16445A [HP]
Agilent B1500A Semiconductor Device Analyzer;
| 型号： | 16445A |
| 厂家： | 
HEWLETT-PACKARD |
| 描述： | Agilent B1500A Semiconductor Device Analyzer |
| 文件： | 总23页 (文件大小：300K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
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Agilent B1500A
Semiconductor Device Analyzer
Technical Overview
Introduction
The Agilent B1500A Semiconductor
Device Analyzer with EasyEXPERT
software is a complete parametric
test solution. It supports all aspects
of parametric test, from basic manual
measurement to test automation across a
wafer in conjunction with a semiautomatic
wafer prober. Because the B1500A utilizes
the Microsoft® Windows® XP Professional
operating system, it integrates easily into
your PC-based work environment. Best of
all, the familiar Windows graphical user
interface (GUI) and convenient online help
menus minimize the need for instrument
training.
• Multi-frequency capacitance measure-
ment unit (MFCMU) available
• High-voltage semiconductor pulse
generator unit (HV-SPGU) available
• Waveform generator/fast measurement
unit (WGFMU) available
• High-resolution, analog-to-digital
converter (ADC) available to all installed
SMUs
• High-speed ADC present on each
installed SMU
• SMU/AUX path switching supported on
the atto-sense and switch unit (ASU)
• SMU/MFCMU switching supported
using SMU CMU unify unit (SCUU) and
guard switch unit (GSWU)
• MFCMU automatically identifies
capacitance measurement accessories
• WGFMU/SMU path switching supported
on the remote-sense and switch unit
(RSU)
• GPIB port for instrument control
• Self-test, self-calibration, diagnostics
The measurement and output accuracy
are specified at the rear panel connector
terminals when referenced to the Zero
Check terminal. The B1530A WGFMU
measurement and output accuracy are
specified at the output terminal of the RSU.
Accuracy is specified under the following
conditions:
Basic Features
• PC-based instrument with touch screen
interface; optional USB keyboard and
mouse available
• EasyEXPERT software with over 200
categorized application tests supplied
with the instrument
• Performs current versus voltage (IV)
measurements
• Performs capacitance versus voltage
(CV), capacitance versus time (Ct)
and capacitance versus frequency (Cf)
measurements
• Performs quasi-static CV (QSCV)
measurements
• High voltage pulse forcing up to 40 V
with ALWG and voltage monitor
capabilities.
• Performs fast IV measurement synchro-
nized with the applied waveforms for
accurate transient IV or time-domain
measurements
• Front-panel Classic Test measurement
modes supported: single-channel sweep,
multi-channel sweep, time sampling,
list sweep, CV sweep and direct control
(GPIB FLEX)
• GUI-based control of the Agilent
B2200A, and B2201A switching matrices
• Modular mainframe with ten module
slots and one 4.2 A ground unit
• Multiple source/monitor unit (SMU)
types available: medium power
(MPSMU), high-power (HPSMU), and
high-resolution (HRSMU)
1. Temperature: 23 °C 5 °C
2. Humidity: 20 % to 60 %
3. After 40 minute warm-up followed by
self-calibration
4. Ambient temperature change less than
1 °C after self-calibration eꢀecution,
not applicable for MFCMU and WGFMU
5. Measurement made within one hour
after self-calibration eꢀecution, not
applicable for MFCMU and WGFMU
6. Calibration period: 1 year
7. SMU integration time setting:
1 PLC (1 nA to 1A range, voltage range)
20 PLC (100 pA range)
50 PLC (1 pA to 10 pA range)
Averaging of high-speed ADC:
128 samples per 1 PLC
8. SMU filter: ON (for SMUs)
9. SMU measurement terminal connection:
Kelvin connection
Specification conditions
This document lists specifications and
supplemental information for the B1500A
and its associated modules. The specifica-
tions are the standards against which the
B1500A and its associated modules are
tested. When the B1500A and any of its
associated modules are shipped from the
factory, they meet the specifications. The
“supplemental” information and “typical”
entries in the following specifications are
not warranted, but provide useful informa-
tion about the functions and performance
of the instrument.
10. WGFMU load capacitance: 25 pF or less
Note: Agilent Technologies is responsible
for removing, installing, and replacing the
B1500A modules. Contact your nearest
Agilent Technologies to install and
calibrate the B1500A modules
B1500A specification
Supported plug-in modules
The B1500A supports ten slots for plug-in modules.
Part
Description
Slots
Range of operation
Measure
number
occupied
resolution
2 µV, 10 fA
B1510A High power source/monitor unit (HPSMU)
2
1
1
—
1
1
-200 V to 200 V, -1 A to 1 A
B1511A Medium power source/monitor unit (MPSMU)
B1517A High resolution source/monitor unit (HRSMU)
E5288A¹ Atto-sense and switch unit (ASU)
B1520A Multi frequency capacitance measurement unit (MFCMU)
B1525A High voltage semiconductor pulse generator unit (HV-SPGU)
B1530A Waveform generator/fast measurement unit (WGFMU)
-100 V to 100 V, -100 mA to 100 mA 0.5 µV, 10 fA
-100 V to 100 V, -100 mA to 100 mA 0.5 µV, 1 fA
-100 V to 100 V, -100 mA to 100 mA 0.5 µV, 100 aA
1 kHz to 5 MHz
40 V (80 Vp-p)
PG Mode: -3 V to 3 V, -5 V to 5 V
Fast IV Mode: -3 V to 3 V, -5 V to
5 V, 0 V to 10 V, -10 V to 0 V
0.035 fFrms²
50 μV
1
0.014 % of the
range 3
1. This is connected with the B1517A high resolution SMU.
2. Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency
1 MHz, signal level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.
3. Display resolution
2
Maximum module configuration
The B1500A can contain up to 4 dual-slot
SMUs (HPSMUs) and 2 single-slot SMUs
(MPSMUs and/or HRSMUs); it can contain
up to 10 single-slot SMUs (MPSMUs
and/or HRSMUs); and it can contain any
combination of dual-slot and single-slot
SMUs between these two eꢀtremes.
Only one single-slot MFCMU can be
installed per B1500A mainframe. Up to five
single-slot HV-SPGUs can be installed per
mainframe. Up to five single-slot WGFMUs
can be installed per mainframe.
GNDU supplemental information
MPSMU
HRSMU
HPSMU
MFCMU
HV-SPGU
WGFMU
2
2
14
7
12
10
Load capacitance: 1 µF
Cable resistance:
For IS ≤ 1.6 A: force line R < 1 Ω
For 1.6 A < IS ≤ 2.0 A: force line R < 0.7 Ω
For 2.0 A < IS ≤ 4.2 A: force line R < 0.35 Ω
For all cases: sense line R ≤ 10 Ω
Where IS is the current being sunk by
the GNDU.
Maximum voltage between common
and ground
≤
42 V
Ground unit (GNDU) specification
The GNDU is furnished standard with the
B1500A mainframe.
When one or more WGFMU modules are
installed in the B1500A mainframe, the
following table applies. Multiply the values
given below by the number of installed
modules of that type and add the products
together. The sum of the products must be
less than or equal to 59 for the configura-
tion to be permissible.
Output voltage: 0 V 100 µV
Maꢀimum sink current: 4.2 A
Output terminal/connection:
Triaꢀial connector, Kelvin (remote sensing)
MPSMU and HRSMU module specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage range
0.5 V
Force resolution
25 µV
Measure resolution
Force accuracy¹
(0.018 % ꢁ 150 µV)
(0.018 % ꢁ 400 µV)
(0.018 % ꢁ 750 µV)
(0.018 % ꢁ 3 mV)
(0.018 % ꢁ 6 mV)
(0.018 % ꢁ 15 mV)
Measure accuracy¹
(0.01 % ꢁ 120 µV)
(0.01 % ꢁ 140 µV)
(0.009 % ꢁ 250 µV)
(0.009 % ꢁ 900 µV)
(0.01 % ꢁ 1 mV)
Maximum current
0.5 µV
2 µV
100 mA
100 mA
100 mA
100 mA
²
2 V
5 V
100 µV
250 µV
1 mV
5 µV
20 V
40 V
100 V
20 µV
40 µV
100 µV
2 mV
5 mV
(0.012 % ꢁ 2.5 mV)
²
1. (% of read value ꢁ offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high resolution ADC)
SMU type
Current
range
1 pA
Force
Measure
Force accuracy³
Measure accuracy³
Maximum
voltage
100 V
,
resolution resolution¹²
HRSMU w/ ASU
HRSMU
1 fA
5 fA
100 aA
(0.9 %ꢁ15 fA)
(0.9 %ꢁ12 fA)
(0.46 %ꢁ15 fAꢁ10 aA ꢀ Vo)
10 pA
400 aA (with ASU) (0.46 %ꢁ30 fAꢁ10 aA ꢀ Vo)
1 fA (HRSMU)
100 V
100 pA
5 fA
500 aA (with ASU) (0.3 %ꢁ100 fAꢁ100 aA ꢀ Vo)
2 fA (HRSMU)
(0.3 %ꢁ30 fAꢁ100 aA ꢀ Vo)
100 V
MPSMU
1 nA
10 nA
100 nA
1 µA
10 µA
100 µA
1 mA
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ3 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ30 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ300 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ3 nAꢁ10 pA ꢀ Vo)
(0.035 %ꢁ15 nAꢁ100 pA ꢀ Vo) (0.03 %ꢁ3 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ150 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ1.5 µAꢁ10 nA ꢀ Vo)
(0.1 %ꢁ200 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ1 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ20 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ100 pAꢁ1 pA ꢀ Vo)
(0.04 %ꢁ2 nAꢁ10 pA ꢀ Vo)
100 V
100 V
100 V
100 V
100 V
100 V
100 V
(0.03 %ꢁ60 nAꢁ1 nA ꢀ Vo)
(0.03 %ꢁ200 nAꢁ10 nA ꢀ Vo)
10 mA
100 mA
100 V
4
(0.045 %ꢁ15 µAꢁ100 nA ꢀ Vo) (0.04 %ꢁ6 µAꢁ100 nA ꢀ Vo)
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of
these factors.
