S11071-1106 [HAMAMATSU]

CCD Sensor, 2048 Horiz pixels, 64 Vert pixels, Rectangular, Through Hole Mount, DIP-24;
S11071-1106
型号: S11071-1106
厂家: HAMAMATSU CORPORATION    HAMAMATSU CORPORATION
描述:

CCD Sensor, 2048 Horiz pixels, 64 Vert pixels, Rectangular, Through Hole Mount, DIP-24

CD 传感器 换能器
文件: 总10页 (文件大小:265K)
中文:  中文翻译
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CCD image sensors  
S11071/S10420-01 series  
Improved etaloning characteristics,  
High-speed type and low noise type available  
The S11071/S10420-01 series are back-thinned CCD image sensors designed for spectrometers. Two types consisting of  
a high-speed type (S11071 series) and low noise type (S10420-01 series) are available with improved etaloning charac-  
teristics. The S11071/S10420-01 series offer nearly at spectral response characteristics with high quantum efciency  
from the UV to near infrared region.  
Features  
Applications  
Improved etaloning characteristics  
Spectrometers, etc.  
High sensitivity over a wide spectral range and nearly  
at spectral response characteristics  
-
High CCD node sensitivity: 8 μV/e (S11071 series)  
-
6.5 μV/e (S10420-01 series)  
High full well capacity and wide dynamic range  
(with anti-blooming function)  
Pixel size: 14 × 14 μm  
Selection guide  
Readout speed  
max.  
Number of  
Type no.  
Number of effective  
pixels  
Image size  
Suitable  
driver circuit  
total pixels  
[mm (H) mm (V)]  
×
(MHz)  
S11071-1004  
1044 22  
1024 16  
14.336 0.224  
×
×
×
S11071-1006  
S11071-1104  
S11071-1106  
S10420-1004-01  
S10420-1006-01  
S10420-1104-01  
S10420-1106-01  
1044 70  
1024 64  
14.336 0.896  
28.672 0.224  
×
×
×
×
10  
C11288  
C11287  
2068 22  
2048 16  
×
×
2068 70  
2048 64  
28.672 0.896  
×
×
×
1044 22  
1024 16  
14.336 0.224  
×
×
×
1044 70  
1024 64  
14.336 0.896  
×
×
×
0.5  
2068 22  
2048 16  
28.672 0.224  
×
×
×
2068 70  
2048 64  
28.672 0.896  
×
×
×
Improved etaloning characteristics  
Etaloning is an interference phenomenon that occurs when the light  
incident on a CCD repeatedly reects between the front and back  
surfaces of the CCD while being attenuated, and causes alternately  
high and low sensitivity. When long-wavelength light enters a back-  
thinned CCD, etaloning occurs due to the relationship between the  
silicon substrate thickness and the absorption length. The S11071/  
S10420-01 series back-thinned CCDs have achieved a signicant im-  
provement in etaloning by using a unique structure that is unlikely  
to cause interference.  
Etaloning characteristics (typical example)  
(Ta=25 °C)  
110  
100  
90  
80  
70  
60  
50  
40  
30  
20  
Etaloning-improved type  
Previous type  
10  
0
900 910 920 930 940 950 960 970 980 990 1000  
Wavelength (nm)  
KMPDB0284EB  
1
www.hamamatsu.com  
CCD image sensors  
S11071/S10420-01 series  
Structure  
Parameter  
S11071 series  
S10420-01 series  
Pixel size (H V)  
14 14 μm  
×
×
Vertical clock phase  
Horizontal clock phase  
Output circuit  
Package  
2-phase  
4-phase  
Two-stage MOSFET source follower  
One-stage MOSFET source follower  
24-pin ceramic DIP (refer to dimensional outline)  
Window material*1  
Cooling  
Quartz glass*2  
Non-cooled  
*1: Temporary window type (ex: S11071-1106N, S10420-1106N-01) is available upon request.  
