MPX50GVSX [MOTOROLA]

0 to 50 kPa (0-7.25 psi) 60 mV FULL SCALE SPAN (TYPICAL); 0〜50千帕（ 0-7.25磅） 60 mV的满量程（典型值）


型号：	MPX50GVSX
厂家：	MOTOROLA
描述：	0 to 50 kPa (0-7.25 psi) 60 mV FULL SCALE SPAN (TYPICAL) 0〜50千帕（ 0-7.25磅） 60 mV的满量程（典型值）
文件：	总10页 (文件大小：190K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

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by MPX50/D

SEMICONDUCTOR TECHNICAL DATA

The MPX50 silicon piezoresistive pressure sensor provides a very accurate and linear

voltage output — directly proportional to the applied pressure. This standard, low cost,

uncompensated sensor permits manufacturers to design and add their own external

temperature compensating and signal conditioning networks. Compensation techniques

are simplified because of the predictability of Motorola’s single element strain gauge

design.

0 to 50 kPa (0–7.25 psi)

60 mV FULL SCALE SPAN

(TYPICAL)

Features

•

Low Cost

Patented Silicon Shear Stress Strain Gauge Design

Ratiometric to Supply Voltage

Easy to Use Chip Carrier Package Options

60 mV Span (Typ)

BASIC CHIP

CARRIER ELEMENT

CASE 344–15, STYLE 1

Differential and Gauge Options

±0.25% (Max) Linearity

Application Examples

•

Air Movement Control

Environmental Control Systems

Level Indicators

Leak Detection

Medical Instrumentation

Industrial Controls

DIFFERENTIAL

PORT OPTION

CASE 344C–01, STYLE 1

Pneumatic Control Systems

Robotics

Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure

sensor chip.

NOTE: Pin 1 is the notched pin.

PIN 3

+ V

PIN NUMBER

Gnd

PIN 2

+ V

–V

out

X–ducer

PIN 4

– V

out

PIN 1

Figure 1. Uncompensated Pressure Sensor Schematic

VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the X–ducer is directly proportional to the differential

pressure applied.

The output voltage of the differential or gauge sensor increases with increasing

pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,

output voltage increases as increasing vacuum is applied to the vacuum side (P2)

relative to the pressure side (P1).

Senseon and X–ducer are trademarks of Motorola, Inc.

REV 5

Motorola Sensor Device Data

Motorola, Inc. 1997

MAXIMUM RATINGS

Rating

Symbol

Value

200

Unit

kPa

°C

(8)

Overpressure (P1 > P2)

max

(8)

Burst Pressure (P1 > P2)

burst

500

Storage Temperature

Operating Temperature

stg

–40 to +125

°C

OPERATING CHARACTERISTICS (V = 3.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

—

Max

Unit

kPa

Vdc

mAdc

(1)

Pressure Range

(2)

Supply Voltage

Supply Current

Full Scale Span

—

3.0

6.0

—

(3)

FSS

(4)

Offset

off

Sensitivity

(5)

∆V/∆P

—

1.2

—

mV/kPa

Linearity

Pressure Hysteresis (0 to 50 kPa)

(5)

–0.25

—

0.25

—

FSS

(5)

—

± 0.1

± 0.5

—

Temperature Hysteresis (– 40°C to +125°C)

—

(5)

Temperature Coefficient of Full Scale Span

(5)

TCV

FSS

–0.22

—

–0.16

—

/°C

µV/°C

FSS

Temperature Coefficient of Offset

TCV

off

± 15

—

(5)

Temperature Coefficient of Resistance

Input Impedance

TCR

0.21

400

750

—

0.27

550

1800

—

%Z /°C

—

Ω

Output Impedance

out

—

(6)

Response Time (10% to 90%)

1.0

Warm–Up

—

(9)

Offset Stability

—

± 0.5

—

FSS

MECHANICAL CHARACTERISTICS

Characteristic

Symbol

Min

—

Typ

2.0

—

Max

—

Unit

Weight (Basic Element Case 344–15)

—

Grams

kPa

(7)

Common Mode Line Pressure

—

690

NOTES:

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self–heating.

3. Full Scale Span (V

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum rated pressure.

FSS

4. Offset (V ) is defined as the output voltage at the minimum rated pressure.

off

5. Accuracy (error budget) consists of the following:

•

Linearity:

Output deviation from a straight line relationship with pressure, using end point method, over the specified

pressure range.

•

Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure

applied.

•

Pressure Hysteresis:

Output deviation at any pressure within the specified range, when this pressure is cycled to and from the

minimum or maximum rated pressure, at 25°C.

•

TcSpan:

TcOffset:

Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.

Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative

to 25°C.

•

TCR:

deviation with minimum rated pressure applied, over the temperature range of –40°C to +125°C,

relative to 25°C.

