QA-CH-A31 [JDSU]

High-Power Q-Switched Diode-Pumped UV Laser; 大功率Q开关二极管泵浦紫外激光器


型号：	QA-CH-A31
厂家：	JDSU
描述：	High-Power Q-Switched Diode-Pumped UV Laser 大功率Q开关二极管泵浦紫外激光器二极管开关泵
文件：	总8页 (文件大小：512K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

COMMERCIAL LASERS

High-Power Q-Switched Diode-Pumped UV Laser

Q Series

Key Features

• Highest commercially available pulse energy and peak power

• Tighter process control due to superior energy stability

enabled by unique intracavity harmonic generation

• Capable of processing widest range of materials due to wide

range of pulse energies and repetition rates

• High reliability due to low fluence in harmonic crystals and

no cavity optic coatings exposed to UV

• 355 or 532 nm outputs available

Applications

The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped

UV lasers used for a wide variety of micromachining and solar cell processing

applications. Whether for high pulse-energy processing of refractory materials

such as silicon; high repetition rate processing of packaging materials such as

Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed

performance combined with industry-leading uptime.

• Solar cell processing

• Wafer scribing

• Full-cut thin wafer dicing

• Low-k dielectric grooving

• Micro via drilling

• Micromachining of silicon and metals

Due to the self-stabilizing characteristics of intracavity UV harmonic generation,

all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term

output power stability. In addition, the excellent thermal stability of the unique

Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally

stable beam position and profile, which is important for processes requiring

accurate feature placement. These advantages enable Q series lasers to achieve

the tightest possible process tolerances for micromachining and other materials

processing applications.

NORTH AMERICA: 800 498-JDSU (5378)

WORLDWIDE: +800 5378-JDSU

WEBSITE: www.jdsu.com

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Q Series 355 nm Laser Head

(Specifications in inches [mm] unless otherwise noted. Dimensions include mounting pads.)

LOCATION POINT, 3X

.25

[6.4]

8.75 [222.3]

10.00 [254.0]

9.84 [250.0]

5.00

[127.0]

4.92

[125.0]

4.92

[125.0]

3X, .266 WIDE X .346 LONG SLOT

[3X, 6.8 WIDE X 8.8 LONG SLOT]

5.00

[127.0]

.90

[22.9]

COOLING WATER CONNECTION, 2X

5.50 [139.7]

2.75 [69.8]

3.39 [86.1]

1.987 [50.47]

.040

[1.0]

2.19 [55.6]

1.06

[26.9]

4.82

[122.4]

3X MOUNTING PADS

.94

[23.9]

32.00 [812.8]

Laser Center

UMBILICAL CABLE PORT

1.050 [26.65] .100 [2.54]

Detail A

Scale 1:2

.669

[17.00]

Power Supply and Chiller

(Specifications in inches [mm] unless otherwise noted. )

17.3

WATER FILL PORT

[440]

16.80

[426.7]

21.0

VOLTAGE SELECTION

ACCESS

[533]

WATER HOSE FITTINGS

14.34

[364.2]

10.4

[264]

13.00

[329]

ELECTRICAL

INTERFACE PANEL

4X, .218 X .375

3.48 [88.4]

3.00 [76.2]

.35 [8.9]

.24 [6.1]

18.30 [464.8]

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Q30X 355nm Models

Typical Performance

300

Q301

Q304

250

200

150

100

Q302

Q303

20 40 60 80 100 120 140

Pulse Repetition Rate (kHz)

Q33X Lower Coast 355nm Models

Typical Performance

200

160

120

Q331

Q332

Q333

20 40 60 80 100 120 140

Pulse Repetition Rate (kHz)

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Q Series Laser Head Specifications

