KPY57RK [INFINEON]
Silicon Piezoresistive Relative Pressure Sensor; 硅压阻相对压力传感器型号: | KPY57RK |
厂家: | Infineon |
描述: | Silicon Piezoresistive Relative Pressure Sensor |
文件: | 总4页 (文件大小:148K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
Silicon Piezoresistive
Relative Pressure Sensor
KPY 51-RK
KPY 57-RK
Features
• Low pressure and temperature hysteresis
• Fast response
• High sensitivity and linearity
• Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
TO-8-6
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
Type and
Marking
Symbol
Pressure Range Unit
Ordering Code
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
P0 … PN
0 … 0.25
0 … 0.6
0 … 1.6
0 … 4
bar
Q62705-K189
Q62705-K190
Q62705-K191
Q62705-K193
Q62705-K195
Q62705-K197
Q62705-K199
0 … 10
0 … 25
0 … 60
Pin Configuration
1
2
3
4
Capillary tube
+ VIN
− VOUT
Temperature sensor
(typ. R25 = 2 kΩ)
5
6
7
8
Temperature sensor
− VIN
+ VOUT
Not connected
Semiconductor Group
1
02.97
KPY 51-RK
KPY 57-RK
Absolute Maximum Ratings
Parameter
Symbol
Limit Values1)
Frontside Rearside
Unit
Pressure overload
PMAX
bar
KPY 51 RK
2
2
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
6
6
10
16
30
75
100
10
16
30
40
70
Operating temperature range
TA
− 40 … + 125
− 50 … + 150
12
˚C
˚C
V
Storage temperature range
Supply voltage
Tstg
VIN
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Bridge resistance
Sensitivity
RB
s
4
−
8
kΩ
mV/
Vbar
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
16.8
11.0
5.6
4.0
1.8
24.0
15.0
8.8
6.0
2.6
32.0
24.0
12.5
9.0
4.0
2.0
0.88
0.47
1.2
0.67
1.0
Output voltage
Vfin
mV
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
21
33
45
80
90
110
140
30
45
70
120
130
150
200
40
72
100
180
200
250
300
Semiconductor Group
2
KPY 51-RK
KPY 57-RK
Electrical Characteristics (cont’d)
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Offset voltage
P = P0
V0
FL
mV
− 25
−
+ 25
Linearity error (Best fit straight line)
% Vfin
P0 = P0 … PN
KPY 51 … 55 RK
KPY 56/57 RK
−
−
± 0.15 ± 0.35
± 0.15 −
Pressure hysteresis
PH
% Vfin
P1 = P0, P2 = PN, P3 = P0 KPY 51 … 57 RK
−
± 0.1
−
Electrical Characteristics
at T1 = 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
typ. max.
Unit
min.
Temperature coefficient of Vfin
TCVfin
%/K
KPY 51 RK
− 0.19 − 0.13 − 0.09
− 0.19 − 0.15 − 0.12
− 0.19 − 0.16 − 0.13
− 0.19 − 0.17 − 0.14
− 0.19 − 0.17 − 0.14
− 0.19 − 0.17 − 0.15
− 0.19 − 0.17 − 0.15
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Temperature coefficient of V0
TCV0
%/K
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
− 0.05 −
− 0.05 −
− 0.03 −
− 0.03 −
− 0.03 −
− 0.03 −
− 0.01 −
+ 0.05
+ 0.05
+ 0.03
+ 0.03
+ 0.03
+ 0.03
+ 0.01
Temperature coefficient of RB
KPY 51 … 57 RK
TCRB
%/K
−
+
−
0.095
Semiconductor Group
3
KPY 51-RK
KPY 57-RK
Electrical Characteristics (cont’d)
at T1 = 25 ˚C, T2 = 125 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified.
Parameter
Symbol
Limit Values
Unit
min.
typ.
max.
Temperature hysteresis of V0; Vfin
% v.
Vfin
TH
KPY 51 RK
KPY 52 RK
KPY 53 … 57 RK
− 0.7
− 0.5
− 0.3
−
−
−
+ 0.7
+ 0.5
+ 0.3
Package Outline
TO-8-6
Dimension in mm
Weight approx. 4.5 g
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group
4
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INFINEON
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