ZMID5202AE1R [IDT]
Inductive Position Sensor IC;
| 型号： | ZMID5202AE1R |
| 厂家： | 
INTEGRATED DEVICE TECHNOLOGY |
| 描述： | Inductive Position Sensor IC 传感器 换能器 |
| 文件： | 总30页 (文件大小：987K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
ZMID5201/-02/-03
Inductive Position Sensor IC
Features
Datasheet
Description
The ZMID5201, ZMID5202, and ZMID5203 ICs are a family of
inductive position sensors, used for absolute rotary and linear
motion sensing in automotive, industrial, medical, and consumer
applications.
.
.
.
.
.
.
.
Position sensing based on inductive principle
Cost effective, no magnet required
Immune to magnetic stray fields; no shielding required
Suitable for harsh environments and extreme temperatures
Only three wires (ground, supply, output)
The ZMID520x uses the physical principles of induction in a wire
loop and eddy currents to detect the position of an electrically
conducting target that is sliding or rotating above a set of coils,
consisting of one transmitter coil and two receiver coils.
Nonvolatile user memory; programming through output pin
Single IC supports on-axis and off-axis rotation, linear motion,
and arc motion sensing
The three coils are typically printed as copper traces on a printed
circuit board (PCB). They are arranged such that the transmitter
coil induces a secondary voltage in the receiver coils that
depends on the position of the metallic target above the coils.
.
.
.
.
.
High resolution, even for small angle ranges
High accuracy: ≤ 0.2% full scale
9-point user linearization
A signal representative of the target’s position over the coils is
obtained by demodulating and processing the secondary voltages
from the receiver coils. The target can be any kind of metal, such
as aluminum, steel or a PCB with a printed copper layer.
Rotation sensing up to a full turn of 360º
Overvoltage and reverse-polarity protection:
-14V to +18V maximum, depending on product
.
.
.
.
.
ESD and short-circuit protection
The ZMID5201/-02-/03 ICs are fully qualified to the automotive
standard AEC-Q 100, grade 0 from -40°C up to 150°C ambient
temperature.
Power or ground loss detection
Facilitates redundant design requirements
Programmable non-linearity correction
Three versions with different output interfaces are available:
Adaptive gain control supporting a wide range of coil designs
and target displacement
.
.
.
ZMID5201: Analog output
ZMID5202: PWM digital output
ZMID5203: SENT digital output
.
Suitable for implementation in safety-related systems
compliant to ISO26262 up to ASIL-B
Available Support
.
Evaluation Kit
Documentation
Application Circuit
.
10
7
4
VDDT
VDDE
SOUT
Physical Characteristics
CVT
+5V
OUT
GND
CVE
.
.
.
Wide operation temperature: -40 C to +150°C
Supply voltage: 4.5V to 5.5V
9
EP
Tx
CT
8
Small 14-TSSOP package
EN
6
5
3
VSSE
VDDA
VDDD
14
13
12
11
Typical Applications
R1P
R1N
R2P
Rx
(cos)
.
.
.
Rotary position sensors up to 360°; e.g. steering angle
sensors, potentiometer replacement
CVA
CVD
Small-angle sensors or arc-motion sensors; e.g. pedal,
vehicle level, or valve sensors
2
1
Rx
TEST_ENA
TEST_D
(sin)
Linear motion sensors; e.g. linear-actuator position sensors,
fluid-level sensors
R2N
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ZMID5201/-02/-03 Datasheet
ZMID5201/-02/-03 Block Diagram
VDDA VDDD VDDT
ZMID520x Family
VDDE
Power
Management
One-Wire
Interface
(OWI)
VSSE
ZMID5201
Analog Interface
R1P
Rx
Cosine
ZMID5202
PWM Interface
R1N
Digital
Signal
Processing
Protection
SOUT
ADC
Analog Front-End
ZMID5203
SENT Interface
R2P
Rx
R2N
Sine
EP
EN
Tx
TEST_ENA
TEST_D
Oscillator
EEPROM
CT
Test
Control
CT1
(opt.)
CT2
(opt.)
Diagnosis
Note: If CT1 and CT2 are
used, CT is not used.
Ordering Information
Orderable Part
ZMID5201AE1R
ZMID5201AE1T
ZMID5202AE1R
ZMID5202AE1T
ZMID5203AE1R
ZMID5203AE1T
ZMID5201-EVK
ZMID5202-EVK
ZMID5203-EVK
Description and Package
MSL Rating
Shipping Packaging
Tape and Reel
Tube
Temperature
-40° to +150°C
-40° to +150°C
-40° to +150°C
-40° to +150°C
-40° to +150°C
-40° to +150°C
ZMID5201; Analog Output; 14-TSSOP
ZMID5201; Analog Output; 14-TSSOP
ZMID5202; PWM Output; 14-TSSOP
ZMID5202; PWM Output; 14-TSSOP
ZMID5203; SENT Output; 14-TSSOP
ZMID5203; SENT Output; 14-TSSOP
1
1
1
1
1
1
Tape and Reel
Tube
Tape and Reel
Tube
ZMID5201 Evaluation Kit: ZMID Communication Board, ZMID5201 Demo Board with printed sensor coil, cable
ZMID5202 Evaluation Kit: ZMID Communication Board, ZMID5202 Demo Board with printed sensor coil, cable
ZMID5203 Evaluation Kit: ZMID Communication Board, ZMID5203 Demo Board with printed sensor coil, cable
Corporate Headquarters
6024 Silver Creek Valley Road
San Jose, CA 95138
Sales
Tech Support
www.IDT.com/go/support
1-800-345-7015 or 408-284-8200
Fax: 408-284-2775
www.IDT.com/go/sales
www.IDT.com
DISCLAIMER Integrated Device Technology, Inc. (IDT) and its affiliated companies (herein referred to as “IDT”) reserve the ri ght to modify the products and/or specifications described herein at any time,
without notice, at IDT's sole discretion. Performance specifications and operating parameters of the described products are determined in an independe nt state and are not guaranteed to perform the same
way when installed in customer products. The information contained herein is provided without representation or warranty of any kind, whether express or implied, including, but not limited to, the suitabi lity
of IDT's products for any particular purpose, an implied warranty of merchantability, or non-infringement of the intellectual property rights of others. This document is presented only as a guide and does not
convey any license under intellectual property rights of IDT or any third parties.
