S10141-1107S [HAMAMATSU]

CCD area image sensor Low readout noise, high resolution (pixel size: 12 レm); CCD面积图像传感器的低读出噪声,高分辨率(像素尺寸: 12レM)
S10141-1107S
型号: S10141-1107S
厂家: HAMAMATSU CORPORATION    HAMAMATSU CORPORATION
描述:

CCD area image sensor Low readout noise, high resolution (pixel size: 12 レm)
CCD面积图像传感器的低读出噪声,高分辨率(像素尺寸: 12レM)

传感器 图像传感器 CD
文件: 总8页 (文件大小:204K)
中文:  中文翻译
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I M A G E S E N S O R  
CCD area image sensor  
S10140/S10141 series  
Low readout noise, high resolution (pixel size: 12 µm)  
S10140/S10141 series is a family of back-thinned FFT-CCD image sensors specifically designed for low-light-level detection in scientific  
applications. By using the binning operation, S10140/S0141 series can be used as a linear image sensor having a long aperture in the direction of  
the device length. This makes S10140/S10141 series ideally suited for use in spectrophotometry. The binning operation offers significant  
improvement in S/N and signal processing speed compared with conventional methods by which signals are digitally added by an external circuit.  
S10140/S10141 series also features low noise and low dark signal (MPP mode operation). This enables low-light-level detection and long  
integration time, thus achieving a wide dynamic range.  
S10140/S10141 series has an effective pixel size of 12 × 12 µm and is available in image areas ranging from 12.288 (H) × 1.464 (V) mm2 (1024 ×  
122 pixels) up to a large image area of 24.576 (H) × 6.072 (V) mm2 (2048 × 506 pixels).  
Features  
Applications  
-
Low readout noise: 4 e rms Typ.  
High resolution: pixel size 12 × 12 µm  
Non-cooled type: S10140 series  
One-stage TE-cooled type: S10141 series  
Line, pixel binning, area scanning  
Greater than 90 % quantum efficiency at peak sensitivity  
wavelength  
Fluorescence spectrometer, ICP  
Industrial inspection requiring  
Semiconductor inspection  
DNA sequencer  
Low-light-level detection  
Wide spectral response range  
Wide dynamic range  
MPP operation  
High UV sensitivity with good stability  
Same pin connections as S7030/S7031 series  
Selection guide  
Suitable  
multichannel  
detector head  
Number of total  
pixels  
Number of active  
pixels  
Active area  
[mm (H) × mm (V)]  
Type No.  
Cooling  
S10140-1007  
S10140-1008  
S10140-1009  
S10140-1107  
S10140-1108  
S10140-1109  
S10141-1007S  
S10141-1008S  
S10141-1009S  
S10141-1107S  
S10141-1108S  
S10141-1109S  
1044 × 128  
1044 × 256  
1044 × 512  
2068 × 128  
2068 × 256  
2068 × 512  
1044 × 128  
1044 × 256  
1044 × 512  
2068 × 128  
2068 × 256  
2068 × 512  
1024 × 122  
1024 × 250  
1024 × 506  
2048 × 122  
2048 × 250  
2048 × 506  
1024 × 122  
1024 × 250  
1024 × 506  
2048 × 122  
2048 × 250  
2048 × 506  
12.288 × 1.464  
12.288 × 3.000  
12.288 × 6.072  
24.576 × 1.464  
24.576 × 3.000  
24.576 × 6.072  
12.288 × 1.464  
12.288 × 3.000  
12.288 × 6.072  
24.576 × 1.464  
24.576 × 3.000  
24.576 × 6.072  
Non-cooled  
C10150  
C10151  
One-stage  
TE-cooled  
General ratings  
Parameter  
S10140 series  
S10141 series  
Pixel size  
12 (H) × 12 (V) µm  
Vertical clock phase  
Horizontal clock phase  
Output circuit  
Package  
2 phases  
2 phases  
One-stage MOSFET source follower  
24 pin ceramic DIP (refer to dimensional outlines)  
Window *1  
Quartz glass  
AR-coated sapphire  
*1: Window-less is available upon request.  
