969-9376 [HP]
Agilent TwisTorr 84 FS;
| 型号： | 969-9376 |
| 厂家： | 
HEWLETT-PACKARD |
| 描述： | Agilent TwisTorr 84 FS |
| 文件： | 总3页 (文件大小：680K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Data Sheet
Agilent TwisTorr 84 FS
The new generation Turbo Pump
with Agilent Floating Suspension
The Agilent TwisTorr 84 FS turbomolecular high-vacuum pump combines TwisTorr
drag stage technology and Agilent Floating Suspension to provide high performance,
reliability, and economy.
TwisTorr drag stages create high compression ratios for light gases such as
hydrogen and helium to deliver high throughput and high tolerance of foreline
pressure, thereby permitting the use of smaller and more economical backing
pumps. This technology results in a compact rotor design that is energy-efficient
and maintains a low operating temperature.
The Agilent Floating Suspension system reduces noise and vibration, and ensures
optimal bearing operating conditions to extend operating life, minimize system
downtime, and assure stability over time.
The unique bearing and dry lubrication in the TwisTorr 704 FS eliminate oil and
maintenance, and permit operation of the pump in any orientation. Available with
onboard or rack controllers.
Technical Specification
Ordering Information
9699290
9699940
Pumps
TwisTorr 84 FS ISO 63
Configuration Options
X3502-64000
X3502-64001
X3502-64002
X3502-64003
Part Numbers
X3508-64001
X3508-64002
X3509-64000
X3509-64001
X3510-64000
Part Numbers
9699958
Air cooling kit (0,5 m cable)
Air cooling kit extension cable (5 m)
Vibration isolator
Technical Specification
Technical Specification
mechanical: Agilent DS 40M / DS 102
KF40
CFF 2.75”
ISO 63
CFF 4.5”
Pumping speed
Recommended forepump
dry pump: Agilent IDP-3/IDP-7
49 L/s
38 L/s
36 L/s
44
56 L/s
46 L/s
40 L/s
57 L/s
67 L/s
63 L/s
53 L/s
66 L/s
67
63
53
66
TwisTorr 84 FS KF 40
Part Numbers
63 969-9375
969-9376
N2
He
H2
Ar
Any
Operating position
TwisTorr 84 FS CFF 4.5”
Vibration isolator ISO
+5 °C to +35 °C
Oper. ambient temperature
TwisTorr 84 FS CFF 2.75”
Vibration isolator CFF 4.5”
Venting
0 - 90 % (not condensing)
80 °C for ISO (120 °C for CFF) at inlet flange
Permanent lubrication
Rel. humidity of air
Bakeout temperature
Lubricant
Controllers
Part Numbers
9699844
Gas throughput at full
rotational speed
(with recomm. forepump)
Water cooling
Air cooling (35 °C)
(25 °C, 65 L/h)
TwisTorr 84 FS AG Rack controller RS232/485
TwisTorr 84 FS AG Rack controller Profibus
TwisTorr 84 FS onboard controller 110/220V
TwisTorr 84 FS onboard controller 24V
TwisTorr 84 FS PCB Controller
Cables
Vent Valve N.O. 0.5 mm orifice (0.5 m cable)
9699941 (5 m)
100 sccm
70 sccm
100 sccm
70 sccm
N2
Ar
Forced air (5- 35 °C ambient temperature)
Air flow temperature +5° C to +35 °C
Cooling requirements
Air cooling
969-9941M003 (10 m)
969-9941M001 (15 m)
969-9941M005 (20 m)
Vent Valve extension cable
Compression ratio and foreline tolerance
Cooling water temperature: +15 °C to +25 °C
Minimum flow: 65 L/h (0.30 GPM)
≥ 1.0 x 1011
2.0 x 106
5.0 x 104
>14 mbar
>12 mbar
>4 mbar
N2
He
H2