IDT's products are not intended for use in applications involving extreme environmental conditions or in life support systems or similar devices where the failure or malfunction of an IDT product can be
reasonably expected to significantly affect the health or safety of users. Anyone using an IDT product in such a manner does so at their own risk, absent an express, written agreement by IDT.
Integrated Device Technology, IDT and the IDT logo are trademarks or registered trademarks of IDT and its subsidiaries in the United States and other countries. Other trademarks used herein are the
property of IDT or their respective third party owners. For datasheet type definitions and a glossary of common terms, visit www.idt.com/go/glossary. All contents of this document are copyright of
Integrated Device Technology, Inc. All rights reserved.
© 2017 Integrated Device Technology, Inc.
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ZMID5201/-02/-03 Datasheet
Contents
1. Pin Assignments...........................................................................................................................................................................................5
2. Pin Descriptions............................................................................................................................................................................................5
3. Absolute Maximum Ratings..........................................................................................................................................................................6
4. Operating Conditions....................................................................................................................................................................................7
5. Electrical Characteristics ..............................................................................................................................................................................7
6. Circuit Description ........................................................................................................................................................................................9
6.1 Overview............................................................................................................................................................................................9
6.2 Block Diagram..................................................................................................................................................................................10
7. Redundant Connection...............................................................................................................................................................................11
8. Protection and Diagnostics.........................................................................................................................................................................12
8.1 I/O Protection...................................................................................................................................................................................12
8.2 Diagnostics ......................................................................................................................................................................................12
8.3 Automotive Safety Integrity Level (ASIL) .........................................................................................................................................12
9. ZMID5201 Inductive Sensor with Analog Output........................................................................................................................................13
10. ZMID5202 Inductive Sensor with PWM Output ..........................................................................................................................................15
11. ZMID5203 Inductive Sensor with SENT Output .........................................................................................................................................18
11.1 SENT Protocol .................................................................................................................................................................................19
12. Programming Options.................................................................................................................................................................................22
13. Operation at High Rotation Speeds............................................................................................................................................................23
14. Interpolation, Linearity Error Correction......................................................................................................................................................24
15. Application Examples .................................................................................................................................................................................25
16. Package Drawing 14-TSSOP.....................................................................................................................................................................27
17. Recommended Land Pattern......................................................................................................................................................................28
18. Marking Diagram ........................................................................................................................................................................................29
19. Ordering Information...................................................................................................................................................................................29
20. Revision History..........................................................................................................................................................................................30
List of Figures
Figure 1. Pin Assignments for 14-TSSOP Package – Top View ........................................................................................................................5
Figure 2. Coil Design for a Linear Motion Sensor...............................................................................................................................................9
Figure 3. Block Diagram ...................................................................................................................................................................................10
Figure 4. Application Diagram, Dual Redundant Sensor with Shared Transmit Coil........................................................................................11
Figure 5. External Components for ZMID5201 Analog Interface with Pull-Down Resistor...............................................................................13
Figure 6. External Components for ZMID5201 Analog Interface with Pull-up Resistor ....................................................................................13
Figure 7. Example of ZMID5201 Analog Output Transfer Function and Programming Options.......................................................................14
Figure 8. External Components for ZMID5202 PWM Interface with Pull-Up Resistor......................................................................................15
Figure 9. PWM Signal Range ...........................................................................................................................................................................16
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ZMID5201/-02/-03 Datasheet
Figure 10. Example of PWM Output Signal........................................................................................................................................................17
Figure 11. Example of ZMID5202 PWM Output Transfer Function and Programming Options .........................................................................17
Figure 12. External Components for ZMID5203 SENT Interface, Option A........................................................................................................18
Figure 13. External Components for ZMID5203 SENT Interface, Option B........................................................................................................18
Figure 14. External Components for ZMID5203 SENT Interface, Option C .......................................................................................................18
Figure 15. SENT Nibble Output for Value = 15DEC..............................................................................................................................................20
Figure 16. SENT Frame......................................................................................................................................................................................20
Figure 17. Example of ZMID5203 Output Transfer Function and Programming Options...................................................................................21
Figure 18. Relationship between Resolution and Rotational Speed...................................................................................................................23
Figure 19. Example Setup: Linear Motion ..........................................................................................................................................................25
Figure 20. Example Setup: Arc Motion...............................................................................................................................................................25
Figure 21. Example Setup: End-of-Shaft Rotation, On-Axis, 1 × 360 ...............................................................................................................25
Figure 22. Example Setup: Side-Shaft Rotation, Off-Axis, 1 × 360...................................................................................................................25
Figure 23. Example Setup: Side-Shaft Rotation, Off-Axis, 2 × 180...................................................................................................................26
Figure 24. Example Setup: Side-Shaft Rotation, Off-Axis, 6 × 60.....................................................................................................................26
Figure 25. 14-TSSOP Package Outline Drawing................................................................................................................................................27
Figure 26. 14-TSSOP Recommended PCB Land Pattern..................................................................................................................................28
List of Tables
Table 1. Pin Descriptions...................................................................................................................................................................................5
Table 2. Absolute Maximum Ratings.................................................................................................................................................................6
Table 3. Operating Conditions...........................................................................................................................................................................7
Table 4. ZMID5201/-02/-03 Electrical Characteristics.......................................................................................................................................7
Table 5. Coil Specifications ...............................................................................................................................................................................8
Table 6. ZMID5201 Analog Output Buffer Characteristics...............................................................................................................................13
Table 7. ZMID5202 PWM Output Buffer Characteristics.................................................................................................................................15
Table 8. ZMID5203 SENT Output Buffer Characteristics ................................................................................................................................19
Table 9. SENT Nibble Output for Value = 0DEC................................................................................................................................................19
Table 10. SENT Tick Length .............................................................................................................................................................................20
Table 11. Programming Options Overview........................................................................................................................................................22
Table 12. Maximum Output Data Rate..............................................................................................................................................................23
Table 13. Resolution at Different Rotation Speeds ...........................................................................................................................................24
Table 14. Linearity Correction Points ................................................................................................................................................................24
Table 15. Examples of Resolution Differences Depending on Product.............................................................................................................26
© 2017 Integrated Device Technology, Inc.
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ZMID5201/-02/-03 Datasheet
1. Pin Assignments
The ZMID5201/-02/-03 ICs are available in a 14-TSSOP RoHS package.
