MPX5050GSX_技术文档

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by MPX5050/D

SEMICONDUCTOR TECHNICAL DATA

OPERATING OVERVIEW

INTEGRATED

PRESSURE SENSOR

0 to 50 kPa (0 to 7.25 psi)

0.2 to 4.7 Volts Output

The MPX5050 series piezoresistive transducer is a state–of–the–art monolithic silicon

pressure sensor designed for a wide range of applications, but particularly those

employing a microcontroller or microprocessor with A/D inputs. This patented, single

element transducer combines advanced micromachining techniques, thin–film metalliza-

tion, and bipolar processing to provide an accurate, high level analog output signal that

is proportional to the applied pressure.

Features

•

2.5% Maximum Error over 0° to 85°C

Ideally suited for Microprocessor or Microcontroller–Based Systems

Temperature Compensated Over – 40° to +125°C

Patented Silicon Shear Stress Strain Gauge

Durable Epoxy Unibody Element

BASIC CHIP CARRIER

ELEMENT

CASE 867–08, STYLE 1

Easy–to–Use Chip Carrier Option

V

S

3

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

X–ducer

SENSING

ELEMENT

1

V

out

DIFFERENTIAL PORT OPTION

CASE 867C–05, STYLE 1

GAIN STAGE #1

NOTE: Pin 1 is the notched pin.

2

PINS 4, 5 AND 6 ARE NO CONNECTS

PIN NUMBER

GND

1

2

3

V

4

5

6

N/C

out

Grd

Figure 1. Fully Integrated Pressure Sensor Schematic

V

S

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect

to external circuitry or ground.

(1)

MAXIMUM RATINGS

Parametrics

(2)

Symbol

Value

200

Unit

kPa

°C

Overpressure (P1 > P2)

P

max

(2)

Burst Pressure (P1 > P2)

P

burst

700

Storage Temperature

Operating Temperature

T

stg

–40° to +125°

T

A

°C

1. T = 25°C unless otherwise noted.

C

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Senseon and X–ducer are trademarks of Motorola, Inc.

REV 3

Motorola Sensor Device Data

1

Motorola, Inc. 1997

OPERATING CHARACTERISTICS (V = 5.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)

S

A

Characteristic

Symbol

Min

0

Typ

—

Max

50

Unit

kPa

(1)

Pressure Range

P

OP

(2)

Supply Voltage

V

4.75

—

5.0

7.0

0.20

5.25

10.0

0.313

Vdc

S

Supply Current

I

o

mAdc

Vdc

(3)

Minimum Pressure Offset

@ V = 5.0 Volts

(0 to 85°C)

V

off

0.088

S

(4)

Full Scale Output

(0 to 85°C)

V

4.587

—

4.70

4.50

4.813

—

Vdc

FSO

@ V = 5.0 Volts

S

(5)

Full Scale Span

V

FSS

@ V = 5.0 Volts

S

(6)

Accuracy

—

90

2.5

—

%V

FSS

Sensitivity

V/P

mV/kPa

(7)

Response Time

t

R

1.0

0.1

20

—

mS

Output Source Current at Full Scale Output

(8)

I +

o

—

mAdc

mSec

Warm–Up Time

(9)

—

Offset Stability

0.5

—

%V

FSS

Decoupling circuit shown in Figure 4 required to meet electrical specifications.

MECHANICAL CHARACTERISTICS

Characteristic

Weight, Basic Element (Case 867)

(10)

Symbol

Min

—

Typ

4.0

—

Max

—

Unit

—

Grams

kPa

Common Mode Line Pressure

NOTES:

—

690

1. 1.0kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V ) is defined as the output voltage at the minimum rated pressure.

off

4. Full Scale Output (V

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

5. Full Scale Span (V

FSS

minimum rated pressure.

6. Accuracy (error budget) consists of the following:

•

Linearity:

Output deviation from a straight line relationship with pressure over the specified pressure range.

Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure

applied.

•

Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from

minimum or maximum rated pressure at 25°C.

•

TcSpan:

TcOffset:

Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative

to 25°C.

•

Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

at 25°C.

FSS

7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

8. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.

