MS5401-AM [INTERSEMA]
MINIATURE SMD PRESSURE SENSOR; 微型SMD压力传感器
| 型号： | MS5401-AM |
| 厂家： | 
INTERSEMA SENSORIC SA |
| 描述： | MINIATURE SMD PRESSURE SENSOR |
| 文件： | 总8页 (文件大小：184K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
MS54XX (RoHS*) MINIATURE SMD PRESSURE SENSOR
• 1, 5, 7, and 12 bar absolute pressure range
• Uncompensated
• Piezoresistive silicon micromachined sensor
• Miniature surface mount 6.2 x 6.4 mm
• Low noise, high sensitivity, high linearity
•
RoHS-compatible & Pb-free*
DESCRIPTION
The MS54XX SMD pressure sensor series is designed for pressure sensor systems with highest demands on
resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2
x 6.4 mm ceramic carrier protected by a metal cap. The MS54XX can be delivered in a highly sensitive version
giving a maximal output voltage or in a highly linear version giving a linear output voltage directly proportional to
the applied pressure.
High Sensitivity Versions
High Linearity Versions
Full Scale
Pressure
Product Code Full Scale Span / Linearity
Product Code Full Scale Span / Linearity
MS5401-AM
MS5407-AM
240 mV /
392 mV /
±
0.2% FS
0.2% FS
MS5401-BM
MS5405-BM
150 mV /
150 mV /
±
0.05% FS
0.05% FS
1 bar
5 bar
7 bar
12 bar
±
±
MS5412-BM
150 mV /
±0.05% FS
FEATURES
• Low cost SMD ceramic package
• Small size
• High reliability, low drift
• -40°C to +125 °C operation range
• Gel protection against humidity and water
APPLICATIONS
• Absolute pressure sensor systems
• High resolution altimeters, variometers
• Barometers
• Engine controls
• Water proof watches and diver’s computers
• Tire pressure monitoring systems (TPMS)
PIN CONFIGURATION
3: VS+
4: OUT+
1: OUT-
2: GND
* The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
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PIN DESCRIPTION
Pin Name
Pin No.
Function
OUT-
GND
VS+
1
2
3
4
Negative output voltage of Wheatstone bridge
Ground
Supply voltage of Wheatstone bridge
Positive output voltage of Wheatstone bridge
OUT+
ABSOLUTE MAXIMUM RATINGS
Parameter
Symbol
Conditions
Ta = 25 oC
Min
Max
Unit
Notes
Supply voltage
VS+
TS
-
20
V
oC
Storage temperature
-40
+125
Overpressure MS5401-AM
MS5401-BM
-
-
-
-
-
5
-
10
21
30
30
(1)
(2)
(3)
-
MS5407-AM
MS5405-BM
MS5412-BM
P
Ta = 25 oC
bar
NOTES
1) The MS5401-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of 11 bar in
salt water or 100 m water respectively.
2) The MS5407-AM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of
21 bar in salt water or 200 m water respectively.
3) The MS5405-BM is qualified referring to ISO Standard 2281 and can withstand an absolute pressure of
26 bar in salt water or 250 m water respectively.
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ELECTRICAL CHARACTERISTICS
HIGH SENSITIVITY VERSIONS
(VS+ = 5 V; Ta = 25°C )
Parameter
Min
Typ
Max
Unit
Notes
Operating pressure range
0
190
190
-
-
240
240
±0.15
-
1
290
290
±0.4
7
bar
mV
Full-scale span (FS)
MS5401-AM
Sensitivity
mV/bar
% FS
bar
Linearity
1, 6
Operating pressure range
0
Full-scale span (FS)
MS5407-AM
322
46
-
392
56
462
66
mV
Sensitivity
mV/bar
% FS
°C
Linearity
±0.15
-
±0.4
125
40
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
-40
-40
-
0
mV
-
% FS
% FS
% FS
kΩ
2, 6
3, 6
4, 6
±0.20
0.8
-
0.3
-
All Ranges
Repeatability
-
±0.20
3.8
Bridge resistance
3.0
3.4
ppm/°C
ppm/°C
µV/°C
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
+2’400
-1’500
-80
2’900
-1’900
-
+3’300
-2’300
+80
5, 6
5, 6
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
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ELECTRICAL CHARACTERISTICS (CONT.)
HIGH LINEARITY VERSIONS
(VS+ = 5 V; Ta = 25°C )
Parameter
Min
Type
Max
Unit
Notes
Operating pressure range
0
120
120
-
-
150
150
±0.05
-
1
180
180
±0.2
5
bar
mV
8
Full-scale span (FS)
MS5401-BM
Sensitivity
mV/bar
% FS
bar
Linearity
1, 6
8
Operating pressure range
0
Full-scale span (FS)
MS5405-BM
120
24
-
150
30
180
36
mV
Sensitivity
mV/bar
% FS
bar
Linearity
1, 6
8
±0.05
-
±0.15
12
Operating pressure range
0
Full-scale span (FS)
MS5412-BM
120
10
150
12.5
±0.05
-
180
15
mV
Sensitivity
mV/bar
% FS
°C
Linearity
1, 6
±0.15
125
40
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
-40
-40
-
0
mV
-
% FS
% FS
% FS
kΩ
2, 6
3, 6
±0.20
0.8
-
0.3
-
All Ranges
Repeatability
-
4, 6, 7
±0.20
3.8
Bridge resistance
3.0
3.4
ppm/°C
ppm/°C
µV/°C
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
+2’400
-1’500
-80
2’900
-1’900
-
+3’300
-2’300
+80
5, 6
5, 6
5, 6
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
7) MS5412-BM: Max. 0.3% FS
8) This sensor family is optimised for the linearity; it is suitable for applications with higher pressure where the
linearity requirement is less critical.