Figure 1. Pin Assignments for 14-TSSOP Package – Top View
1
2
3
4
5
6
7
14
13
12
11
10
9
TEST_D
TEST_ENA
VDDD
R1P
R1N
R2P
R2N
VDDT
EP
SOUT
VDDA
VSSE
8
VDDE
EN
2. Pin Descriptions
Table 1.
Pin Descriptions
Number
Name
TEST_D
TEST_ENA
VDDD
Type
Description
Factory test pin; must be left unconnected.
Factory test pin. Connect to the VSSE pin.
1
2
3
Input/output
Input/output
Supply
Internal regulated digital supply voltage. Connect capacitor CVD = 100nF from the VDDD
pin to the VSSE pin, no other load.
Analog output:
ZMID5201 only
Analog output (also referred to as AOUT for the ZMID5201). Refer to section 9,
Figure 5, and Figure 6 for external connections.
PWM digital output: PWM digital output (also referred to as PWM OUT for the ZMID5202). Refer to
section 10 and Figure 11 for external connections.
ZMID5202 only
4
5
SOUT
VDDA
SENT digital output: SENT output (also referred to as SENT OUT for the ZMID5203). Refer to section 11,
Figure 12, Figure 13, and Figure 14 for external connections.
ZMID5203 only
Digital input/output: Digital One-Wire Interface (OWI) used during programming.
programming only
Supply
Internal regulated analog supply voltage. Connect CVA = 100nF from the VDDA pin to
the VSSE pin; no other load.
6
7
VSSE
VDDE
Ground
Supply
Common ground connection.
External supply voltage. Connect the VDDE pin to CVE = 100nF capacitor in parallel with
a 1pF to 10pF capacitor connected to the VSSE pin.
8
9
EN
EP
Connect the transmitter coil between EP and EN. Resonant frequency is adjusted with a
parallel capacitor CT between EP and EN (see application diagram on page 1) or capa-
citors CT1 from EN to VSSE and CT2 from EP to VSSE (see block diagram on page 2).
Analog output
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ZMID5201/-02/-03 Datasheet
Number
10
Name
VDDT
R2N
Type
Description
Supply
Internal supply voltage for transmitter amplifier. Connect to CVT = 100nF to VSSE.
11
Analog input
Analog input
Connect receiver coil 2 between the R2N and R2P pins.
12
R2P
13
R1N
Connect receiver coil 1 between the R1N and R1P pins.
14
R1P
3. Absolute Maximum Ratings
The absolute maximum ratings are stress ratings only. Stresses greater than those listed below can cause permanent damage to the device.
Functional operation of the ZMID5201/-02/-03 at absolute maximum ratings is not implied. Exposure to absolute maximum rating conditions
could affect device reliability.
Table 2.
Absolute Maximum Ratings
Symbol
Parameter
Conditions
Minimum Maximum Units
VVDDE
External supply voltage
-18
-14
18
14
V
V
For negative voltage, external
current must be limited to 10mA
ZMID5201 analog output voltage on the
AOUT pin[a]
VOUT_ANA
Without external current limitation
-0.3
-14
14
18
V
V
For negative voltage, external
current must be limited to 10mA
ZMID5202 PWM output voltage on the
PWM OUT pin[a]
VOUT_PWM
Without external current limitation
-0.3
-14
18
18
V
V
For negative voltage, external
current must be limited to 10mA
ZMID5203 SENT output voltage on the
SENT OUT pin[a]
VOUT_SENT
Without external current limitation
-0.3
-0.3
18
V
V
VOSC_COIL
VR1P
Oscillator coil pins: EP, EN
Receiver coil pin: R1P
5.5
VR1N
Receiver coil pin: R1N
-0.3
3.6
V
VR2P
Receiver coil pin: R2P
VR2N
Receiver coil pin: R2N
VTEST_ENA
VTEST_D
VVDDA
VVDDD
VVDDT
Test pin: TEST_ENA
-0.3
-0.3
5.5
3.6
V
V
Test pin: TEST_D
Regulated supply voltage pin: VDDA
Regulated supply voltage pin: VDDD
Regulated supply voltage pin: VDDT
-0.3
3.6
V
[a] The SOUT pin is referred to as the AOUT pin for the ZMID5201; PWM OUT for the ZMID5202; and SENT OUT for the ZMID5203.
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ZMID5201/-02/-03 Datasheet
4. Operating Conditions
Conditions: VDDE = 5V ±10%, TA = -40°C to +150°C.
Table 3.
Operating Conditions
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
TA
Ambient temperature
-40
150
ºC
TJ
Junction temperature
-40
-50
175
150
140
5.5
ºC
ºC
TSTOR
RTHJA
VVDDE
Storage temperature
Thermal resistance junction to ambient
Supply voltage
ºC/W
V
4.5
±4
±3
±2
5
Pins VSS, VCC
Pin SOUT[ a]
All other pins
kV
Electrostatic discharge,
HBM 100pF/1.5kΩ
ESD
kV
kV
[a] The SOUT pin is referred to as the AOUT pin for the ZMID5201; PWM OUT for the ZMID5202; and SENT OUT for the ZMID5203.
5. Electrical Characteristics
The following electrical specifications are valid for the operating conditions as specified in Table 3: (TA = -40°C to 150°C).
Table 4.
ZMID5201/-02/-03 Electrical Characteristics
Symbol
VVDDE_TH_H
Parameter
Conditions
Minimum Typical Maximum Units
VDDE switch ON threshold
The device is activated when VDDE
increases above this threshold
4.4
V
VVDDE_TH_L
VDDE switch OFF threshold The device is deactivated when
VDDE decreases below this threshold
4
V
VVDDE_HYST
VVDDE_OVH
VDDE hysteresis
0.1
V
V
Over-voltage detection high
The device is deactivated after VDDE
increases above this voltage
7
VVDDE_OVL
VVDDT
Over-voltage detection low
The device is activated after VDDE
decreases below this voltage
5.6
2.4
5
V
V
Regulated coil driver supply
output voltage
Internally regulated, programmable
3.6
Without coils. no load
9
mA
mA
ICC
Current consumption
With coils, no load; depending on
programmable Tx coil current
12
20
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ZMID5201/-02/-03 Datasheet
Symbol
Angle Calculation
tSAMPLE
Parameter
Conditions
Minimum Typical Maximum Units
Data acquisition time
Output update rate
CORDIC resolution
45
50
16
55
10
µs
kHz
bits
tREFRESH
Analog output
RESCORDIC
Performance
INL
Internal; over 360° electrical
Accuracy[a]
See note.[a]
0.2
% FS
[a] The achievable accuracy depends on proper coil and target design. Nonlinearity errors in the calculated position might be further improved by
9-point linearization.
