X3511-64016 [HP]
Agilent TwisTorr 704 FS;
| 型号： | X3511-64016 |
| 厂家： | 
HEWLETT-PACKARD |
| 描述： | Agilent TwisTorr 704 FS |
| 文件： | 总4页 (文件大小：1507K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Data Sheet
Agilent TwisTorr 704 FS
The new generation Turbo Pump
with Agilent Floating Suspension
The Agilent TwisTorr 704 FS turbomolecular high-vacuum pump combines TwisTorr
drag stage technology and Agilent Floating Suspension to provide high performance,
reliability, and economy.
TwisTorr drag stages create high compression ratios for light gases such as
hydrogen and helium to deliver high throughput and high tolerance of foreline
pressure, thereby permitting the use of smaller and more economical backing
pumps. This technology results in a compact rotor design that is energy-efficient
and maintains a low operating temperature.
The Agilent Floating Suspension system reduces noise and vibration, and ensures
optimal bearing operating conditions to extend operating life, minimize system
downtime, and assure stability over time.
The unique bearing and dry lubrication in the TwisTorr 704 FS eliminate oil and
maintenance, and permit operation of the pump in any orientation. Available with
onboard or rack controllers.
Technical Specification
Technical Specification
Technical Specification
DS302
IDP10
IDP15
ISO 160 / CF 8”
Pumping speed
Recommended forepump
660 L/s
640 L/s
480 L/s
625 L/s
N2
He
H2
Ar
Any
Operating position
+5 °C to +35 °C
Oper. ambient temperature
Rel. humidity of air
Gas throughput at full
rotational speed
(with recomm. forepump)*
Water Temperature.
0 - 90 % (not condensing)
Ambient Temp. (25 °C)
(25 °C, 50 L/h)
ISO pump: 80 °C at inlet flange
CFF pump: 120 °C at inlet flange
Bakeout temp.
7.9 mbarL/s
467 SCCM
10.4 mbarL/s
615 SCCM
He
N2
Permanent grease lubrication
Lubricant
4.3 mbarL/s
255 SCCM
6.2 mbarL/s
367 SCCM
Cooling requirements
Air cooling
Air temperature from +5°C to 35°C
1.5 mbarL/s
89 SCCM
3.3 mbarL/s
195 SCCM
Water temperature from +15°C to +25°C
Water flow min. 100L/h
Ar
Water cooling
(*) Backing pump 11.6 m3/hr
Noise Pressure Level
(at 1m at full speed)
43dB(A)
Compression ratio and foreline tolerance*
-40°C to +70°C
3000 m
Storage temperature
Max altitude
>1E+11
2E+08
3E+06
>1E+11
10 mbar
10 mbar
>4 mbar
8.5 mbar
N2
He
H2
Ar
ISO160K
ISO160F
CFF 8”