*2: Resin sealing  
Absolute maximum ratings (Ta=25 °C)  
Parameter  
Operating temperature*3  
Storage temperature  
Symbol  
Topr  
Tstg  
Min.  
-50  
-50  
-0.5  
-0.5  
-0.5  
-0.5  
-0.5  
-0.5  
-0.5  
-10  
-10  
-10  
-10  
-10  
-10  
-10  
-10  
Typ.  
Max.  
+50  
+70  
+25  
+30  
+18  
+18  
+18  
+18  
+18  
+15  
+15  
+15  
+15  
+15  
+15  
+15  
+15  
Unit  
°C  
°C  
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
S11071 series  
S10420-01 series  
Output transistor  
drain voltage  
VOD  
V
Reset drain voltage  
Output amplier return voltage  
Overow drain voltage  
Vertical input source voltage  
Horizontal input source voltage  
Overow gate voltage  
Vertical input gate voltage  
Horizontal input gate voltage  
Summing gate voltage  
Output gate voltage  
Reset gate voltage  
Transfer gate voltage  
Vertical shift register clock voltage  
VRD  
Vret  
VOFD  
VISV  
VISH  
V
V
V
V
V
V
V
V
V
V
V
V
V
VOFG  
VIG1V, VIG2V  
VIG1H, VIG2H  
VSG  
VOG  
VRG  
VTG  
VP1V, VP2V  
VP1H, VP2H  
VP3H, VP4H  
Horizontal shift register clock voltage  
-10  
-
+15  
V
*3: Package temperature  
Note: Exceeding the absolute maximum ratings even momentarily may cause a drop in product quality. Always be sure to use the  
product within the absolute maximum ratings.  
Operating conditions (MPP mode, Ta=25 °C)  
S11071 series  
S10420-01 series  
Parameter  
Symbol  
Unit  
Min.  
12  
14  
11  
0
Typ.  
15  
15  
12  
13  
5
Max.  
Min.  
Typ.  
24  
12  
12  
12  
5
Max.  
Output transistor drain voltage  
Reset drain voltage  
Overow drain voltage  
Overow gate voltage  
Output gate voltage  
VOD  
VRD  
VOFD  
VOFG  
VOG  
18  
16  
13  
14  
6
-
2
-
-
23  
11  
11  
0
25  
13  
13  
13  
6
V
V
V
V
V
V
V
V
V
V
4
-
-
-
-9  
-9  
4
4
Substrate voltage  
VSS  
Vret  
0
1
VRD  
-8  
-8  
-
0
-
Output amplier return voltage*4  
Input source  
VISV, VISH  
VIG1V, VIG2V  
VIG1H, VIG2H  
VP1VH, VP2VH  
VP1VL, VP2VL  
VP1HH, VP2HH  
VP3HH, VP4HH  
VP1HL, VP2HL  
VP3HL, VP4HL  
VSGH  
-
VRD  
-8  
-8  
6
-8  
-
-
-
8
-7  
Test point  
Vertical input gate  
Horizontal input gate  
-9  
-9  
4
-
8
-7  
High  
Low  
6
-8  
Vertical shift register clock voltage  
Horizontal shift register clock voltage  
V
-9  
-9  
High  
Low  
4
6
8
4
6
8
V
-6  
-5  
-4  
-6  
-5  
-4  
High  
Low  
High  
Low  
High  
Low  
4
-6  
4
-6  
4
6
-5  
6
-5  
6
8
-4  
8
-4  
8
4
-6  
4
6
-5  
6
8
-4  
8
Summing gate voltage  
Reset gate voltage  
V
V
V
VSGL  
VRGH  
VRGL  
VTGH  
VTGL  
RL  
-6  
4
-5  
6
-4  
8
Transfer gate voltage  
-9  
2.0  
-8  
2.2  
-7  
2.4  
-9  
90  
-8  
100  
-7  
110  
kΩ  
External load resistance  
*4: Output amplier return voltage is a positive voltage with respect to Substrate voltage, but the current ows in the direction of ow  
out of the sensor.  