Table 5.
Coil Specifications
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
L
Excitation coil inductance
For Tx coil as shown in block
diagram in Figure 3
1.5
30
µH
Q
Quality factor
For Tx coil as shown in block
diagram in Figure 3
10
Q = ωL/R, f = 2.2MHz
fOSC
VTX_P
VRX
Excitation frequency
LC oscillator
2.2
50
3.5
5.6
7200
360
MHz
mVpp
mVpp
Excitation coil amplitude
Receive coil amplitude
Peak voltage, pins EP vs. EN
Input signal full range
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ZMID5201/-02/-03 Datasheet
6. Circuit Description
6.1 Overview
The ZMID5201/-02/-03 ICs are inductive position sensors for use in automotive, industrial, medical and consumer applications. They operate
on the principle of induction in a wire loop and eddy currents. The sensing element is a set of coils that are directly connected to the IC. The
coils consist of one transmit coil and two receive coils. The transmit coil and a capacitor form an LC oscillator that is directly driven by the IC.
It generates a magnetic field within the transmit coil area that is picked up by the receiver coils.
The voltage generated by the receiver coils depends on the position of the target in the sense that areas shielded by the target generate a
weaker secondary voltage compared to areas that are not shaded by the target.
The two receive coils are arranged so that the secondary voltages are relatively phase shifted by electrical 90°, thereby generating a
response curve (receive coil output voltages versus position) that resembles a sine and cosine waveform over the range of target travel. By
having a sine and cosine shaped response, a ratiometric measurement is possible, which greatly improves the robustness of the system
because the output signal will remain stable, even if the gap between coils and target is varied.
Figure 2 shows an example of a linear motion sensor with one transmit coil (Tx loop) and two receive coils (Sin loop and Cos loop). The
arrows in the receive coils indicate the direction of the induced current relative to each other. The direction of the current either clockwise (cw)
or counterclockwise (ccw) determines the polarity of the voltage generated in each loop (RxCos, RxSin).
Figure 2. Coil Design for a Linear Motion Sensor
Cos loop 1
(cw)
Cos loop 2
(ccw)
Tx loop
RxCos
Tx
RxSin
Metallic Target
Sin loop 2
(ccw)
Sin loop 3
(cw)
Sin loop 1
(cw)
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ZMID5201/-02/-03 Datasheet
6.2 Block Diagram
Figure 3 shows the block diagram of the ZMID5201/-02/-03.
Figure 3. Block Diagram
VDDA VDDD VDDT
ZMID520x Family
VDDE
Power
Management
One-Wire
Interface
(OWI)
VSSE
ZMID5201
Analog Interface
R1P
Rx
Cosine
ZMID5202
PWM Interface
R1N
Digital
Signal
Processing
Protection
SOUT
ADC
Analog Front-End
Oscillator
ZMID5203
SENT Interface
R2P
R2N
Rx
Sine
EP
EN
Tx
TEST_ENA
TEST_D
EEPROM
CT
Test
Control
CT1
(opt.)
CT2
(opt.)
Diagnosis
Note: If CT1 and CT2 are
used, CT is not used.
The main building blocks include the following:
.
.
.
.
.
Power management: power-on-reset (POR) circuit, low drop-out (LDO) regulators for internal supplies
Oscillator: generation of the transmit coil signal
Analog front-end: demodulator and gain control for the receive signals
Analog-to-digital converter (ADC): conversion into digital domain
Digital signal processing: offset correction, conversion of sine and cosine signals into angle and magnitude, angle range adjustment,
linearization, etc.
.
.
.
EEPROM: nonvolatile storage of factory and user-programmable settings
One-wire interface (OWI): programming of the chip through the output pin
Interface options:
— Analog output for ZMID5201
— PWM output for ZMID5202
— SENT output for ZMID5203
.
.
Protection: overvoltage, reverse polarity , short circuit protection
Test control: factory testing; connect TEST_D and TEST_ENA pins as indicated in Table 1.
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ZMID5201/-02/-03 Datasheet
7. Redundant Connection
In applications requiring extended safety, a redundant set-up is required. The ZMID5201/-02/-03 ICs also support this requirement by either
having two identical but physically separated sensors or by interleaving the 2 2 receiving coils and using one shared transmitter coil.
In Figure 4, two sensors share one common transmitter coil (Tx). Both sensors must share the same ground connection (GND) but could
have separate positive supply connections (VDD1, VDD2). This setup is particularly useful for designs having limited coil space.
In normal operation, both chips drive the transmitter coil (Tx) and calculate the target’s position through the receiving coil signals. If one chip
fails to drive the transmitter coil, for example due to loss of supply, the host system can detect the failed part (loss of signal) while the second
chip continues to drive the coil and maintains correct operation.
Figure 4. Application Diagram, Dual Redundant Sensor with Shared Transmit Coil
Sensor 1
Sensor 2
VDD2
+5V
VDD1
7
4
10
9
10
9
7
4
VDDE
SOUT
VDDT
EP
VDDT
EP
VDDE
SOUT
CVT
CVT
+5V
OUT1
GND
CVE
CVE
CT1
CT2
Tx
OUT2
8
8
EN
EN
6
5
3
6
5
3
VSSE
VDDA
VDDD
VSSE
VDDA
VDDD
14
13
12
11
14
13
12
11
R1P
R1N
R2P
R1P
R1N
R2P
Rx1
Rx3
(cos)
(cos)
CVA
CVD
CVA
CVD
2
1
2
1
Rx2
(sin)
Rx4
(sin)
TEST_ENA
TEST_D
TEST_ENA
TEST_D
R2N
R2N
.
