MPX2202 [MOTOROLA]

200 kPa On-Chip Temperature Compensated & Calibrated Pressure Sensors; 200千帕片上温度补偿和校准的压力传感器
MPX2202
型号: MPX2202
厂家: MOTOROLA    MOTOROLA
描述:

200 kPa On-Chip Temperature Compensated & Calibrated Pressure Sensors
200千帕片上温度补偿和校准的压力传感器

传感器 压力传感器 温度补偿
文件: 总12页 (文件大小:320K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
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Freescale Semiconductor, Inc.  
Order this document  
by MPX2202/D  
SEMICONDUCTOR TECHNICAL DATA  
2
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Te mpe r a t ure  
Ca lib r at e d  
M
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S E RI E S  
Motorola Preferred Device  
The MPX2202/MPXV2202G device series is a silicon piezoresistive pressure sensor  
providing a highly accurate and linear voltage output — directly proportional to the  
applied pressure. The sensor is a single monolithic silicon diaphragm with the strain  
gauge and a thin–film resistor network integrated on–chip. The chip is laser trimmed for  
precise span and offset calibration and temperature compensation. They are designed  
for use in applications such as pump/motor controllers, robotics, level indicators, medical  
diagnostics, pressure switching, barometers, altimeters, etc.  
0 to 200 kPa (0 to 29 psi)  
40 mV FULL SCALE SPAN  
(TYPICAL)  
Features  
UNIBODY PACKAGE  
Temperature Compensated Over 0°C to +85°C  
Easy–to–Use Chip Carrier Package Options  
Available in Absolute, Differential and Gauge Con-  
figurations  
SMALL OUTLINE PACKAGE  
SURFACE MOUNT  
Application Examples  
Pump/Motor Controllers  
Robotics  
Level Indicators  
Medical Diagnostics  
Pressure Switching  
Barometers  
MPX2202A/D  
CASE 344  
MPXV2202GP  
CASE 1369  
Altimeters  
Figure 1 illustrates a block diagram of the internal  
circuitry on the stand–alone pressure sensor chip.  
V
S
3
MPX2202AP/GP  
CASE 344B  
T HIN F IL M  
T EM PER AT URE  
CO M PENS AT IO N  
AND  
2
4
V
o
u
u
t
t
+
-
S EN SI N G  
E L EME NT  
MPXV2202DP  
CASE 1351  
V
o
CA LI BRAT IO N  
CI RCUI TRY  
PIN NUMBER  
1
1
2
3
4
Gnd  
N/C  
N/C  
N/C  
N/C  
5
6
7
+V  
out  
G
N
D
Figure 1. Temperature Compensated Pressure  
Sensor Schematic  
V
S
MPX2202DP  
CASE 344C  
–V  
out  
8
VOLTAGE OUTPUT versus  
APPLIED DIFFERENTIAL PRESSURE  
The differential voltage output of the sensor is  
NOTE: Pin 1 is noted by the notch in  
the lead.  
directly proportional to the differential pressure applied.  
The absolute sensor has a built–in reference vacu-  
um. The output voltage will decrease as vacuum,  
relative to ambient, is drawn on the pressure (P1) side.  
The output voltage of the differential or gauge sensor  
increases with increasing pressure applied to the  
pressure (P1) side relative to the vacuum (P2) side.  
Similarly, output voltage increases as increasing vacu-  
um is applied to the vacuum (P2) side relative to the  
pressure (P1) side.  
MPX2202ASX/GSX  
CASE 344F  
PIN NUMBER  
1
2
Gnd  
+V  
3
4
V
S
MPX2202GVP  
CASE 344D  
Preferred devices are Motorola recommended choices for future use  
and best overall value.  
–V  
out  
out  
NOTE: Pin 1 is noted by the notch in  
the lead.  
Replaces MPX2200/D  
REV 2  
For More Information On This Product,  
Go to: www.freescale.com  
Motorola, Inc. 2002  
SFE RrIeEeS scale Semiconductor, Inc.  
M
P
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2
0
2
M
P
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2
0
2
G
MAXIMUM RATINGS(NOTE)  
Rating  
Symbol  
Value  
800  
Unit  
kPa  
°C  
Maximum Pressure (P1 > P2)  
Storage Temperature  
Operating Temperature  
P
max  
T
stg  
–40 to +125  
–40 to +125  
T
A
°C  
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.  