3. (% of read value ꢁ offset current (fiꢀed part determined by the output/measurement range ꢁ proportional part that is multiplied by Vo))
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
3
Voltage range, resolution, and accuracy (high speed ADC)
Voltage range
0.5 V
Force resolution
25 µV
Measure resolution
Force accuracy¹
(0.018 % ꢁ 150 µV)
(0.018 % ꢁ 400 µV)
(0.018 % ꢁ 750 µV)
(0.018 % ꢁ 3 mV)
(0.018 % ꢁ 6 mV)
(0.018 % ꢁ 15 mV)
Measure accuracy¹
(0.01 % ꢁ 250 µV)
(0.01 % ꢁ 700 µV)
(0.01 % ꢁ 2 mV)
(0.01 % ꢁ 4 mV)
(0.015 % ꢁ 8 mV)
(0.02 % ꢁ 20 mV)
Maximum current
0.5 µV
2 µV
100 mA
100 mA
100 mA
100 mA
²
2 V
5 V
100 µV
250 µV
1 mV
5 µV
20 V
40 V
100 V
20 µV
40 µV
100 µV
2 mV
5 mV
²
1. (% of read value ꢁ offset voltage V)
2. 100 mA (Vo ≤ 20 V), 50 mA (20 V < Vo ≤ 40 V), 20 mA (40 V < Vo ≤ 100 V), Vo is the output voltage in Volts.
Current range, resolution, and accuracy (high speed ADC)
SMU type
Current
Force
Measure
Force accuracy³
Measure accuracy³
Maximum
voltage
,
range
resolution resolution¹²
HRSMU w/ ASU
HRSMU
1 pA
10 pA
1 fA
5 fA
100 aA
(0.9 %ꢁ15 fA)
(1.8 %ꢁ12 fA)
(0.5 %ꢁ15 fAꢁ10 aA ꢀ Vo)
100 V
100 V
400 aA (with ASU) (0.46 %ꢁ30 fAꢁ10 aA ꢀ Vo)
1 fA (HRSMU)
100 pA
5 fA
500 aA (with ASU) (0.3 %ꢁ100 fAꢁ100 aA ꢀ Vo)
2 fA (HRSMU)
(0.5 %ꢁ40 fAꢁ100 aA ꢀ Vo)
100 V
MPSMU
1 nA
10 nA
100 nA
1 µA
10 µA
100 µA
1 mA
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ3 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ30 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ300 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ3 nAꢁ10 pA ꢀ Vo)
(0.035 %ꢁ15 nAꢁ100 pA ꢀ Vo) (0.05 %ꢁ20 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ150 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ1.5 µAꢁ10 nA ꢀ Vo)
(0.25 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.25 %ꢁ2 pAꢁ10 fA ꢀ Vo)
(0.1 %ꢁ20 pAꢁ100 fA ꢀ Vo)
(0.1 %ꢁ200 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ2 nAꢁ10 pA ꢀ Vo)
100 V
100 V
100 V
100 V
100 V
100 V
100 V
(0.04 %ꢁ200 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ2 µAꢁ10 nA ꢀ Vo)
10 mA
100 mA
100 V
4
(0.045 %ꢁ15 µAꢁ100 nA ꢀ Vo) (0.1 %ꢁ20 µAꢁ100 nA ꢀ Vo)
1. Specified measurement resolution is limited by fundamental noise limits. Minimum displayed resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can be greatly impacted by vibrations and shocks. These specifications assume an environment free of
these factors.
3. (% of read value ꢁ offset current (fiꢀed part determined by the output/measurement range ꢁ proportional part that is multiplied by Vo))
4. 100 V (Io ≤ 20 mA), 40 V (20 mA < Io ≤ 50 mA), 20 V (50 mA < Io ≤ 100 mA), Io is the output current in Amps.
MPSMU and HRSMU measurement and output range
Power consumption
Voltage source mode
Current (mA)
100
Voltage range
Power
0.5 V
2 V
5 V
20 ꢀ Ic (W)
20 ꢀ Ic (W)
20 ꢀ Ic (W)
20 ꢀ Ic (W)
40 ꢀ Ic (W)
50
20
20 V
40 V
100 V
100 ꢀ Ic (W)
Where Ic is the current compliance setting.
-100
-40 -20
20 40
100
-20
-50
Voltage (V)
Current source mode
Voltage compliance Power
Vc ≤ 20
20 < Vc ≤ 40
40 < Vc ≤ 100
Where Vc is the voltage compliance setting
and Io is output current.
20 ꢀ Io (W)
40 ꢀ Io (W)
100 ꢀ Io (W)
-100
4
HPSMU module specifications
Voltage range, resolution, and accuracy (high resolution ADC)
Voltage
range
2 V
Force
Measure
Force accuracy¹
Measure accuracy¹
Maximum current
resolution resolution
100 µV
1 mV
2 µV
20 µV
(0.018 % ꢁ 400 µV)
(0.018 % ꢁ 3 mV)
(0.018 % ꢁ 6 mV)
(0.018 % ꢁ 15 mV)
(0.018 % ꢁ 30 mV)
(0.01 % ꢁ 140 µV)
(0.01 % ꢁ 140 µV)
(0.01 % ꢁ 1 mV)
(0.012 % ꢁ 2.5 mV)
(0.014 % ꢁ 2.8 mV)
1 A
1 A
500 mA
125 mA
50 mA
20 V
40 V
2 mV
40 µV
100 V
200 V
5 mV
10 mV
100 µV
200 µV
1. (% of read value ꢁ offset voltage V)
Current range, resolution, and accuracy (high resolution ADC)
Current
range
1 nA
Force
Measure
Force accuracy²
Measure accuracy²
Maximum voltage
resolution resolution¹
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ3 pAꢁ10 fA ꢀ Vo)
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ2.5 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ25 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ100 pAꢁ1 pA ꢀ Vo)
(0.04 %ꢁ2 nAꢁ10 pA ꢀ Vo)
(0.03 %ꢁ3 nAꢁ100 pA ꢀ Vo)
(0.03 %ꢁ60 nAꢁ1 nA ꢀ Vo)
(0.03 %ꢁ200 nAꢁ10 nA ꢀ Vo)
(0.04 %ꢁ6 µAꢁ100 nA ꢀ Vo)
(0.4 %ꢁ150 µAꢁ1 µA ꢀ Vo)
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
³
10 nA
100 nA
1 µA
(0.05 %ꢁ30 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ300 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ3 nAꢁ10 pA ꢀ Vo)
(0.035 %ꢁ15 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ150 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ1.5 nAꢁ10 nA ꢀ Vo)
(0.045 %ꢁ15 µAꢁ100 nA ꢀ Vo)
(0.4 %ꢁ300 µAꢁ1 µA ꢀ Vo)
10 µA
100 µA
1 mA
10 mA
100 mA
1 A
50 µA
³
1. Specified measurement resolution is limited by fundamental noise limits.
2. (% of read value ꢁ offset current (fiꢀed part determined by the output/measurement range ꢁ proportional part that is multiplied by Vo))
3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.
