MPX7050GVS [MOTOROLA]
0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL); 0〜50千帕（ 0至7.25磅） 40 mV的满量程（典型值）
| 型号： | MPX7050GVS |
| 厂家： | 
MOTOROLA |
| 描述： | 0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL) |
| 文件： | 总10页 (文件大小：194K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
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by MPX7050/D
SEMICONDUCTOR TECHNICAL DATA
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
The new MPX7050 series pressure sensor incorporates all the innovative features of
Motorola’s MPX2000 series family including the patented, single piezoresistive strain
gauge (X–ducer) and on–chip temperature compensation and calibration. In addition, the
MPX7050 series has a high input impedance of typically 10 kΩ for those portable, low
power and battery–operated applications. This device is suitable for those systems in
which users must have a dependable, accurate pressure sensor that will not consume
significant power. The MPX7050 series device is a logical and economical choice for
applications such as portable medical instrumentation, and remote sensing systems with
4–20 mAmp transmission.
Features
BASIC CHIP
•
•
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Unique Silicon Shear Stress Strain Gauge
Easy to Use Chip Carrier Package Options
Available in Differential and Gauge Configurations
Ratiometric to Supply Voltage
CARRIER ELEMENT
CASE 344–15, STYLE 1
±0.25% Linearity
Application Examples
•
•
Portable Medical Instrumentation
Remote Sensing Systems
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
V
S
3
NOTE: Pin 1 is the notched pin.
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
HIGH
PIN NUMBER
2
4
V
Z
out+
in
1
2
Gnd
+V
3
4
V
S
X–ducer
SENSING
ELEMENT
–V
out
V
out
out–
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 3
Motorola, Inc. 1997
MAXIMUM RATINGS
Rating
Symbol
Value
200
Unit
kPa
kPa
°C
(8)
Overpressure (P1 > P2)
P
max
(8)
Burst Pressure (P1 > P2)
P
burst
500
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristics
Symbol
Min
0
Typ
—
Max
50
Unit
kPa
Vdc
mAdc
mV
(1)
Pressure Range
P
OP
(2)
Supply Voltage
Supply Current
Full Scale Span
V
S
—
10
16
I
o
—
1.0
40
—
(3)
V
FSS
38.5
–1.0
—
41.5
1.0
—
(4)
Offset
V
off
—
mV
Sensitivity
(5)
∆V/∆P
—
0.80
—
mV/kPa
Linearity
Pressure Hysteresis (0 to 50 kPa)
(5)
–0.25
—
0.25
—
%V
%V
%V
%V
FSS
FSS
FSS
FSS
(5)
—
±0.1
±0.5
—
Temperature Hysteresis (–40°C to +125°C)
(5)
—
—
—
Temperature Effect on Full Scale Span
TCV
FSS
–1.0
–1.0
5000
2500
—
1.0
1.0
15,000
6000
—
(5)
Temperature Effect on Offset
TCV
off
—
mV
Input Impedance
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
Warm–Up
t
R
1.0
20
ms
ms
—
—
—
—
(9)
Offset Stability
—
±0.5
—
%V
FSS
MECHANICAL CHARACTERISTICS
Characteristics
Symbol
Min
—
Typ
2.0
—
Max
—
Unit
Grams
kPa
Weight (Basic Element Case 344–15)
—
—
(7)
Common Mode Line Pressure
—
690
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
FSS
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer’s output follows
LEAST SQUARES FIT
EXAGGERATED
PERFORMANCE
CURVE
the equation: V
= V + sensitivity x P over the operating
out
off
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
STRAIGHT LINE
DEVIATION
LEAST
SQUARE
DEVIATION
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
END POINT
STRAIGHT LINE FIT
OFFSET
50
PRESSURE (% FULLSCALE)
100
0
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX7050
series at 25°C. The output is directly proportional to the dif-
ferential pressure and is essentially a straight line.
The effects of temperature on Full Scale Span and
Offset are very small and are shown under Operating
Characteristics.
40
V
= 10 Vdc
= 25°C
S
35
30
T
A
SILICONE
DIE COAT
P1 > P2
TYP
STAINLESS STEEL
METAL COVER
EPOXY
DIE
25
20
15
10
5
SPAN
RANGE
(TYP)
P1
MAX
WIRE BOND
CASE
MIN
RTV DIE
BOND
0
LEAD FRAME
OFFSET
(TYP)
–5
DIFFERENTIAL/GAUGE ELEMENT
P2
kPa
0
12.5
1.83
25
3.63
37.5
5.44
50
7.3
PSI
Figure 3. Output versus Pressure Differential
Figure 4. Cross–Sectional Diagram
(not to scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344–15). A silicone gel iso-
lates the die surface and wire bonds from the environment,
while allowing the pressure signal to be transmitted to the sil-
icon diaphragm.
