fluctuation (p-p) (Max.)
L11798
L11798-01
Approx. 30
L11799
L11799-01
Unit
s
%
%/h
h
—
0.05
0.3
1000
at 230 nm
Drift (Max.)
Guaranteed light source service life 2
Input voltage (AC)
100 V to 240 V (100 V / 200 V auto switching), single phase 50 Hz to 60 Hz
200
Power consumption (Max.)
VA
2End of service life is defined as the time when light intensity at 230 nm falls below 50 % of its initial value.
GREPLACE LAMP SOURCE (sold separately)
Parameter
Spectral distribution
L12098
115 to 400
L12099
160 to 400
Synthetic silica
L11799/L11799-01
Unit
nm
—
Window material
Light source
MgF2
L11798/L11798-01
—
SPECTRAL DISTRIBUTION
GL11798/-01 (MgF2 window)
GL11799/-01 (Synthetic silica window)
TLSOB0079EC
TLS B0008EB
100
100
80
60
40
80
60
40
20
0
20
0
100
120
140
160
180
200
220
240
400
160
200
240
280
320
360
400
WAVELENGTH (nm)
WAVELENGTH (nm)
DIMENSIONAL OUTLINES (Unit: mm)
GLIGHT SOURCE (Weight: Approx. 1.3kg)
L11798, L11799
A
B
ARC POINT
44.3
VACUUM FLANGE MOUNT
H2D2 LAMP
(L11798)
CONNECTOR (CONNECTION TO POWER SUPPLY)
COOLING FAN
Type No. Dimension A Dimension B
L11798
L11799
240
215
4
4
110
88
4
4
TLS A0007EA
L11798-01, L11799-01
A
B
ARC POINT
TUBE JOINT
44.3
LCooling section
CONNECTOR
(CONNECTION TO POWER SUPPLY)
VACUUM FLANGE MOUNT
(L11798-01)
H2D2 LAMP
Type No. Dimension A Dimension B
L11798-01
231
4
110
4
L11799-01
204
4
88
4
TLS A0008EB
GPOWER SUPPLY (Weight: Approx. 2.8kg)
CONNECTOR
(CONNECTION TO LIGHT SOUECE)
TOP VIEW
298
280
MAIN POWER SWITCH
COOLING FAN
LED
POWER
ON
DEUTERIUMU LAMP POWER SUPPLY C11472
LAMP
ON/OFF
OFF
OUTPUT
AUTO OPEN O.H.P
INTERFACE
AC INPUT
LAMP SWITCH
FRONT VIEW
EXTERNAL CONTROL TERMINALS
ALARM SIGNAL
DEUTERIUM LAMP STATUS SIGNAL
DEUTERIUM LAMP ON/OFF CONTROL
SIDE VIEW
REAR VIEW
LIGHT SOURCE TO POWER SUPPLY CABLE LENGTH: 2000 50
TLS A0009EB
RELATED PRODUCTS
IVACUUM FLANGE
GOVERVIEW
Various vacuum flanges are available for the H2D2 light source unit. The E3444-02 mount flange meets ICF114
flange specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum
flanges including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best
flange that matches their vacuum vessel.
GSPECIFICATIONS
Parameter
E3444
E3444-01
E3444-02
Seeling method
Flange
O-ring
JIS VF50
Regular
ICF114
ICF114
Mount flange
Seeling force retention
—
JIS VG50
1.33 × 10-4 Pa L/s or less (1 × 10-6 Torr L/s)
* L11798 and L11798-01 can be operated under vacuum condition. L11799 and L11799-01 are not suitable for operation under vacuum condition.
GDIMENSIONAL OUTLINES (Unit: mm)
E3444
40
4- 8.4
10
7
7
7
O-RING
O-RING
O-RING
20
20
20
TLSOA0097EB
TLSOA0098EB
TLSOA0053EC
40
E3444-01
4- 10
10
47.5
E3444-02
17.5
8- 8.4
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K.
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se
TLSZ1014E05
NOV. 2014 IP
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: info@hamamatsu.it
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: hpc@hamamatsu.com.cn
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