Voltage range, resolution, and accuracy (high speed ADC)
Voltage
range
2 V
Force
Measure
Force accuracy¹
Measure accuracy¹
Maximum current
resolution resolution
100 µV
1 mV
2 µV
20 µV
(0.018 % ꢁ 400 µV)
(0.018 % ꢁ 3 mV)
(0.018 % ꢁ 6 mV)
(0.018 % ꢁ 15 mV)
(0.018 % ꢁ 30 mV)
(0.01 % ꢁ 700 µV)
(0.01 % ꢁ 4 mV)
(0.015 % ꢁ 8 mV)
(0.02 % ꢁ 20 mV)
(0.035 % ꢁ 40 mV)
1 A
1 A
500 mA
125 mA
50 mA
20 V
40 V
2 mV
40 µV
100 V
200 V
5 mV
10 mV
100 µV
200 µV
1. (% of read value ꢁ offset voltage V)
5
Current range, resolution, and accuracy (high speed ADC)
Current
range
1 nA
Force
Measure
Force accuracy²
Measure accuracy²
Maximum voltage
resolution resolution¹
50 fA
500 fA
5 pA
50 pA
500 pA
5 nA
50 nA
500 nA
5 µA
10 fA
10 fA
100 fA
1 pA
10 pA
100 pA
1 nA
10 nA
100 nA
1 µA
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ3 pAꢁ10 fA ꢀ Vo)
(0.25 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.25 %ꢁ2 pAꢁ10 fA ꢀ Vo)
(0.1 %ꢁ20 pAꢁ100 fA ꢀ Vo)
(0.1 %ꢁ200 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ2 nAꢁ10 pA ꢀ Vo)
(0.05 %ꢁ20 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ200 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ2 µAꢁ10 nA ꢀ Vo)
(0.1 %ꢁ20 µAꢁ100 nA ꢀ Vo)
(0.5 %ꢁ300 µAꢁ1 µA ꢀ Vo)
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
³
10 nA
100 nA
1 µA
(0.05 %ꢁ30 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ300 pAꢁ1 pA ꢀ Vo)
(0.05 %ꢁ3 nAꢁ10 pA ꢀ Vo)
(0.035 %ꢁ15 nAꢁ100 pA ꢀ Vo)
(0.04 %ꢁ150 nAꢁ1 nA ꢀ Vo)
(0.04 %ꢁ1.5 µAꢁ10 nA ꢀ Vo)
(0.045 %ꢁ15 µAꢁ100 nA ꢀ Vo)
(0.4 %ꢁ300 µAꢁ1 µA ꢀ Vo)
10 µA
100 µA
1 mA
10 mA
100 mA
1 A
50 µA
³
1. Specified measurement resolution is limited by fundamental noise limits.
2. (% of read value ꢁ offset current (fiꢀed part determined by the output/measurement range ꢁ proportional part that is multiplied by Vo))
3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.
HPSMU measurement and output range
Power consumption
Voltage source mode
Current (mA)
Voltage range
Power
1000
2 V
20 V
40 V
20 ꢀ Ic (W)
20 ꢀ Ic (W)
40 ꢀ Ic (W)
500
100 V
200 V
100 ꢀ Ic (W)
200 ꢀ Ic (W)
Where Ic is the current compliance setting.
125
50
Current source mode
Voltage compliance Power
-200
-100 -40 -20
20
40
100
200
Voltage (V)
Vc ≤ 20
20 ꢀ Io (W)
40 ꢀ Io (W)
100 ꢀ Io (W)
200 ꢀ Io (W)
-50
20 < Vc ≤ 40
40 < Vc ≤ 100
100 < Vc ≤ 200
-125
Where Vc is the voltage compliance
setting and Io is output current.
-500
-1000
6
Output terminal/connection
Dual triaꢀial connector, Kelvin (remote
sensing)
Supplemental information
Maꢀimum allowable cable resistance
(Kelvin connection):
Sense: 10 Ω
Force: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA)
Voltage range, resolution, and
accuracy (high speed ADC)
Voltage Measure Measure
,
range
0.5 V³
resolution accuracy¹ ²
Voltage/current compliance
(limiting)
25 µV
100 µV
250 µV
1 mV
2 mV
5 mV
(0.01 % ꢁ 250 µV)
(0.01 % ꢁ 700 µV)
(0.01 % ꢁ 2 mV)
(0.01 % ꢁ 4 mV)
(0.015 % ꢁ 8 mV)
(0.02 % ꢁ 20 mV)
(0.035 % ꢁ 40 mV)
2 V
5 V³
20 V
The SMU can limit output voltage or
current to prevent damaging the device
under test.
Voltage source output resistance:
(Force line, Non-Kelvin connection)
0.2 Ω (HPSMU)
0.3 Ω (MPSMU, HRSMU)
40 V
Voltage:
100 V
Voltage measurement input resistance:
0 V to 100 V (MPSMU, HRSMU)
0 V to 200 V (HPSMU)
200 V4
10 mV
≥ 1013
Ω
1. (% of read value ꢁ offset voltage V)
Current source output resistance:
Current:
2. Averaging is 128 samples in 1 PLC.
3. Only for MPSMU and HRSMU.
4. Only for HPSMU.
≥ 1013 Ω (1 nA range)
10 fA to 100 mA (HRSMU with ASU)
100 fA to 100 mA (HRSMU)
1 pA to 100 mA (MPSMU)
1 pA to 1 A (HPSMU)
Current compliance setting accuracy
(for opposite polarity):
For 1 pA to 10 nA ranges:
I setting accuracy 12 % of range
Current range, resolution, and
accuracy (high speed ADC)
Compliance accuracy:
Same as the current or voltage set
accuracy.
For 100 nA to 1 A ranges:
I setting accuracy 2.5 % of range
Current Measure
range
1 pA4 100 aA
Measure accuracy3
,
resolution¹ ²
Maꢀimum capacitive load:
(1.8 %ꢁ12 fA)
1 pA to 10 nA ranges: 1000 pF
100 nA to 10 mA ranges: 10 nF
100 mA and 1 A ranges: 100 µF
About measurement accuracy
RF electromagnetic field and SMU
measurement accuracy:
10 pA5
1 fA
5 fA
50 fA
(0.5 %ꢁ15 fAꢁ10 aA ꢀ Vo)
(0.3 %ꢁ30 fAꢁ100 aA ꢀ Vo)
(0.1 %ꢁ300 fAꢁ1 fA ꢀ Vo)
(0.1 %ꢁ2 pAꢁ10 fA ꢀ Vo)
(0.05 %ꢁ20 pAꢁ100 fA ꢀ Vo)
(0.05 %ꢁ200 pAꢁ1 pA ꢀ Vo)
(0.04 %ꢁ2 nAꢁ10 pA ꢀ Vo)
(0.03 %ꢁ20 nAꢁ100 pA ꢀ Vo)
(0.03 %ꢁ200 nAꢁ1 nA ꢀ Vo)
(0.03 %ꢁ2 µAꢁ10 nA ꢀ Vo)
(0.04 %ꢁ20 µAꢁ100 nA ꢀ Vo)
(0.4 %ꢁ300 µAꢁ1 µA ꢀ Vo)
100 pA5
1 nA
Maꢀimum guard capacitance:
900 pF (HPSMU, MPSMU, HRSMU)
660 pF (HRSMU with ASU)
Maꢀimum shield capacitance:
5000 pF (HPSMU, MPSMU, HRSMU)
3500 pF (HRSMU with ASU)
SMU voltage and current measure-
ment accuracy can be affected by RF
electromagnetic field strengths greater
than 3 V/m in the frequency range of
80 MHz to 1 GHz. The eꢀtent of this
effect depends upon how the instrument
is positioned and shielded.
10 nA 500 fA
100 nA
1 µA
5 pA
50 pA
10 µA 500 pA
100 µA
1 mA
5 nA
50 nA
Maꢀimum guard offset voltage:
1 mV (HPSMU)
10 mA 500 nA
Induced RF field noise and SMU
measurement accuracy:
3 mV (MPSMU, HRSMU)
100 mA
5 µA
50 µA
1 A6
4.2 mV (HRSMU with ASU, Iout≤100 µA)
1. Specified measurement resolution is limited by
fundamental noise limits. Minimum displayed
resolution is 1 aA at 1 pA range by 6 digits.
2. Measurements made in the lower ranges can
be greatly impacted by vibrations and shocks.
These specifications assume an environment
free of these factors.
3. (% of read value ꢁ offset current
(fiꢀed part determined by the output/
measurement range ꢁ proportional part
that is multiplied by Vo)
SMU voltage and current measurement
accuracy can be affected by induced RF
field noise strengths greater than 3 Vrms
in the frequency range of 150 kHz to
80 MHz. The eꢀtent of this effect
depends upon how the instrument is
positioned and shielded.
Noise characteristics (filter ON):
Voltage source: 0.01 % of V range (rms.)
Current source: 0.1 % of I range (rms.)
Overshoot (typical, filter ON):
Voltage source: 0.03 % of V range
Current source: 1 % of I range
Range switching transient noise (filter ON):
Voltage ranging: 250 mV
Current ranging: 70 mV
Pulse measurement
Pulse width: 500 µsec to 2 s
Slew rate: 0.2 V/µs (maꢀimum)
Pulse period: 5 ms to 5 s
4. 1 pA range is for HRSMU with ASU.
5. 10 pA range and 100 pA range is for HRSMU
Period ≥ width ꢁ 2 ms
(when width ≤ 100 ms)
Period ≥ width ꢁ 10 ms
(when width > 100 ms)
with or without ASU.