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)  
S
A
Characteristics  
Symbol  
Min  
0
Typ  
Max  
200  
16  
Unit  
kPa  
Vdc  
mAdc  
mV  
(1)  
Pressure Range  
Supply Voltage  
Supply Current  
P
OP  
V
S
10  
I
o
6.0  
40  
(3)  
Full Scale Span  
V
FSS  
38.5  
–1.0  
41.5  
1.0  
(4)  
Offset  
V
off  
mV  
Sensitivity  
V/P  
0.2  
mV/kPa  
(5)  
Linearity  
MPX2202D Series  
MPX2202A Series  
–0.6  
–1.0  
0.4  
1.0  
%V  
FSS  
(5)  
Pressure Hysteresis (0 to 200 kPa)  
±0.1  
±0.5  
%V  
%V  
%V  
FSS  
FSS  
FSS  
(5)  
Temperature Hysteresis (–40°C to +125°C)  
(5)  
Temperature Effect on Full Scale Span  
TCV  
–2.0  
–1.0  
1000  
1400  
2.0  
1.0  
2500  
3000  
FSS  
(5)  
Temperature Effect on Offset  
TCV  
mV  
off  
Input Impedance  
Z
in  
Output Impedance  
Z
out  
(6)  
Response Time (10% to 90%)  
t
R
1.0  
20  
ms  
ms  
Warm–Up  
(7)  
Offset Stability  
±0.5  
%V  
FSS  
NOTES:  
1. 1.0 kPa (kiloPascal) equals 0.145 psi.  
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional  
error due to device self–heating.  
3. Full Scale Span (V  
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the  
FSS  
minimum rated pressure.  
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.  
off  
5. Accuracy (error budget) consists of the following:  
Linearity:  
Output deviation from a straight line relationship with pressure, using end point method, over the specified  
pressure range.  
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is  
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure  
applied.  
Pressure Hysteresis:  
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the  
minimum or maximum rated pressure, at 25°C.  
TcSpan:  
TcOffset:  
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.  
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative  
to 25°C.  
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to  
a specified step change in pressure.  
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.  
2
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, MInPcX2.2 0 2  
M P XV2 2 0 2G SE R I ES  
LINEARITY  
L
E
A
S
T
Linearity refers to how well a transducer’s output follows  
the equation: Vout = Voff + sensitivity x P over the operating  
pressure range. There are two basic methods for calculating  
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)  
a least squares best line fit. While a least squares fit gives  
the “best case” linearity error (lower numerical value), the  
calculations required are burdensome.  
SQ U AR E  
D EVI ATIO N  
L EA S T S Q UA RE S FI T  
E X AG G E RATE D  
P E RFO RMA NC E  
CU RV E  
S TR AIG H T L IN E  
DEV IATIO N  
Conversely, an end point fit will give the “worst case” error  
(often more desirable in error budget calculations) and the  
calculations are more straightforward for the user. Motorola’s  
specified pressure sensor linearities are based on the end  
point straight line method measured at the midrange  
pressure.  
E ND P O IN T  
S TRA I G HT L I NE FI T  
O
F
F
S
E
T
5 0  
P RE SS UR E (% FUL L SC AL E )  
1 00  
0
Figure 2. Linearity Specification Comparison  
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION  
Figure 3 shows the output characteristics of the  
MPX2202/MPXV2202G series at 25°C. The output is directly  
proportional to the differential pressure and is essentially a  
straight line.  
The effects of temperature on Full Scale Span and Offset  
are very small and are shown under Operating Characteristics.  
V
T
=
1 0 V dc  
S
40  
35  
30  
25  
20  
15  
10  
5
= °C25  
>
A
P 1  
P
2
TY P  
S PA N  
RA NG E  
(T YP )  
MA X  
M
I
N
0
-
ā
O
F
F
S
E
T
k
P
a
0
25  
5 0  
7 . 25  
7
5
1 00  
1 4. 5  
1 25 1 50 1 75 2 00  
2 1. 7 5 2 9  
P
S
I
P RE S SU RE  
Figure 3. Output versus Pressure Differential  
SIL IC O N E G EL DI FF ER EN TI AL /G AU G E  
D IE CO AT DI E  
S I LI CO NE G E L  
DI E CO AT  
A B SO L UTE  
DI E  
S TA I NL ES S S TE EL  
M ETA L CO V E R  
S TA I NL E SS STE EL  
ME TAL C O VER  
P 1  
P 1  
EP O XY  
C ASE  
E P OX Y  
CA S E  
WI R E BON D  
W IR E B O ND  
L EA D FRA M E  
DI E  
B O ND  
L EAD F R AM E  
D IE  
BO N D  
D IFF ER EN TI AL/ G A UG E E LEM E NT  
P 2  
A B SO L UTE E LE M EN T  
P 2  
Figure 4. Cross–Sectional Diagrams (Not to Scale)  
Figure 4 illustrates an absolute sensing die (right) and the  
differential or gauge die in the basic chip carrier (Case 344).  