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ZMID5201/-02/-03 Datasheet
8. Protection and Diagnostics
8.1 I/O Protection
In order to meet the automotive requirements for overvoltage and reverse-polarity protection on both the output and power supply pins, the
ZMID5201/-02/-03 ICs include several protection and diagnosis features:
1. Detection of broken power line, interrupted output signal, and broken ground connection on the receiving side
2. Protection against short circuit of output pin to VSSE, output pin to VDDE, and supply VDDE to VSSE
3. Overvoltage protection on supply pin VDDE
4. Overvoltage protection on output pin
5. Reverse-polarity protection on supply pin VDDE to VSSE
6. Reverse-polarity protection on output pin to VSSE
7. Reverse-polarity protection on output pin to VDDE
8.2 Diagnostics
The ZMID5201/-02/-03 monitors a number of features to accommodate ISO26262 diagnostic requirements. The monitored diagnostic
features include the following:
1. Supply voltage too low or too high
2. Rx sine coil: open, short, short to ground, or short to Rx cosine coil
3. Rx sine coil: amplitude error or offset error
4. Rx cosine coil: open, short, short to ground, or short to Rx sine coil
5. Rx cosine coil: amplitude error or offset error
6. Tx coil: amplitude too low or open
7. Tx coil: frequency out of range
8. LC oscillator failure
9. CORDIC magnitude too high or too low
10. Missing target
11. Internal EEPROM failure
12. ADC signal processing overflow
8.3 Automotive Safety Integrity Level (ASIL)
The ZMID5201/-02/-03 products are safety-related, intermediate hardware parts supporting up to ASIL-B in regard to random failures, and, as
such, they have been qualified according to ISO 26262:2012 Part 8, Clause 13 (Table 6). Integration of ZMID5201/-02/-03 products into
safety-related applications requires a safety analysis performed by customers.
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9. ZMID5201 Inductive Sensor with Analog Output
Typical interface circuits for the ZMID5201 are shown in Figure 5 and Figure 6.
Note: The pull-up or pull-down resistors are not mandatory for normal operation. However they are recommended for proper detection of
broken ground or broken supply wires at the receiving side.
Note: RF, CF = optional low pass filter. Values depend on user’s application.
Figure 5. External Components for ZMID5201 Analog Interface with Pull-Down Resistor
Wiring
ZMID5201: Sensor with Analog Interface
Analog Signal Receiver
5V supply
+5V
+5V
IN
7
VDDE
CVE
RF
OUT
4
AOUT
ZMID5201
MCU
CF
RPD,A
CANA
GND
GND
6
VSSE
Figure 6. External Components for ZMID5201 Analog Interface with Pull-up Resistor
Wiring
ZMID5201: Sensor with Analog Interface
Analog Signal Receiver
5V supply
+5V
+5V
IN
7
VDDE
CVE
RPU,A
RF
OUT
4
AOUT
ZMID5201
MCU
CANA
CF
GND
GND
6
VSSE
Table 6.
ZMID5201 Analog Output Buffer Characteristics
Note: Refer to the VDDE pin description in Table 1 for the value of CVE.
Symbol
Out_err
Parameter
Conditions
Minimum
Typical
Maximum
Units
mV
Analog output error
Offset and nonlinearity error
-6
6
Step_large
Output response, large step
Step=4.5V, CANA=10nF,
160
μs
RPD,A=5kΩ, 10% to 90%
CANA
RESANA
RPU,A
Output capacitor for analog
Analog output resolution
Output pull-up resistor
0.47
10
3
27
nF
bits
kΩ
kΩ
4.7
4.7
10
10
RPD,A
Output pull down resistor
3
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Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
%VDDE
%VDDE
%VDDE
%VDDE
%VDDE
mA
Normal operating range
Limits are programmable
5
95
Diag_high_ana Diagnostic high for analog
96
Diag_low_ana
VCL_L
Diagnostic low for analog
Clamping level , low [a]
Clamping level, high [a]
Output node short current
4
Programmable in 1% steps
Programmable in 1% steps
Short to VDDE or VSSE
5
68
95
50
VCL_H
32
Current_limit
[a] Low clamping level must be programmed lower than the VCL_H high clamping level.
For the ZMID5201, the 100% position range is mapped to a voltage range from 250mV to 4750mV. The stepping rate of the clamping
parameters is 1% so that the analog voltage stepping rate is 47.5 mV/%. The diagnostic low level is ≤ 200mV and the diagnostic high level is
≥ 4800mV.
Note that the minimum and maximum output positions can be mapped to the mechanical range of the application by programming the zero
angle offset, slope programming (linear vs. sawtooth), and clamping level register settings (refer to section 12 and Figure 7). For example, for
a pedal sensor with ratiometric analog output (ZMID5201), having 20° mechanical degrees of movement range and clamping levels of 5%
and 95%, the output value 0.25V (5% of VDDE) represents 0° mechanical degrees and the output value 4.75V (95% of VDDE) represents 20°
mechanical degrees. Note that the slope can be programmed to either rising (as shown in Figure 7) or falling with increasing electrical angle.
Figure 7. Example of ZMID5201 Analog Output Transfer Function and Programming Options
Note: The following figure illustrates an example of 5% and 95% clamping levels and a rising slope setting.
Output Voltage (%VDDE
)
100%
95%
1023DEC
Sawtooth
Linear Sensor
Programming Option
Programming Option
68%
32%
Slope
5%
0
Position
0°
Zero Angle
360°
Movement Range (Programmable 90° to 360° electrical)
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10. ZMID5202 Inductive Sensor with PWM Output
The typical interface circuit for the ZMID5202 is shown in Figure 8.
Note: RF, CF = optional low pass filter. Values depend on user’s application.
Figure 8. External Components for ZMID5202 PWM Interface with Pull-Up Resistor
Wiring
ZMID5202: Sensor with PWM Interface
Digital Signal Receiver
VPullup
+5V
+5V
IN
7
VDDE
CVE
RPU,PWM
RF
OUT
4
6
PWM
OUT
ZMID5202
MCU
CPWM
CF
GND
GND
VSSE
Table 7.
ZMID5202 PWM Output Buffer Characteristics
Note: Refer to VDDE pin in Table 1 for the value of CVE.