6. Only for HPSMU.
Pulse resolution: 100 µs
SMU pulse setting accuracy
(fiꢀed measurement range,
supplemental information):
Width: 0.5 % ꢁ 50 µs
Period: 0.5 % ꢁ 100 µs
7
MFCMU (multi frequency capacitance measurement unit) module specifications
E (%)
Measurement functions
Maximum DC bias current
(supplemental information)
Measurement parameters:
θ accuracy
Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D,
Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs,
Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ
Ranging:
Auto and fiꢀed
Measurement terminal:
Four-terminal pair configuration, four
BNC (female) connectors
Cable length:
1.5 m or 3 m, automatic identification of
accessories
E/100 (rad)
Impedance range
Maximum DC
bias current
10 mA
10 mA
10 mA
1 mA
C accuracy
at D ≤ 0.1
E (%X )
at DX > 0.1
E ꢀ ꢂ√√√√√√√
50 Ω
100 Ω
300 Ω
1 kΩ
2
(1 ꢁ DX ) (%)
3 kΩ
1 mA
10 kΩ
30 kΩ
100 kΩ
300 kΩ
100 µA
100 µA
10 µA
D accuracy
at DX ≤ 0.1
E/100
at DX > 0.1
E ꢀ (1 ꢁ DX)/100
G accuracy
at D ≤ 0.1
E/XDX (%)
at DX > 0.1
E ꢀ ꢂ√√√√√√√
10 µA
Output impedance: 50 Ω, typical
DC bias monitor:
Range: 0 to 25 V
Test signal
Frequency:
Range: 1 kHz to 5 MHz
Resolution: 1 mHz (minimum)
Accuracy: 0.008 %
Accuracy (open load):
(0.2 % of reading ꢁ 10.0 mV) at the
measurement port of the MFCMU or the
MFCMU cable (1.5 m or 3.0 m)
2
(1 ꢁ DX ) /DX (%)
Output signal level:
Range: 10 mVrms to 250 mVrms
Note: measurement accuracy is specified
under the following conditions:
Temperature: 23 °C 5 °C
Resolution: 1 mVrms
Accuracy:
Sweep characteristics
Available sweep parameters:
Oscillator level, DC bias voltage,
frequency
Integration time: 1 PLC or 16 PLC
(10.0 % ꢁ 1 mVrms
)
at the measurement port of the MFCMU
Sweep type: linear, log
(15.0 % ꢁ 1 mVrms
)
Sweep mode: single, double
Sweep direction: up, down
Number of measurement points:
Maꢀimum 1001 points
at the measurement port of the MFCMU
cable (1.5 m or 3.0 m)
Output impedance: 50 Ω, typical
Signal level monitor:
Measurement accuracy
Range: 10 mVrms to 250 mVrms
The following parameters are used to
eꢀpress the impedance measurement
accuracy at the measurement port of
the MFCMU or the MFCMU cable
(1.5 m or 3.0 m).
Accuracy (open load):
(10.0 % of reading ꢁ 1 mV
)
at the measurement port ofrmths e MFCMU
(15.0 % of reading ꢁ 1 mV
)
at the measurement port ofrmths e MFCMU
cable (1.5 m or 3 m)
ZX: Impedance measurement value (Ω)
DX: Measurement value of D
E = EP’ ꢁ (ZS’/|ZX| ꢁ YO’|ZX|) ꢀ 100 (%)
EP’ = EPL ꢁ EPOSC ꢁ EP (%)
YO’ = YOL ꢁ YOSC ꢁ YO (S)
ZS’ = ZSL ꢁ ZOSC ꢁ ZS (Ω)
DC bias function
DC bias:
Range: 0 to 25 V
Resolution: 1 mV
Accuracy: (0.5 % ꢁ 5.0 mV) at the
measurement port of the MFCMU or the
MFCMU cable (1.5 m or 3.0 m)
|Z| accuracy
8
Parameters EPOSC ZOSC
Oscillator level
EPOSC (%)
ZOSC (mΩ)
125 mV < VOSC ≤ 250 mV
64 mV < VOSC ≤ 125 mV
32 mV < VOSC ≤ 64 mV
0.03 ꢀ (250/ VOSC - 1)
0.03 ꢀ (125/ VOSC - 1)
0.03 ꢀ (64/ VOSC - 1)
0.03 ꢀ (32/ VOSC - 1)
5 ꢀ (250/ VOSC - 1)
5 ꢀ (125/ VOSC - 1)
5 ꢀ (64/ VOSC - 1)
5 ꢀ (64/ VOSC - 1)
V
OSC ≤ 32 mV
VOSC is oscillator level in mV.
Parameters EPL YOL ZSL
Cable length
1.5 m
EPL (%)
0.02 ꢁ 3 ꢀ f/100
YOL (nS)
750 ꢀ f/100
ZSL (mΩ)
5.0
3 m
0.02 ꢁ 5 ꢀ f/100
1500 ꢀ f/100
5.0
f is frequency in MHz. If measurement cable is eꢀtended, open compensation,
short compensation, and load compensation must be performed.
Parameters YOSC YO EP ZS
Frequency
YOSC (nS)
YO (nS)
1.5
3.0
3.0
30.0
EP (%)
0.095
0.095
0.28
ZS (mΩ)
5.0
5.0
5.0
5.0
1 kHz ≤ f ≤ 200 kHz
200 kHz < f ≤ 1 MHz
1 MHz < f ≤ 2 MHz
2 MHz < f
1 ꢀ (125/ VOSC – 0.5)
2 ꢀ (125/ VOSC – 0.5)
2 ꢀ (125/ VOSC – 0.5)
20 ꢀ (125/ VOSC – 0.5)
0.28
f is frequency in Hz.
VOSC is oscillator level in mV.
Example of calculated C/G measurement accuracy
Frequency Measured
capacitance
C accuracy¹ Measured
conductance
G accuracy¹
5 MHz
1 MHz
100 kHz
10 kHz
1 kHz
1 pF
10 pF
100 pF
1 nF
0.61 %
0.32 %
0.29 %
0.32 %
0.26 %
0.11 %
0.10 %
0.10 %
0.18 %
0.11 %
0.10 %
0.10 %
0.18 %
0.11 %
0.10 %
0.10 %
0.92 %
0.18 %
0.11 %
0.10 %
≤ 3 µS
≤ 31 µS
≤ 314 µS
≤ 3 mS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
192 nS
990 nS
9 µS
99 µS
16 nS
71 nS
624 nS
7 µS
11 nS
66 nS
619 nS
7 µS
11 nS
66 nS
619 nS
7 µS
1 pF
10 pF
100 pF
1 nF
10 pF
100 pF
1 nF
10 nF
100 pF
1 nF
10 nF
100 nF
100 pF
1 nF
≤ 63 µS
≤ 628 µS
≤ 63 nS
≤ 628 nS
≤ 6 µS
6 nS
11 nS
66 nS
619 nS
10 nF
100 nF
≤ 63 µS
1. The capacitance and conductance measurement accuracy is specified under
the following conditions:
DX = 0.1
Integration time: 1 PLC
Test signal level: 30 mVrms
At four-terminal pair port of MFCMU
9
For GSWU
Measurement accuracy
Atto-sense and switch unit
(ASU) specifications
Input:
Impedance measurement error is given by
adding the following additional error Ee to
the MFCMU measurement error.
Control port: for SCUU
Mini pin plug ports: Guard1, Guard2
AUX path specification
Maꢀimum voltage
Ee = (A ꢁ ZS/|ZX| ꢁ YO|ZX|) ꢀ 100 (%)
ZX: Impedance measurement value (Ω)
A: 0.05 % (direct docking) or
0.1 % (indirect docking)
Output:
100 V (AUX input to AUX common)
100 V (AUX input to circuit common)
42 V (AUX common to circuit common)
LED: Connection status indicator
SCUU supplemental information
SMU path:
Maꢀimum current
0.5 A (AUX input to force output)
ZS: 500 ꢁ 500 ꢀ f (mΩ)
Offset current: < 20 fA
YO: 1 ꢁ 1000 ꢀ f/100 (nS)
Offset voltage: < 100 µV at 300 sec
ASU supplemental information
Band width (at -3 dB)
(direct docking, ꢀ2 for indirect docking)
Note: f is frequency in MHz.
Closed channel residual resistance:
< 200 mΩ
Channel isolation resistance: > 1015
30 MHz (AUX port)
When the measurement terminals are
eꢀtended by using the measurement cable,
the measurement accuracy is applied to
the data measured after performing the
open/short/load correction at the DUT
side cable end.
Ω
CMU path:
Test signal
SMU CMU unify unit (SCUU)
and guard switch unit (GSWU)
specifications
Signal output level additional errors
(CMU bias, open load):
2 % (direct docking)
The SCUU multipleꢀes the outputs from
two SMUs (MPSMUs and/or HRSMUs)
and the CMU. The SCUU outputs are two
sets of Kelvin triaꢀial ports (Force and
Sense). The SCUU also allows the SMUs
to act as DC bias sources in conjunction
with the CMU. Special cables are available
to connect the SMUs and CMU with
the SCUU, and an auto-detect feature
automatically compensates for the cable
length going to the SCUU.
Note: The error is specified under the
following conditions:
7 % (indirect docking)
Signal output level additional errors
(SMU bias, open load):
Temperature: 23 °C 5 °C
Integration time: 1 PLC or 16 PLC
5 % (direct docking, ≥ 10 kHz)
10 % (indirect docking, ≥ 10 kHz)
Output impedance: 50 Ω, typical
Signal level monitor additional errors
(open load):
2 % (CMU bias), direct docking
5 % (SMU bias), direct docking
7 % (CMU bias), indirect docking
10 % (SMU bias), indirect docking
The GSWU contains a relay that auto-
matically opens for IV measurements and
closes for CV measurements, forming a
guard return path to improve CV measure-
ment accuracy.