2
CCD image sensors  
S11071/S10420-01 series  
Electrical characteristics (Ta=25 °C)  
S11071 series  
S10420-01 series  
Parameter  
Symbol  
fc  
Unit  
MHz  
Min.  
Typ.  
5
Max.  
10  
-
-
-
-
-
-
-
-
-
-
-
9
-
-
Min.  
Typ.  
0.25  
200  
600  
400  
1200  
80  
Max.  
0.5  
-
Signal output frequency*5  
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-1004(-01)  
-1006(-01)  
-1104(-01)  
-1106(-01)  
200  
600  
400  
1200  
80  
160  
10  
10  
-
-
-
-
-
-
-
-
Vertical shift register  
capacitance  
pF  
CP1V, CP2V  
-1004(-01)/-1006(-01)  
-1104(-01)/-1106(-01)  
Horizontal shift register  
capacitance  
CP1H, CP2H  
CP3H, CP4H  
pF  
160  
10  
10  
30  
60  
Summing gate capacitance  
Reset gate capacitance  
pF  
pF  
CSG  
CRG  
-1004(-01)/-1006(-01)  
-1104(-01)/-1106(-01)  
30  
60  
Transfer gate capacitance  
pF  
CTG  
-
-
Charge transfer efciency*6  
DC output level*5  
Output impedance*5  
Power consumption*5 *7  
CTE  
Vout  
Zo  
0.99995 0.99999  
0.99995 0.99999  
-
V
kΩ  
mW  
7
-
-
8
0.3  
75  
17  
-
18  
10  
4
19  
-
P
-
-
*5: The values depend on the load resistance. (S11071 series: VOD=15 V, RL=2.2 kΩ, S10420-01 series: VOD=24 V, RL=100 kΩ)  
*6: Charge transfer efciency per pixel, measured at half of the full well capacity  
*7: Power consumption of the on-chip amplier plus load resistance  
Electrical and optical characteristics (Ta=25 °C, unless otherwise noted)  
S11071 series  
Typ.  
S10420-01 series  
Min. Typ. Max.  
Parameter  
Saturation output voltage  
Symbol  
Vsat  
Unit  
V
Min.  
Max.  
-
-
-
9
500  
28  
-
-
50  
150  
7
-
-
Fw Sv  
×
-
50  
250  
5.5  
-
Fw Sv  
×
-
-
-
Vertical  
Horizontal  
60  
200  
8
50  
23  
60  
300  
6.5  
Full well capacity  
Fw  
ke-  
CCD node sensitivity*8  
Dark current*9  
Readout noise*10  
Dynamic range*11  
Sv  
DS  
Nr  
7.5  
500  
15  
-
μV/e-  
e-/pixel/s  
e- rms  
-
50  
-
6
Line binning  
DR  
6520  
8700  
41700  
50000  
200 to  
1100  
±3  
200 to  
1100  
±3  
Spectral response range  
λ
-
-
-
-
-
-
nm  
%
Photoresponse nonuniformity*12  
PRNU  
±10  
±10  
*8: The values depend on the load resistance. (S11071 series: VOD=15 V, RL=2.2 kΩ, S10420-01 series: VOD=24 V, RL=100 kΩ)  
*9: Dark current is reduced to half for every 5 to 7 °C decrease in temperature.  