Ar
Water cooling
X3502-68005
X1699-64039
Vent Screw M5
Pressure: 2 to 4 bar (45 to 75 psi)
Vent Adapter kit M5-M8
> 1.0 x 1011
>14 mbar
Noise Pressure level
(at 1 mt at full speed)
Mains cable NEMA plug 3 m long
Mains cable EU plug 3 m long
Serial cable and T-plus software
PCB cable
40 dB(A) *
Purge
Purge Screw
Part Numbers
X3502-68004
9699834
Base pressure with recom-
mended forepump (5 m3/h)
9699957
< 5 x 10-10 mbar (< 3.75 x 10-10 Torr)
-40 °C to +70 °C
3000 m
Storage temperature
Max altitude
9699883
ISO 63
KF 40
CFF 4.5” od
Purge valve 10 SCCM NW16KF - M12
Purge valve 10 SCCM ¼ Swagelok - M12
Purge valve 20 SCCM NW16KF - M12
Purge valve 20 SCCM ¼ Swagelok - M12
Purge valve 10 SCCM ¼ Swagelok - ¼ Swagelok
Purge valve 20 SCCM ¼ Swagelok - ¼ Swagelok
Mounting
Inlet flange
9699869
CFF 2.75” od
Pump ISO 63 kg 2.05
Pump CFF 4.5” kg 3.50
Pump CFF 2.75” kg 3.34
Pump KF 40” kg 2.37
9699108
9699942
Pump extension cable (3 m)
KF16 NW
Foreline flange
Rotational speed
Start-up time
Weight kg (lbs)
969-9241
969-9242
969-9942M007 (5 m)
969-9942M006 (10 m)
969-9942M005 (15 m)
969-9942M004 (20 m)
81000 rpm (1350 Hz driving frequency)
< 2 minutes
Extension cable
969-9232
Conformity to norms
969-9236
CE, C-CSA-US, RoHS
Inlet Screen
Inlet screen ISO 63
Part Numbers
X3502-68001
X3502-68000
969-9309
compliant as per 2011/65/UE
Part Numbers
X3502-68006
X3502-68007
X3502-68008
X3502-68009
Part Numbers
*average value ± 4 dB(A) std deviation
Controller side mounting bracket
CFF4.5 Mounting kit
Inlet screen CFF 4.5”
Inlet screen, KF 40
Metric screws kit
969-9328
Inlet screen CFF 2.75”
Cooling
Outline Drawing
American screws kit
Part Numbers
X3502-68002
X3502-68003
X3502-68002
X3502-68003
Active Gauges
Metal water cooling kit
Plastic water cooling kit
Metal water cooling kit
Plastic water cooling kit
ELECTRICAL
CONNECTOR
ELECTRICAL
CONNECTOR
FRG 700 Full Range Gauge
PVG 500 Pirani Vacuum Gauge
PCG 750 Pirani Capacitance Gauge
CDG-500 Capacitance Diaphragm Gauge
Ask Agilent for details
VENT
SCREW
VENT
SCREW
Pumping Speed
Compression Ratio
FORELINE
FLANGE KF16
FORELINE
FLANGE KF16
Hydrogen
Helium
Nitrogen
Argon
Hydrogen
Helium
Nitrogen
Argon
80
70
60
50
40
30
20
10
0
1,E+12
1,E+11
1,E+10
1,E+09
1,E+08
1,E+07
1,E+06
1,E+05
1,E+04
1,E+03
1,E+02
1,E+01
1,E+00
ISO 63K
CFF 4"1/2
1,E-09
1,E-08
1,E-07
1,E-06
1,E-05
1,E-04
1,E-03
1,E-02
1,E-01
1,E+00
1,E-3
1,E-2
1,E-1
1,E+0
1,E+1
1,E+2
Inlet Pressure (mbar)
Foreline Pressure (mbar)
Ø97 [3.82]
Ø97 [3.82]
3D Drawings available for download
3
2
www.agilent.com/chem/vacuum
United States
Agilent Technologies
121 Hartwell Avenue, Lexington MA 02421, USA
Tel: +1 781 861 7200
Toll free: +1 800 882 7426
vpl-customercare@agilent.com
Europe and other countries
Agilent Technologies Italia SpA
via F.lli Varian 54, 10040 Leini, (Torino), Italy
Tel: +39 011 9979 111
Toll free: 00 800 234 234 00
vpt-customercare@agilent.com
This information is subject to change without notice.
© Agilent Technologies, Inc. 2017
Printed in the USA, October, 2017
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