Parameter

Q301-HD

Q302-HD

Q303-HD

Q304-HD

Wavelength

Spatial mode

M-squared¹

355 nm

TEM₀₀

<1.2

355 nm

TEM₀₀

<1.2

42 0.4 cm

0.26 mm nominal

1.8 0.35 mrad

<10 µrad/°C

<50 µrad

355 nm

TEM₀₀

<1.2

42 0.4 cm

0.26 mm nominal

1.8 0.35 mrad

<10 µrad/°C

<50 µrad

355 nm

TEM₀₀

<1.2

42 0.4 cm

0.25 mm nominal

2.0 0.35 mrad

<10 µrad/°C

<50 µrad

Waist location¹(internal, from beam exit) 42 0.4 cm

Waist diameter¹, 1/e²

0.26 mm nominal

Beam divergence¹, full angle

Beam pointing drift, full angle

Pointing drift, over 8 hours, full angle²

Beam position accuracy, unit to unit

Beam pointing accuracy, unit to unit

Repetition rate

1.8 0.35 mrad

<10 µrad/°C

<50 µrad

<2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal <2.5 mm from nominal

<1° from nominal

Internally triggered

Externally triggered

5 to 250 kHz

0 to 250 kHz

<10 kHz

5 to 250 kHz

0 to 250 kHz

<30 kHz

5 to 250 kHz

0 to 250 kHz

<50 kHz

5 to 250 kHz

0 to 250 kHz

<40 kHz

Constant pulse energy range

Average output power³

At 10, 20, and 30 kHz

At 30, 50, and 70 kHz

At 70, 100, and 130 kHz

At 40, 60, and 90 kHz

Pulse width⁴

≥10.0, 8.0 and 6.0 W

≥8.0, 6.8, and 5.0 W

≥6.5, 4.5, and 2.9 W

≥11.0, 9.5, 6.3 W

At 10, 20, and 30 kHz

At 30, 50, and 70 kHz

At 70, 100, and 130 kHz

At 40, 60, and 90 kHz

Pulse energy fluctuations⁵

At 10, 20, and 30 kHz

At 30, 50, and 70 kHz

At 70, 100, and 130 kHz

At 40, 60, and 90 kHz

Power drift over 8 hours^{2, 6}

Beam roundness

34 10, 52 15, 69 15 ns

78 20, 107 20, 135 30 ns

135 35, 180 45, 225 60 ns -

95 30, 130 35, 180 50 ns

<1.0%, 10 – 30 kHz

< 2%

>85% circular

>100:1, horizontal

<1.5%, 30 – 50 kHz

< 2%

>85% circular

>100:1, horizontal

<1.5%, <2.0%, <2.5% -

< 2%

>85% circular

>100:1, horizontal

<1.5%, 40 – 90 kHz

< 2%

>85% circular

>100:1, horizontal

Polarization

Warm-up time

From cold start

From standby

Operating ambient temperature

Relative humidity, non-condensing

Weight

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

1. Specifications hold over different repetition rate ranges, depending on the laser model, as follows:

Q301 from 10 to 30 kHz, for Q302 from 30 to 70 kHz, for Q303 from 70 to 130 kHz, and Q304 from 40 to 90 kHz.

2. Ambient temperature constant 2°C.

3. Averaged for 1 hour after >80 minutes of continuous operation.

4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.”

5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy.

6. Measured after more than 80 minutes of continuous operation.

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Q Series Laser Head Specifications

Continued

Parameter

Q331-HD

Q332-HD

Q333-HD

Wavelength

355 nm

Spatial mode

M-squared¹

TEM₀₀

<1.2

TEM₀₀

<1.2

TEM₀₀

<1.2

Waist location¹(internal, from beam exit)