*10: S11071 series (temperature: 25 °C): fc=2 MHz, S10420-01 series (temperature: -40 °C): fc=20 kHz  
*11: Dynamic range = Full well capacity / Readout noise  
*12: Measured at one-half of the saturation output (full well capacity) using LED light (peak emission wavelength: 660 nm)  
Fixed pattern noise (peak to peak)  
Photoresponse nonuniformity =  
× 100 [%]  
Signal  
3
CCD image sensors  
S11071/S10420-01 series  
Spectral response (without window)*13  
Spectral transmittance characteristic of window material  
(Typ. Ta=25 °C)  
(Typ. Ta=25 °C)  
100  
80  
60  
40  
20  
0
100  
80  
60  
40  
20  
0
200  
400  
600  
800  
1000  
1200  
100 200 300 400 500 600 700 800 900 1000 1100  
Wavelength (nm)  
Wavelength (nm)  
KMPDB0316EA  
KMPDB0303EA  
*13: Spectral response with quartz glass is decreased according to  
the spectral transmittance characteristic of window material.  
Dark current vs. temperature  
(Typ.)  
100  
10  
1
0.1  
0.01  
-50 -40  
-30  
-20 -10  
0
10  
20  
30  
Temperature (°C)  
KMPDB0304EA  
4
CCD image sensors  
S11071/S10420-01 series  
Device structure (conceptual drawing of top view in dimensional outline)  
S11071 series  
Effective pixels  
Thinning  
Effective pixels  
23 22 21 20 19  
18 17 16  
64  
15  
14  
13  
Horizontal  
shift register  
5
4
3
2
1
2
3
4
5
1024  
24  
V=16, 64  
H=1024, 2048  
1
2
3
4
5
6
7
8
9
10  
11 12  
4 blank pixels  
2n signal output  
4 blank pixels  
6-bevel  
Horizontal  
shift register  
6-bevel  
Note: When viewed from the direction of the incident light, the horizontal shift register is  
covered with a thick silicon layer (dead layer). However, long-wavelength light  
passes through the silicon dead layer and may possibly be detected by the horizontal  
shift register. To prevent this, provide light shield on that area as needed.  
KMPDC0343EB  
S10420-01 series  
Effective pixels  
Thinning  
Effective pixels  
23 22 21 20 19  
18 17 16  
64  
15  
14  
13  
Horizontal  
shift register  
5
4
3
2
1
2
3
4
5
1024  
24  
V=16, 64  
H=1024, 2048  
1
2
3
4
5
6
7
8
9
10  
11 12  
4 blank pixels  
2n signal output  
4 blank pixels  
6-bevel  
Horizontal  
shift register  
6-bevel  
Note: When viewed from the direction of the incident light, the horizontal shift register is  
covered with a thick silicon layer (dead layer). However, long-wavelength light  
passes through the silicon dead layer and may possibly be detected by the horizontal  
shift register. To prevent this, provide light shield on that area as needed.  
KMPDC0269EC  
5
CCD image sensors  
S11071/S10420-01 series  
Timing chart (line binning)  
Integration time  
Vertical binning period  
Readout period  
(shutter has to be open)  
(shutter has to be closed)  
(shutter has to be closed)  
3...21 22 16 + 6 (bevel): S11071/S10420-1004, -1104  
Tpwv  
3...69 70 64 + 6 (bevel): S11071/S10420-1006, -1106  
1
2
P1V  
Toovvrr  
P2V, TG  
4...1043 1044: S11071/S10420-1004, -1006  
4...2067 2068: S11071/S10420-1104, -1106  
Tpwh, Tpws Tovrh  
1
2
3
P1H  
P2H  
P3H  
P4H, SG  
RG  
Tpwr  
OS  
D1  
D2  
D3...D10, S1...S1024, D11...D18: S11071/S10420-1004, -1006  
S1...S2048 : S11071/S10420-1104, -1106  
D19  
D20  
KMPDC0270ED  
S11071 series  
S10420-01 series  
Parameter  
Symbol  
Unit  
Min.  
1
Typ.  
8
-
100  
-
50  
50  
100  
-
50  
50  
50  
-
Max.  
-
-
-
-
-
60  
-
-
-
Min.  
6
20  
Typ.  
8
-
Max.  
