MMA2301D [MOTOROLA]

Surface Mount Micromachined Accelerometer; 表面贴装微机械加速度计
MMA2301D
型号: MMA2301D
厂家: MOTOROLA    MOTOROLA
描述:

Surface Mount Micromachined Accelerometer
表面贴装微机械加速度计

光电二极管 机械
文件: 总7页 (文件大小:146K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
Freescale Semiconductor, Inc.  
MOTOROLA  
Order Number: MMA2301D  
Rev. 2, 06/2004  
SEMICONDUCTOR TECHNICAL DATA  
Surface Mount Micromachined  
Accelerometer  
MMA2301D  
The MMA series of silicon capacitive, micromachined accelerometers features  
signal conditioning, a four-pole low pass filter and temperature compensation.  
Zero-g offset full scale span and filter cut-off are factory set and require no external  
devices. A full system self-test capability verifies system functionality.  
MMA2301D: X-AXIS SENSITIVITY  
MICROMACHINED  
ACCELEROMETER  
±200g  
Features  
Integral Signal Conditioning  
Linear Output  
Ratiometric Performance  
Fourth Order Bessel Filter Preserves Pulse Shape Integrity  
Calibrated Self-test  
Low Voltage Detect, Clock Monitor, and EPROM Parity Check Status  
Transducer Hermetically Sealed at Wafer Level for Superior Reliability  
Robust Design, High Shocks Survivability  
Typical Applications  
Vibration Monitoring and Recording  
Impact Monitoring  
16 LEAD SOIC  
CASE 475-01  
ORDERING INFORMATION  
Device  
Temperature  
Range  
Package  
PIN ASSIGNMENT  
MMA2301D  
– 40 to +125°C SOIC-16  
MMA2301DR2  
– 40 to +125°C SOIC-16, Tape & Reel  
16  
15  
14  
13  
12  
11  
10  
9
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
ST  
1
2
3
4
5
6
7
8
V
OUT  
STATUS  
V
SS  
DD  
V
V
V
DD  
G-Cell  
Sensor  
Temp  
Integrator  
Gain  
Filter  
OUT  
ST  
Control Logic &  
EPROM  
Trim Circuits  
Clock  
Gen.  
Oscillator  
Self-Test  
V
SS  
Status  
Figure 1. Simplified Accelerometer Functional Block Diagram  
REV 2  
For More Information On This Product,  
Go to: www.freescale.com  
© Motorola, Inc. 2004  
Freescale Semiconductor, Inc.  
Maximum Ratings  
(Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)  
Rating  
Symbol  
Value  
1500  
Unit  
g
Powered Acceleration (all axes)  
Unpowered Acceleration (all axes)  
Supply Voltage  
G
pd  
G
V
2000  
g
upd  
DD  
–0.3 to +7.0  
1.2  
V
(1)  
Drop Test  
D
m
drop  
Storage Temperature Range  
T
–40 to +125  
°C  
stg  
NOTES:  
1. Dropped onto concrete surface from any axis.  
ELECTRO STATIC DISCHARGE (ESD)  
WARNING: This device is sensitive to electrostatic  
discharge.  
Although the Motorola accelerometers contain internal 2kV  
ESD protection circuitry, extra precaution must be taken by the  
user to protect the chip from ESD. A charge of over 2000 volts  
can accumulate on the human body or associated test  
equipment. A charge of this magnitude can alter the  
performance or cause failure of the chip. When handling the  
accelerometer, proper ESD precautions should be followed to  
avoid exposing the device to discharges which may be  
detrimental to its performance.  
MMA2301D  
2
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, Inc.  
OPERATING CHARACTERISTICS  
(Unless otherwise noted: -40°C TA +105°C, 4.75 VDD 5.25, Acceleration = 0g, Loaded output(1)  
)
Characteristic  
Symbol  
Min  
Typ  
Max  
Unit  
(2)  
(3)  
Operating Range  
Supply Voltage  
Supply Current  
V
4.75  
3.0  
-40  
5.0  
5.25  
6.0  
+125  
V
mA  
°C  
g
DD  
I
DD  
Operating Temperature Range  
Acceleration Range  
T
g
A
225  
FS  
Output Signal  
(4)  
Zero g (T = 25°C, V = 5.0 V)  
V
OFF  
2.4  
0.46 V  
9.5  
1.86  
360  
-1.0  
2.5  
0.50 V  
10.0  
2.0  
400  
2.6  
0.54 V  
10.5  
2.14  
440  
1.0  
V
V
A
DD  
Zero g  
V
OFF,V  
DD  
DD  
DD  
(5)  
Sensitivity (T = 25°C, V = 5.0 V)  
S
mV/g  
mV/g/V  
Hz  
A
DD  
Sensitivity  
Bandwidth Response  
Nonlinearity  
S
V
f
-3dB  
NL  
% FSO  
OUT  
Noise  
RMS (.01-1 kHz)  
Power Spectral Density  
Clock Noise (without RC load on output)  
n
n
n
110  
2.0  
2.8  
mVrms  
µV/(Hz  
mVpk  
RMS  
1/2  
)
PSD  
(6)  
CLK  
Self-Test  
Output Response  
Input Low  
g
24  
30  
-100  
2.0  
36  
0.3 x V  
g
V
V
µA  
ms  
ST  
V
V
IL  
IH  
IN  
SS  
DD  
Input High  
Input Loading  
V
I
0.7 x V  
-30  
V
DD  
DD  
(7)  
-260  
10  
(8)  
Response Time  
t
ST  
(12)(13)  
Status  
Output Low (I  
Output High (I  
= 100 µA)  
= 100 µA)  
V
V
0.4  
V
V
load  
OL  
V
-0.8  
load  
OH  
LVD  
min  
DD  
Minimum Supply Voltage (LVD Trip)  
Clock Monitor Fail Detection Frequency  
Output Stage Performance  
Electrical Saturation Recovery Time  
Full Scale Output Range (I  
V
2.7  
3.25  
4.0  
V
f
50  
260  
kHz  
(9)  
t
0.25  
0.2  
ms  
V
pF  
DELAY  
= 200 µA)  
V
V
-0.25  
OUT  
FSO  
DD  
(10)  
Capacitive Load Drive  
Output Impedance  
C
Z
100  
L
300  
O
Mechanical Characteristics  
(11)  
Transverse Sensitivity  
Package Resonance  
V
f
10  
5.0  
% FSO  
kHz  
XZ,YZ  
PKG  
NOTES:  
1. For a loaded output the measurements are observed after an RC filter consisting of a 1 kresistor and a 0.01 µF capacitor to ground.  
2. These limits define the range of operation for which the part will meet specification.  
3. Within the supply range of 4.75 and 5.25 volts, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the  
device may operate as a linear device but is not guaranteed to be in calibration.  
4. The device can measure both + and - acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output will  
increase above V /2 and for negative acceleration the output will decrease below V /2.  
DD  
DD  
5. The device is calibrated at 35g.  
6. At clock frequency 70 kHz.  
7. The digital input pin has an internal pull-down current source to prevent inadvertent self test initiation due to external board level leakages.  
8. Time for the output to reach 90% of its final value after a self-test is initiated.  
9. Time for amplifiers to recover after an acceleration signal causing them to saturate.  
10. Preserves phase margin (60°) to guarantee output amplifier stability.  
11. A measure of the device's ability to reject an acceleration applied 90° from the true axis of sensitivity.  
12. The Status pin output is not valid following power-up until at least one rising edge has been applied to the self-test pin. The Status pin is high  
whenever the self-test input is high, as a means to check the connectivity of the self-test and Status pins in the application.  
13. The Status pin output latches high if a Low Voltage Detection or Clock Frequency failure occurs, or the EPROM parity changes to odd. The  
Status pin can be reset low if the self-test pin is pulsed with a high input for at least 100 us, unless a fault condition continues to exist.  
Motorola Sensor Device Data  
MMA2301D  
3
For More Information On This Product,  
Go to: www.freescale.com  
 