9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

10. Common mode pressures beyond what is specified may result in leakage at the case–to–lead interface.

2

Motorola Sensor Device Data

Figure 3 illustrates the Differential/Gauge Sensing Chip in

the basic chip carrier (Case 867). A fluorosilicone gel isolates

the die surface and wire bonds from the environment, while

allowing the pressure signal to be transmitted to the sensor

diaphragm.

The MPX5050 series pressure sensor operating charac-

teristics, and internal reliability and qualification tests are

based on use of dry air as the pressure media. Media, other

than dry air, may have adverse effects on sensor perfor-

mance and long–term reliability. Contact the factory for in-

formation regarding media compatibility in your application.

Figure 4 shows a typical decoupling circuit for interfacing

the integrated sensor to the A/D input of a microprocessor.

Proper decoupling of the power supply is recommended.

Figure 2 shows the sensor output signal relative to pres-

sure input. Typical, minimum, and maximum output curves

are shown for operation over a temperature range of 0° to

85°C using the decoupling circuit below. (The output will sat-

urate outside of the specified pressure range.)

5.0

TRANSFER FUNCTION:

4.5

4.0

3.5

3.0

2.5

2.0

1.5

1.0

0.5

0

V

= V *(0.018*P+0.04) ± ERROR

S

out

V

= 5.0 Vdc

S

TEMP = 0 to 85°C

TYPICAL

MIN

30

MAX

0

5

10

15

20

25

35

40

45

50

55

DIFFERENTIAL PRESSURE (kPa)

Figure 2. Output versus Pressure Differential

MPX5050

FLUORO SILICONE

GEL DIE COAT

STAINLESS STEEL

OUPUT

A/D

DIE

METAL COVER

(PIN 1)

P1

EPOXY

50 pF

51 k

WIRE BOND

PLASTIC

µ

PROCESSOR

CASE

DIE

LEAD FRAME

BOND

DIFFERENTIAL/GAUGE ELEMENT

P2

Figure 3. Cross–Sectional Diagram

(Not to Scale)

Figure 4. Typical Decoupling Filter for Sensor to

Microprocessor Interface

Motorola Sensor Device Data

3

Transfer Function

Nominal Transfer Value: V

= V (P x 0.018 + 0.04)

S

out

+/– (Pressure Error x Temp. Factor x 0.018 x V )

S

V

= 5.0 V ± 0.25 Vdc

S

Temperature Error Band

MPX5050D Series

4.0

Temp

Multiplier

3.0

– 40

0 to 85

+125

3

1

3

Temperature

Error

2.0

Factor

1.0

0.0

–40

–20

0

20

40

60

80

100

120

140

Temperature in °C

NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C.

Pressure Error Band

Error Limits for Pressure

3.0

2.0

1.0

0.0

Pressure (in kPa)

0

10

20

30

40

50

60

–1.0

– 2.0

– 3.0

Pressure

Error (Max)

± 1.25 kPa

0 to 50 kPa

4

Motorola Sensor Device Data

PRESSURE (P1) / VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor

pressure sensor is designed to operate with positive differen-

as the Pressure (P1) side and the Vacuum (P2) side. The

Pressure (P1) side is the side containing fluorosilicone gel

which protects the die from harsh media. The Motorola MPX

tial pressure applied, P1 > P2.

The Pressure (P1) side may be identified by using the

table below:

Pressure (P1)

Side Identifier

Part Number

Case Type

MPX5050D

867–08

Stainless Steel Cap

MPX5050DP

MPX5050GP

MPX5050GVP

MPX5050GS

MPX5050GVS

MPX5050GSX

MPX5050GVSX

867C–05

867B–04

867D–04

867E–03

867A–04

867F–03

867G–03

Side with Part Marking

Side with Port Attached

Stainless Steel Cap

Side with Port Attached

Stainless Steel Cap

Side with Port Attached

Stainless Steel Cap

ORDERING INFORMATION

The MPX5050 pressure sensor is available in differential and gauge configurations. Devices are available in the basic

element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure

connections.