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
fPWM
PWM output frequency
User programmable
Typical - 7%
0.125
0.25
0.50
0.75
1.00
1.25
1.50
2.00
Typical + 7%
kHz
tPWM_FALL
PWM fall time
CPWM =4.7nF, RPU,PWM=1kΩ,
VPullup=5V, 2 correction bits
2.45
10
4.55
μs
RESPWM
VPullup
PWM resolution
bits
V
PWM output voltage
(pull-up)
16
10
VOL_PWM
VOH_PWM
RPU,PWM
PWM output LOW level
PWM output HIGH level
Pullup resistor for PWM
VPullup=5V to VPullup=16V
VPullup=5V to VPullup=16V
VPullup=5V
%VPullup
%VPullup
kΩ
90
1
10
10
20
95
VPullup=16V
3
CPWM
Output capacitor for PWM
Normal operating range
1
4.7
nF
Limits are programmable
5
% duty
cycle
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Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
Diag_high_PWM Diagnostic high for PWM
96
97.5
% duty
cycle
Diag_low_PWM Diagnostic low for PWM
2.5
4
% duty
cycle
DCL_L
DCL_H
Clamping level , low [a]
Clamping level, high [a]
Programmable in 1% steps
Programmable in 1% steps
5
68
95
% duty
cycle
32
% duty
cycle
[a] Low clamping level must be programmed lower than the DCL_H high clamping level.
The 100% position range is mapped to a duty cycle of 5% to 95%. A clamping step of 1% is mapped to a duty cycle change of 0.9%. The
diagnostic low level is mapped to a 2.5% (typical) duty cycle; the diagnostic high level is mapped to a 97.5% (typical) duty cycle.
Figure 9. PWM Signal Range
Normal Operating Range
PWM Duty Cycle
[%]
1
4 5
32
Clamping Level, Low
68
95 96 99
Clamping Level, High
The graph in Figure 10 shows examples of different PWM signals with 5%, 50%, and 95% duty cycle, representing the minimum, 50%, and
maximum output values.
Note that the minimum and maximum output positions can be mapped to the mechanical range of the application by programming the zero
angle offset, slope programming (linear or sawtooth), and clamping level (minimum/maximum duty cycle) register settings (see section 12 and
Figure 11). For example, for a pedal sensor with PWM output (ZMID5202), having 20° mechanical degrees of movement range and clamping
levels of 5% and 95%, the output value 0 represents 0° mechanical degrees and the output value 1023DEC represents 20° mechanical
degrees. Note that the slope can be programmed to either rising (as shown in Figure 11) or falling with increasing electrical angle.
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Figure 10. Example of PWM Output Signal
Vout
5% duty cycle = 0000DEC
50% duty cycle = 512DEC
95% duty cycle =1023DEC
VOH_PWM
VOL_PWM
0
1
2
3
4
5
6
7
8
9
0
1
2
3
4
5
6
7
8
9
0
1
2
3
4
5
6
7
8
9
0
time
tPWM
tPWM
tPWM
Figure 11. Example of ZMID5202 PWM Output Transfer Function and Programming Options
Note: The following figure illustrates an example of 5% and 95% clamping levels and a rising slope setting.
100%
1023DEC
95%
Sawtooth
Linear Sensor
Programming Option
Programming Option
68%
32%
Slope
5%
0
Position
0°
360°
Mechanical Movement Range
Zero Angle
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11. ZMID5203 Inductive Sensor with SENT Output
Three options for the typical interface circuit for the ZMID5203 are shown in Figure 12, Figure 13, and Figure 14.
Note: RF, CF and RP = optional low pass filter for the SENT interface. Values depend on user’s application.
Figure 12. External Components for ZMID5203 SENT Interface, Option A
Wiring
ZMID5203: Sensor with SENT Interface
Digital Signal Receiver
5V supply
+5V
+5V
IN
7
VDDE
RPU,SENT
51kΩ
CVE
R01
RS,SENT
560Ω
ZMID5203
OUT
4
SENT OUT
MCU
MCU
MCU
RF
CSENT
2.2nF
C11
C12
RP
CF
GND
GND
6
VSSE
Figure 13. External Components for ZMID5203 SENT Interface, Option B
Wiring
ZMID5203: Sensor with SENT Interface
Digital Signal Receiver
5V supply
+5V
+5V
IN
7
VDDE
CVE
R01
RPU,SENT 10kΩ to 51kΩ
ZMID5203
RF
OUT
4
SENT OUT
RS,SENT 560Ω
CSENT
C11
C12
CF
RP
GND
GND
2.2nF
6
VSSE
Figure 14. External Components for ZMID5203 SENT Interface, Option C
Wiring
ZMID5203: Sensor with SENT Interface
Digital Signal Receiver
5V supply
+5V
+5V
IN
7
VDDE
CVE
R01
RPU,SENT 10kΩ
RF
ZMID5203
OUT
4
SENT OUT
C11
C12
CSENT
100pF
CF
RP
GND
GND
6
VSSE
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Table 8.
ZMID5203 SENT Output Buffer Characteristics
Note: Refer to VDDE pin in Table 1 for the value of CVE.
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
bits
μs
12
6
RESSENT
SENT output resolution
tSTABLE_HIGH SENT HIGH stabilization time HIGH level at 3.8V
0.5
V
VOL
VOH
R01
Output LOW level
Output HIGH level
4.1
3.0
V
120
2.2
Ω
SENT output pi (π) filter
resistor
For application circuits options
A,B, and C
nF
C11
SENT output pi (π) filter first
capacitor
For application circuits options A,
B, and C
3.36
3.9
3.67
µs
nF
nF
tTICK
Clock tick time
For application circuit option C
SENT output pi (π) filter,
second capacitor
C12
2.2
For application circuits options A
and B
11.1 SENT Protocol
The SENT (Single Edge Nibble Transmission) protocol conforms to SAE J2716, Revision 2. In addition, SENT Pause and CRC can be
programmed according to SAE J2716, Revision 3.
For transmitting a nibble with the 0 value, 12 clock ticks are required: a fixed LOW period of 5 ticks followed by a HIGH period of 7 ticks. One
tick equals tTICK = 3.0µs to 3.67µs (see Table 8 ).
Table 9.
SENT Nibble Output for Value = 0DEC
Vout
5
7
5
VOH
VOL
0
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29
t (ticks)
For transmitting a nibble with the value 15DEC (1111BIN, FHEX), 27 clock ticks are required: a fixed LOW period of 5 ticks followed by a HIGH
period of 22 ticks. The total time for one nibble can be calculated as with the following equation:
(
)
tNIBBLE = tTICK 12 + x
Where x = the nibble decimal value = 0 to 15.