6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.

8. Exposure beyond these limits may cause permanent damage or degradation to the device.

9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

Motorola Sensor Device Data

TEMPERATURE COMPENSATION

Figure 2 shows the typical output characteristics of the

MPX50 series over temperature.

or by designing your system using the MPX2050 series

sensors.

Several approaches to external temperature compensa-

tion over both –40 to +125°C and 0 to +80°C ranges are

presented in Motorola Applications Note AN840.

The X–ducer piezoresistive pressure sensor element is a

semiconductor device which gives an electrical output signal

proportional to the pressure applied to the device. This de-

vice uses a unique transverse voltage diffused semiconduc-

tor strain gauge which is sensitive to stresses produced in a

thin silicon diaphragm by the applied pressure.

Because this strain gauge is an integral part of the silicon

diaphragm, there are no temperature effects due to differ-

ences in the thermal expansion of the strain gauge and the

diaphragm, as are often encountered in bonded strain gauge

pressure sensors. However, the properties of the strain

gauge itself are temperature dependent, requiring that the

device be temperature compensated if it is to be used over

an extensive temperature range.

LINEARITY

Linearity refers to how well a transducer’s output follows

the equation: V

= V + sensitivity x P over the operating

out

off

pressure range (see Figure 3). There are two basic methods

for calculating nonlinearity: (1) end point straight line fit or (2)

a least squares best line fit. While a least squares fit gives

the “best case” linearity error (lower numerical value), the

calculations required are burdensome.

Conversely, an end point fit will give the “worst case” error

(often more desirable in error budget calculations) and the

calculations are more straightforward for the user. Motorola’s

specified pressure sensor linearities are based on the end

point straight line method measured at the midrange

pressure.

Temperature compensation and offset calibration can be

achieved rather simply with additional resistive components,

100

LINEARITY

–40°C

MPX50

= 3 Vdc

P1 > P2

+25°C

ACTUAL

SPAN

RANGE

(TYP)

+125°C

SPAN

)

FSS

THEORETICAL

PSI

kPa

OFFSET

(TYP)

OFFSET

)

OFF

MAX

PRESSURE DIFFERENTIAL

PRESSURE (kPA)

Figure 2. Output versus Pressure Differential

Figure 3. Linearity Specification Comparison

SILICONE

DIE COAT

STAINLESS STEEL

METAL COVER

EPOXY

DIE

WIRE BOND

CASE

RTV DIE

BOND

LEAD FRAME

Figure 4. Cross–Sectional Diagram (not to scale)

Figure 4 illustrates the differential or gauge configuration

in the basic chip carrier (Case 344–15). A silicone gel iso-

lates the die surface and wire bonds from the environment,

while allowing the pressure signal to be transmitted to the sil-

icon diaphragm.

tics and internal reliability and qualification tests are based

on use of dry air as the pressure media. Media other than dry

air may have adverse effects on sensor performance and

long term reliability. Contact the factory for information re-

garding media compatibility in your application.

The MPX50 series pressure sensor operating characteris-

Motorola Sensor Device Data

PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE

Motorola designates the two sides of the pressure sensor

pressure sensor is designed to operate with positive differen-

as the Pressure (P1) side and the Vacuum (P2) side. The

Pressure (P1) side is the side containing silicone gel which

isolates the die from the environment. The Motorola MPX

tial pressure applied, P1 > P2.

The Pressure (P1) side may be identified by using the

table below:

Part Number

Case Type

344–15

Pressure (P1) Side Identifier

Stainless Steel Cap

MPX50D

MPX50DP

MPX50GP

344C–01

344B–01

344D–01

344E–01

344A–01

344F–01

344G–01

Side with Part Marking

Side with Port Attached

Stainless Steel Cap

MPX50GVP

MPX50GS

Side with Port Attached

Stainless Steel Cap

MPX50GVS

MPX50GSX

MPX50GVSX

Side with Port Attached

Stainless Steel Cap

ORDERING INFORMATION

MPX50 series pressure sensors are available in differential and gauge configurations. Devices are available with basic

element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure

connections.

MPX Series

Device Type

Basic Element

Ported Elements

Options

Case Type

Case 344–15

Order Number

MPX50D

Device Marking

MPX50D

Differential

Gauge

Case 344C–01

Case 344B–01

Case 344D–01

Case 344E–01

Case 344A–01

Case 344F–01

Case 344G–01

MPX50DP

MPX50GP

MPX50GVP

MPX50D

MPX50GP

MPX50GVP

MPX50GS

MPX50GVS

MPX50GSX

MPX50GVSX

Gauge Vacuum

Gauge Stovepipe

Gauge Vacuum Stovepipe

Gauge Axial

Gauge Vacuum Axial

Motorola Sensor Device Data

PACKAGE DIMENSIONS

NOTES:

1. DIMENSIONING AND TOLERANCING PER ASME

Y14.5M, 1994.