Pulse width*14  
Rise and fall times*14  
Pulse width*14  
Tpwv  
Tprv, Tpfv  
Tpwh  
Tprh, Tpfh  
Tovrh  
-
-
-
-
-
μs  
ns  
ns  
ns  
ns  
%
ns  
ns  
ns  
%
ns  
ns  
μs  
P1V, P2V, TG  
20  
50  
10  
25  
40  
50  
10  
25  
40  
5
1000  
10  
2000  
-
Rise and fall times*14  
Pulse overlap time  
Duty ratio*14  
P1H, P2H, P3H, P4H  
500  
40  
1000  
10  
1000  
50  
2000  
-
-
60  
-
Pulse width*14  
Tpws  
Tprs, Tpfs  
Tovrh  
Rise and fall times*14  
Pulse overlap time  
Duty ratio*14  
Pulse width  
Rise and fall times  
Overlap time  
-
-
SG  
500  
40  
100  
5
1000  
50  
1000  
-
-
60  
-
-
60  
-
Tpwr  
Tprr, Tpfr  
Tovr  
RG  
5
1
-
-
TG-P1H  
2
-
1
2
*14: Symmetrical clock pulses should be overlapped at 50% of maximum pulse amplitude.  
6
CCD image sensors  
S11071/S10420-01 series  
Dimensional outline (unit: mm)  
3.3 0.35  
A
24  
13  
12  
1
Index mark  
Index mark  
27.94 0.3  
38.10 0.4  
Photosensitive surface  
Photosensitive area  
Type no.  
A
B
-1004(-01) 14.336 (H) 0.224 (V)  
-1006(-01) 14.336 (H) 0.896 (V)  
-1104(-01) 28.672 (H) 0.224 (V)  
-1106(-01) 28.672 (H) 0.896 (V)  
0.46 0.05  
1.27 0.2  
2.54 0.13  
S11071/  
S10420  
KMPDA0223EE  
7
CCD image sensors  
S11071/S10420-01 series  
Pin connections  
S11071 series  
Function  
Pin no.  
1
Symbol  
OS  
Remark (standard operation)  
RL=2.2 kΩ  
Output transistor source  
2
3
OD  
OG  
Output transistor drain  
Output gate  
+15 V  
+5 V  
4
5
6
SG  
Vret  
RD  
Summing gate  
Output amplier return  
Reset drain  
Same pulse as P4H  
+1 V  
+15 V  
7
8
9
P4H  
P3H  
P2H  
P1H  
IG2H  
IG1H  
OFG  
OFD  
ISH  
ISV  
CCD horizontal register clock-4  
CCD horizontal register clock-3  
CCD horizontal register clock-2  
CCD horizontal register clock-1  
Test point (horizontal input gate-2)  
Test point (horizontal input gate-1)  
Over ow gate  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
-8 V  
-8 V  
+13 V  
+12 V  
Connect to RD  
Connect to RD  
GND  
+15 V  
-8 V  
Over ow drain  
Test point (horizontal input source)  
Test point (vertical input source)  
Substrate  
SS  
RD  
Reset drain  
IG2V  
IG1V  
P2V  
P1V  
TG  
Test point (vertical input gate-2)  
Test point (vertical input gate-1)  
CCD vertical register clock-2  
CCD vertical register clock-1  
Transfer gate  
-8 V  
Same pulse as P2V  
RG  
Reset gate  
S10420-01 series  
Pin no.  
