MPX7200 [MOTOROLA]
0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL); 0至200千帕（ 0 〜29 psi）的40 mV的满量程（典型值）
| 型号： | MPX7200 |
| 厂家： | 
MOTOROLA |
| 描述： | 0 to 200 kPa (0 to 29 psi) 40 mV FULL SCALE SPAN (TYPICAL) |
| 文件： | 总8页 (文件大小：183K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Order this document
by MPX7200/D
SEMICONDUCTOR TECHNICAL DATA
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
The new MPX7200 series pressure sensor incorporates all the innovative features of
Motorola’s MPX2000 series family including the patented, single piezoresistive strain
gauge (X–ducer) and on–chip temperature compensation and calibration. In addition, the
MPX7200 series has a high input impedance of typically 10 kΩ for those portable, low
power and battery–operated applications. This device is suitable for those systems in
which users must have a dependable, accurate pressure sensor that will not consume
significant power. The MPX7200 series device is a logical and economical choice for
applications such as portable medical instrumentation, remote sensing systems with
4–20 mAmp transmission and field barometers/altimeters.
Features
•
•
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Unique Silicon Shear Stress Strain Gauge
Easy to Use Chip Carrier Package Options
Available in Absolute, Differential and Gauge Configurations
Ratiometric to Supply Voltage
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
±0.25% Linearity (MPX7200D)
Application Examples
•
•
•
Portable Medical Instrumentation
Field Altimeters
Field Barometers
Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
DIFFERENTIAL
PORT OPTION
V
S
CASE 344C–01, STYLE 1
3
NOTE: Pin 1 is the notched pin.
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
HIGH
2
4
V
Z
out+
in
PIN NUMBER
X–ducer
SENSING
ELEMENT
V
out–
1
2
Gnd
+V
3
4
V
S
–V
out
out
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 3
Motorola, Inc. 1997
MAXIMUM RATINGS
Rating
Symbol
Value
400
Unit
kPa
kPa
°C
(8)
Overpressure (P1 > P2)
P
max
(8)
Burst Pressure (P1 > P2)
P
burst
2000
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristic
Symbol
Min
0
Typ
—
Max
200
16
Unit
kPa
Vdc
mAdc
mV
(1)
Pressure Range
P
OP
(2)
Supply Voltage
Supply Current
Full Scale Span
V
S
—
10
I
o
—
1.0
40
—
(3)
MPX7200A, MPX7200D
V
FSS
38.5
41.5
(4)
Offset
MPX7200D
MPX7200A
V
off
–1.0
–2.0
—
—
1.0
2.0
mV
Sensitivity
(5)
∆V/∆P
—
0.2
—
mV/kPa
Linearity
MPX7200D
MPX7200A
—
—
–0.25
–1.0
—
—
0.25
1.0
%V
FSS
(5)
Pressure Hysteresis
Temperature Hysteresis
Temperature Effect on Full Scale Span
(0 to 200 kPa)
—
—
—
—
±0.1
±0.5
—
—
—
%V
%V
%V
FSS
FSS
FSS
(5)
(–40°C to +125°C)
(5)
TCV
FSS
–1.0
–1.0
5000
2500
—
1.0
(5)
Temperature Effect on Offset
Input Impedance
TCV
off
—
1.0
mV
Z
in
—
15,000
6000
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time
t
R
1.0
20
ms
ms
Warm–Up
—
—
—
—
(9)
Offset Stability
—
±0.5
—
%V
FSS
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
—
Typ
2.0
—
Max
—
Unit
Grams
kPa
Weight (Basic Element Case 344–15)
—
—
(7)
Common Mode Line Pressure
—
690
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
FSS
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer’s output follows
LEAST SQUARES FIT
EXAGGERATED
PERFORMANCE
CURVE
the equation: V
= V + sensitivity x P over the operating
out
off
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
STRAIGHT LINE
DEVIATION
LEAST
SQUARE
DEVIATION
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pres-
sure.
END POINT
STRAIGHT LINE FIT
OFFSET
50
PRESSURE (% FULLSCALE)
100
0
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX7200
series at 25°C. The output is directly proportional to the dif-
ferential pressure and is essentially a straight line.
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteris-
tics.
40
35
30
25
20
15
10
5
V
T
= 10 Vdc
= 25°C
S
A
P1 > P2
TYP
SPAN
RANGE
(TYP)
MAX
MIN
0
–5
OFFSET
kPa
0
25
50
7.25
75
100
14.5
125
150
21.75
175
200
29
PSI
PRESSURE
Figure 3. Output versus Pressure Differential
SILICONE GEL DIFFERENTIAL/GAUGE
SILICONE GEL
DIE COAT
ABSOLUTE
DIE
STAINLESS STEEL
METAL COVER
STAINLESS STEEL
METAL COVER
DIE COAT
DIE
P1
P1
EPOXY
CASE
EPOXY
CASE
WIRE BOND
WIRE BOND
DIE
BOND
LEAD FRAME
LEAD FRAME
DIE
BOND
DIFFERENTIAL/GAUGE ELEMENT
P2
ABSOLUTE ELEMENT
P2
Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration (right)
and the differential or gauge configuration in the basic chip
carrier (Case 344–15). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the pres-
sure signal to be transmitted to the silicon diaphragm.