MPX Series

Device Type

Basic Element

Ported Elements

Options

Case Type

Order Number

MPX5050D

Device Marking

MPX5050D

Differential

867–08

Differential Dual Ports

Gauge

867C–05

867B–04

867D–04

867E–03

867A–04

867F–03

867G–03

MPX5050DP

MPX5050GP

MPX5050GVP

MPX5050GS

MPX5050GVS

MPX5050GSX

MPX5050GVSX

MPX5050DP

MPX5050GP

MPX5050GVP

MPX5050D

Gauge Vacuum Port

Gauge, Axial

Gauge Vacuum Axial

Gauge, Axial PC Mount

Gauge Vacuum Axial PC Mount

MPX5050D

Motorola Sensor Device Data

5

PACKAGE DIMENSIONS

C

R

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD

STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

POSITIVE PRESSURE

(P1)

M

B

–A–

INCHES

MILLIMETERS

N

L

DIM

A

B

C

D

F

MIN

MAX

0.630

0.534

0.220

0.033

0.064

MIN

15.11

13.06

5.08

MAX

16.00

13.56

5.59

0.595

0.514

0.200

0.027

0.048

PIN 1

1

2

3

4

5

6

SEATING

PLANE

–T–

0.68

0.84

1.22

1.63

G

J

S

G

J

L

M

N

R

S

0.100 BSC

2.54 BSC

F

0.014

0.695

0.016

0.725

0.36

0.40

D_{6 PL}

17.65

18.42

30 NOM

M

0.136 (0.005)

T A

0.475

0.430

0.090

0.495

0.450

0.105

12.07

10.92

2.29

12.57

11.43

2.66

STYLE 1:

PIN 1. VOUT

2. GROUND

3. VCC

4. V1

5. V2

CASE 867–08

ISSUE N

6. VEX

BASIC ELEMENT (D)

A

C

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

POSITIVE

PRESSURE

(P1)

INCHES

MILLIMETERS

–B–

V

DIM

A

B

C

D

E

MIN

MAX

0.720

0.255

0.820

0.033

0.186

0.064

MIN

17.53

6.22

19.81

0.69

MAX

18.28

6.48

20.82

0.84

0.690

0.245

0.780

0.027

0.178

0.048

PIN 1

PORT #2

VACUUM

(P2)

4.52

1.22

4.72

1.63

1

2

3

4

5

6

F

G

J

K

N

S

0.100 BSC

2.54 BSC

K

S

0.014

0.345

0.300

0.220

0.182

0.016

0.375

0.310

0.240

0.194

0.36

8.76

7.62

5.59

4.62

0.41

9.53

7.87

6.10

4.93

G

J

V

F

N

E

D_{6 PL}

STYLE 1:

PIN 1. VOUT

2. GROUND

M

0.13 (0.005)

T B

–T–

3. VCC

4. V1

5. V2

6. VEX

CASE 867A–04

ISSUE E

VACUUM SIDE PORTED (GVS)

6

Motorola Sensor Device Data

PACKAGE DIMENSIONS–CONTINUED

A

U

L

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

SEATING

PLANE

–T–

R

PORT #1

POSITIVE

PRESSURE (P1)

INCHES

MILLIMETERS

V

DIM

A

B

C

D

F

MIN

MAX

1.175

0.715

0.325

0.033

0.064

MIN

29.08

17.40

7.75

0.68

1.22

MAX

29.85

18.16

8.26

0.84

1.63

1.145

0.685

0.305

0.027

0.048

–Q–

N

G

J

K

L

N

P

Q

R

S

0.100 BSC

2.54 BSC

0.014

0.695

0.290

0.420

0.153

0.230

0.220

0.016

0.725

0.300

0.440

0.159

0.250

0.240

0.36

17.65

7.37

0.41

18.42

7.62

B

10.67

3.89

11.18

4.04

K

1

2

3

4

5

6

3.89

4.04

5.84

6.35

PIN 1

S

5.59

6.10

U

V

0.910 BSC

23.11 BSC

–P–

C

0.182

0.194

4.62

4.93

G

D6 PL

0.13 (0.005)

M

0.25 (0.010)

T

Q

F

J

M

S

T

P

Q

STYLE 1:

PIN 1.

V

OUT

2. GROUND

3.

V

CC

4. V1

5. V2

CASE 867B–04

ISSUE E

6.

