MMA2260DR2 [MOTOROLA]
1.5g X-Axis Micromachined Accelerometer; 1.5克X轴微机械加速度计型号: | MMA2260DR2 |
厂家: | MOTOROLA |
描述: | 1.5g X-Axis Micromachined Accelerometer |
文件: | 总8页 (文件大小:312K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
MOTOROLA
Freescale Semiconductor, Inc.
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by MMA2260D
SEMICONDUCTOR TECHNICAL DATA
±1.5g X--Axis
Micromachined Accelerometer
MMA2260D
The MMA series of silicon capacitive, micromachined accelerometers
features signal conditioning, a 2--pole low pass filter and temperature
compensation. Zero--g offset full scale span and filter cut--off are factory set and
require no external devices. A full system self--test capability verifies system
functionality.
MMA2260D: X AXIS SENSITIVITY
MICROMACHINED
ACCELEROMETER
±1.5g
Features
•
•
•
•
•
•
•
•
Integral Signal Conditioning
High Sensitivity
Linear Output
2nd Order Bessel Filter
Calibrated Self--test
16
EPROM Parity Check Status
Transducer Hermetically Sealed at Wafer Level for Superior Reliability
Robust Design, High Shock Survivability
9
1
8
Typical Applications
16 LEAD SOIC
CASE 475
•
•
•
•
•
•
•
•
Tilt Monitoring
Inclinometers
Appliance Control
Pin Assignment
Mechanical Bearing Monitoring
Vibration Monitoring and Recording
Sports Diagnostic Devices and Systems
Trailer Brake Controls
16
15
14
13
12
11
10
9
N/C
N/C
N/C
N/C
N/C
N/C
N/C
N/C
V
*
1
2
3
4
5
6
7
8
SS
V
V
*
SS
*
SS
Automotive Aftermarket
V
OUT
STATUS
V
DD
V
SS
ORDERING INFORMATION
ST
Device
MMA2260D
MMA2260DR2
Temperature Range
Case No.
Package
SOIC--16
SOIC--16, Tape & Reel
--40 to +105°C
--40 to +105°C
Case 475--01
Case 475--01
V
V
DD
G--CELL
SENSOR
TEMP COMP
& GAIN
INTEGRATOR
GAIN
FILTER
OUT
ST
CONTROL LOGIC &
EPROM TRIM CIRCUITS
SELF--TEST
OSCILLATOR
CLOCK GEN.
V
SS
STATUS
Figure 1. Simplified Accelerometer Functional Block Diagram
REV 0
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© Motorola, Inc. 2003
Freescale Semiconductor, Inc.
MAXIMUM RATINGS (Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)
Rating
Unpowered Acceleration (all axes)
Supply Voltage
Symbol
Value
2000
Unit
g
g
upd
V
--0.3 to +7.0
1.2
V
DD
(1)
Drop Test
H
drop
m
Storage Temperature Range
T
stg
--40 to +125
°C
NOTES:
1. Dropped onto concrete surface from any axis.
over 2000 volts can accumulate on the human body or asso-
ciated test equipment. A charge of this magnitude can alter
the performance or cause failure of the chip. When handling
the accelerometer, proper ESD precautions should be fol-
lowed to avoid exposing the device to discharges which may
be detrimental to its performance.
ELECTRO STATIC DISCHARGE (ESD)
WARNING: This device is sensitive to electrostatic
discharge.
Although the Motorola accelerometers contain internal
2000V ESD protection circuitry, extra precaution must be
taken by the user to protect the chip from ESD. A charge of
MMA2260D
Motorola Sensor Device Data
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OPERATING CHARACTERISTICS
(1)
(Unless otherwise noted: --40°C ≤ T ≤ +105°C, 4.75 ≤ V ≤ 5.25, Acceleration = 0g, Loaded output
)
A
DD
Characteristic
Symbol
Min
Typ
Max
Unit
(2)
(3)
Operating Range
Supply Voltage
Supply Current
V
4.75
1.1
−40
—
5.00
2.2
—
5.25
3.2
+105
—
V
mA
°C
g
DD
I
DD
Operating Temperature Range
Acceleration Range
T
g
A
1.5
FS
Output Signal
(4)
Zero g (V = 5.0 V)
V
2.3
1140
1110
40
2.5
1200
1200
50
2.7
1260
1290
60
V
DD
OFF
S
S
(5)
Sensitivity (T = 25°C, V = 5.0 V)
mV/g
mV/g
Hz
A
DD
(5)
Sensitivity (V = 5.0 V)
DD
Bandwidth Response
Nonlinearity
f
--3dB
NL
−1.0
—
+1.0
% FSO
OUT
Noise
RMS (0.1 Hz -- 1.0 kHz)
Spectral Density (RMS, 0.1 Hz -- 1.0 kHz)
n
n
—
—
3.5
350
—
—
mVrms
µg/√Hz
RMS
(6)
SD
Self--Test
Output Response (V = 5.0 V)
∆V
0.3
0.4
—
—
−125
20
0.5
0.3 V
DD
V
DD
−300
V
V
V
µA
ms
DD
ST
Input Low
Input High
Input Loading
V
V
IL
SS
V
I
0.7 V
IH
DD
(7)
−50
—
IN
(8)
Response Time
t
25
ST
(12)(13)
Status
Output Low (I
Output High (I
= 100 µA)
= --100 µA)
V
V
—
−0.8
DD
—
—
0.4
—
V
V
load
OL
V
load
OH
Output Stage Performance
Electrical Saturation Recovery Time
(9)
t
V
—
—
—
—
50
2.0
ms
V
pF
Ω
DELAY
Full Scale Output Range (I
Capacitive Load Drive
= --200 µA)
V
+0.25
SS
V
−0.25
OUT
FSO
DD
(10)
C
L
—
—
100
—
Output Impedance
Z
O
Mechanical Characteristics
(11)
Transverse Sensitivity
V
—
—
5.0
% FSO
YX,ZX
NOTES:
1. For a loaded output the measurements are observed after an RC filter consisting of a 1 kΩ resistor and a 0.1 µF capacitor to ground.