2. CONTROLLING DIMENSION: INCH.

POSITIVE

PRESSURE (P1)

3. DIMENSION –A– IS INCLUSIVE OF THE MOLD

STOP RING. MOLD STOP RING NOT TO EXCEED

16.00 (0.630).

INCHES

MILLIMETERS

–A–

DIM

MIN

MAX

0.630

0.534

0.220

0.020

0.064

MIN

15.11

13.06

5.08

MAX

16.00

13.56

5.59

0.595

0.514

0.200

0.016

0.048

PIN 1

0.41

0.51

–T–

1.22

1.63

SEATING

0.100 BSC

2.54 BSC

PLANE

0.014

0.695

0.016

0.725

0.36

0.40

POSITIVE

PRESSURE

(P1)

17.65

18.42

30 NOM

D 4 PL

0.475

0.430

0.495

0.450

12.07

10.92

12.57

11.43

0.136 (0.005)

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

CASE 344–15

ISSUE W

NOTES:

PORT #2

VACUUM

PRESSURE

(P2)

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

POSITIVE

PRESSURE

(P1)

INCHES

MILLIMETERS

DIM

MIN

MAX

0.720

0.255

0.820

0.020

0.064

MIN

17.53

6.22

MAX

18.28

6.48

0.690

0.245

0.780

0.016

0.048

PIN 1

–B–

19.81

0.41

20.82

0.51

1.22

1.63

0.100 BSC

2.54 BSC

0.014

0.345

0.300

0.178

0.220

0.182

0.016

0.375

0.310

0.186

0.240

0.194

0.36

8.76

7.62

4.52

5.59

4.62

0.41

9.53

7.87

4.72

6.10

4.93

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

D 4 PL

0.13 (0.005)

SEATING

–T–

PLANE

CASE 344A–01

ISSUE B

Motorola Sensor Device Data

PACKAGE DIMENSIONS — CONTINUED

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5, 1982.

2. CONTROLLING DIMENSION: INCH.

–A–

SEATING

PLANE

–T–

INCHES

MILLIMETERS

DIM

MIN

MAX

1.175

0.715

0.325

0.020

0.064

MIN

29.08

17.40

7.75

0.41

1.22

MAX

29.85

18.16

8.26

0.51

1.63

1.145

0.685

0.305

0.016

0.048

PORT #1

–Q–

POSITIVE

PRESSURE

(P1)

0.100 BSC

2.54 BSC

0.182

0.014

0.695

0.290

0.420

0.153

0.230

0.220

0.194

0.016

0.725

0.300

0.440

0.159

0.250

0.240

4.62

0.36

17.65

7.37

10.67

3.89

5.84

5.59

4.93

0.41

18.42

7.62

11.18

4.04

6.35

6.10

PIN 1

–P–

0.25 (0.010)

0.910 BSC

23.11 BSC

D 4 PL

0.13 (0.005)

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

CASE 344B–01

ISSUE B

NOTES:

–A–

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

PORT #1

INCHES

MILLIMETERS

PORT #2

DIM

MIN

MAX

1.175

0.715

0.435

0.020

0.064

MIN

29.08

17.40

10.29

0.41

MAX

29.85

18.16

11.05

0.51

PORT #1

POSITIVE PRESSURE

(P1)

PORT #2

VACUUM

(P2)

1.145

0.685

0.405

0.016

0.048

–Q–

1.22

1.63

0.100 BSC

2.54 BSC

SEATING

PLANE

SEATING

PLANE

0.182

0.014

0.695

0.290

0.420

0.153

0.063

0.220

0.194

0.016

0.725

0.300

0.440

0.159

0.083

0.240

4.62

0.36

17.65

7.37

10.67

3.89

1.60

5.59

4.93

0.41

18.42

7.62

11.18

4.04

2.11

3 4

PIN 1

–P–

0.25 (0.010)

–T–

6.10

0.910 BSC

23.11 BSC

D 4 PL

0.248

0.310

0.278

0.330

6.30

7.87

7.06

8.38

0.13 (0.005)

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

CASE 344C–01

ISSUE B

Motorola Sensor Device Data

PACKAGE DIMENSIONS — CONTINUED

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5, 1982.