 
Freescale Semiconductor, Inc.  
PRINCIPLE OF OPERATION  
The Motorola accelerometer is a surface-micromachined  
integrated-circuit accelerometer.  
Self-Test  
The sensor provides a self-test feature that allows the  
The device consists of a surface micromachined capacitive  
sensing cell (g-cell) and a CMOS signal conditioning ASIC  
contained in a single integrated circuit package. The sensing  
element is sealed hermetically at the wafer level using a bulk  
micromachined cap wafer.  
verification of the mechanical and electrical integrity of the  
accelerometer at any time before or after installation. This  
feature is critical in applications such as automotive airbag  
systems where system integrity must be ensured over the life of  
the vehicle. A fourth plate is used in the g-cell as a self-test  
plate. When the user applies a logic high input to the self-test  
pin, a calibrated potential is applied across the self-test plate  
and the moveable plate. The resulting electrostatic force  
(Fe = 1/2 AV2/d2) causes the center plate to deflect. The  
resultant deflection is measured by the accelerometer's control  
ASIC and a proportional output voltage results. This procedure  
assures that both the mechanical (g-cell) and electronic  
sections of the accelerometer are functioning.  
The g-cell is a mechanical structure formed from  
semiconductor materials (polysilicon) using semiconductor  
processes (masking and etching). It can be modeled as a set of  
beams attached to a movable central mass that move between  
fixed beams. The movable beams can be deflected from their  
rest position by subjecting the system to an acceleration  
(Figure 2).  
As the beams attached to the central mass move, the  
distance from them to the fixed beams on one side will increase  
by the same amount that the distance to the fixed beams on the  
other side decreases. The change in distance is a measure of  
acceleration.  
Ratiometricity  
Ratiometricity simply means that the output offset voltage  
and sensitivity will scale linearly with applied supply voltage.  
That is, as you increase supply voltage the sensitivity and offset  
increase linearly; as supply voltage decreases, offset and  
sensitivity decrease linearly. This is a key feature when  
interfacing to a microcontroller or an A/D converter because it  
provides system level cancellation of supply induced errors in  
the analog to digital conversion process.  
The g-cell plates form two back-to-back capacitors  
(Figure 2). As the central mass moves with acceleration, the  
distance between the beams change and each capacitor's  
value will change, (C = NAε/D). Where A is the area of the  
facing side of the beam, ε is the dielectric constant, D is the  
distance between the beams, and N is the number of beams.  
Status  
The CMOS ASIC uses switched capacitor techniques to  
measure the g-cell capacitors and extract the acceleration data  
from the difference between the two capacitors. The ASIC also  
signal conditions and filters (switched capacitor) the signal,  
providing a high level output voltage that is ratiometric and  
proportional to acceleration.  
Motorola accelerometers include fault detection circuitry and  
a fault latch. The Status pin is an output from the fault latch,  
OR'd with self-test, and is set high whenever one (or more) of  
the following events occur:  
Supply voltage falls below the Low Voltage Detect (LVD)  
voltage threshold  
Clock oscillator falls below the clock monitor minimum  
frequency  
Acceleration  
Parity of the EPROM bits becomes odd in number.  
The fault latch can be reset by a rising edge on the self-test  
input pin, unless one (or more) of the fault conditions continues  
to exist.  
Figure 2. Simplified Transducer Physical Model versus  
Transducer Physical Model  
SPECIAL FEATURES  
Filtering  
The Motorola accelerometers contain an onboard 4-pole  
switched capacitor filter. A Bessel implementation is used  
because it provides a maximally flat delay response (linear  
phase) thus preserving pulse shape integrity. Because the filter  
is realized using switched capacitor techniques, there is no  
requirement for external passive components (resistors and  
capacitors) to set the cut-off frequency.  
MMA2301D  
4
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
 