A silicone gel isolates the die surface and wire bonds from  
the environment, while allowing the pressure signal to be  
transmitted to the silicon diaphragm.  
ating characteristics and internal reliability and qualification  
tests are based on use of dry air as the pressure media. Me-  
dia other than dry air may have adverse effects on sensor  
performance and long term reliability. Contact the factory for  
information regarding media compatibility in your application.  
The MPX2202/MPXV2202G series pressure sensor oper-  
Motorola Sensor Device Data  
3
For More Information On This Product,  
Go to: www.freescale.com  
SFE RrIeEeS scale Semiconductor, Inc.  
MP X2 20 2 M P XV 2 2 02 G  
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE  
Motorola designates the two sides of the pressure sensor  
tial pressure applied, P1 > P2. The absolute sensor is  
as the Pressure (P1) side and the Vacuum (P2) side. The  
Pressure (P1) side is the side containing the silicone gel  
which isolates the die from the environment. The differential  
or gauge sensor is designed to operate with positive differen-  
designed for vacuum applied to P1 side.  
The Pressure (P1) side may be identified by using the  
table below:  
Part Number  
Case Type  
344  
Pressure (P1) Side Identifier  
Stainless Steel Cap  
MPX2202A  
MPX2202D  
MPX2202DP  
MPX2202AP  
MPX2202GVP  
MPX2202ASX  
MPXV2202GP  
MPXV2202DP  
344C  
344B  
344D  
344F  
Side with Part Marking  
Side with Port Attached  
Stainless Steel Cap  
MPX2202GP  
MPX2202GSX  
Side with Port Attached  
Side with Port Attached  
Side with Part Marking  
1369  
1351  
ORDERING INFORMATION — UNIBODY PACKAGE (MPX2202 SERIES)  
MPX Series  
Order Number  
Device Marking  
Device Type  
Options  
Case Type  
Basic Element  
Absolute, Differential  
344  
MPX2202A  
MPX2202D  
MPX2202A  
MPX2202D  
Ported Elements  
Differential, Dual Port  
Absolute, Gauge  
344C  
344B  
MPX2202DP  
MPX2202DP  
MPX2202AP  
MPX2202GP  
MPX2202AP  
MPX2202GP  
Absolute, Gauge Axial  
Gauge, Vacuum  
344F  
344D  
MPX2202ASX  
MPX2202GSX  
MPX2202A  
MPX2202D  
MPX2202GVP  
MPX2202GVP  
ORDERING INFORMATION — SMALL OUTLINE PACKAGE (MPXV2202G SERIES)  
Device Type  
Options  
Case No.  
1369  
MPX Series Order No.  
MPXV2202GP  
Packing Options  
Trays  
Marking  
MPXV2202G  
MPXV2202G  
Ported Elements  
Gauge, Side Port, SMT  
Differential, Dual Port, SMT  
1351  
MPXV2202DP  
Trays  
4
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, MInPcX2.2 0 2  
M P XV2 2 0 2G SE R I ES  
SMALL OUTLINE PACKAGE DIMENSIONS  
2 PLACES 4 TIPS  
0 .0 08ꢀ ( 0. 20 ) C A  
B
E
A
GAGE  
PLANE  
e
5
4
e/2  
.014 (0.35)  
θ
L
A1  
D
F
DETAIL G  
8
1
N O TE S :  
1. C O N TR O LL IN G D I MEN S I ON : I N CH .  
2. I N TE R PR E T D I MEN S I ON S A ND TO L ER AN C ES PE R  
A SME Y 14. 5M-1 994.  
3. D I MEN S I ON S "D " A N D "E 1" D O N O T IN C L U D E M O LD  
F LAS H O R P R OT R U SI O N S . MO LD FL ASH O R  
P RO T R U SI O N S S HA LL N O T E XC EED 0 .0 06 (0 .1 52 )  
P ER S ID E .  