1
CCD area image sensor S10140/S10141 series  
Absolute maximum ratings (Ta=25 °C)  
Parameter  
Operating temperature  
Storage temperature  
OD voltage  
RD voltage  
ISV voltage  
ISH voltage  
IGV voltage  
IGH voltage  
SG voltage  
OG voltage  
RG voltage  
TG voltage  
Vertical clock voltage  
Horizontal clock voltage  
Symbol  
Topr  
Tstg  
VOD  
VRD  
VISV  
VISH  
VIG1V, VIG2V  
VIG1H, VIG2H  
VSG  
Min.  
-50  
-50  
-0.5  
-0.5  
-0.5  
-0.5  
-10  
-10  
-10  
-10  
-10  
-10  
-10  
-10  
Typ.  
Max.  
+30  
+70  
+30  
+18  
+18  
+18  
+15  
+15  
+15  
+15  
+15  
+15  
+15  
+15  
Unit  
°C  
°C  
V
V
V
V
V
V
V
-
-
-
-
-
-
-
-
-
-
-
-
-
-
VOG  
VRG  
VTG  
V
V
V
V
VP1V, VP2V  
VP1H, VP2H  
V
Operating conditions (MPP mode, Ta=25 °C)  
Parameter  
Output transistor drain voltage  
Reset drain voltage  
Output gate voltage  
Substrate voltage  
Symbol  
VOD  
VRD  
VOG  
VSS  
Min.  
-
-
-
-
-
-
-9  
-9  
-
-
-
-
-
-
-
-
-
Typ.  
24  
12  
3
Max.  
Unit  
V
V
V
V
V
V
V
V
-
-
-
-
-
-
0
0
-
-
-
-
-
-
-
-
-
-
0
Test point (vertical input source)  
Test point (horizontal input source)  
Test point (vertical input gate)  
Test point (horizontal input gate)  
Vertical shift register  
clock voltage  
VISV  
VISH  
VRD  
VRD  
-8  
-8  
3
-8  
5
-8  
5
-8  
5
-8  
3
VIG1V, VIG2V  
VIG1H, VIG2H  
VP1VH, VP2VH  
VP1VL, VP2VL  
VP1HH, VP2HH  
VP1HL, VP2HL  
VSGH  
High  
Low  
High  
Low  
High  
Low  
High  
Low  
High  
Low  
V
V
V
V
V
Horizontal shift register  
clock voltage  
Summing gate voltage  
Reset gate voltage  
VSGL  
VRGH  
VRGL  
VTGH  
Transfer gate voltage  
VTGL  
-
-8  
Electrical characteristics (Ta=25 °C)  
Parameter  
Signal output frequency  
Vertical shift register capacitance *2  
Horizontal shift register capacitance *2  
Summing gate capacitance  
Reset gate capacitance  
Transfer gate capacitance  
Charge transfer efficiency *3  
DC output level *4  
Output impedance *4  
Power consumption *4 *5  
Symbol  
fc  
CP1V, CP2V  
CP1H, CP2H  
CSG  
Min.  
-
-
-
-
-
-
Typ.  
250  
3600  
150  
30  
30  
75  
0.99999  
17  
Max.  
500  
-
-
-
-
-
-
18  
-
Unit  
kHz  
pF  
pF  
pF  
pF  
pF  
-
CRG  
CTG  
CTE  
Vout  
Zo  
P
0.99995  
12  
-
-
V
k  
mW  
8
4
-
*2: S10140-1108, S10141-1108S  
*3: Charge transfer efficiency per pixel, measured at half of the full well capacity.  
*4: The values depend on the load resistance. (Typical, VOD=24 V, Load resistance=100 k)  
*5: Power consumption of the on-chip amplifier  
2
CCD area image sensor S10140/S10141 series  
Electrical and optical characteristics (Ta=25 °C, unless otherwise noted)  
Parameter  
Symbol  
Min.  
Typ.  