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APPLICATION INFORMATION
GENERAL
The MS54XX is a miniaturised absolute pressure sensor series which has been designed for surface mounting
applications. Its main advantages are the high reliability of the semiconductor sensor and a design which makes
it suitable for applications requiring small-scale and cost-efficient solutions.
The sensor element of the MS54XX consists of a micromachined silicone membrane with Pyrex glass wafer-
bonded under vacuum to the backside for reference pressure. Implanted resistors make use of the piezo-
resistive effect to sense pressure applied to the membrane. The sensor is mounted in a special process
allowing best-offset stability making the part suitable for direct PCB assembly.
Typical applications for this miniaturised pressure sensor MS54XX are altitude measurements and the
measurement of atmospheric reference pressure in medical and industrial equipment as well as in automotive
and household applications, consumer electronics and pneumatics.
Full Scale
Pressure
High Sensitivity Versions
(MS54XX-AM)
High Linearity Versions
(MS54XX-BM)
High End Altimeter, Medical
Instrumentation
1 bar
5 bar
7 bar
12 bar
Variometer, Altimeter, Barometer
Diving computers labelled 250 m
Divers Watch, Tire Pressure, High End
Electronic Scale
Electronic Scale
Pneumatic Brake, Diving Computer
HUMIDITY, WATER PROTECTION
The MS54XX carries a anticorrosive and antimagnetic stainless steel protection cap filled with silicone gel for
enhanced protection against humidity. The properties of this gel ensure function of the sensor even when in
direct water contact. This feature can be useful for waterproof watches or other applications, where direct water
contact cannot be avoided. Nevertheless the user should avoid drying of hard materials like for example salt
particles on the silicone gel surface. In this case it is better to rinse with clean water afterwards. Special care
has to be taken to not mechanically damage the gel. Damaged gel could lead to air entrapment and
consequently to unstable sensor signal, especially if the damage is close to the sensor surface.
The metal cap is fabricated of special anticorrosive stainless steel in order to avoid any corrosive battery effects
inside the final product. The MS5401-BM are qualified referring to the ISO Standard 2281 and can withstand a
pressure of 11 bar in salt water. The concentration of the see water used for the qualification is 41 g of see salt
for 1 litre of DI water. The MS5405-BM and the MS5407-AM did also pass the salt-water test with a pressure
capability of 26 and 21 bar respectively.
For underwater operations as specified in ISO Standard 2281 it is important to seal the sensor with a rubber O-
ring around the metal cap. Any salt water coming to the contact side (ceramic and pads) of the sensor could
lead to permanent damage. Especially for "water-resistant 100 m" watches and for diving computers, it is
recommended to provide a stable mechanical pusher from the backside of the sensor. Otherwise the
overpressure might push the sensor backwards and even bend the electronic board on which the sensor is
mounted.
LIGHT SENSITIVITY
The MS54XX is sensitive to sunlight, especially to infrared light sources. This is due to the strong photo effect of
silicon. As the effect is reversible there will be no damage, but the user has to take care that in the final product
the sensor cannot be exposed to direct light during operation. This can be achieved for instance by placing
mechanical parts with holes in such that light cannot pass.
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CONNECTION TO PCB
The package outline of the module allows the use of a flexible PCB to connect it. This can be important for
applications in watches and other special devices, and will also reduce mechanical stress on the device.
For applications subjected to mechanical shock, it is recommended to enhance the mechanical reliability of the
solder junctions by covering the rim or the corners of MS54XX ceramic substrate with glue or Globtop-like
material.
SOLDERING
Please refer to the application note AN808 for all soldering issues.
CLEANING
The MS54XX has been manufactured under cleanroom conditions. Each device has been inspected for the
homogeneity and the cleanness of the silicone gel. It is therefore recommended to assemble the sensor under
class 10’000 or better conditions. Should this not be possible, it is recommended to protect the sensor opening
during assembly from entering particles and dust. To avoid cleaning of the PCB, solder paste of type “no-clean”
shall be used. Cleaning might damage the sensor.
RECOMMENDED PAD LAYOUT
Recommended pad layout for soldering of the MS54xx on a printed circuit board
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PACKAGE OUTLINES
Device package outlines of MS54XX-YM (M = anticorrosive and antimagnetic stainless steel cap)
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PACKING
The MS54XX is packed in a 51 cm (20-inch) antistatic plastic tube with rubber end-plugs of two different
colours: One green and one black. The dot on the ceramic next to Pin 1 is facing the green end-plug. Each tube
contains 80 sensors. The tubes are marked "ANTISTATIC" and have an information label.
See the drawings below for more details.
PACKING TUBE OUTLINES
4.4
Information label
8.2
510
All measures in mm
ORDERING INFORMATION
MS5401-AM Miniature Pressure Sensor 1 bar, high sensitivity
MS5401-BM Miniature Pressure Sensor 1 bar, high linearity
MS5405-BM Miniature Pressure Sensor 1 bar, high linearity
MS5407-AM Miniature Pressure Sensor 7 bar, high sensitivity
MS5412-BM Miniature Pressure Sensor 12 bar, high linearity
Art.-Nr. 325401001
Art.-Nr. 325401000
Art.-Nr. 325405000
Art.-Nr. 325407000
Art.-Nr. 325412000
A = high sensitivity
B = high linearity
M = anticorrosive and antimagnetic stainless steel cap
FACTORY CONTACTS
Intersema Sensoric SA
Ch. Chapons-des-Prés 11
CH-2022 BEVAIX
Tel. 032 847 9550
Tel. Int. +41 32 847 9550
Telefax +41 32 847 9569
e-mail:
SWITZERLAND
http://www.intersema.ch
NOTICE
Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance
and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys
no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from
patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty
that such applications will be suitable for the use specified without further testing or modification.
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