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
The MPX7050 series pressure sensor operating charac-
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
MPX pressure sensor is designed to operate with positive
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The Motorola
differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Pressure (P1)
Side Identifier
Part Number
Case Type
MPX7050D
344–15C
344C–01
344B–01
344D–01
344E–01
344A–01
344F–01
344G–01
Stainless Steel Cap
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
Side with Port Attached
Stainless Steel Cap
Side with Port Attached
Stainless Steel Cap
MPX7050DP
MPX7050GP
MPX7050GVP
MPX7050GS
MPX7050GVS
MPX7050GSX
MPX7050GVSX
ORDERING INFORMATION
MPX7050 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
Device Type
Basic Element
Ported Elements
Options
Case Type
Case 344–15
Order Number
MPX7050D
Device Marking
MPX7050D
Differential
Differential, Dual Ported
Gauge
Case 344C–01
Case 344B–01
Case 344D–01
Case 344E–01
Case 344A–01
Case 344F–01
Case 344G–01
MPX7050DP
MPX7050GP
MPX7050GVP
MPX7050GS
MPX7050GVS
MPX7050GSX
MPX7050GVSX
MPX7050DP
MPX7050GP
MPX7050GVP
MPX7050D
Gauge, Vacuum
Gauge, Stove Pipe
Gauge, Vacuum Stove Pipe
Gauge, Axial
MPX7050D
MPX7050D
Gauge, Vacuum Axial
MPX7050D
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
POSITIVE
PRESSURE (P1)
R
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
M
INCHES
MILLIMETERS
B
–A–
DIM
A
B
C
D
MIN
MAX
0.630
0.534
0.220
0.020
0.064
MIN
15.11
13.06
5.08
MAX
16.00
13.56
5.59
0.595
0.514
0.200
0.016
0.048
N
L
1
2
3
4
PIN 1
0.41
0.51
–T–
F
1.22
1.63
SEATING
G
J
L
M
N
R
0.100 BSC
2.54 BSC
PLANE
0.014
0.695
0.016
0.725
0.36
0.40
G
POSITIVE
PRESSURE
(P1)
J
17.65
18.42
F
30 NOM
30 NOM
D 4 PL
0.475
0.430
0.495
0.450
12.07
10.92
12.57
11.43
M
M
0.136 (0.005)
T
A
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE W
NOTES:
PORT #2
VACUUM
PRESSURE
(P2)
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
C
A
POSITIVE
PRESSURE
(P1)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
MAX
18.28
6.48
0.690
0.245
0.780
0.016
0.048
PIN 1
–B–
V
19.81
0.41
20.82
0.51
2
3
1
4
1.22
1.63
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
J
V
N
G
F
R
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
0.13 (0.005)
SEATING
–T–
M
M
T
B
PLANE
CASE 344A–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
SEATING
PLANE
–T–
U
L
R
INCHES
MILLIMETERS
H
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
1.145
0.685
0.305
0.016
0.048
N
B
PORT #1
–Q–
POSITIVE
PRESSURE
(P1)
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
1
2
3
4
PIN 1
K
–P–
S
M
S
0.25 (0.010)
T
Q
J
F
U
0.910 BSC
23.11 BSC
G
C
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344B–01
ISSUE B
NOTES:
–A–
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
V
U
PORT #1
W
L
R
H
INCHES
MILLIMETERS
PORT #2
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.435
0.020
0.064
MIN
29.08
17.40
10.29
0.41
MAX
29.85
18.16
11.05
0.51
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
1.145
0.685
0.405
0.016
0.048
N
–Q–
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
SEATING
PLANE
SEATING
PLANE
B
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.063
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.083
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
1.60
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
2.11
1
2
3 4
PIN 1
K
–P–
M
S
0.25 (0.010)
T
Q
–T–
–T–
S
F
J
6.10
G
C
U
V
W
0.910 BSC
23.11 BSC
D 4 PL
0.248
0.310
0.278
0.330
6.30
7.87
7.06
8.38
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344C–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
SEATING
PLANE
INCHES
MILLIMETERS
–T–
L
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
PORT #2
VACUUM
(P2)
1.145
0.685
0.305
0.016
0.048
H
R
POSITIVE
PRESSURE
(P1)
N
–Q–
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.158
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
1
2
3
4
K
PIN 1
S
U
0.910 BSC
23.11 BSC
C
F
–P–
G
STYLE 1:
J
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
M
S
0.25 (0.010)
T
Q
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
CASE 344D–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
PORT #1
POSITIVE
PRESSURE
(P1)
C
A
BACK SIDE
VACUUM
(P2)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
19.81
0.41
MAX
18.28
6.48
20.82
0.51
0.690
0.245
0.780
0.016
0.048
–B–
V
3
2
4
1
1.22
1.63
PIN 1
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
V
J
N
G
STYLE 1:
F
R
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
SEATING
PLANE
M
M
–T–
0.13 (0.005)
T B
CASE 344E–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
–Q–
E
U
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
N
S
B
4.57
1.63
V
0.100 BSC
R
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
M
M
0.25 (0.010)
T Q
4
3
2
1
K
U
V
F
J
G
STYLE 1:
D 4 PL
0.13 (0.005)
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
M
S
S
T
P
Q
CASE 344F–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
U
–Q–
E
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
POSITIVE
PRESSURE
(P1)
4.57
1.63
N
B
R
V
0.100 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PIN 1
PORT #2
VACUUM
(P2)
–P–
M
M
0.25 (0.010)
T Q
1
2
3
4
S
U
V
K
F
J
STYLE 1:
G
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
D 4 PL
0.13 (0.005)
M
S
S
T
P
Q
CASE 344G–01
ISSUE B
8
Motorola Sensor Device Data
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
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are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Motorola Sensor Device Data
9
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