Waist diameter¹, 1/e²

Beam divergence¹, full angle

Beam pointing drift, full angle

Pointing drift, over 8 hours, full angle²

Beam position accuracy, unit to unit

Beam pointing accuracy, unit to unit

Repetition rate

42 0.4 cm

0.26 mm nominal

1.8 0.35 mrad

<10 µrad/°C

<50 µrad

<2.5 mm from nominal

<1° from nominal

0.26 mm nominal

1.8 0.35 mrad

<10 µrad/°C

<50 µrad

<2.5 mm from nominal

<1° from nominal

0.26 mm nominal

1.8 0.35 mrad

<10 µrad/°C

<50 µrad

<2.5 mm from nominal

<1° from nominal

Internally triggered

Externally triggered

5 to 250 kHz

0 to 250 kHz

<10 kHz

5 to 250 kHz

0 to 250 kHz

<30 kHz

5 to 250 kHz

0 to 250 kHz

<50 kHz

Constant pulse energy range

Average output power³

At 10, 20, and 30 kHz

At 30, 50, and 70 kHz

At 70, 100, and 130 kHz

Pulse width⁴

≥5.0, 4.0 and 3.0 W

≥4.0, 3.4, and 2.5 W

≥3.6, 2.5, and 1.6 W

At 10, 20, and 30 kHz

At 30, 50, and 70 kHz

At 70, 100, and 130 kHz

Pulse energy fluctuations⁵

At 10, 20, and 30 kHz

At 30, 50, and 70 kHz

At 70, 100, and 130 kHz

Power drift over 8 hours^{2, 6}

Beam roundness

34 10, 52 15, 69 15 ns

78 20, 107 20, 135 30 ns

132 30, 168 40, 204 55 ns

<2.0%, 10 – 30 kHz

< 2%

>85% circular

>100:1, horizontal

<3%, 30 – 50 kHz

< 2%

>85% circular

>100:1, horizontal

<3%, <2.0%, <2.5%

< 2%

>85% circular

>100:1, horizontal

Polarization

Warm-up time

From cold start

From standby

Operating ambient temperature

Relative humidity, non-condensing

Weight

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

<20 minutes

<10 minutes

15 to 35°C

10 to 80%

14.5 kg

1. Specification holds over different repetition rate ranges, depending on the laser model, as follows:

Q331 from 10 to 30 kHz, for Q332 from 30 to 70 kHz, for Q333 from 70 to 130 kHz.

2. Ambient temperature constant 2°C.

3. Averaged for 1 hour after >80 minutes of continuous operation.

4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.”

5. Pulse Energy Fluctuations = σ / μ x 100%, σ = standard deviation, μ = average pulse energy.

6. Measured after more than 80 minutes of continuous operation.

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Q-PS-1000R Power Supply

Parameter

Specification

Front panel/display

Power on/off key

Shutter open/closed switch (Status LED)

Status Display (4 line x 20 character vacuum fluorescent)

RS232 Serial Port Connector (9-pin D-sub)

RS232 Serial Port Connector (Identical to front panel)

Interlock connector (2-pin, 0.1” spacing)

Q switch RF connector (SMA connector)

Umbilical connector (multi-pin D-shaped)

Chiller communication port (9-pin D-sub)

Emission indicator connector (2-pin, 0.1” spacing)

External control port (10-pin 3M-style)

Slot for optional standard or custom interface board (standard with 3 BNC connectors)

Ground pin

Rear panel

Fuse holder

Power Switch

Power cord connector

Weight

20.5 lbs (9.3 kg)

Umbilical cable length

Frequency

Standard: 10 ft. (3.0 m); optional: 16.4 ft. (5.0 m)

100 to 240 V AC, 50 – 60 Hz

Power

<550 W (400 W typical)

Input and Ambient

Voltage, frequency

Power

Operating ambient temperature

Relative humidity, non-condensing

Storage temperature

100 to 240 V AC, 50 – 60 Hz

<550 W (400 W typical)

15 to 35°C

10 – 80%

-20 to 55°C

QA-CH Chiller

Parameter

Specification

Cooling capacity

Refrigerant

>300 W

R134a

Coolant

Distilled or tap water

<1 gal (3.8 l)

<0.4 gpm at 6 psi (1.5 lpm at 0.4 atm)

121 lbs (55 kg)

Standard: 9.5 ft (2.9 m); optional: 16 ft (4.9 m)

10 ft (3.0 m)