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Table 10. SENT Tick Length
Decimal
0
0
1
1
2
2
3
3
4
4
5
5
6
6
7
7
8
8
9
9
10
A
11
B
12
C
13
D
14
E
15
F
Hexadecimal
Number of ticks 12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
Figure 15. SENT Nibble Output for Value = 15DEC
Vout
5
22
5
VOH
VOL
0
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29
t (ticks)
Figure 16. SENT Frame
The SENT protocol frame consists of a fixed-length synch pulse (LOW period of 5 ticks followed by a HIGH period of 51 ticks), followed by a
status nibble, 6 data nibbles, and a CRC nibble. An optional pause pulse can be programmed to adjust the SENT frame to a fixed length of
270 ticks.
Data1
MSN
4-bit (#1)
Data1
MidN
4-bit (#2)
Data1
LSN
4-bit (#3)
Data2
MSN, ctr
4-bit (#4)
Data2
LSN, ctr
4-bit (#5)
Data2
inv MSN
4-bit (#6)
Vout
Sync
Status
4-bit (#0)
CRC
4-bit (#7)
Pause
(optional)
VOH
VOL
5
51
5
7 to 10
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
5
7 to 22
5
var
ticks
152 to 260
270
Note that the status nibble has a maximum length of only 5 + 10 = 15 ticks since bits 2 and 3 are always zero:
Status nibble:
0000BIN = Normal operation
0011BIN = Diagnostic state
The SENT output frame format can be programmed in one of two options:
1. 12-bit position data + 8-bit rolling counter (ctr in Figure 16) + inverted copy of Data1 MSN (nibble #1 in Figure 16) + cyclic redundancy
check (CRC). In this option, the SENT frame length is between 152 and 260 ticks with a variable frame length and 270 ticks with a fixed
frame length.
2. 12-bit position data + “000” data + CRC. In this option, if the pause pulse is disabled, the SENT frame has the shortest possible length:
less than 220 ticks.
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Note that the minimum and maximum output positions can be mapped to the mechanical range of the application by programming the zero
angle offset and slope register settings (see section 12 and Figure 17). For example for a pedal sensor with SENT output (ZMID5203) with 20°
mechanical degrees of movement range, the output value 0 represents 0° mechanical degrees and the output value 4095DEC represents 20°
mechanical degrees. Note that the slope can be programmed to either rising (as shown in Figure 17) or falling with increasing electrical angle.
Figure 17. Example of ZMID5203 Output Transfer Function and Programming Options
Note: The following figure illustrates an example using the rising slope setting.
4095DEC
Sawtooth
Linear Sensor
Programming Option
Programming Option
Slope
0
Position
0°
360°
Mechanical Movement Range
Zero Angle
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12. Programming Options
The ZMID520x family offers a variety of programming options. The IC is programmed through the output pin via a proprietary bi-directional
one-wire interface (OWI). For programming, no additional wires or programming voltage is required, so the IC can be fully programmed in the
field. Note: A full description of the IDT one-wire interface protocol and a detailed memory map are available on request. The main program-
ming functions are described in Table 11.
Table 11. Programming Options Overview
Function
Coil input
Products
Programming Option
Notes
All
Reverse coil polarity (increasing or decreasing
output relative to target movement)
Invert coils to change the direction of
the output values
Input amplifier
All
Offset of sine and cosine channels
Offset correction before CORDIC
angle calculation
Slope of transfer function
Zero position
All
All
Steepness of slope, rising/falling
Zero angle
Adjustment of angle range
To match mechanical zero position
with electrical zero position
Linearization
All
9-point linearization
To increase accuracy and compensate
for imperfections in coil design
Transmit coil
Output mode
All
Coil driver current and amplitude
Linear or sawtooth
To optimize Tx oscillator
All
Single or multiple ramps
ZMID5201
ZMID5202
ZMID5201
ZMID5202
ZMID5202
ZMID5202
ZMID5203
ZMID5203
Minimum, maximum output voltage
Minimum, maximum PWM duty cycle
Output voltage in diagnostic mode
PWM duty cycle in diagnostic mode
PWM output signal slew rate
Define normal operating range
Define normal operating range
To indicate diagnostic alarm
To indicate diagnostic alarm
To optimize EMC performance
Base frequency of PWM signal
Implementation of CRC calculation
Clamp low, clamp high
Diagnostic levels
PWM fall time
PWM base frequency
SENT CRC
PWM frequency
CRC according to SAE J2716, Rev.2 or Rev.3
SENT Pause
Optional pause setting according to SAE J2716,
Revision 2 or Revision 3
Revision 2: No pause pulse
Revision 3: Fixed frame length + pause
SENT Frame
ZMID5203
Type of data transmitted in SENT frame
12-bit position data + 8-bit rolling
counter + inverted copy of first data
nibble + CRC (see Figure 16)
12-bit position data + “000” data + CRC
CORDIC magnitude upper and lower levels
To trigger alarm if CORDIC magnitude
is out of range
Transmit coil frequency alarm
Automatic gain control (AGC)
Detects out of range Tx frequency
Detects AGC out of range
Diagnostics
All
EEPROM double error; shadow register parity error Internal memory errors
R1 or R2 coil open or short
Signal processing overflow
Detect defective receiver coils
Internal processing errors
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13. Operation at High Rotation Speeds
The ZMID520x ICs are primarily designed for low-speed or static operation due to their inherent interface types (analog ramp, PWM, SENT).
There is no upper speed limit for using the ZMID520x in high speed applications; however, due to the maximum data rate at the various
outputs, the resolution (on a rotary application: number of measurements per revolution) will be reduced with increasing speed.
The maximum output data rates for the various versions are given in Table 12.
Table 12. Maximum Output Data Rate
Product
ZMID5201
ZMID5202
ZMID5203
Type of Output
Analog ramp
PWM
Maximum Output Rate, Updates per Second
Notes
Linear analog ramp
10000
2000
1235
Programmable from 125Hz to 2000Hz
270 ticks @ 3µS
SENT
With these maximum output data rates, the resolution versus rotation speed relationship is shown in the graph in Figure 18.
Figure 18. Relationship between Resolution and Rotational Speed
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For example, the number of readings per revolution at 10rpm and 1000 rpm are given in Table 13.
Table 13. Resolution at Different Rotation Speeds
Product
ZMID5201
ZMID5202
ZMID5203
Type of Output
Analog ramp
PWM
Readings per Revolution at 10rpm
1024 (10-bit)
Readings per Revolution at 1000rpm
600 (9.2-bit)
120 (6.9-bit)
74 (6.2-bit)
1024 (10-bit)
SENT
4096 (12-bit)
14. Interpolation, Linearity Error Correction
A post-CORDIC linearity correction is available to correct nonlinearities and to further increase the overall accuracy of the system.