Fw × Sv  
75  
150  
200  
Max.  
-
-
-
-
Unit  
V
Saturation output voltage  
Vsat  
-
Vertical  
Horizontal  
Summing  
60  
120  
150  
4
Full well capacity  
Fw  
Sv  
ke-  
CCD node sensitivity  
5
6
µV/e-  
e-  
25 °C  
0 °C  
-
-
100  
5
1000  
50  
Dark current *6  
MPP mode  
DS  
/pixel/  
s
Readout noise *7  
Nr  
-
4
18  
-
-
10  
-
0
10  
3
0
e- rms  
Line binning  
Area scanning  
30000  
15000  
37500  
18500  
-
Dynamic range *8  
DR  
-
%
nm  
-
-
-
Photo response non-uniformity *9  
Spectral response range  
PRNU  
λ
-
-
-
-
-
-
3
200 to 1100  
W hite spots  
Black spots  
-
-
-
-
Point defect *10  
Blemish  
-
Cluster defect *11  
Column defect *12  
-
*6: Dark current nearly doubles for every 5 to 7 °C increase in temperature.  
*7: -50 °C, Operating frequency is 20 kHz.  
*8: Dynamic range (DR) = Full well/Readout noise  
*9: Measured at the half of the full well capacity output.  
Fixed pattern noise (peak to peak)  
Photo response non-uniformity (PRNU) [%]  
× 100  
Signal  
*10: W hite spots  
-
Pixels whose dark current is higher than 1 ke after one-second integration at 0 °C.  
Black spots  
Pixels whose sensitivity is lower than one-half of the average pixel output. (Measured with uniform light producing one-half  
of the saturation charge)  
*11: 2 to 9 contiguous defective pixels  
*12: 10 or more contiguous defective pixels  
Spectral response (without window) *10  
Spectral transmittance characteristics  
(Typ. Ta=25 ˚C)  
(Typ. Ta=25 ˚C)  
100  
100  
90  
80  
70  
60  
50  
40  
30  
20  
BACK-THINNED  
S10140/S10141  
SERIES  
90  
80  
QUARTZ WINDOW  
70  
AR COATED SAPPHIRE  
60  
50  
40  
30  
20  
10  
FRONT-ILLUMINATED  
(UV COAT)  
10  
0
FRONT-ILLUMINATED  
600 800  
WAVELENGTH (nm)  
0
100 200 300 400 500 600 700 800 900 1000 1100 1200  
200  
400  
1000  
1200  
WAVELENGTH (nm)  
KMPDB0254EA  
KMPDB0110EA  
Window material  
*10: Spectral response with quartz glass or AR-coated  
sapphire are decreased by the transmittance.  
Type No.  
Window material  
Quartz glass *11  
(option: window-less)  
Dark current vs. temperature  
S10140 series  
S10141 series  
(Typ.)  
1000  
AR-coated sapphire *12  
(option: window-less)  
100  
10  
1
S10142 series  
(two-stage  
TE-cooled types,  
made to order)  
AR-coated sapphire *12  
(option: window-less)  
*11: Resin sealing  
*12: Hermetic sealing  
0.1  
0.01  
-50  
-40 -30  
-20 -10  
0
10  
20  
30  
TEMPERATURE (˚C)  
KMPDB0255EA  
3
CCD area image sensor S10140/S10141 series  
Device structure (Conceptual drawing of top view)  
THINNING  
20  
22  
23  
V
4
3
2
1 2 3 4 5  
H
1
12  
11  
V=122, 250, 506  
H=1024, 2048  
3
8
9
10  
n
4 BLANK  
4 BLANK  
2
SIGNAL OUT  
6 BEVEL  
6 BEVEL  
KMPDC0244EA  
Timing chart  
Linebininng  
INTEGRATION PERIOD  
(Shutter must be open)  
VERTICAL BINNING PERIOD  
(Shutter must be closed)  
READOUT PERIOD (Shutter must be closed)  
6458 + 6 (BEVEL): S1014 -1007/-1107  
3.. 62  
63  
*
3..126 127  
3..254 255  
128122 + 6 (BEVEL): S1014 -1008/-1108  
*
Tpwv  
256250 + 6 (BEVEL): S1014 -1009/-1109  
*
1
2
P1V  
Tovr  
P2V, TG  
P1H  
Tpwh, Tpws  
4..530 531  
4..1042 1043  
532 : S1014 -1007/-1008/-1009  
*
1044: S1014 -1107/-1108/-1109  
*
1
2
3
P2H, SG  
Tpwr  
D1  
RG  
OS  
D2  
S1..S512  
D19  
D20: S1014 -1007/-1008/-1009  
*
D3..D10, S1..S1024, D11..D18  
: S1014 -1107/-1108/-1109  
*
KMPDC0242EA  
Parameter  
Pulse width  
Symbol  
Tpwv  
Tprv, Tpfv  
Tpwh  
Tprh, Tpfh  
-
Tpws  
Tprs, Tpfs  
-
Tpwr  
Tprr, Tpfr  
Tovr  
Remark  
Min.  