Freescale Semiconductor, Inc.  
BASIC CONNECTIONS  
Pinout Description  
PCB Layout  
STATUS  
P1  
N/C  
N/C  
N/C  
ST  
1
2
3
4
5
6
7
16  
15  
14  
13  
12  
11  
10  
9
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
N/C  
ST  
P0  
V
V
SS  
V
A/D In  
OUT  
R
1 kΩ  
0.1 µF  
C
C 0.01 µF  
C 0.1 µF  
V
V
SS  
DD  
OUT  
DD  
C 0.1 µF  
STATUS  
V
V
V
SS  
RH  
V
DD  
8
Pin Descriptions  
Power Supply  
Pin No.  
Pin Name  
N/C  
Description  
Leave unconnected.  
1 thru 3  
Figure 4. Recommend PCB Layout for Interfacing  
Accelerometer to Microcontroller  
4
ST  
Logic input pin used to initiate self-test.  
Output voltage of the accelerometer.  
Logic output pin to indicate fault.  
The power supply ground.  
5
V
OUT  
NOTES:  
6
STATUS  
Use a 0.1 µF capacitor on VDD to decouple the power  
source.  
7
8
V
V
SS  
DD  
Physical coupling distance of the accelerometer to the  
microcontroller should be minimal.  
Place a ground plane beneath the accelerometer to reduce  
noise, the ground plane should be attached to all of the open  
ended terminals shown in Figure 4  
Use an RC filter of 1 kand 0.01 µF on the output of the  
accelerometer to minimize clock noise (from the switched  
capacitor filter circuit).  
The power supply input.  
9 thru 13  
Trim pins  
Used for factory trim. Leave  
unconnected.  
14 thru 16  
No internal connection. Leave  
unconnected.  
PCB layout of power and ground should not couple power  
supply noise.  
Accelerometer and microcontroller should not be a high  
current path.  
A/D sampling rate and any external power supply switching  
frequency should be selected such that they do not interfere  
with the internal accelerometer sampling frequency. This  
will prevent aliasing errors.  
6
MMA2301D  
ST  
V
Status  
DD  
Logic  
Input  
4
8
R1  
1 kΩ  
5
Output  
Signal  
V
V
OUT  
DD  
C1  
0.1 µF  
C2  
0.01 µF  
7 V  
SS  
Figure 3. SOIC Accelerometer with Recommended  
Connection Diagram  
Motorola Sensor Device Data  
MMA2301D  
For More Information On This Product,  
Go to: www.freescale.com  
5
 