2. CONTROLLING DIMENSION: INCH.

–A–

SEATING

PLANE

INCHES

MILLIMETERS

–T–

DIM

MIN

MAX

1.175

0.715

0.325

0.020

0.064

MIN

29.08

17.40

7.75

0.41

1.22

MAX

29.85

18.16

8.26

0.51

1.63

PORT #2

VACUUM

(P2)

1.145

0.685

0.305

0.016

0.048

POSITIVE

PRESSURE

(P1)

–Q–

0.100 BSC

2.54 BSC

0.182

0.014

0.695

0.290

0.420

0.153

0.230

0.220

0.194

0.016

0.725

0.300

0.440

0.159

0.158

0.250

0.240

4.62

0.36

17.65

7.37

10.67

3.89

5.84

5.59

4.93

0.41

18.42

7.62

11.18

4.04

6.35

6.10

PIN 1

0.910 BSC

23.11 BSC

–P–

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

0.25 (0.010)

D 4 PL

0.13 (0.005)

CASE 344D–01

ISSUE B

NOTES:

1. DIMENSIONING AND TOLERANCING PER ANSI

Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

PORT #1

POSITIVE

PRESSURE

(P1)

BACK SIDE

VACUUM

(P2)

INCHES

MILLIMETERS

DIM

MIN

MAX

0.720

0.255

0.820

0.020

0.064

MIN

17.53

6.22

19.81

0.41

MAX

18.28

6.48

20.82

0.51

0.690

0.245

0.780

0.016

0.048

–B–

1.22

1.63

PIN 1

0.100 BSC

2.54 BSC

0.014

0.345

0.300

0.178

0.220

0.182

0.016

0.375

0.310

0.186

0.240

0.194

0.36

8.76

7.62

4.52

5.59

4.62

0.41

9.53

7.87

4.72

6.10

4.93

STYLE 1:

PIN 1. GROUND

2. + OUTPUT

3. + SUPPLY

4. – OUTPUT

D 4 PL

SEATING

PLANE

–T–

0.13 (0.005)

T B

CASE 344E–01

ISSUE B

Motorola Sensor Device Data

PACKAGE DIMENSIONS — CONTINUED

NOTES:

1. DIMENSIONING AND TOLERANCING PER

ANSI Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

–T–

–Q–

INCHES

MILLIMETERS

DIM

MIN

MAX

1.120

0.760

0.650

0.020

0.180

0.064

MIN

27.43

18.80

16.00

0.41

4.06

1.22

2.54 BSC

0.36

5.59

1.78

3.81

11.18

17.65

21.34

4.62

MAX

28.45

19.30

16.51

0.51

1.080

0.740

0.630

0.016

0.160

0.048

4.57

1.63

0.100 BSC

0.014

0.220

0.070

0.150

0.440

0.695

0.840

0.182

0.016

0.240

0.080

0.160

0.460

0.725

0.860

0.194

0.41

6.10

2.03

4.06

11.68

18.42

21.84

4.92

PORT #1

POSITIVE

PRESSURE

(P1)

PIN 1

–P–

0.25 (0.010)

T Q

STYLE 1:

D 4 PL

0.13 (0.005)

PIN 1. GROUND

2. V (+) OUT

3. V SUPPLY

4. V (–) OUT

CASE 344F–01

ISSUE B

NOTES:

1. DIMENSIONING AND TOLERANCING PER

ANSI Y14.5M, 1982.

2. CONTROLLING DIMENSION: INCH.

–T–

–Q–

INCHES

MILLIMETERS

DIM

MIN

MAX

1.120

0.760

0.650

0.020

0.180

0.064

MIN

27.43

18.80

16.00

0.41

4.06

1.22

2.54 BSC

0.36

5.59

1.78

3.81

11.18

17.65

21.34

4.62

MAX

28.45

19.30

16.51

0.51

1.080

0.740

0.630

0.016

0.160

0.048

POSITIVE

PRESSURE

(P1)

4.57

1.63

0.100 BSC

0.014

0.220

0.070

0.150

0.440

0.695

0.840

0.182

0.016

0.240

0.080

0.160

0.460

0.725

0.860

0.194

0.41

6.10

2.03

4.06

11.68

18.42

21.84

4.92

PIN 1

PORT #2

VACUUM

(P2)

–P–

0.25 (0.010)

T Q

STYLE 1:

PIN 1. GROUND

2. V (+) OUT

3. V SUPPLY

4. V (–) OUT

D 4 PL

0.13 (0.005)

CASE 344G–01

ISSUE B

Motorola Sensor Device Data

Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding

the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and

specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola

datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”

must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of

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applicationsintended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury

ordeathmayoccur. ShouldBuyerpurchaseoruseMotorolaproductsforanysuchunintendedorunauthorizedapplication,BuyershallindemnifyandholdMotorola

and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees

arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that

Motorola was negligent regarding the design or manufacture of the part. Motorola and

Opportunity/Affirmative Action Employer.

are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal

Motorola Sensor Device Data

Mfax is a trademark of Motorola, Inc.

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MPX50/D

◊

Motorola Sensor Device Data

MPX50GVSX [MOTOROLA]

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