4. D I MEN S I ON "b " D O ES N O T I N C LU D E D AM BAR  
P RO T R U SI O N . A LLO WA BLE D AM BAR PR O T RU S IO N  
S HA LL B E 0. 008 (0 .20 3) MA XI M U M.  
8X b  
M
0. 00 4ꢀ (0 . 1)  
C
A
B
E1  
B
INCHES  
DIM MIN MAX  
0. 300  
A1 0. 002  
MILLIMETERS  
MIN  
7. 11  
MAX  
7 .6 2  
0.2 5  
1.0 7  
12. 32  
N
T
A
0. 330  
0. 010  
0. 042  
0. 485  
K
0. 05  
0. 96  
11. 81  
b
D
E
0. 038  
0. 465  
0. 717 ꢀB SC  
1
8
.
2
1
B
S
C
E1 0. 465  
0. 485  
11. 81  
2. 54ꢀ B SC  
12. 32  
A
M
e
F
0. 100 ꢀB SC  
0. 245  
0. 120  
0. 061  
0. 270  
0. 080  
0. 009  
0. 115  
0. 255  
0. 130  
0. 071  
0. 290  
0. 090  
0. 011  
0. 125  
6. 22  
3. 05  
1. 55  
6. 86  
2. 03  
0. 23  
2. 92  
6.4 7  
3.3 0  
1.8 0  
7.3 6  
2.2 8  
0 .2 8  
3.1 7  
K
L
8X  
0. 00 4ꢀ ( 0.1 )  
M
N
P
T
P
DETAIL G  
SEATING  
PLANE  
C
°
0ꢀ ꢀ  
°
7ꢀ ꢀ  
°
0ꢀ ꢀ  
°
7 ꢀꢀ  
θ
CASE 1369–01  
ISSUE O  
Motorola Sensor Device Data  
5
For More Information On This Product,  
Go to: www.freescale.com  
SFE RrIeEeS scale Semiconductor, Inc.  
MP X2 20 2 M P XV 2 2 02 G  
SMALL OUTLINE PACKAGE DIMENSIONS—CONTINUED  
2 PLACES 4 TIPS  
0 .0 06 ꢀ( 0. 15 ) C A  
B
E
A
GAGE  
PLANE  
e
5
4
e/2  
.014 (0.35)  
θ
L
A1  
D
F
DETAIL G  
8
1
N O TE S :  
8X b  
1. C O N TR O LL IN G D I MEN S I ON : I N CH .  
2. I N TE R PR E T D I MEN S I ON S A ND TO LE R AN C ES PE R  
A SME Y 14. 5M-1 994.  
3. D I MEN S I ON S "D " A N D "E 1" D O N O T IN C L U D E M O LD  
F LAS H O R P R OT R U SI O N S . MO LD F LASH O R  
P RO T R U SI O N S S HA LL N O T E XC E ED 0 .0 06 (0 .1 52 )  
P ER S ID E .  
4. D I MEN S I ON "b " D O ES N O T I N CL U D E D AM BAR  
P RO T R U SI O N . A LLO WA BLE D AM BA R PR O TR U S IO N  
S HA LL B E 0. 008 (0 .20 3) MA XI MU M .  
S TY LE 1:  
P IN 1. G N D  
S TY LE 2:  
P IN 1. N / C  
2. V s  
M
0. 00 4ꢀ (0 . 1)  
C A B  
2. +Vout  
3. V s  
3. G N D  
4. Vout  
5. N / C  
6. N / C  
7. N / C  
8. N / C  
4. -Vout  
5. N / C  
6. N / C  
7. N / C  
8. N / C  
E1  
B
INCHES  
DIM MIN MAX  
0. 370  
A1 0. 002  
MILLIMETERS  
N
MIN  
9. 39  
MAX  
9. 91  
T
A
0. 390  
0. 010  
0. 042  
0. 485  
0. 700  
0. 485  
0. 05  
0. 96  
0. 25  
1. 07  
b
D
E
0. 038  
0. 465  
0. 680  
11. 81  
17. 27  
11. 81  
12. 32  
17. 78  
12. 32  
E1 0. 465  
M
A
e
F
0
.