20.6 Kg / 45.3 lbs.
22.6 Kg / 49.7 lbs.
22 Kg / 48.4 lbs.
Weight kg (lbs)
(*) Foreline Tolerance defined as the pressure at which the turbopump still produce a
compression of 100 and estimated in water cooling mode
< 1 x 10-10 mbar
(< 1 x 10-10 Torr)
Conformity to norms
Base pressure with
recomm. forepump
61326-1
EMC (Control Units)
Safety (CE/CSA)
Machinery Directive
Low Voltage Directive
EMC Directive (Control Units)
ROHS
61010-1
ISO 160K, ISO 160F, CFF 8”
NW25 (NW40 as optional accessory)
Auto setting from 40'800 RPM to 49'500 RPM
< 5 minutes
Inlet flange
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU
Foreline flange
Rotational speed
Start-up time
115.25 [4.54]
117.25 [4.62]
115.25 [4.54]
117.25 [4.62]
Outline Drawing
PURGE
SCREW
PURGE
SCREW
FORELINE
FLANGE KF25
FORELINE
FLANGE KF25
VENT
SCREW
VENT
SCREW
ELECTRICAL
CONNECTOR
ELECTRICAL
CONNECTOR
CFF 8"
Ø202.44 [7.97]
ISO160K
Ø179.86 [7.08]
Ø207.5 [8.17]
Ø207.5 [8.17]
3D Drawings available for download
2
Ordering Information
Pumps
Configuration Options
X3511-64000
X3511-64001
X3511-64002
X3511-64003
X3511-64015
X3511-64016
X3511-64017
X3511-64018
Part Numbers
X3501-64016
X3512-64016
Part Numbers
9699958
Cooling
Part Numbers
X3501-68001
9699297
TwisTorr 704 FS ISO160K KF25 air cooling
TwisTorr 704 FS ISO160F KF25 air cooling
TwisTorr 704 FS CFF8" KF25 air cooling
TwisTorr 704 FS CFF8" Long-Neck KF25 air cooling
TwisTorr 704 FS ISO160K KF25 water cooling
TwisTorr 704 FS ISO160F KF25 water cooling
TwisTorr 704 FS CFF8" KF25 water cooling
TwisTorr 704 FS CFF8" Long-Neck KF25 water cooling
Controllers
Medium-TMP Air Cooling Kit for rack controller
Medium-TMP Air Cooling Kit for onboard controller
Plastic water cooling kit
9699347
9699337
Metal Water cooling Kit
X3501-68101 (5 m)
X3501-68051 (10 m)
X3501-68061 (15 m)
X3501-68021 (20 m)
X3501-68011 (30 m)
X3501-68071 (50 m)
X3501-68081 (75 m)
X3501-68091 (100 m)
Air Cooling Kit Extension Cable
TwisTorr Medium-TMP rack controller
TwisTorr Medium-TMP onboard controller
Cables
Venting
Vent valve driven by rack controller
Vent valve driven by onboard controller
Vent flange, NW 10 KF / M8
Spare Vent Screw
Part Numbers
X3501-68002
9699834
Mains cable NEMA plug 3 m long
Mains cable EU plug 3 m long
9699957
9699108
X3501-68005
9699883
Mains cable UK plug 2.5 m long
X3511-68000
Serial Cable and A-plus
X3501-68004 (5 m)
X3501-68054 (10 m)
X3501-68064 (15 m)
X3501-68074 (20 m)
X3501-68084 (30 m)
X3501-68034 (50 m)
X3501-68094 (75 m)
X3501-68104 (100 m)
9699948M001 (5 m)
9699948M003 (10 m)
9699948M004 (15 m)
9699948M002 (20 m)
9699948M005 (30 m)
9699948M006 (50 m)
9699948M009 (75 m)
9699948M010 (100 m)
Vent valve Rack Extension Cable
Medium-TMP Extension Cable
Purge
Purge 10SCCM M12-NW16KF
Purge 10SCCM M12-1/4Swagelok
Purge 20SCCM M12-NW16KF
Purge 20SCCM M12-1/4Swagelok
Spare Purge Screw
Part Numbers
9699239
Inlet Screen
Inlet Screen ISO160/CFF8
Part Numbers
9699304
9699240
Mounting
Part Numbers
X3511-68003
X3511-68001
X3511-68002
9699241
Medium-TMP onboard ctlr. side-mounting bracket
Medium-TMP KF25 foreline flange
Medium-TMP KF40 foreline flange
9699242
X3502-68004
Compression Ratio
Pumping Speed
14
700
600
500
400
300
200
100
0
10
12
10
10
10
H2
Hydrogen
Helium
Nitrogen
Argon
Helium
Nitrogen
Argon
8
10
6
10
4
10
2
10
-3
-2
10
-1
10
0
1
2
-9
10
-8
10
-7
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
10
10
10
10
10
Foreline Pressure (mbar)
Inlet Pressure (mbar)
3
www.agilent.com/chem/vacuum
United States
Agilent Technologies
121 Hartwell Avenue, Lexington MA 02421, USA
Tel: +1 781 861 7200
Toll free: +1 800 882 7426
vpl-customercare@agilent.com
Europe and other countries
Agilent Technologies Italia SpA
via F.lli Varian 54, 10040 Leini, (Torino), Italy
Tel: +39 011 9979 111
Toll free: 00 800 234 234 00
vpt-customercare@agilent.com
This information is subject to change without notice.
© Agilent Technologies, Inc. 2017
Printed in the USA, October, 2017
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