Reservoir volume

Coolant flow rate

Weight, reservoir empty

Hose length

Control cable length

Input and Ambient

Voltage, frequency¹

90 to 110 and 180 to 220 V AC, 50 Hz

105 to 125 and 210 to 250 V AC, 60 Hz

<1000 W (700 W typical)

15 to 35°C

10 to 80%

-20 to 55°C

Power

Operating ambient temperature

Relative humidity, non-condensing

Storage temperature

Orientation

Upright position only

1. For 200/230 VAC version, the model number is QA-CH-E.

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Ordering Information

For more information on this or other products and their availability, please contact your local JDSU account manager or

JDSU directly at 1-800-498-JDSU (5378) in North America and +800-5378-JDSU worldwide, or via e-mail at

customer.service@jdsu.com.

Sample: Q331-HD (355 nm, 10 to 30 kHz laser head), Q-PS-1000R (power supply), Q-PS-A30R (3 meter flex umb cable set),

QA-CH (standard voltage configuration chiller), and QA-CH-A11 (3 m hose, straight/straight couplings)

Laser Head

Product Code

Q331-HD

Q332-HD

Q333-HD

Q301-HD

Q302-HD

Q303-HD

Q304-HD

Description

355 nm, 5 W class, 10 to 30 kHz

355 nm, 5 W class, 30 to 70 kHz

355 nm, 5 W class, 70 to 130 kHz

355 nm, 10 W class, 10 to 30 kHz

355 nm, 10 W class, 30 to 70 kHz

355 nm, 10 W class, 70 to 130 kHz

355 nm, 11 W class, 40 to 90 kHz

Power Supply

Product Code

Description

Q-PS-1000R

Standard power supply

Umbilical Cable

Product Code

Q-PS-A30R

Q-PS-A50R

Q-PS-A70R

Q-PS-A100R

Description

3 meter flex umbilical cable set

5 meter flex umbilical cable set

7 meter flex umbilical cable set

10 meter molded umb cable set

Chiller

Product Code

QA-CH

QA-CH-E

Description

Chiller with standard voltage configuration

Chiller with European voltage configuration

Hose Kit

Product Code

QA-CH-A11

QA-CH-A12

QA-CH-A21

QA-CH-A22

QA-CH-A31

QA-CH-A32

Description

Pair of 3 m hoses, straight/straight couplings

Pair of 5 m hoses, straight/straight couplings

Pair of 3 m hoses, right-angle/straight couplings

Pair of 5 m hoses, right-angle/straight couplings

Pair of 3 m hoses, right-angle/right-angle couplings

Pair of 5 m hoses, right-angle/right-angle couplings

HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER

Compliance with Regulatory Requirements

These laser sources are generic (non-OEM) versions of JDSU diode-pumped, Q-switched laser systems. The lasers are Class IV lasers as

defined by the Federal Register 21 CFR 1040.10 Laser Safety Standard. The Standard requires that certain performance features and

laser safety labels be provided on the product.

The American National Standards Institute publishes a laser safety standard for users entitled American National Standard for the Safe

Use of Lasers (ANSI Z136.1). JDSU recommends that laser users obtain and follow the procedures described in this ANSI Standard.

Warranty

JDSU diode-pumped Q Series laser systems are warranted to be free of defects in materials and workmanship for thirteen

months from the date of shipment or for 5,000 operating hours, whichever occurs first.

Patent Information

The products described in this data sheet are based on JDSU Intellectual Property which includes more than 1,800 United

States and foreign registered patents. These patents are relevant to an extensive set of products and/or technology applications

including JDSU’s laser products and associated technologies. For further information contact the JDSU Legal Department.

NORTH AMERICA: 800 498-JDSU (5378)

WORLDWIDE: +800 5378-JDSU

WEBSITE: www.jdsu.com

March 2009

QA-CH-A31 [JDSU]

相关型号：

QA-CH-A32

QA-CH-E

QA-T160

QA/8040/33

QA01-09

QA01-17

QA01-A09

QA012

QA01251-22

QA01251-P4

QA01251-PPG4-AF

QA01252-22