1
0
0
B
S
C
2. 54ꢀ B SC  
0. 240  
0. 115  
0. 040  
0. 270  
0. 160  
0. 009  
0. 110  
0. 260  
0. 135  
0. 060  
0. 290  
0. 180  
0. 011  
0. 130  
6. 10  
2. 92  
1. 02  
6. 86  
4. 06  
0. 23  
2. 79  
6. 60  
3. 43  
1. 52  
7. 37  
4. 57  
0. 28  
3. 30  
K
L
8X  
0. 00 4ꢀ ( 0.1 )  
M
N
P
T
K
P
DETAIL G  
SEATING  
PLANE  
°
0ꢀ ꢀ  
°
7ꢀ ꢀ  
°
0ꢀ ꢀ  
°
7ꢀ ꢀ  
θ
C
CASE 1351–01  
ISSUE O  
6
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, MInPcX2.2 0 2  
M P XV2 2 0 2G SE R I ES  
UNIBODY PACKAGE DIMENSIONS  
N O TE S :  
C
1. D I MEN S I ON I N G A ND TO LE R AN C IN G PE R AS ME  
Y 14. 5M, 199 4.  
2. C O N TR O LL IN G D I MEN S I ON : I N C H .  
R
3. D I MEN S I ON -A - I S I N CL U SI V E O F TH E  
S TO P R I NG . MO LD S TO P RI N G N O T TO EX C EED  
16. 00 (0 .63 0).  
M O LD  
M
Z
1
4
2
3
INCHES  
DIM MIN MAX  
MILLIMETERS  
B
–A–  
MIN  
15. 11  
13. 06  
5. 08  
MAX  
1 6. 00  
1 3. 56  
5 .5 9  
A
B
C
D
F
0. 595  
0. 514  
0. 200  
0. 016  
0. 048  
0. 630  
0. 534  
0. 220  
0. 020  
0. 064  
N
L
1
2
3
4
PIN 1  
0. 41  
1. 22  
0 .5 1  
1 .6 3  
–T–  
SEATING  
PLANE  
G
J
0. 100 ꢀB SC  
2
.
5
4
B
S
C
F
0. 014  
0. 695  
0. 016  
0. 725  
0. 36  
17. 65  
0 .4 0  
1 8. 42  
G
J
L
F
Y
M
N
R
Y
Z
3
0
N
O
M
30ꢀ ꢀ ꢀꢀ N O M  
_
_
D 4 PL  
0
.
4
7
5
0. 495  
0. 450  
0. 052  
0. 118  
12. 07  
1 2. 57  
11 .4 3  
1 .3 2  
0. 430  
0. 048  
0. 106  
10. 92  
1. 22  
2. 68  
DAMBAR TRIM ZONE:  
THIS IS INCLUDED  
WITHIN DIM. “F” 8 PL  
M
M
T A  
0. 13 6ꢀ ( 0.0 05)  
3
.
0
0
S
T
Y
L
E
1
:
S TY LE 2:  
P IN 1. V  
S TY LE 3:  
PIN 1. G R OU N D  
2. + O U TPU T  
3. + SU PPLY  
4. - O U TPU T  
P IN 1. G N D  
2. -V O U T  
3. V S  
C C  
2. - S U PP LY  
3. + S UP P LY  
4. G R O U N D  
4
.
+
V
O
U
T
CASE 344–15  
ISSUE Z  
N O TE S :  
–A–  
SEATING  
PLANE  
1. D I MEN S I ON I N G A ND TO LE R AN C IN G PE R AN S I  
Y 14. 5, 198 2.  
2. C O N TR O LL IN G D I MEN S I ON : I N C H .  
–T–  
U
L
R
INCHES  
DIM MIN MAX  
MILLIMETERS  
H
MIN  
29. 08  
17. 40  
7. 75  
MAX  
2 9. 85  
1 8. 16  
8 .2 6  
A
B
C
D
F
1. 145  
0. 685  
0. 305  
0. 016  
0. 048  
1. 175  
0. 715  
0. 325  
0. 020  
0. 064  
N
B
PORT #1  
POSITIVE  
PRESSURE  
(P1)  
–Q–  
0. 41  
1. 22  
0 .5 1  
1 .6 3  
G
H
J
0. 100 ꢀB SC  
2. 54ꢀ B SC  
0. 182  
0. 014  
0. 695  
0. 290  
0. 420  
0. 153  
0. 153  
0. 230  
0. 220  
0. 194  
0. 016  
0. 725  
0. 300  
0. 440  
0. 159  
0. 159  
0. 250  
0. 240  
4. 62  
0. 36  
17. 65  
7. 37  
10. 67  
3. 89  
3. 89  
5. 84  
5. 59  
4 .9 3  
0 .4 1  
1 8. 42  
7 .6 2  
11 .1 8  
4 .0 4  
4 .0 4  
6 .3 5  
6 .1 0  
K
L
1
2
3 4  
PIN 1  
N
P
Q
R
S
U
K
–P–  
S
M
S
0. 25 ꢀ( 0 .0 10)  
T Q  
J
F
0. 910 ꢀB SC  
2
3
.