1
Symbol  
OS  
OD  
Function  
Output transistor source  
Output transistor drain  
Output gate  
Remark (standard operation)  
RL=100 kΩ  
+24 V  
2
3
OG  
+5 V  
4
5
SG  
SS  
Summing gate  
Substrate  
Same pulse as P4H  
GND  
6
RD  
Reset drain  
+12 V  
7
8
9
P4H  
P3H  
P2H  
P1H  
IG2H  
IG1H  
OFG  
OFD  
ISH  
ISV  
CCD horizontal register clock-4  
CCD horizontal register clock-3  
CCD horizontal register clock-2  
CCD horizontal register clock-1  
Test point (horizontal input gate-2)  
Test point (horizontal input gate-1)  
Over ow gate  
10  
11  
12  
13  
14  
15  
16  
17  
18  
19  
20  
21  
22  
23  
24  
-8 V  
-8 V  
+12 V  
+12 V  
Connect to RD  
Connect to RD  
GND  
+12 V  
-8 V  
Over ow drain  
Test point (horizontal input source)  
Test point (vertical input source)  
Substrate  
SS  
RD  
Reset drain  
IG2V  
IG1V  
P2V  
P1V  
TG  
Test point (vertical input gate-2)  
Test point (vertical input gate-1)  
CCD vertical register clock-2  
CCD vertical register clock-1  
Transfer gate  
-8 V  
Same pulse as P2V  
RG  
Reset gate  
8
CCD image sensors  
S11071/S10420-01 series  
Precautions (electrostatic countermeasures)  
Handle these sensors with bare hands or wearing cotton gloves. In addition, wear anti-static clothing or use a wrist band with an  
earth ring, in order to prevent electrostatic damage due to electrical charges from friction.  
Avoid directly placing these sensors on a work-desk or work-bench that may carry an electrostatic charge.  
Provide ground lines or ground connection with the work-oor, work-desk and work-bench to allow static electricity to discharge.  
Ground the tools used to handle these sensors, such as tweezers and soldering irons.  
It is not always necessary to provide all the electrostatic measures stated above. Implement these measures according to the  
amount of damage that occurs.  
Related information  
www.hamamatsu.com/sp/ssd/doc_en.html  
Precautions  
Notice  
Image sensors/Precautions  
Technical information  
FFT-CCD area image sensor/Technical information  
Driver circuits for CCD image sensor (S10420-01/S11071 series) C11287/C11288 [sold separately]  
The C11287, C11288 are driver circuits designed for HAMAMATSU CCD image sensors S10420-01/S11071 series. The C11287, C11288  
can be used in spectrometers, etc. when combined with the CCD image sensor.  
Features  
Built-in 14-bit A/D converter  
Interface to computer: USB 2.0  
Power supply: USB bus power operation (C11287)  
DC+5 V operation (C11288)  
C11287  
C11288  
9
CCD image sensors  
S11071/S10420-01 series  
Information described in this material is current as of February, 2014.  
Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the  
information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always  
contact us for the delivery specification sheet to check the latest specifications.  
Type numbers of products listed in the delivery specification sheets or supplied as samples may have a suffix "(X)" which means preliminary specifications or  
a suffix "(Z)" which means developmental specifications.  
The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that  
one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product  
use.  
Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission.  
www.hamamatsu.com  
HAMAMATSU PHOTONICS K.K., Solid State Division  
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81) 53-434-3311, Fax: (81) 53-434-5184  
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P.O.Box 6910, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1) 908-231-0960, Fax: (1) 908-231-1218  
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49) 8152-375-0, Fax: (49) 8152-265-8  
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: 33-(1) 69 53 71 00, Fax: 33-(1) 69 53 71 10  
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44) 1707-294888, Fax: (44) 1707-325777  
North Europe: Hamamatsu Photonics Norden AB: Thorshamnsgatan 35 16440 Kista, Sweden, Telephone: (46) 8-509-031-00, Fax: (46) 8-509-031-01  
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Moia, 1 int. 6, 20020 Arese, (Milano), Italy, Telephone: (39) 02-935-81-733, Fax: (39) 02-935-81-741  
China: Hamamatsu Photonics (China) Co., Ltd.: 1201 Tower B, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86) 10-6586-6006, Fax: (86) 10-6586-2866  
10  
Cat. No. KMPD1120E08 Feb. 2014 DN  

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