DC bias function
DC voltage bias (CMU bias):
Range: 0 to 25 V
Supported SMU
Resolution: 1 mV
Additional errors (for CMU bias):
100 µV (open load)
DC voltage bias (SMU bias):
Range: 0 to 100 V
Resolution: 5 mV
Additional errors (for SMU voltage
output accuracy): 100 µV (open load)
DC bias monitor additional errors (open load):
20 mV, direct docking
30 mV, indirect docking
Output impedance:
50 Ω, typical
DC output resistance: 50 Ω (CMU bias),
130 Ω (SMU bias)
MPSMU and HRSMU
For SCUU
Inputs:
Triaꢀial ports: Force1, Sense1, Force2,
and Sense2
BNC ports: for MFCMU
Control port: for MFCMU
Outputs:
Triaꢀial ports: Force1/CMUH, Sense1,
Force2/CMUL, and Sense2
Control port: for GSWU
LEDs: SMU/CMU output status indicator
Docking mode:
Direct and indirect mode
10
HV-SPGU (high voltage semiconductor pulse generator unit) module specification
Specifications
Pulse/DC output voltage and accuracy
Output voltage (Vout) 50 Ω load
Open load
Number of output channels:
2 channels per module
–20 V to ꢁ20 V
–40 V to ꢁ40 V
Modes: pulse, constant, and freerun
Accuracy¹
Open load
(0.5 % ꢁ 50 mV)
0.2 mV ( 10 V range)
0.8 mV ( 40 V range)
0.4 mV ( 10 V range)
1.6 mV ( 40 V range)
SMA
Standard pulse mode:
• Two level pulse
• Three level pulse per one channel
• Pulse period: 30 ns to 10 s
Amplitude resolution 50 Ω load
Open load
Output connectors
Source impedance
Short circuit current
Delay range: 0 s to 9.99 s
Delay resolution: 2.5 ns (minimum)
Output count: 1 to 1,000,000
Voltage monitor minimum sampling
period: 5 μs
50 Ω²
800 mA peak (400 mA average³)
(5 % ꢁ 20 mV)
Overshoot/
50 Ω load
pre-shoot/ringing4
Output limit
1. At 1 µs after completing transition.
2. Typical ( 1 %)
Monitoring over current limit
Trigger output:
Level: TTL
3. This value is specified under the following condition: [(Number of installed HV-SPGUs) ꢀ 0.2 A]
ꢁ [DC current output by all modules (including HV-SPGUs)] < 3.0 A
Timing: Synchronized with pulse period
Trigger width:
4. Following the specified condition with transition time.
Pulse period ꢀ 1/2 (pulse period ≤ 10 µs)
Maꢀimum 5 µs (pulse period > 10 µs)
Pulse range and pulse parameter¹
Frequency range
Pulse period
0.1 Hz to 33 MHz
30 ns to 10 s
10 ns
SPGU supplemental information
Programmable range
Resolution
Minimum
Accuracy
Programmable range
Resolution
Pulse width jitter: 0.001 % ꢁ150 ps
Pulse period jitter: 0.001 % ꢁ150 ps
Maꢀimum slew rate: 1000 V/µs (50 Ω load)
Noise: 10 mVrms (at DC output)
100 ns³
1 % ( 0.01 % ²)
10 ns to (period – 10 ns)
2.5 ns (Tr and Tf ≤ 8 µs)
10 ns (Tr or Tf > 8 µs)
50 ns (25 ns typical)³
(3 % ꢁ 2 ns)
Width
Advanced feature:
Voltage monitor: The HV-SPGU has a
voltage monitor function to measure the
voltage at the DUT terminal.
Minimum
Accuracy
Programmable range
Transition time5
(Tr and Tf)
8 ns to 400 ms
Measurement accuracy (open load):
(0.1 % of reading ꢁ 25 mV)
Measurement resolution: 50 μV
Note: Specified at 1 PLC (20 ms = (5 μs
sample ꢁ 5 μs interval) ꢀ 2000 samples.)
Voltage compensation: The HV-SPGU
can measure the impedance of DUT and
adjust the output voltage according to
the DUT impedance.
Resolution
2 ns (Tr and Tf ≤ 8 µs)
8 ns (Tr or Tf > 8 µs)
< 15 ns³
20 ns (Vamp ≤ 10 V)
30 ns (Vamp ≤ 20 V)
60 ns (Vamp > 20 V)
–5 % to 5 % ꢁ 10 ns (Vamp ≤ 10 V)
–5 % to 5 % ꢁ 20 ns (Vamp ≤ 20 V)
< 100 µs
Minimum (typical)
Minimum
Accuracy
Output relay
Open/close
switching time4
1. Unless otherwise stated, all specifications assume a 50 Ω termination.
ALWG (arbitrary linear
2. Typical minimum. This is supplemental information.
waveform generator) function
3. This is specified at Vamp ≤ 10 V.
4. The time it takes the open state relay to open or close.
5. The time from 10 % to 90 % of Vamp which is the amplitude of output pulse.
Arbitrary linear waveform generator
(ALWG) mode:
• Output compleꢀ waveform per one
channel of HV-SPGU
• Define multi-level pulse and multi-pulse
waveform including open state pulse
with ALWG GUI editor
Pulse waveform
Tperiod
Twidth
Tdelay
Vpeak
• Sequential pulse waveform from
user-defined pulse waveform
• 1024 points per one channel
90%
90%
Vamp
10%
Tr
10%
Tf
• Programmable timing range:
10 ns to 10 s, 10 ns resolution
Vbase
11
Example 1. ALWG setup table and pattern
Pattern
Point
Time
0
Voltage
0.0 V
0.0 V
15.0 V
15.0 V
0.0 V
1
2
50 ns
70 ns
100 ns
200 ns
300 ns
320 ns
400 ns
450 ns
500 ns
P3
P4
15
10
3
4
5
6
7
8
9
10
P7
P6
P8
0.0 V
10.0 V
10.0 V
0.0 V
P1
P2
P5
P9
P10
0
500 ns
0.0 V
0
Example 2. ALWG complex waveform
Pattern 1
Pattern 2 x 5
Pattern 3
Pattern 2
16440A SMU/pulse generator
selector
Input
Output
Channel 1 (CH 1)
Channel 2 (CH 2)
2 (SMU and PGU1)
2 (SMU and PGU)
1
1
1
1
The Agilent 16440A SMU/pulse generator
selector switches either a SMU or PGU to
the associated output port. You can
eꢀpand to four channels by adding an
additional 16440A. The PGU port on
channel 1 provides a “PGU OPEN” function,
which can disconnect the PGU by opening
a semiconductor relay. The Agilent B1500A
and 16445A are required to use the
16440A.
Channel 3 (CH 3)2 2 (SMU and PGU1)
Channel 4 (CH 4)2 2 (SMU and PGU)
1. PGU channels 1 & 3 have a built-in series semiconductor relay.
2. Available when a second 16440A (selector eꢀpander) is
installed.
• Voltage and current range
Input port Maximum Maximum
voltage
200 V
40 V
current
1.0 A
The following specifications data is
specified at 23 °C 5 °C and 50% relative
humidity.
SMU
PGU
0.2 A 1
1. This is peak-to-peak ac current.
• Channel configuration:
16445A SMU/PGU selector connection
adaptor
2 channels (CH 1 and CH 2).
Can add an additional 2 channels
(CH 3 and CH 4) by adding another
16440A (selector eꢀpander).
The Agilent 16445A selector adapter
is required to control and to supply DC
power to the Agilent 16440A SMU/pulse
generator selector.
Power requirement: 100 to 240 V, 50/60 Hz
Maꢀimum volt-amps (VA): 20 VA
12
WGFMU (waveform generator/fast measurement unit) module specification
Overview
Measurement functions, voltage forcing, voltage measurement, and current
measurement
The WGFMU is a self-contained module
offering the combination of arbitrary
linear waveform generation (ALWG) with
synchronized fast current or voltage (IV)
measurement. The ALWG function allows
you to generate not only DC, but also
various types of AC waveforms. In addition
to this versatile sourcing capability, the
WGFMU can also perform measurement in
synchronization with the applied wave-
form, which enables accurate high-speed
IV characterization.
Mode
Function
V force ranges V measure
ranges
I measure ranges
Fast IV
V force/I measure, -3 V to ꢁ3 V
V force/V measure -5 V to ꢁ5 V
-10 V to 0 V
-5 V to ꢁ5 V
1 µA, 10 µA, 100 µA,
-10 V to ꢁ10 V 1 mA, 10 mA.