1
1
B
S
C
G
C
D 4 PL  
M
S
S
Q
0
.
1
3
(
0
.
0
0
5
)
T
S
S TY LE 1:  
P IN 1. G R O U N D  
2. + O U TP U T  
3. + S UP P LY  
4. - O U TP U T  
CASE 344B–01  
ISSUE B  
Motorola Sensor Device Data  
7
For More Information On This Product,  
Go to: www.freescale.com  
SFE RrIeEeS scale Semiconductor, Inc.  
MP X2 20 2 M P XV 2 2 02 G  
UNIBODY PACKAGE DIMENSIONS — CONTINUED  
N O TE S :  
–A–  
1. D I MEN S I ON I N G A ND TO LE R AN C I N G PE R AN S I  
Y 14. 5M, 198 2.  
2. C O N TR O LL IN G D I MEN S I ON : I N CH .  
V
U
PORT #1  
W
L
R
H
INCHES  
DIM MIN MAX  
MILLIMETERS  
PORT #2  
MIN  
29. 08  
17. 40  
10. 29  
0. 41  
MAX  
29. 85  
18. 16  
11. 05  
0. 51  
PORT #1  
POSITIVE PRESSURE  
(P1)  
PORT #2  
VACUUM  
(P2)  
A
B
C
D
F
1. 145  
0. 685  
0. 405  
0. 016  
0. 048  
1. 175  
0. 715  
0. 435  
0. 020  
0. 064  
N
–Q–  
1. 22  
1
.
6
3
G
H
J
0
.
1
0
0
B
S
C
2. 54ꢀ B SC  
SEATING  
PLANE  
SEATING  
PLANE  
B
0. 182  
0. 014  
0. 695  
0. 290  
0. 420  
0. 153  
0. 153  
0. 063  
0. 220  
0. 194  
0. 016  
0. 725  
0. 300  
0. 440  
0. 159  
0. 159  
0. 083  
0. 240  
4. 62  
0. 36  
17. 65  
7. 37  
10. 67  
3. 89  
3. 89  
1. 60  
5. 59  
4. 93  
0. 41  
18. 42  
7. 62  
11. 18  
4. 04  
4. 04  
2. 11  
1
2 3 4  
K
L
PIN 1  
K
–P–  
N
P
Q
R
S
U
V
W
M
S
0. 25 ꢀ( 0 .0 10)  
T Q  
–T–  
–T–  
S
F
J
6. 10  
G
C
0. 910 ꢀB SC  
23. 11ꢀ BS C  
D 4 PL  
0. 248  
0. 310  
0. 278  
0. 330  
6. 30  
7. 87  
7. 06  
8. 38  
M
S
S
0. 13 ꢀ( 0 .0 05)  
T S  
Q
S TY LE 1:  
P IN 1. G R O U N D  
2. + O U TP U T  
3. + S UP P LY  
4. - O U TP U T  
CASE 344C–01  
ISSUE B  
N O TE S :  
1. D I MEN S IO N I N G A ND TO LE R AN C I N G PE R AN S I  
Y 14. 5, 198 2.  
2. C O N TR O LL IN G D I MEN S I ON : I N CH .  
–A–  
U
L
SEATING  
PLANE  
INCHES  
DIM MIN MAX  
MILLIMETERS  
–T–  
MIN  
29. 08  
17. 40  
7. 75  
MAX  
29. 85  
18. 16  
8. 26  
PORT #2  
VACUUM  
(P2)  
A
B
C
D
F
1. 145  
0. 685  
0. 305  
0. 016  
0. 048  
1. 175  
0. 715  
0. 325  
0. 020  
0. 064  
H
R
POSITIVE  
PRESSURE  
(P1)  
0. 41  
1. 22  
0. 51  
1. 63  
N
B
–Q–  
G
H
J
0. 100 ꢀB SC  
2
.