V

EX

PRESSURE SIDE PORTED (GP)

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

P

–A–

U

M

0.25 (0.010)

T Q

X

INCHES

MILLIMETERS

L

W

DIM

A

B

C

D

F

MIN

MAX

1.175

0.715

0.435

0.033

0.064

MIN

29.08

17.40

10.29

0.68

MAX

29.85

18.16

11.05

0.84

R

N

1.145

0.685

0.405

0.027

0.048

V

PORT #1

POSITIVE

PRESSURE

(P1)

PORT #2 VACUUM (P2)

PORT #1 POSITIVE

PRESSURE (P1)

1.22

1.63

G

J

K

L

N

P

Q

R

S

0.100 BSC

2.54 BSC

–Q–

PORT #2

VACUUM

(P2)

0.014

0.695

0.290

0.420

0.153

0.063

0.220

0.016

0.725

0.300

0.440

0.159

0.083

0.240

0.36

17.65

7.37

10.67

3.89

0.41

18.42

7.62

11.18

4.04

2.11

B

PIN 1

3.89

1.60

K

1

2

3

4

5

6

5.59

6.10

U

V

W

X

0.910 BSC

23.11 BSC

C

0.182

0.310

0.248

0.194

0.330

0.278

4.62

7.87

6.30

4.93

8.38

7.06

S

SEATING

PLANE

SEATING

PLANE

–T–

J

6 PL

D

G

STYLE 1:

PIN 1.

F

M

0.13 (0.005)

A

V

OUT

2. GROUND

3.

V

CC

4. V1

5. V2

CASE 867C–05

ISSUE F

6.

V

EX

PRESSURE AND VACUUM SIDES PORTED (DP)

Motorola Sensor Device Data

7

PACKAGE DIMENSIONS–CONTINUED

–P–

M

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

0.25 (0.010)

T Q

A

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

U

PORT #2

SEATING

PLANE

L

INCHES

MILLIMETERS

–T–

R

VACUUM (P2)

DIM

A

B

C

D

F

MIN

MAX

1.175

0.715

0.325

0.033

0.064

MIN

29.08

17.40

7.75

0.68

1.22

MAX

29.85

18.16

8.26

0.84

1.63

V

1.145

0.685

0.305

0.027

0.048

POSITIVE PRESSURE (P1)

–Q–

N

B

G

J

K

L

N

P

Q

R

S

0.100 BSC

2.54 BSC

0.014

0.695

0.290

0.420

0.153

0.230

0.220

0.016

0.725

0.300

0.440

0.159

0.250

0.240

0.36

17.65

7.37

0.41

18.42

7.62

PIN 1

10.67

3.89

11.18

4.04

3.89

4.04

K

5.84

6.35

1

2

3

4

5

6

5.59

6.10

U

V

0.910 BSC

23.11 BSC

S

0.182

0.194

4.62

4.93

C

G

6 PL

D

STYLE 1:

PIN 1.

J

V

F

OUT

M

S

0.13 (0.005)

T

P

Q

2. GROUND

3.

4. V1

5. V2

V

CC

CASE 867D–04

ISSUE F

6.

V

EX

VACUUM SIDE PORTED (GVP)

NOTES:

C

A

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

INCHES

MILLIMETERS

DIM

A

B

C

D

E

MIN

MAX

0.720

0.255

0.820

0.033

0.186

0.064

MIN

17.53

6.22

19.81

0.69

MAX

18.28

6.48

20.82

0.84

0.690

0.245

0.780

0.027

0.178

0.048

–B–

V

PIN 1

4.52

1.22

4.72

1.63

F

PORT #1

POSITIVE

PRESSURE

(P1)

6

5

4

3

2

1

G

J

K

N

S

0.100 BSC

2.54 BSC

0.014

0.345

0.300

0.220

0.182

0.016

0.375

0.310

0.240

0.194

0.36

8.76

7.62

5.59

4.62

0.41

9.53

7.87

6.10

4.93

K

S

V

J

G

STYLE 1:

PIN 1.

F

N

E

D 6 PL

V

OUT

2. GROUND

3.

4. V1

5. V2

V

–T–

M

0.13 (0.005)

T B

CC

6.

