969-9942M007 [HP]
Agilent Quality Assured;
| 型号： | 969-9942M007 |
| 厂家： | 
HEWLETT-PACKARD |
| 描述： | Agilent Quality Assured |
| 文件： | 总3页 (文件大小：619K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Agilent TwisTorr 84FS
Split Flow
Agilent Quality Assured
Datasheet
Technical Specifications
Main Pumping speed
ISO 63
54
50
The 84FS Split Flow
turbo pump takes
N2
He
H2
l/s
l/s
l/s
advantage of all standard
Agilent 84FS pump
52
Gas throughput at full rotational speed Air cooling
Water Cooling
(25°C, 65 l/h)
features and benefits,
providing, in addition, a
solution for applications
with multiple chambers
to be pumped as GC-MS,
SEM, etc.
(with recommended forepump)
(35°C)
N2
K-ratio
N2
He
Ar
100 sccm
Main-Side
>10+5
100 sccm
Main-Foreline
>10+10
>10+5
>10+5
>10+5
>10+10
Inlet port base pressure with
< 5 x 10-9 mbar (< 3.75 x 10-9 Torr)
recommended forepump (5 m3/h)
Inlet flange
ISO 63
Side port flange
Foreline flange
Rotational speed
Start-up time
KF16 NW
KF16 NW
81000 rpm (1350 Hz driving frequency)
< 2 minutes
Recommended forepump mechanical: Agilent DS 40M / DS 102
dry pump:
Agilent IDP-3 / SH 110
Any
Operating position
Operating ambient temperature
Relative humidity of air
Bakeout temperature
Lubricant
+5 °C to +35 °C
0 - 90 % (not condensing)
80°C at inlet ISO flange
Permanent lubrication
Cooling requirements
- Air Cooling
Air flow temperature +5°C to +35 °C
Cooling water temperature:
- Water Cooling
+15 °C to +25 °C
Minimum flow: 65 l/h (0.30 GPM)
Pressure: 2 to 4 bar (45 to 75 psi)
Noise Pressure Level
(at 1 mt at full speed)
40 dB(A) *
Storage temperature
Max altitude
-40° C to +70° C
3000 m
Certifications
CE, C-CSA-US, RoHS
compliant as per 2011/65/UE
Weight kg (lbs)
Pump ISO 63
kg 2.05
*average value ± 4 dB(A) std deviation
Agilent TwisTorr 84FS Split Flow
Datasheet
Side Port Pumping Speed
Main Port Pumping Speed
60,0
50,0
40,0
30,0
4
3,5
3
2,5
2
1,5
1
20,0
Nitrogen
Nitorgen
Helium
Argon
Helium
10,0
Argon
0,5
0,0
1,00E-08
0
1,00E-07
1,00E-06
1,00E-05
1,00E-04
1,00E-03
1,00E-02
1,00E-01
1,00E+00
1,00E-03
1,00E-02
1,00E-01
1,00E+00
Side Port Pressure (mbar)
Main Port Pressure (mbar)
Main/Side Port Compression Ratio
Main Port vs Foreline Compression Ratio
1,0E+11
1,0E+10
1,0E+09
1,0E+08
1,0E+07
1,0E+06
1,0E+05
1,0E+04
1,0E+06
1,0E+05
1,0E+04
1,0E+03
1,0E+02
Main Port Nitrogen
1,0E+03
Nitrogen
Helium
Argon
1,0E+01
1,0E+02
1,0E+01
1,0E+00
Main Port Helium
Main Port Argon
1,0E+00
1,0E-03
1,0E-02
1,0E-01
1,0E+00
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
Side Port Pressure (mbar)
Foreline Pressure (mbar)
Side Port vs Foreline Compression Ratio
1,0E+06
1,0E+05
1,0E+04
1,0E+03
1,0E+02
Side Port Nitrogen
Side Port Helium
1,0E+01
Side Port Argon
1,0E+00
1,0E-02
1,0E-01
1,0E+00
1,0E+01
1,0E+02
Foreline Pressure (mbar)
Agilent TwisTorr 84FS Split Flow
Datasheet
Ordering Information
Pumps
TwisTorr 84FS Split Flow
Part Numbers
X3502-64300
Vibration isolator
Vibration isolator ISO 63
969-9375
Venting
Controllers
Part Numbers
X3508-64001
X3508-64002
X3509-64000
X3509-64001
X3510-64000
Vent Valve N.O. 0,5 mm orifice (0,5 m cable)
Vent Valve extension cable (5 m)
Vent Valve extension cable (10 m)
Vent Valve extension cable (15 m)
Vent Valve extension cable (20 m)
Vent Screw M5
969-9844
TwisTorr 84FS AG Rack controller RS232/485
TwisTorr 84FS AG Rack controller Profibus
TwisTorr 84FS on-board controller 110/220V
TwisTorr 84FS on-board controller 24V
TwisTorr 84FS PCB Controller
969-9941
969-9941M003
969-9941M001
969-9941M005
X3502-68005
X1699-64039
Accessories
Part Numbers
Vent Adapter kit M5-M8
Cables
Purge
Mains cable NEMA plug, 3 m long
Mains cable European plug, 3 m long
Serial cable and T-plus software
PCB cable
969-9958
Purge Screw
X3502-68004
969-9239
969-9240
969-9241
969-9242
969-9232
969-9236
969-9957
Purge valve 10 SCCM NW16KF - M12
Purge valve 10 SCCM ¼ Swagelok - M12
Purge valve 20 SCCM NW16KF - M12
Purge valve 20 SCCM ¼ Swagelok - M12
Purge valve 10 SCCM ¼ Swagelok - ¼ Swagelok
Purge valve 20 SCCM ¼ Swagelok - ¼ Swagelok
969-9883
969-9869
Pump extension cable (3 m)
Extension cable 5 m
Extension cable 10 m
Extension cable 15 m
Extension cable 20 m
Inlet screen
Inlet screen ISO63
969-9942
969-9942M007
969-9942M006
969-9942M005
969-9942M004
Mounting
Controller side mounting bracket
Active Gauges
FRG 700 Full Range Gauge
PVG 500 Pirani Vacuum Gauge
PCG 750 Pirani Capacitance Gauge
CDG-500 Capacitance Diaphragm Gauge
X3502-68006
X3502-68001
Ask Agilent for details
Ask Agilent for details
Ask Agilent for details
Ask Agilent for details
Cooling
Metal Water Cooling Kit
Plastic Water cooling kit
Air cooling kit (0,5 m cable)
Air cooling kit extension cable (5 m)
X3502-68002
X3502-68003
969-9290
969-9940
United States
Agilent Technologies
121 Hartwell Avenue, Lexington MA 02421, USA
Tel: +1 781 861 7200, Fax: +1 781 860 5437 -
Toll free: +1 800 882 7426
Europe and other countries
Agilent Technologies Italia SpA
via F.lli Varian 54, 10040 Leini, (Torino), Italy
Tel: +39 011 9979 111, Fax: +39 011 9979 350
Toll free: 00 800 234 234 00
This information is subject to change without notice.
© Agilent Technologies, Inc. 2017
Published in Italy, March, 2017
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CAPACITOR, VARIABLE, CERAMIC, 400V, 7.5pF - 50pF, VERTICAL ADJUSTER, THROUGH HOLE MOUNT
JOHANSON
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