2. These limits define the range of operation for which the part will meet specification.
3. Within the supply range of 4.75 and 5.25 volts, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits
the device may operate as a linear device but is not guaranteed to be in calibration.
4. Thedevicecanmeasureboth+ and − acceleration. Withnoinput accelerationtheoutput is at midsupply. Forpositive acceleration the output
will increase above V /2 and for negative acceleration the output will decrease below V /2.
DD
DD
5. Sensitivity limits apply to 0 Hz acceleration.
6. At clock frequency ≅ 34 kHz.
7. The digital input pin has an internal pull--down current source to prevent inadvertent self test initiation due to external board level leakages.
8. Time for the output to reach 90% of its final value after a self--test is initiated.
9. Time for amplifiers to recover after an acceleration signal causing them to saturate.
10. Preserves phase margin (60°) to guarantee output amplifier stability.
11. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity.
12. The Status pin output is not valid following power--up until at least one rising edge has been applied to the self--test pin. The Status pin is
high whenever the self--test input is high.
13. The Status pin output latches high if the EPROM parity changes to odd. The Status pin can be reset by a rising edge on self--test, unless
a fault condition continues to exist.
MMA2260D
Motorola Sensor Device Data
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PRINCIPLE OF OPERATION
SPECIAL FEATURES
Filtering
Motorola accelerometers contain an onboard 2--pole
The Motorola accelerometer is a surface--micromachined
integrated--circuit accelerometer.
switched capacitor filter. Because the filter is realized using
switched capacitor techniques, there is no requirement for
external passive components (resistors and capacitors) to
set the cut--off frequency.
The device consists of a surface micromachined capaci-
tive sensing cell (g--cell) and a CMOS signal conditioning
ASIC contained in a single integrated circuit package. The
sensing element is sealed hermetically at the wafer level us-
ing a bulk micromachined “cap’’ wafer.
The g--cell is a mechanical structure formed from semicon-
ductor materials (polysilicon) using semiconductor
processes (masking and etching). It can be modeled as a set
of beams attached to a movable central mass that move be-
tween fixed beams. The movable beams can be deflected
from their rest position by subjecting the system to an accel-
eration (Figure 2).
As the beams attached to the central mass move, the dis-
tance from them to the fixed beams on one side will increase
by the same amount that the distance to the fixed beams on
the other side decreases. The change in distance is a mea-
sure of acceleration.
The g--cell beams form two back--to--back capacitors (Fig-
ure 2). As the central mass moves with acceleration, the dis-
tance between the beams change and each capacitor’s
value will change, (C = NAε/D). Where A is the area of the
facing side of the beam, ε is the dielectric constant, D is the
distance between the beams, and N is the number of beams.
The CMOS ASIC uses switched capacitor techniques to
measure the g--cell capacitors and extract the acceleration
data from the difference between the two capacitors. The
ASIC also signal conditions and filters (switched capacitor)
the signal, providing a high level output voltage that is ratio-
metric and proportional to acceleration.
Self--Test
The sensor provides a self--test feature that allows the ver-
ification of the mechanical and electrical integrity of the ac-
celerometer at any time before or after installation. A fourth
“plate’’ is used in the g--cell as a self--test plate. When the
user applies a logic high input to the self--test pin, a cali-
brated potential is applied across the self--test plate and
the moveable plate. The resulting electrostatic force
(Fe = 1/2 AV2/d2) causes the center plate to deflect. The re-
sultant deflection is measured by the accelerometer’s control
ASIC and a proportional output voltage results. This proce-
dure assures that both the mechanical (g--cell) and electronic
sections of the accelerometer are functioning.