V

EX

CASE 867E–03

ISSUE D

PRESSURE SIDE PORTED (AS, GS)

8

Motorola Sensor Device Data

PACKAGE DIMENSIONS–CONTINUED

–T–

NOTES:

1. DIMENSIONING AND TOLERANCING PER

ANSI Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

C

A

U

E

–Q–

INCHES

MILLIMETERS

DIM

A

B

C

D

E

MIN

MAX

1.120

0.760

0.650

0.033

0.180

0.064

MIN

27.43

18.80

16.00

0.68

MAX

28.45

19.30

16.51

0.84

1.080

0.740

0.630

0.027

0.160

0.048

N

V

4.06

1.22

4.57

1.63

B

F

G

J

K

N

P

Q

R

S

U

V

0.100 BSC

2.54 BSC

R

0.014

0.220

0.070

0.150

0.440

0.695

0.840

0.182

0.016

0.240

0.080

0.160

0.460

0.725

0.860

0.194

0.36

5.59

0.41

6.10

PIN 1

PORT #1

POSITIVE

PRESSURE

(P1)

1.78

2.03

–P–

3.81

4.06

6

5

4

3

2

1

M

0.25 (0.010)

T Q

3.81

4.06

S

11.18

17.65

21.34

4.62

11.68

18.42

21.84

4.93

K

J

D_{6 PL}

G

STYLE 1:

PIN 1.

M

S

0.13 (0.005)

T

P

Q

V

OUT

2. GROUND

3.

V

F

CC

4. V1

5. V2

6.

V

EX

CASE 867F–03

ISSUE D

PRESSURE SIDE PORTED (GSX)

–T–

NOTES:

1. DIMENSIONING AND TOLERANCING PER

ANSI Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

C

A

U

E

–Q–

INCHES

MILLIMETERS

DIM

A

B

C

D

E

F

G

J

K

N

P

Q

R

S

MIN

MAX

1.120

0.760

0.650

0.033

0.180

0.064

MIN

27.43

18.80

16.00

0.68

4.06

1.22

2.54 BSC

0.36

5.59

1.78

3.81

11.18

17.65

21.34

4.62

MAX

28.45

19.30

16.51

0.84

1.080

0.740

0.630

0.027

0.160

0.048

POSITIVE

PRESSURE

(P1)

N

S

4.57

1.63

V

B

0.100 BSC

R

0.014

0.220

0.070

0.150

0.440

0.695

0.840

0.182

0.016

0.240

0.080

0.160

0.460

0.725

0.860

0.194

0.41

6.10

2.03

4.06

11.68

18.42

21.84

4.93

PORT #2

VACUUM

(P2)

PIN 1

–P–

1

2

3

4

5

6

M

0.25 (0.010)

T Q

U

V

K

J

D_{6 PL}

STYLE 1:

PIN 1.

G

V

M

S

0.13 (0.005)

T

P

Q

OUT

2. GROUND

3.

V

CC

4. V1

5. V2

F

6.

V

EX

CASE 867G–03

ISSUE D

VACUUM SIDE PORTED (GVSX)

Motorola Sensor Device Data

9

Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding

the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and

specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola

datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”

must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of

others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other

applicationsintended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury

ordeathmayoccur. ShouldBuyerpurchaseoruseMotorolaproductsforanysuchunintendedorunauthorizedapplication,BuyershallindemnifyandholdMotorola

and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees

arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that

Motorola was negligent regarding the design or manufacture of the part. Motorola and

Opportunity/Affirmative Action Employer.

are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal

Mfax is a trademark of Motorola, Inc.

How to reach us:

USA/EUROPE/Locations Not Listed: Motorola Literature Distribution;

P.O. Box 5405, Denver, Colorado 80217. 303–675–2140 or 1–800–441–2447

JAPAN: Nippon Motorola Ltd.; Tatsumi–SPD–JLDC, 6F Seibu–Butsuryu–Center,

3–14–2 Tatsumi Koto–Ku, Tokyo 135, Japan. 81–3–3521–8315

Mfax : RMFAX0@email.sps.mot.com – TOUCHTONE 602–244–6609

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– US & Canada ONLY 1–800–774–1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852–26629298

INTERNET: http://motorola.com/sps

MPX5050/D

◊

10

Motorola Sensor Device Data


型号：	MPX5050GSX
厂家：	MOTOROLA
描述：	OPERATING OVERVIEW INTEGRATED PRESSURE SENSOR 0 to 50 kPa (0 to 7.25 psi) 0.2 to 4.7 Volts Output 操作概述集成压力传感器0到50千帕（ 0至7.25磅） 0.2至4.7伏特输出传感器换能器压力传感器
文件：	总10页 (文件大小：192K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

MPX5050GSX [MOTOROLA]

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