0 V to ꢁ10 V
PG
DC
V force/V measure -3 V to ꢁ3 V
-5 V to ꢁ5 V
—
-5 V to ꢁ5 V
V force/I measure, -3 V to ꢁ3 V
V force/V measure -5 V to ꢁ5 V
-10 V to 0 V
-5 V to ꢁ5 V
-10 V to 10 V
1 µA, 10 µA, 100 µA,
1 mA, 10 mA
0 V to ꢁ10 V
Specifications
SMU pass- Measurement
through using SMU
Maꢀ 25 V
—
Maꢀ 100 mA
Number of output channels:
2 channels per module
Voltage force accuracy, resolution, and timing
Modes: Fast IV, PG (pulse generator),
DC, and SMU pass-through
V force (Fast IV mode)
V force (PG mode)
-5 V to 5 V, -10 V to 0 V, 0 V to 10 V
-5 V to 5 V (open load)
-2.5 V to 2.5 V (50 Ω load)
0.1% of setting 0.1% of range1
96 μV (-3 to 3V)
RSU:
Accuracy
Output Connector: SMA
Source Impedance: 50 Ω (nominal)
at DC in PG mode
Resolution2
160 μV (all ranges eꢀcept for -3 V to 3 V)
Overshoot/undershoot
Noise
Rise time T (10 to 90%)/
Fall time Tfarilsl e(90 to 10%)
Pulse period
(5%ꢁ20 mV) 3
Maꢀimum 0.1 mVrms
SMU path: Maꢀimum voltage 25 V,
Maꢀimum current 100 mA
V monitor terminal:
Connector: BNC
Source Impedance: 50 Ω (nominal) at DC
The terminal outputs a buffered signal
equal to 1/10 of Vout (into a 50 Ω load)
4
Accuracy: -5% to (ꢁ5% ꢁ10 ns) of setting 5
Minimum: 24 ns, PG mode and 50 Ω load
Timing Accuracy: 1% of setting6
Minimum:100 ns, PG mode and 50 Ω load
Accuracy: (3%ꢁ2 ns)7
Minimum: 50 ns, PG mode and 50 Ω load
Pulse width
WGFMU to RSU cable length:
Voltage measurement accuracy, resolution, and noise
The WGFMU and RSU are connected by
a special composite cable. The following
configurations are available:
Accuracy
(0.1% of reading 0.1% of range)8
Resolution9
680 μV (-5 V to ꢁ5 V range)
1.4 mV (-10 V to ꢁ10 V range)
Maꢀimum 4 mVrms (-5 V to ꢁ5 V range)
Noise10
• 3 m
• 5 m
1. Independent of the range or the mode. DC constant voltage output. Load impedance must be ≥ 1 MΩ
(1 μA range) or ≥ 200 kΩ (all other current ranges) for Fast IV mode, or ≥ 1 MΩ for PG mode.
2. Can vary at most 5% based on the result of calibration.
• 1.5 m
• 2.4 m ꢁ connector adapter ꢁ 0.6 m
• 4.4 m ꢁ connector adapter ꢁ 0.6 m
Note: The connector adapter is used when
routing the cable through the prober’s
connector panel.
3. PG mode, 50 Ω load, Trise and Tfall >16 ns with the 1.5 m cable, >32 ns with 3 m cable, or >56 ns
with 5 m cable
4. Theoretical value for observed time 100 ns to 1 ms, supplemental information
5. PG mode, 50 Ω load, Trise and Tfall ≥ 24 ns
6. PG mode, 50 Ω load, pulse period ≥ 100 ns
7. PG mode, 50 Ω load, pulse width ≥ 50 ns
8. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000
averaging samples for 10 μA range and above; 100,000 averaging samples for the 1 μA range.
9. Display resolution. Can vary at most 5% based on the result of calibration.
10. 0 V output, open load, no averaging. Maꢀimum 1.5 mVrms as supplemental information.
13
Current measurement accuracy and resolution
Accuracy
(0.1% of reading 0.2% of range)1
Resolution2
0.014% of range
Noise (Effective resolution)
Maꢀimum 0.2% of range3
1. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000
averaging samples for 10 μA range and above; 100,000 averaging samples for the 1 μA range.
2. Display resolution. Can vary at most 5% based on the result of calibration
3. Effective value at 0 V output, open load, and no averaging. Supplemental information
ALWG function
Maꢀimum number of vectors
2048
Maꢀimum number of sequences 512
Maꢀimum number of loop counts 1 to 1012
Length of a vector
Sampling rate
Averaging time
Hardware memory
10 ns to 10,000 s with 10 ns resolution
5 ns, or 10 ns to 1 s with 10 ns resolution
10 ns to 20 ms with 10 ns resolution
About 4 M data points/channel (typical)
Trigger output
Level: TTL
Trigger width: 10 ns
Generated synchronously with ALWG waveform.
Supplemental Information
RSU SMU path:
Leak current: < 100 pA
Residual resistance: <300 mΩ
Jitter: <1 ns
Skew between channels: <3 ns, under no electrostatic discharge condition.
Trigger output skew: <3 ns
Current range change time: <150 μs*
*
The time until the measured current settles within 0.3 % of the final result value after the
range change.
Minimum rise/fall time*
Mode
Current measure-
Minimum rise/fall time
Load condition
25 pF, open
ment range
NA
10 mA
1 mA
0 to 1V
0 to 5 V
30 ns
80 ns
250 ns
600 ns
4.5 μs
—
0 to 10V
NA
PG mode
Fast IV mode
30 ns
80 ns
250 ns
600 ns
2 μs
80 ns 25 pF, 1 MΩ
250 ns
1.5 μs
7 μs
100 μA
10 μA
1 μA
6 μs
—
—
35 μs
75 μs 25 pF, open
*
This is the minimum setting value effective for suppressing overshoot and distortion.
14
Settling time*
Mode
Current
measurement
range
Settling time
Load condition
Voltage
Current
measurement
150 ns
150 ns
150 ns
400 ns
1.2 μs
measurement
PG mode
Fast IV mode
NA
NA
100 ns
250 ns
1μs
25 pF, open
25 pF, 1 kΩ
25 pF, 10 kΩ
25 pF, 100 kΩ
25 pF, 1 MΩ
25 pF, 10 MΩ
10 mA
1 mA
100 μA
10 μA
1 μA
10 μs
80 μs
6 μs
*
The time until the measured value settles within 0.3 % of the final result value after the output
voltage is changed from the initial value (0 V). Applicable condition: Rise time = 10 ns
Minimum pulse width*
Mode
PG mode
Fast IV mode
Current measurement range Minimum pulse width Load condition
NA
170 ns
180 ns
500 ns
1.6 μs
25 pF, open
25 pF, 1 kΩ
25 pF, 10 kΩ
25 pF, 100 kΩ
25 pF, 1 MΩ
25 pF, 10 MΩ
10 mA
1 mA
100 μA
10 μA
1 μA
14.5 μs
115 μs
*
The time until the pulse peak output value (0 to 5 V) settles within 0.3% of the setup value after
the output voltage is changed from the initial value (0 V). Applicable condition: Rise time is set to
the minimum rise/fall time shown in the above table.
Software
Instrument library for WGFMU control
Operating system:
Microsoft Windows XP Professional SP2
and Windows Vista Business SP1
NBTI and general-purpose EasyEXPERT
Application Tests
Sample programs (NBTI and general-
purpose measurement using WGFMU
and RTS data analysis)
WGFMU supported prober vendors
Cascade Microtech
Suss MicroTec
Vector Semicon
Note: The maꢀimum number of installable
RSUs for a given prober depends upon
the available space. Please contact your
local sales representative for details on
connecting and mounting the WGFMU
and RSU.
15
Agilent EasyEXPERT software
a pulsed bias voltage or current. A third
channel can be synchronized with the
primary sweep channel as an additional
voltage or current sweep source.
Functions
VAR1
Operation mode:
Primary sweep controls the staircase
Application test mode, Classic test mode, (DC or pulsed) voltage or current sweep.
Quick test mode
Maꢀimum number of VAR1 steps:
N1 = 1001
Sampling (time domain)
measurement mode
Key features
• Categorized and predefined application
test library
VAR2
Subordinate linear staircase or linear
pulsed sweep. After primary sweep is
completed, the VAR2 unit output voltage
or current is changed.
Displays the time sampled voltage/current
data (by SMU) versus time.
• GUI-based application test editor
• Save/Recall “My Favorite Setups”
• Define/customize application library
• Eꢀecute measurement
Sampling channels: Up to 10
Sampling mode: Linear, logarithmic (log)
Maꢀimum number of VAR2 steps:
N2 = 1001 (1 ≤ N1 × N2 ≤ 128128)
(Single/Repeat/Append)
• Quick test eꢀecution
• Direct control (GPIB FLEX)
• Save/Recall measurement data and
settings
• Test result data management
• Import/Eꢀport device definition,
measurement settings, my favorite
setup, measurement data, and
application library
• Graph plot display/analysis/printing
• Switching matriꢀ control
• Workspace management
• Self-test, self-calibration, diagnostics
Sampling points:
For linear sampling:
1 to 100,001/(number of channels)
VAR1’
Staircase or pulse sweep synchronized
with the VAR1 sweep. Sweep is made with
a user specified ratio and offset value.
VAR1’ output is calculated as VAR1’ = a ꢀ
VAR1 ꢁ b, where “a” is the user specified
ratio and “b” is the user specified offset
value.
For log sampling:
1 to 1ꢁ (number of data for 11 decades)
Sampling interval range:
100 μs ꢁ20 μs ꢀ (num. of channels – 1)
to 2 ms, 10 µs resolution
2 ms to 65.535 s, 1 ms resolution
Hold time, bias hold time:
-90 ms to -100 µs, 100 µs resolution
0 to 655.35 s, 10 ms resolution
CONST
A source unit can be set as a constant
voltage or current source depending on
the unit.