6
20  
1000  
10  
40  
1000  
10  
40  
100  
5
1
Typ.  
8
-
Max.  
-
-
-
-
60  
-
-
60  
-
-
Unit  
µs  
ns  
ns  
ns  
%
ns  
ns  
%
13  
P1V, P2V, TG  
P1H, P2H  
*
Rise and fall time  
Pulse width  
Rise and fall time  
Duty ratio  
Pulse width  
Rise and fall time  
Duty ratio  
Pulse width  
Rise and fall time  
Overlap time  
2000  
13  
*
-
50  
2000  
-
50  
1000  
-
SG  
-
ns  
ns  
µs  
RG  
-
-
TG P1H  
2
-
*13: The clock pulses should be overlapped at 50 % of clock pulse amplitude.  
4
CCD area image sensor S10140/S10141 series  
Area scanning  
INTEGRATION PERIOD  
(Shutter must be open)  
READOUT PERIOD (Shutter must be closed)  
4.. 63 6458 + 6 (BEVEL): S1014 -1007/-1107  
*
4..127 128122 + 6 (BEVEL): S1014 -1008/-1108  
*
Tpwv  
4..255 256250 + 6 (BEVEL): S1014 -1009/-1109  
*
1
2
3
P1V  
P2V, TG  
P1H  
P2H, SG  
RG  
OS  
Tovr  
P2V, TG  
ENLARGED VIEW  
Tpwh, Tpws  
P1H  
P2H, SG  
RG  
Tpwr  
D1  
OS  
D2  
D3  
D4  
S1..S512  
D18  
D19  
D20: S1014 -1007/-1008/-1009  
*
D5..D10, S1..S1024, D11..D17  
: S1014 -1107/-1108/-1109  
*
KMPDC0243EA  
Parameter  
Pulse width  
Symbol  
Remark  
Min.  
6
20  
1000  
10  
40  
1000  
10  
40  
100  
5
1
Typ.  
8
-
Max.  
-
-
-
-
60  
-
-
60  
-
-
Unit  
µs  
ns  
ns  
ns  
%
ns  
ns  
%
Tpwv  
Tprv, Tpfv  
Tpwh  
Tprh, Tpfh  
-
Tpws  
Tprs, Tpfs  
-
14  
P1V, P2V, TG  
P1H, P2H  
*
Rise and fall time  
Pulse width  
Rise and fall time  
Duty ratio  
Pulse width  
Rise and fall time  
Duty ratio  
Pulse width  
Rise and fall time  
Overlap time  
2000  
14  
*
-
50  
2000  
-
50  
1000  
-
SG  
-
Tpwr  
Tprr, Tpfr  
Tovr  
ns  
ns  
µs  
RG  
-
-
TG - P1H  
2
-
*14: The clock pulses should be overlapped at 50 % of clock pulse amplitude.  