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
The MPX7200 series pressure sensor operating charac-
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
ential pressure applied, P1 > P2. The absolute sensor is de-
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
and gauge sensor is designed to operate with positive differ-
signed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Part Number
Case Type
344–15C
344C–01
344B–01
344D–01
344E–01
344F–01
344G–01
Pressure Side (P1) Identifier
Stainless Steel Cap
MPX7200A
MPX7200D
MPX7200DP
MPX7200AP
MPX7200GVP
MPX7200AS
MPX7200ASX
MPX7200GVSX
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
MPX7200GP
Side with Port Attached
Side with Port Attached
Stainless Steel Cap
MPX7200GSX
ORDERING INFORMATION
MPX7200 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
MPX Series
Device Type
Options
Case Type
Case 344–15
Order Number
Device Marking
Basic Element
Absolute, Differential
MPX7200A
MPX7200D
MPX7200A
MPX7200D
Ported Elements
Differential
Case 344C–01
Case 344B–01
MPX7200DP
MPX7200DP
Absolute, Gauge
MPX7200AP
MPX7200D
MPX7200AP
MPX7200GP
Gauge Vacuum
Case 344D–01
Case 344E–01
Case 344F–01
MPX7200GVP
MPX7200AS
MPX7200GVP
MPX7200A
Absolute, Stove Pipe
Absolute, Gauge Axial
MPX7200ASX
MPX7200GSX
MPX7200A
MPX7200D
Gauge Vacuum Axial
Case 344G–01
MPX7200GVSX
MPX7200D
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
POSITIVE
PRESSURE (P1)
R
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
M
INCHES
MILLIMETERS
B
–A–
DIM
A
B
C
D
MIN
MAX
0.630
0.534
0.220
0.020
0.064
MIN
15.11
13.06
5.08
MAX
16.00
13.56
5.59
0.595
0.514
0.200
0.016
0.048
N
L
1
2
3
4
PIN 1
0.41
0.51
–T–
F
1.22
1.63
SEATING
G
J
L
M
N
R
0.100 BSC
2.54 BSC
PLANE
0.014
0.695
0.016
0.725
0.36
0.40
G
POSITIVE
PRESSURE
(P1)
J
17.65
18.42
F
30 NOM
30 NOM
D 4 PL
0.475
0.430
0.495
0.450
12.07
10.92
12.57
11.43
M
M
0.136 (0.005)
T A
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE W
NOTES:
–A–
SEATING
PLANE
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
U
L
R
INCHES
MILLIMETERS
H
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
MAX
29.85
18.16
8.26
1.145
0.685
0.305
0.016
0.048
N
B
PORT #1
POSITIVE
PRESSURE
(P1)
–Q–
0.41
0.51
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
1
2
3
4
PIN 1
K
–P–
S
M
S
0.25 (0.010)
T Q
J
F
U
0.910 BSC
23.11 BSC
G
C
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
V
PORT #1
W
L
R
H
INCHES
MILLIMETERS
PORT #2
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.435
0.020
0.064
MIN
29.08
17.40
10.29
0.41
MAX
29.85
18.16
11.05
0.51
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
1.145
0.685
0.405
0.016
0.048
N
–Q–
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
SEATING
PLANE
SEATING
PLANE
B
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.063
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.083
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
1.60
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
2.11
1
2
3 4
PIN 1
K
–P–
M
S
0.25 (0.010)
T
Q
–T–
–T–
S
F
J
6.10
G
C
U
V
W
0.910 BSC
23.11 BSC
D 4 PL
0.248
0.310
0.278
0.330
6.30
7.87
7.06
8.38
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344C–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
–A–
2. CONTROLLING DIMENSION: INCH.
U
L
SEATING
PLANE
INCHES
MILLIMETERS
–T–
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
PORT #2
VACUUM
(P2)
1.145
0.685
0.305
0.016
0.048
H
R
POSITIVE
PRESSURE
(P1)
N
–Q–
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.158
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
1
2
3
4
K
PIN 1
S
U
0.910 BSC
23.11 BSC
C
F
–P–
G
STYLE 1:
J
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
M
S
0.25 (0.010)
T Q
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
CASE 344D–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
PORT #1
POSITIVE
PRESSURE
(P1)
C
A
BACK SIDE
VACUUM
(P2)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
19.81
0.41
MAX
18.28
6.48
20.82
0.51
0.690
0.245
0.780
0.016
0.048
–B–
V
3
2
4
1
1.22
1.63
PIN 1
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
V
J
N
G
STYLE 1:
F
R
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
SEATING
PLANE
M
M
–T–
0.13 (0.005)
T B
CASE 344E–01
ISSUE B
NOTES:
–T–
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
C
A
U
–Q–
E
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
N
S
B
R
4.57
1.63
V
0.100 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
M
M
0.25 (0.010)
T Q
4
3
2
1
K
U
V
F
J
G
STYLE 1:
D 4 PL
0.13 (0.005)
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
M
S
S
T
P
Q
CASE 344F–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
–Q–
E
U
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
POSITIVE
PRESSURE
(P1)
4.57
1.63
N
S
B
V
0.100 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
R
PIN 1
PORT #2
VACUUM
(P2)
–P–
M
M
0.25 (0.010)
T Q
1
2
3
4
U
V
K
F
J
STYLE 1:
G
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
D 4 PL
0.13 (0.005)
M
S
S
T
P
Q
CASE 344G–01
ISSUE B
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