The correction factors are applied by linear interpolation between 9 equidistant points over one phase (0 to 360°) with one of two options:
.
.
Option 1: Starting at 0° with intervals of 45°
Option 2: Same as option1 shifted by 22.5°, starting at 22.5° with intervals of 45°
Table 14. Linearity Correction Points
Point
1
2
3
4
5
6
7
8
9
Option 1
Option 2
0°
45°
90°
135°
157.5°
180°
202.5°
225°
247.5°
270°
292.5°
315°
337.5°
360°
22.5°
67.5°
112.5°
382.5° (22.5°)
Note that in a rotating application, correction point 1 (0°) and point 9 (360°) coincide at the same angle. Therefore in such cases, it is useful to
use the same correction values for both point 1 and point 9.
In general, the correction points are applicable as follows:
Correction point 1 is used for angles 0° ≤ α < 45° and optionally for 22.5° ≤ α < 67.5°.
(…)
Correction point 9 is used for angles 315° ≤ α < (360° = 0°) and optionally for 337.5° ≤ α < 22.5°.
For each point, an offset can be applied. Angle values between two points are corrected by linear interpolation between the two linearization
points.
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15. Application Examples
Typical coil and target arrangements are shown in Figure 19 to Figure 24: linear motion; arc motion; and on-axis (end of shaft) and off-axis
(side shaft) rotary. Many other arrangements are also possible. In the figures, blue indicates the target and the dashed lines indicate range of
travel. See Table 15 for resolution values.
Note: The coils are shown in a simplified form. Detailed guidelines on coil design and programming options are available on request from IDT
application support. Note that within each base configuration, the movement range can be further fine-trimmed by user programming.
Examples:
.
.
An angle sensor for 0 to 270° angle range would use a 360° base configuration (360°/1) and could then be trimmed to a maximum angle
of 270° by user programming.
An angle sensor for 0 to 110° angle range would use a 120° configuration (360°/3) and could then be trimmed to a maximum angle of
110° by user programming.
Figure 19. Example Setup: Linear Motion
Figure 20. Example Setup: Arc Motion
Figure 21. Example Setup: End-of-Shaft Rotation,
Figure 22. Example Setup: Side-Shaft Rotation,
On-Axis, 1 × 360
Off-Axis, 1 × 360
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Figure 23. Example Setup: Side-Shaft Rotation,
Figure 24. Example Setup: Side-Shaft Rotation,
Off-Axis, 2 × 180
Off-Axis, 6 × 60
The different coil and target arrangements provide different ranges for the degrees measurement, which affects the measurement resolution
(degrees per step). This varies depending on the ZMID520x product. Table 15 gives examples of resolution for various ranges of motion for
each product.
Table 15. Examples of Resolution Differences Depending on Product
Resolution of Measurement
ZMID5201/ZMID5202
(1024 steps per phase)
ZMID5203
(4096 steps per phase)
Range of Travel for Example Application
Linear Position Sensing Range of Travel =
Coil Length Minus Target Length
(See the example in Figure 19)
(Range of Travel)/1024
(Range of Travel)/4096
Arc Position Sensing Range of Travel =
Coil Arc Angle Minus Target Angle (Width of Target)
(See the example in Figure 20)
(Range of Travel)/1024
(Range of Travel)/4096
1 360 (See the examples in Figure 21 and Figure 22)
2 180 (See the example in Figure 23)
0.35/Step
0.18/Step
0.059/Step
0.088/Step
0.044/Step
0.015/Step
6 60 (See the example in Figure 24)
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16. Package Drawing 14-TSSOP
Figure 25. 14-TSSOP Package Outline Drawing
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17. Recommended Land Pattern
Figure 26. 14-TSSOP Recommended PCB Land Pattern
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18. Marking Diagram
Line 1: First four characters of part code (ZMID)
Line 2: Next four characters of the part code (5201, 5202, or 5203) followed by
A = Design revision
E = Operation temperature range, extended automotive
Line 3: “XXXXXX” = Lot number
Line 4: “YYWW” = Manufacturing date:
YY = last two digits of manufacturing year
WW = manufacturing week
ZMID
520xAE
XXXXXX
YYWW
19. Ordering Information
Orderable Part Number
ZMID5201AE1R
ZMID5201AE1T
ZMID5202AE1R
ZMID5202AE1T
ZMID5203AE1R
ZMID5203AE1T
ZMID5201-EVK
Description and Package
MSL Rating
Shipping Packaging
Tape and Reel
Tube
Temperature
-40° to +150°C
-40° to +150°C
-40° to +150°C
-40° to +150°C
-40° to +150°C
-40° to +150°C
ZMID5201; Analog Output; 14-TSSOP
ZMID5201; Analog Output; 14-TSSOP
ZMID5202; PWM Output; 14-TSSOP
ZMID5202; PWM Output; 14-TSSOP
ZMID5203; SENT Output; 14-TSSOP
ZMID5203; SENT Output; 14-TSSOP
1
1
1
1
1
1
Tape and Reel
Tube
Tape and Reel
Tube
ZMID5201 Evaluation Kit: ZMID Communication Board, ZMID5201 Demo Board with printed sensor coil,
micro-USB cable
ZMID5202-EVK
ZMID5203-EVK
ZMID5202 Evaluation Kit: ZMID Communication Board, ZMID5202 Demo Board with printed sensor coil,
micro-USB cable
ZMID5203 Evaluation Kit: ZMID Communication Board, ZMID5203 Demo Board with printed sensor coil,
micro-USB cable
© 2017 Integrated Device Technology, Inc.
29
April 28, 2017
ZMID5201/-02/-03 Datasheet
20. Revision History
Revision Date
Description of Change
April 28, 2017
.
.
Correction for sine and cosine labels in the following figures: application circuit on page 1, the block
diagram on page 2, Figure 3, and Figure 4.
Minor edits.
March 28, 2017
.
.
.
Correction for Table 15 for step values.
Addition of new images for Figure 19 to Figure 24.
Correction of name of ZMID520x Reference Board to ZMID520x Demo Board in kit contents given in part
order table.
March 23, 2017
Initial release.
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without notice, at IDT's sole discretion. Performance specifications and operating parameters of the described products are d etermined in an independent state and are not guaranteed to perform the same
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© 2017 Integrated Device Technology, Inc.
30
April 28, 2017
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