5
CCD area image sensor S10140/S10141 series  
Dimensional outlines (unit: mm)  
S10140-1007/-1008/-1009  
S10140-1107/-1108/-1109  
WINDOW 16.3  
WINDOW 28.6  
ACTIVE AREA  
12.29  
ACTIVE AREA 24.58  
2.54  
44.0  
2.54  
34.0  
1st PIN INDICATION PAD  
1st PIN INDICATION PAD  
PHOTOSENSITIVE SURFACE  
PHOTOSENSITIVE SURFACE  
(24 ×) 0.5  
(24 ×) 0.5  
S10140-1107: a=1.464  
S10140-1108: a=3.000  
S10140-1109: a=6.072  
S10140-1007: a=1.464  
S10140-1008: a=3.000  
S10140-1009: a=6.072  
KMPDA0207EA  
KMPDA0208EA  
S10141-1007S/-1008S/-1009S  
S10141-1107S/-1108S/-1109S  
WINDOW 16.3  
WINDOW 28.6  
ACTIVE AREA  
12.29  
ACTIVE AREA 24.58  
2.54  
44.0  
2.54  
34.0  
52.0  
42.0  
60.0  
50.0  
PHOTOSENSITIVE SURFACE  
1st PIN INDICATION PAD  
1st PIN INDICATION PAD  
PHOTOSENSITIVE SURFACE  
TE-COOLER  
TE-COOLER  
(24 ×) 0.5  
(24 ×) 0.5  
S10141-1007S: a=1.464  
S10141-1008S: a=3.000  
S10141-1009S: a=6.072  
S10141-1107S: a=1.464  
S10141-1108S: a=3.000  
S10141-1109S: a=6.072  
KMPDA0209EB  
KMPDA0210EB  
6
CCD area image sensor S10140/S10141 series  
Pin connections  
Remark  
(s ta n d a rd  
o p e ra tio n )  
S10140 series  
Function  
S10141 series  
Function  
Pin  
No.  
Symbol  
Symbol  
1
2
3
4
5
6
RD  
OS  
OD  
OG  
SG  
-
Reset drain  
RD  
OS  
OD  
OG  
SG  
-
Reset drain  
+12 V  
RL=100 k  
+24 V  
+3 V  
Sam e pulse as P2H  
Output transistor source  
Output transistor drain  
Output gate  
Output transistor source  
Output transistor drain  
Output gate  
Summing gate  
Summing gate  
7
-
-
8
9
P2H  
P1H  
IG2H  
IG1H  
ISH  
TG *15  
P2V  
P1V  
-
CCD horizontal register clock-2  
CCD horizontal register clock-1  
Test point (horizontal input gate-2)  
Test point (horizontal input gate-1)  
Test point (horizontal input source)  
Transfer gate  
P2H  
P1H  
IG2H  
IG1H  
ISH  
TG *15  
P2V  
P1V  
Th1  
Th2  
P-  
P+  
SS  
ISV  
IG2V  
IG1V  
RG  
CCD horizontal register clock-2  
CCD horizontal register clock-1  
Test point (horizontal input gate-2)  
Test point (horizontal input gate-1)  
Test point (horizontal input source)  
Transfer gate  
CCD vertical register clock-2  
CCD vertical register clock-1  
Thermistor  
Thermistor  
TE-cooler-  
TE-cooler+  
Substrate (GND)  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
Connect to RD  
Sam e pulse as P2V  
CCD vertical register clock-2  
CCD vertical register clock-1  
-
-
-
SS  
Substrate (GND)  
GND  
Connect to RD  
ISV  
IG2V  
IG1V  
RG  
Test point (vertical input source)  
Test point (vertical input gate-2)  
Test point (vertical input gate-1)  
Reset gate  
Test point (vertical input source)  
Test point (vertical input gate-2)  
Test point (vertical input gate-1)  
Reset gate  
*15: Isolation gate between vertical register and horizontal register. In standard operation, TG should be applied the same pulse as  
P2V.  
Specifications of built-in TE-cooler (Typ.)  