Freescale Semiconductor, Inc.  
Dynamic Acceleration Sensing Direction  
16  
15  
14  
13  
12  
11  
10  
9
1
2
3
4
5
6
7
8
Acceleration of the package  
in the +X direction (center  
plate moves in the X  
direction) will result in an  
increase in the output.  
Activation of Self Test  
moves the center plate in  
the X direction, resulting in  
an increase in the output.  
+x  
x  
16-Pin SOIC Package  
N/C pins are recommended to be left FLOATING  
Top View  
Static Acceleration Sensing Direction  
8
7
6
5
4
3
2 1  
Direction of Earth's gravity field.*  
9 10 11 12 13 14 15 16  
Front View  
Side View  
* When positioned as shown, the Earth's gravity will result in a positive 1g output.  
MMA2301D  
6
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, Inc.  
PACKAGE DIMENSIONS  
A
A
G/2  
2 PLACES, 16 TIPS  
G
NOTES:  
1. ALL DIMENSIONS ARE IN MILLIMETERS.  
0.15 T A  
B
2. INTERPRET DIMENSIONS AND TOLERANCES  
PER ASME Y14.5M, 1994.  
16  
9
3. DIMENSIONS "A" AND "B" DO NOT INCLUDE  
MOLD FLASH OR PROTRUSIONS. MOLD FLASH  
OR PROTRUSIONS SHALL NOT EXCEED 0.15  
PER SIDE.  
4. DIMENSION "D" DOES NOT INCLUDE DAMBAR  
PROTRUSION. PROTRUSIONS SHALL NOT  
CAUSE THE LEAD WIDTH TO EXCEED 0.75.  
B
B
P
1
8
MILLIMETERS  
16X D  
DIM MIN  
MAX  
10.45  
7.60  
M
0.13  
T
A
B
A
B
C
D
F
10.15  
7.40  
3.30  
0.35  
0.76  
3.55  
0.49  
1.14  
R X 45˚  
G
J
K
M
P
R
1.27 BSC  
0.25  
0.10  
0˚  
0.32  
0.25  
7˚  
J
C
10.16  
0.25  
10.67  
0.75  
0.1  
M
K
F
SEATING  
PLANE  
T
CASE 475-01  
ISSUE B  
16 LEAD SOIC  
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS  
Surface mount board layout is a critical portion of the total  
design. The footprint for the surface mount packages must be  
the correct size to ensure proper solder connection interface  
between the board and the package. With the correct footprint,  
the packages will self-align when subjected to a solder reflow  
process. It is always recommended to design boards with a  
solder mask layer to avoid bridging and shorting between solder  
pads.  
0.050 in.  
1.27 mm  
0.380 in.  
9.65 mm  
0.024 in.  
0.610 mm  
0.080 in.  
2.03 mm  
Figure 5. Footprint SOIC-16 (Case 475-01)  
Motorola Sensor Device Data  
MMA2301D  
7
For More Information On This Product,  
Go to: www.freescale.com  

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