Status
Motorola accelerometers include fault detection circuitry
and a fault latch. The Status pin is an output from the fault
latch, OR’d with self--test, and is set high whenever the fol-
lowing event occurs:
•
Parity of the EPROM bits becomes odd in number.
The fault latch can be reset by a rising edge on the self--
test input pin, unless one (or more) of the fault conditions
continues to exist.
Acceleration
Figure 2. Simplified Transducer Physical Model
MMA2260D
Motorola Sensor Device Data
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PCB Layout
BASIC CONNECTIONS
STATUS
P1
16
15
14
13
12
11
10
9
N/C
N/C
N/C
N/C
N/C
N/C
N/C
N/C
V
*
*
1
2
3
4
5
6
7
8
SS
V
V
ST
P0
SS
*
SS
V
SS
V
A/D IN
OUT
R
V
OUT
C
0.1 µF
C
1 kΩ
0.1 µF
STATUS
V
SS
V
DD
V
DD
C
0.1 µF
V
DD
V
SS
V
RH
ST
C
0.1 µF
Figure 3. Pinout Description
POWER SUPPLY
Pin No.
Pin Name
Description
1 thru 3
V
*
Redundant connections to the internal
SS
Figure 5. Recommended PCB Layout for Interfacing
Accelerometer to Microcontroller
V
and may be left unconnected.
SS
4
5
6
7
8
V
Output voltage of the accelerometer.
Logic output pin used to indicate fault.
The power supply input.
OUT
STATUS
V
DD
V
The power supply ground.
SS
NOTES:
ST
Trim pins
—
Logic input pin used to initiate self--
test.
•
•
•
Use a 0.1 µF capacitor on VDD to decouple the power
source.
9 thru 13
Used for factory trim.
Leave unconnected.
Physical coupling distance of the accelerometer to the mi-
crocontroller should be minimal.
14 thru 16
No internal connection.
Leave unconnected.
Place a ground plane beneath the accelerometer to reduce
noise, the ground plane should be attached to all internal
VSS terminals shown in Figure 3.
5
•
Use an RC filter of 1 kΩ and 0.1 µF on the output of the ac-
celerometer to minimize clock noise (from the switched
capacitor filter circuit).
MMA2260D
V
STATUS
V
DD
LOGIC
INPUT
8
6
ST
R1
1 kΩ
4
OUTPUT
SIGNAL
V
DD
OUT
•
•
•
PCB layout of power and ground should not couple power
supply noise.
C1
0.1 µF
C2
Accelerometer and microcontroller should not be a high
current path.
0.1 µF
7
V
SS
A/D sampling rate and any external power supply switching
frequency should be selected such that they do not inter-
fere with the internal accelerometer sampling frequency.
This will prevent aliasing errors.
Figure 4. SOIC Accelerometer with Recommended
Connection Diagram
MMA2260D
Motorola Sensor Device Data
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DYNAMIC ACCELERATION
1
2
3
4
5
6
7
8
16
15
14
13
12
11
10
9
+X
--X
16--Pin SOIC Package
Top View
STATIC ACCELERATION
Direction of Earth’s gravity field.*
-- 1 g
V
= 3.7V
OUT
0g
0g
V
= 2.50V
V
= 2.50V
OUT
OUT
+1g
V
= 1.3V
OUT
* When positioned as shown, the Earth’s gravity will result in a positive 1g output
MMA2260D
Motorola Sensor Device Data
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PACKAGE DIMENSIONS
A
A
G/2
2 PLACES, 16 TIPS
G
NOTES:
0.15
T A B
1. ALL DIMENSIONS ARE IN MILLIMETERS.
2. INTERPRET DIMENSIONS AND TOLERANCES
PER ASME Y14.5M, 1994.
16
9
3. DIMENSIONS ”A” AND ”B” DO NOT INCLUDE
MOLD FLASH OR PROTRUSIONS. MOLD FLASH
OR PROTRUSIONS SHALL NOT EXCEED 0.15
PER SIDE.
4. DIMENSION ”D” DOES NOT INCLUDE DAMBAR
PROTRUSION. PROTRUSIONS SHALL NOT
CAUSE THE LEAD WIDTH TO EXCEED 0.75
B
B
P
1
8
MILLIMETERS
DIM MIN
MAX
10.45
7.60
3.55
0.49
1.14
16X D
A
B
C
D
F
10.15
7.40
3.30
0.35
0.76
M
0.13
T
A B
R
X 45
_
G
J
K
M
P
R
1.27 BSC
0.25
0.10
0.32
0.25
J
0
7
_
_
C
10.16
0.25
10.67
0.75
0.1
M
K
F
SEATING
PLANE
T
CASE 475--01
ISSUE B
16 LEAD SOIC
MMA2260D
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licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document.
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters that may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including
“Typicals”, must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the
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applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
ordeathmayoccur.ShouldBuyerpurchaseoruseMotorolaproductsforanysuchunintendedorunauthorizedapplication, BuyershallindemnifyandholdMotorola
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arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
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