9699396 [HP]
Agilent TwisTorr 304 FS;
| 型号： | 9699396 |
| 厂家： | 
HEWLETT-PACKARD |
| 描述： | Agilent TwisTorr 304 FS |
| 文件： | 总4页 (文件大小：1651K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Data Sheet
Agilent TwisTorr 304 FS
The new generation Turbo Pump
with Agilent Floating Suspension
The Agilent TwisTorr 304 FS turbomolecular high-vacuum pump combines TwisTorr
drag stage technology and Agilent Floating Suspension to provide high performance,
reliability, and economy.
TwisTorr drag stages create high compression ratios for light gases such as
hydrogen and helium to deliver high throughput and high tolerance of foreline
pressure, thereby permitting the use of smaller and more economical backing
pumps. This technology results in a compact rotor design that is energy-efficient
and maintains a low operating temperature.
The Agilent Floating Suspension system reduces noise and vibration, and ensures
optimal bearing operating conditions to extend operating life, minimize system
downtime, and assure stability over time.
The unique bearing and dry lubrication in the TwisTorr 704 FS eliminate oil and
maintenance, and permit operation of the pump in any orientation. Available with
onboard or rack controllers.
Technical Specification
Technical Specification
Technical Specification
mechanical: Agilent DS 102
ISO 100 / CF 6”
ISO 160 / CF 8”
Pumping speed
Recommended forepump
dry pump: Agilent IDP-7
Any
250 L/s
255 L/s
220 L/s
250 L/s
250 L/s
255 L/s
220 L/s
250 L/s
N2
He
H2
Ar
Operating position
+5 °C to +35 °C
Oper. ambient temperature
Rel. humidity of air
0 to 90% (not condensing)
Gas throughput at full
rotational speed (with
recomm. forepump)
80 °C at inlet flange max (ISO flange)
120 °C at inlet flange max (CFF flange)
Ambient Temp.
(25 °C)
Water Temp.
Bakeout temperature
Lubricant
(25 °C, 50 L/h)
Permanent grease lubrication
170 SCCM
110 SCCM
170 SCCM
110 SCCM
N2
Ar
Forced air (5- 35 °C ambient temperature)
Water (mandatory if ambient temp. > 35 °C)
Cooling requirements
Water temperature from +15°C to +25°C
Water flow min. 100L/h
Compression ratio and foreline tolerance
> 1 x 1011
>10 mbar
>10 mbar
>4 mbar
N2
He
H2
Ar
> 1 x 108
1.5 x 106
> 1 x 1011
Minimum flow: 50 L/h (0.89 GPM)
Temperature: +15 °C to +30°C
Pressure: 3 to 5 bar (45 to 75 psi)
Coolant water
>10 mbar
Base pressure with
recommended forepump
(5 m3/h)
< 50 dB(A) at 1 meter
3000 m
Noise Pressure level
Max altitude
< 1 x 10-10 mbar
(< 1 x 10-10 Torr)
Pump ISO 100
Pump CFF 6’’
Pump ISO 160
Pump CFF 8’’
5.5 kg (12.3)
7.5 kg (16.5)
5.7 kg (12.6)
9.7 kg (20.9)
KF16 NW (KF25 - optional)
60000 rpm (1010 Hz driving frequency)
< 3 minutes
Foreline flange
Rotational speed
Start-up time
Weight kg (lbs)
Conformity to norms
61326-1
EMC (Control Units)
Safety (CE/CSA)
ROHS
DIR 2006/42/CE
DIR 2011/65/EU
Outline Drawing
PURGE
SCREW
PURGE
SCREW
86.5 [3.41]
86.5 [3.41]
ELECTRICAL
CONNECTOR
ELECTRICAL
CONNECTOR
WATER
COOLING
WATER
COOLING
VENT
SCREW
VENT
SCREW
FORELINE
FLANGE KF16
FORELINE
FLANGE KF16
ISO 100K
CFF 6"
Ø144 [5.67]
Ø144 [5.67]
3D Drawings available for download
2
Ordering Information
X3500-68010
9699949
Pumps
Configuration Options
X3511-64007
X3500-64001
X3500-64002
X3500-64003