5
4
B
S
C
0. 182  
0. 014  
0. 695  
0. 290  
0. 420  
0. 153  
0. 153  
0. 230  
0. 220  
0. 194  
0. 016  
0. 725  
0. 300  
0. 440  
0. 159  
0. 158  
0. 250  
0. 240  
4. 62  
0. 36  
17. 65  
7. 37  
10. 67  
3. 89  
3. 89  
5. 84  
5. 59  
4. 93  
0. 41  
18. 42  
7. 62  
11. 18  
4. 04  
4. 04  
6. 35  
6. 10  
K
L
N
P
Q
R
S
U
1
2
3 4  
K
PIN 1  
S
0
.
9
1
0
B
S
C
2
3
.
1
1
B
S
C
C
F
–P–  
G
S
T
Y
L
E
1
:
J
M
S
T Q  
P IN 1. G R O U N D  
2. + O U TP U T  
3. + S U PP LY  
4. - O U TP U T  
0
.
2
5
(
0
.
0
1
0
)
D 4 PL  
M
S
S
Q
0
.
1
3
(
0
.
0
0
5
)
T
S
CASE 344D–01  
ISSUE B  
8
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, MInPcX2.2 0 2  
M P XV2 2 0 2G SE R I ES  
UNIBODY PACKAGE DIMENSIONS — CONTINUED  
N O TE S :  
–T–  
1. D I MEN S I ON I N G A N D TO LER A N C IN G PE R  
A NS I Y 14. 5M, 198 2.  
2. C O N TR O LL IN G D I MEN S I ON : IN C H .  
C
A
U
–Q–  
E
INCHES  
DIM MIN MAX  
MILLIMETERS  
MIN  
27 .4 3  
18 .8 0  
16 .0 0  
0.4 1  
MAX  
2 8. 45  
1 9. 30  
1 6. 51  
0 .5 1  
A
B
C
D
E
F
1. 080  
0. 740  
0. 630  
0. 016  
0. 160  
0. 048  
1. 120  
0. 760  
0. 650  
0. 020  
0. 180  
0. 064  
N
S
B
R
4.0 6  
1.2 2  
4 .5 7  
1 .6 3  
V
G
J
0. 100 ꢀB SC  
2 .5 4ꢀB SC  
0. 014  
0. 220  
0. 070  
0. 150  
0. 150  
0. 440  
0. 695  
0. 840  
0. 182  
0. 016  
0. 240  
0. 080  
0. 160  
0. 160  
0. 460  
0. 725  
0. 860  
0. 194  
0.3 6  
5.5 9  
0 .4 1  
6 .1 0  
K
N
P
Q
R
S
U
V
PORT #1  
POSITIVE  
PRESSURE  
(P1)  
PIN 1  
1.7 8  
3.8 1  
2 .0 3  
4 .0 6  
–P–  
M
M
T Q  
0
.
2
5
(
0
.
0
1
0
)
4
3
2
1
3.8 1  
4 .0 6  
11 .1 8  
17 .6 5  
21 .3 4  
4.6 2  
11 .6 8  
1 8. 42  
2 1. 84  
4 .9 2  
K
F
J
G
S TY LE 1:  
P IN 1. G R O U N D  
D 4 PL  
0 .1 3 ꢀ (0 . 00 5 )  
2. V (+ ) O U T  
3. V S U PP LY  
4. V (- ) O U T  
M
S
S
Q
T
P
CASE 344F–01  
ISSUE B  
Motorola Sensor Device Data  
9
For More Information On This Product,  
Go to: www.freescale.com  
SFE RrIeEeS scale Semiconductor, Inc.  
MP X2 20 2 M P XV 2 2 02 G  
NOTES  
10  
Motorola Sensor Device Data  
For More Information On This Product,  
Go to: www.freescale.com  
Freescale Semiconductor, MInPcX2.2 0 2  
M P XV2 2 0 2G SE R I ES  
NOTES  
Motorola Sensor Device Data  
11  
For More Information On This Product,  
Go to: www.freescale.com  
SFE RrIeEeS scale Semiconductor, Inc.  
MP X2 20 2 M P XV 2 2 02 G  
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding  
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and specifically disclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters can and do vary in different  
applications and actual performance may vary over time. All operating parameters, including “Typicals” must be validated for each customer application by  
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MOTOROLA and the Stylized M Logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective  
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E Motorola, Inc. 2002.  
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For More Information On This Product,  
MPX2202/D  
Go to: www.freescale.com  

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