Measurement time resolution: 100 µs
Application library
Standby mode
Sample application tests are supplied for
the following categories; they are subject
to change without notice.
Staircase sweep measurement mode
Forces swept voltage or current, and
measures DC voltage or current. One
channel can sweep current or voltage
while up to ten channels can measure
current or voltage. A second channel can
be synchronized with the primary sweep
channel as an additional voltage or current
sweep source.
SMUs in “Standby” remain programmed to
their specified output value even as other
units are reset for the neꢀt measurement.
Structure, CMOS, Bipolar (BJT),
Memory, Miꢀed Signal Device, TFT,
Discrete, Reliability, Power Device,
Nanotechnology, Utility
Current offset cancel
This function subtracts the offset current
from the current measurement raw data,
and returns the result as the measurement
data. This function is used to compensate
the error factor (offset current) caused
by the measurement path such as the
measurement cables, manipulators, or
probe card.
Measurement mode details
The Agilent B1500A supports the following
measurement modes:
• Staircase sweep
Number of steps: 1 to 1001
Sweep mode: Linear or logarithmic (log)
Sweep direction: Single or double sweep
Hold time: 0 to 655.35 s, 10 ms resolution
Delay time: 0 to 65.5350 s, 100 µs
resolution
• Multi-channel sweep¹
• Pulsed sweep
• Staircase sweep with pulsed bias
• IV sampling
Time stamp
The B1500A supports a time stamp
function utilizing an internal quartz clock.
Resolution: 100 µs
• High speed IV sampling
• CV sweep
• C-t sampling
Pulsed sweep measurement mode:
Forces pulsed swept voltage or current,
and measures DC voltage or current.
A second channel can be programmed
to output a staircase sweep voltage or
current synchronized with the pulsed
sweep output.
• C-f sweep
Other measurement characteristics
Measurement control:
Single, repeat, append, and stop
• List sweep
• Linear search²
• Binary search²
SMU setting capabilities:
1. EasyEXPERT does not support VAR1’ in
multi-channel sweep mode.
2. They are supported by FLEX command only.
Limited auto ranging, voltage/current
compliance, power compliance, auto-
matic sweep abort functions, self-test,
and self-calibration
Staircase sweep with pulsed bias
measurement mode
Each SMU can be set to VAR1 (primary
sweep), VAR2 (secondary sweep), VAR1’
(synchronous sweep), or CONST (constant
voltage/current source).
Forces swept voltage or current, and
measures DC voltage or current. A second
channel can be programmed to output
16
Arithmetic and analysis
functions
Automatic analysis function
Other functions
On a graphics plot, the markers and lines
can be automatically located using the
auto analysis setup. Parameters can be
automatically determined using automatic
analysis, user function, and read out
functions.
Import/export files
File type:
Agilent EasyEXPERT format, XML-SS
format, CSV format
User functions
Up to 20 user-defined functions can be
defined using arithmetic eꢀpressions.
Data storage
Measured data and pre-defined variables
can be used in the computation. The
results can be displayed on the LCD.
Hard disk drive, DVD-ROM/CD-R/CD-RW
drive
Data variable display
Up to 20 user-defined parameters can be
displayed on the graphics screen.
Interfaces
Arithmetic operators
GPIB, interlock, USB (USB 2.0, front 2,
rear 2), LAN (100BASE-TX/10BASE-T),
trigger in/out, digital I/O
ꢁ, -, *, /, ^, abs (absolute value),
Analysis functions
at (arc tangent), avg (averaging), cond
(conditional evaluation), delta, diff (differ-
ential), eꢀp (eꢀponent), integ (integration),
lgt (logarithm, base 10), log (logarithm,
base e), mavg (moving average), maꢀ,
min, sqrt, trigonometric function, inverse
trigonometric function, and so on.
Up to 20 user-defined analysis func-
tions can be defined using arithmetic
eꢀpressions.
Trigger I/O
Only available using GPIB FLEX commands.
Measured data, pre-defined variables,
and read out functions can be used in the
computation. The results can be displayed
on the LCD.
Trigger in/out synchronization pulses
before and after setting and measuring
DC voltage and current. Arbitrary trigger
events can be masked or activated
independently.
Physical constants
Keyboard constants are stored in memory
as follows:
Read out functions
The read out functions are built-in func-
tions for reading various values related to
the marker, cursor, or line.
q: Electron charge, 1.602177E-19 C
k: Boltzman’s constant, 1.380658E-23
ε (e): Dielectric constant of vacuum,
8.854188E-12
Supported external instruments
EasyEXPERT Standard edition:
• Supported by switching matriꢀ GUI:
B2200A/B2201A
• Supported by application tests: E5250A
(E5252A cards), 4284A/E4980A, 81110A,
3458A
Graph plot
Display mode
Engineering units
Data display window can be printed. Only
X-Y graph can be printed.
The following unit symbols are also
available on the keyboard:
EasyEXPERT Plus edition:
Graph plot file
• All eꢀternal instruments supported by
EasyEXPERT Standard edition
a (10-18), f (10-15), p (10-12), n (10-9),
u or µ (10-6), m (10-3), k (103), M (106),
G (109), T (1012) , P (1015)
Graph plot can be stored as image data to
clip board or mass storage device.
• Also supported by switching matriꢀ GUI:
E5250A (E5252A cards)
File type: bmp, gif, png, emf
Analysis capabilities
Furnished software
• Prober control eꢀecution files
Output
Overlay graph comparison
Graphical plots can be stored and overlaid.
Display mode
• Desktop EasyEXPERT software with
license-to-use for Standard edition
• 4155/56 setup file converter tool
(Supported operating systems:
Microsoft Windows 2000 Professional,
XP Home or Professional, and Vista
Business)
• A VXIplug&play driver for the B1500A
(Supported operating systems:
Microsoft Windows 2000 Professional
and XP Professional)
X-Y graph, list, and parameter
Scale
Auto scale and zoom
X-Y graph display
X-aꢀis and up to eight Y-aꢀes, linear and
log scale, real time graph plotting
Marker
Marker to min/maꢀ, interpolation, direct
marker, and marker skip
List display
Measurement data and calculated user
function data are listed in conjunction
with VAR1 step number or time domain
sampling step number. Up to 20 data sets
can be displayed.
Cursor
Direct cursor
Line
Two lines, normal mode, grad mode,
tangent mode, and regression mode
17
Agilent Desktop EasyEXPERT software
Desktop EasyEXPERT is the same
Prober control
Supported instruments
software that is built-in to the PC-based
Agilent B1500A Semiconductor Device
Analyzer, eꢀcept that it runs on a stand-
alone PC. Just like standard EasyEXPERT,
Desktop EasyEXPERT supports all aspects
of parametric test, from basic manual
measurements to test automation across
a wafer in conjunction with a semi-
automatic wafer prober.
All popular semiautomatic wafer probers
are supported by Desktop EasyEXPERT.
You can define wafer, die, and module
information for probing across an entire
wafer. You can also combine wafer prober
control with either Quick Test mode or an
application test based test sequence to
perform multiple testing on various devices
across the wafer.
• B1500A
• 4155B, 4156B, 4155C, and 4156C
• Supported 4155/4156 firmware:
HOSTC: 03.08 or later
SMUC: 04.08 or later
Supported external instruments
Desktop EasyEXPERT Standard edition:
• Supported by switching matriꢀ GUI:
B2200A/B2201A
• Supported by application tests: E5250A
(E5252A cards), 4284A/E4980A, 81110A,
3458A
Automatic data export
Features and benefits
The Desktop EasyEXPERT has the ability
to automatically eꢀport measurement data
in real time, in a variety of formats. You
can save data to any drive connected to
the PC. If you wish, you can eꢀport data to
a network drive and view test results on
your desktop PC as your instruments are
performing the testing in your lab.
Large application test library
Desktop EasyEXPERT comes with over
200 application tests conveniently
organized by device type, application, and
technology. Many of these application
tests will run on the 4155/4156 without
modification, and you can easily edit and
customize the furnished application tests
to fit your specific needs.
Desktop EasyEXPERT Plus edition:
• All eꢀternal instruments supported by
Desktop EasyEXPERT Standard edition
• Also supported by switching matriꢀ GUI:
E5250A (E5252A cards)
System requirements
The following are the minimum require-
ment for eꢀecuting Desktop EasyEXPERT.
Offline capability
Desktop EasyEXPERT can be run in either
online or offline mode. In the offline mode
you can perform tasks such as analyzing
data and creating new application tests.
This frees up your eꢀisting analyzer from
being needed for development work
and enables you to use it for its primary
purpose: making measurements.
Operating system
and service pack
Microsoft Windows XP
Professional SP2
Microsoft Windows
Vista Business SP1
Vista certified PC with
1GB memory
Processer
Memory
Display
HDD
Intel Celeron 2 GHz
512 Megabytes DDR266
XGA 1024ꢀ768 (SXGA 1280ꢀ1024 recommended)
1 GB free space on the C drive, 10 GB (30 GB recommended)
free space on a drive for test setup/result data strage.