Parameter  
Internal resistance  
Maximum current *16  
Maximum voltage  
Maxim um heat absorption *19  
Maximum temperature  
of heat radiating side  
Symbol  
Rint Ta=25 °C  
Imax Tc *17=Th *18=25 °C  
Vmax Tc *17=Th *18=25 °C  
Qmax  
Condition  
S10141-1007S/-1008S/-1009S  
S10141-1107S/-1108S/-1109S  
Unit  
2.5  
1.5  
3.8  
3.4  
1.2  
3.0  
3.6  
5.1  
A
V
W
-
70  
70  
°C  
*16: Maximum current Imax:  
If the current greater than this value flows into the thermoelectric cooler, the heat absorption begins to decrease due to  
the Joule heat. It should be noted that this value is not the damage threshold value. To protect the thermoelectric cooler  
and maintain stable operation, the supply current should be less than 60 % of this maximum current.  
*17: Temperature of the cooling side of thermoelectric cooler.  
*18: Temperature of the heat radiating side of thermoelectric cooler.  
*19: Maximum heat absorption Qmax.  
This is a theoretical heat absorption level that offsets the temperature difference in the thermoelectric cooler when the  
maximum current is supplied to the unit.  
S10141-1007S/-1008S/-1009S  
S10141-1107S/-1108S/-1109S  
(Typ. Ta=25 ˚C)  
(Typ. Ta=25 ˚C)  
7
30  
20  
10  
0
7
30  
20  
10  
0
VOLTAGE vs. CURRENT  
VOLTAGE vs. CURRENT  
CCD TEMPERATURE vs. CURRENT  
CCD TEMPERATURE vs. CURRENT  
6
5
4
3
2
1
0
6
5
4
3
2
1
0
-10  
-20  
-30  
-40  
-10  
-20  
-30  
-40  
0
0.5  
1.0  
1.5  
2.0  
0
1
2
3
4
CURRENT (A)  
CURRENT (A)  
KMPDB0178EA  
KMPDB0179EA  
7
CCD area image sensor S10140/S10141 series  
Specifications of built-in temperature sensor  
ꢀꢀ  
A chip thermistor is built in the same package with a CCD chip, and the CCD chip temperature can be monitored with it. A relation  
between the thermistor resistance and absolute temperature is expressed by the following equation.  
1 M  
R1 = R2 × expB (1 / T1 - 1 / T2)  
where R1 is the resistance at absolute temperature T1 (K)  
R2 is the resistance at absolute temperature T2 (K)  
B is so-called the B constant (K)  
The characteristics of the thermistor used are as follows.  
R (298K) = 10 kΩ  
100 kΩ  
B (298K / 323K) = 3450 K  
10 kΩ  
220  
240  
260  
280  
300  
TEMPERATURE (K)  
KMPDB0111EB  
Precaution for use (Electrostatic countermeasures)  
Handle these sensors with bare hands or wearing cotton gloves. In addition, wear anti-static clothing or use a wrist band with  
an earth ring, in order to prevent electrostatic damage due to electrical charges from friction.  
Avoid directly placing these sensors on a work-desk or work-bench that may carry an electrostatic charge.  
Provide ground lines or ground connection with the work-floor, work-desk and work-bench to allow static electricity to  
discharge.  
Ground the tools used to handle these sensors, such as tweezers and soldering irons.  
It is not always necessary to provide all the electrostatic measures stated above. Implement these measures according to the  
amount of damage that occurs.  
Element cooling/heating temperature incline rate  
When cooling the CCD by an externally attached cooler, set the cooler operation so that the temperature gradient (rate of  
temperature change) for cooling or allowing the CCD to warm back is less than 5 K/minute.  
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.  
Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2007 Hamamatsu Photonics K.K.  
HAMAMATSU PHOTONICS K.K., Solid State Division  
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184, www.hamamatsu.com  
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218  
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 08152-3750, Fax: (49) 08152-2658  
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10  
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777  
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171 41 Solna, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01  
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741  
Cat. No. KMPD1094E05  
Oct. 2007 DN  
8

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