X3500-64004
X3500-64005
X3500-64006
X3500-64007
X3500-64010
Part Numbers
X3506-64002
X3506-64003
X3507-64002
X3507-64003
Part Numbers
9699958
Air cooling kit for onboard controller
Fan extension cable for onboard controller
Air cooling kit for rack AG controller
Fan extension cable for rack AG controller
Vibration isolator
TwisTorr 304 FS ISO 100 water cooling
TwisTorr 304 FS CFF 6” water cooling
TwisTorr 304 FS ISO 160 water cooling
TwisTorr 304 FS CFF 8” water cooling
TwisTorr 304 FS ISO100 air cooling
TwisTorr 304 FS CFF 6” air cooling
TwisTorr 304 FS ISO 160 air cooling
TwisTorr 304 FS CFF 8” air cooling
TwisTorr 304 FS ISO 100 SF water cooling
Controllers
X3500-68011
9699940
Part Numbers
9699344
Vibration isolator ISO 100
9699334
Vibration isolator CF 6”
9699345
Vibration isolator ISO 160
9699335
Vibration isolator CF 8”
9699396
Vibration isolator ISO 100 IDX
Vent flange, NW 10 KF / M8
9699108
TwisTorr 304 FS AG rack controller with RS232/485
TwisTorr 304 FS AG rack controller with Profibus
TwisTorr 304 FS onboard controller 24 Vdc
TwisTorr 304 FS onboard controller 100-240 Vac
Cables
Venting
Part Numbers
X3505-68000
X3505-68001
9699844
Delay vent valve 1.2 mm orifice
Delay vent valve 0.5 mm orifice
Vent valve N.O. for rack AG controller (0.5 mm)
Vent valve for onboard controller (1.2 mm)
Vent valve for onboard controller (0.5 mm)
Purge
9699834
9699834M006
Part Numbers
9699239
Mains cable NEMA plug, 3 m long
Mains cable European plug, 3 m long
Serial cable and A-plus Software
Serial Cable & T-plus Software
9699957
9699883
Purge valve 10 SCCM NW16KF - M12
Purge valve 10 SCCM ¼ Swagelok - M12
Purge valve 20 SCCM NW16KF - M12
Purge valve 20 SCCM ¼ Swagelok - M12
Purge valve 10 SCCM ¼ Swagelok - ¼ Swagelok
Purge valve 20 SCCM ¼ Swagelok - ¼ Swagelok
Mounting
9699883
9699240
9699948M007 (5 m)
9699948M006 (10 m)
9699948M005 (15 m)
9699948M004 (20 m)
9699241
9699242
9699232
Extension cable
9699236
Inlet Screen
Inlet Screen ISO 100
Inlet Screen CFF 6”
Inlet Screen ISO 160
Inlet Screen CFF 8”
Cooling
Part Numbers
X3500-68000
9699302
Part Numbers
X3500-68012
Bracket for onboard controller side mounting
Foreline flange KF25
X3500-68002
X3500-68001
9699304
Active Gauges
Part Numbers
Ask Agilent for details
Ask Agilent for details
Ask Agilent for details
Ask Agilent for details
FRG 700 Full Range Gauge
Part Numbers
9699337
PVG 500 Pirani Vacuum Gauge
PCG 750 Pirani Capacitance Gauge
CDG-500 Capacitance Diaphragm Gauge
Water cooling kit
9699347
Plastic water cooling kit
Compression Ratio
Pumping Speed
Hydrogen
H2
Helium
Nitrogen
Argon
Helium
Nitrogen
Argon
2
0
Foreline Pressure (mbar)
Inlet Pressure (mbar)
3
www.agilent.com/chem/vacuum
United States
Agilent Technologies
121 Hartwell Avenue, Lexington MA 02421, USA
Tel: +1 781 861 7200
Toll free: +1 800 882 7426
vpl-customercare@agilent.com
Europe and other countries
Agilent Technologies Italia SpA
via F.lli Varian 54, 10040 Leini, (Torino), Italy
Tel: +39 011 9979 111
Toll free: 00 800 234 234 00
vpt-customercare@agilent.com
This information is subject to change without notice.
© Agilent Technologies, Inc. 2017
Printed in the USA, October, 2017
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