GUI-based classic test mode
Desktop EasyEXPERT offers a classic
test mode that maintains the look, feel,
and terminology of the 4155/4156 user
interface. In addition, it improves the
4155/4156 user interface by taking full
advantage of Microsoft Windows GUI
features.
.NET Framework
Microsoft
Microsoft .NET Framework
Ver. 3.0
.NET Framework Ver. 2.0
Redistributable Package
Microsoft .NET
Framework 2.0 SP1
Easy test sequencing
IO Libraries
(for online mode)
Agilent IO Libraries Suite 15.0
Agilent IO Libraries Suite 15.0
A GUI-based Quick Test mode enables
you to perform test sequencing without
programming. You can select, copy, rear-
range and cut-and-paste any application
tests with a few simple mouse clicks. Once
you have selected and arranged your tests,
simply click on the measurement button to
begin running an automated test sequence.
Supported GPIB I/F (for online mode)
B1500A
4155B/C
4156B/C
O
O
O
Agilent 82350B
Agilent 82357A
Agilent 82357B
O
X
X
O = Supported
X = Not supported
18
Supported 4155/4156
functionality
Desktop EasyEXPERT Standard edition:
• I/V Sweep
• B2200A and B2201A switching matriꢀ
GUI control
Desktop EasyEXPERT Plus edition:
General specifications
Furnished accessories
Power cable
Manual CD-ROM
Desktop EasyEXPERT CD-ROM
Software CD-ROM (including VXIplug&play
driver and utility tools)
License-to-use for Desktop EasyEXPERT
standard edition
Temperature range
Operating: ꢁ5 °C to ꢁ40 °C
Storage: -20 °C to ꢁ60 °C
Humidity range
Operating: 20 % to 70 % RH,
non-condensing
Storage: 10 % to 90 % RH, non-condensing
The following functions are additionally
supported.
Altitude
Operating: 0 m to 2,000 m (6,561 ft)
Storage: 0 m to 4,600 m (15,092 ft)
• I/V-t sampling (eꢀcept thinned out mode)
• VSU/VMU (eꢀcept differential voltage
measurement using VMU)
• PGU (41501B)
• E5250A/E5252A switching matriꢀ GUI
control
Power requirement
AC voltage: 90 V to 264 V
Line frequency: 47 Hz to 63 Hz
Maximum volt-amps (VA)
B1500A: 900 VA
Setup converter tool
In addition to Desktop EasyEXPERT,
Agilent supplies a free setup converter
tool that runs on any Windows-based
PC. This tool can convert 4155 and 4156
measurement setup files (file eꢀtensions
MES or DAT) into equivalent Desktop
EasyEXPERT classic test mode setup files.
Regulatory compliance
EMC:
IEC61326-1:ꢁA1/EN61326-1:ꢁA1
AS/NZS 2064.1
Safety:
CSA C22.2 No.1010.1-1992
IEC61010-1:ꢁA2/EN61010-1:ꢁA2
UL3111-1:1994
Certification
CE, CSA, NRTL/C, C-Tick
Dimensions
B1500A:
420 mm W ꢀ 330 mm H ꢀ 575 mm D
N1301A-100 SMU CMU unify unit:
148 mm W ꢀ 75 mm H ꢀ 70 mm D
N1301A-200 guard switch unit:
33.2 mm W ꢀ 41.5 mm H ꢀ 32.8 mm D
E5288A Atto-sense and switch unit:
132 mm W × 88.5 mm H × 50 mm D
B1531A RSU:
45.2 mm W ꢀ 70 mm H ꢀ 82 mm D
16440A SMU/PGU selector:
250 mm W × 50 mm H × 275 mm D
16445A Selector adaptor:
250 mm W × 50 mm H × 260 mm D
Weight
B1500A (empty): 20 kg
B1510A: 2.0 kg
B1511A: 1.0 kg
B1517A: 1.2 kg
B1520A: 1.5 kg
B1525A: 1.3 kg
B1530A: 1.3 kg
B1531A: 0.13 kg
E5288A: 0.5 kg
N1301A-100: 0.8 kg
N1301A-200: 0.1 kg
16440A: 1.1 kg
16445A: 1.0 kg
19
Order information
HV-SPGU accessories
Mainframe and modules
16440A
16440A-003
16445A
16445A-001
16445A-002
16493P-001
16493P-002
16493Q-001
SMU/PGU selector
Control cable (40 cm)
SMU/PGU selector connection adapter
Control cable for B1500A to 16440A (1.5 m)
Control cable for B1500A to 16440A (3 m)
SPGU cable (1.5 m)
B1500A
Semiconductor device analyzer mainframe
The following modules are available:
High power SMU (HPSMU)
Medium power SMU (MPSMU)
High resolution SMU (HRSMU)
Atto-sense switch unit (ASU)
Multi frequency CMU (MFCMU)
High voltage SPGU (HV-SPGU)
Waveform generator/fast measurement unit
(WGFMU)
50 Hz line frequency
60 Hz line frequency
ANSI Z540 compliant calibration
Commercial calibration certificate with test data
SPGU cable (3 m)
SPGU synchronization cable
WGFMU accessories
16493R
WGFMU cables and accessories
B1500A-050
B1500A-060
B1500A-A6J
B1500A-UK6
16493R-001
16493R-002
16493R-003
16493R-004
16493R-005
16493R-006
16493R-101
16493R-102
16493R-202
0.6 m cable between WGFMU and RSU
2.4 m cable between WGFMU and RSU
3 m cable between WGFMU and RSU
5 m cable between WGFMU and RSU
4.4 m cable between WGFMU and RSU
1.5 m cable between WGFMU and RSU
SSMC-SSMC cable (50 mm) for current return path
SSMC-SSMC cable (70 mm) for current return path
SMA-SSMC cable (200 mm) between RSU and
DC probe
B1500A-ABA English documentation
B1500A-ABJ Japanese documentation
B1540A-001
Agilent EasyEXPERT with license-to-use for
standard version
B1540A-002
B1541A
License-to-use for Agilent EasyEXPERT Plus
Agilent Desktop EasyEXPERT software and
measurement libraries
16493R-302
SMA-SMA cable (200 mm) between RSU and
RF probe
B1541A-001
B1541A-002
Agilent Desktop EasyEXPERT with license-to-use
for standard version
16493R-801
16493R-802
16493R-803
WGFMU connector adapter (female-female)
Magnet stand for RSU
Sync cable for WGFMU
License-to-use for Agilent Desktop EasyEXPERT
Plus
B1500 accessories
Other accessories
16444A-001
16444A-002
16444A-003
N1253A-100
N1253A-200
N1254A-100
N1254A-108
SMU cables
16494A-001
16494A-002
16493K-001
16493K-002
Keyboard
Mouse
Stylus pen
Digital I/O cable
Digital I/O BNC boꢀ
GNDU to Kelvin adapter
ASU magnetic stand
16442B
16493G
Test fiꢀture
Digital I/O cable
16493J-001
16493J-002
16493L-001
16493L-002
Interlock cable (1.5 m)
Interlock cable (3 m)
GNDU cable (1.5 m)
GNDU cable (3 m)
Part numbers for adding additional modules
B1510A
B1511A
B1517A
E5288A
B1520A
High power source/monitor unit module
Triaꢀial cable (1.5 m)
Triaꢀial cable (3 m)
Kelvin triaꢀial cable (1.5 m)
Kelvin triaꢀial cable (3 m)
Medium power source/monitor unit module
High resolution source/monitor unit module
Atto-sense and switch unit
Multi frequency capacitance measurement unit
module
CMU accessories
N1300A-001
N1300A-002
N1301A-100
N1301A-102
N1301A-110
N1301A-200
N1301A-201
N1301A-202
CMU cable (1.5 m)
CMU cable (3 m)
B1525A
B1530A
High voltage semiconductor pulse generator unit
module
Waveform generator/fast measurement unit
module
SMU CMU unify unit (SCUU)
SMU CMU unify unit cable (3 m)
SMU CMU unify unit magnetic stand
Guard switch unit (GSWU)
Guard switch unit cable (1 m)
Guard switch unit cable (3 m)
20
21
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1 800 226 008
Hong Kong
India
Japan
Korea
For more information on repair and
calibration services, go to
Malaysia
Singapore
Taiwan
www.agilent.com/find/removealldoubt
Thailand
Europe & Middle East
Austria
Belgium
Denmark
Finland
France
01 36027 71571
32 (0) 2 404 93 40
45 70 13 15 15
358 (0) 10 855 2100
0825 010 700*
*0.125 €/minute
Germany
Ireland
07031 464 6333
1890 924 204
Israel
972-3-9288-504/544
39 02 92 60 8484
31 (0) 20 547 2111
34 (91) 631 3300
0200-88 22 55
0800 80 53 53
Italy
Netherlands
Spain
Sweden
Switzerland
United Kingdom 44 (0) 118 9276201
Other European Countries:
www.agilent.com/find/contactus
Revised: October 1, 2008
Microsoft and Windows are U.S. registered
trademarks of Microsoft Corporation.
Product specifications and descriptions in this
document subject to change without notice.
© Agilent Technologies, Inc. 2007-2009
Printed in USA, February 13, 2009
5989-2785EN
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