935309647174 [NXP]

Peizoresistive Sensor;
935309647174
型号: 935309647174
厂家: NXP    NXP
描述:

Peizoresistive Sensor

传感器 换能器
文件: 总10页 (文件大小:127K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
Pressure  
MPXV4115V  
Rev 4, 10/2012  
Freescale Semiconductor  
Data Sheet: Technical Data  
Integrated Silicon Pressure Sensor  
On-Chip Signal Conditioned,  
Temperature Compensated, and  
Calibrated  
MPXV4115V  
Series  
INTEGRATED  
PRESSURE SENSOR  
-115 to 0 kPa (-16.7 to 0 psi)  
0.2 to 4.6 V Output  
The MPXV4115V series piezoresistive transducer is a state-of-the-art  
monolithic silicon pressure sensor designed for a wide range of applications,  
particularly those employing a microcontroller with A/D inputs. This transduc-  
er combines advanced micromachining techniques, thin-film metallization  
and bipolar processing to provide an accurate, high-level analog output signal  
that is proportional to the applied pressure/vacuum. The small form factor and  
high reliability of on-chip integration make the sensor a logical and economi-  
cal choice for the automotive system designer. Figure 1 shows a block dia-  
gram of the internal circuitry integrated on a pressure sensor chip.  
Application Examples  
• Vacuum Pump Monitoring  
• Brake Booster Monitoring  
Features  
• 1.5% Maximum error over 0to 85C  
Temperature Compensated from –40+ 125C  
• Ideally Suited for Microprocessor or Microcontroller-Based Systems  
• Durable Thermoplastic (PPS) Surface Mount Package  
ORDERING INFORMATION  
# of Ports  
None Single  
Pressure Type  
Package  
Options  
Case  
No.  
Device  
Marking  
Device Name  
Dual  
Gauge  
Differential Absolute  
Small Outline Package (MPXV4115V Series)  
MPXV4115V6U  
MPXV4115V  
MPXV4115V  
Rails  
482  
• Vacuum/  
Gauge  
MPXV4115VC6U  
Rails  
482A  
• Vacuum/  
Differential  
SMALL OUTLINE PACKAGES  
MPXV4115VC6U  
CASE 482A-01  
MPXV4115V6U  
CASE 482-01  
© 2005, 2008, 2010, 2012 Freescale Semiconductor, Inc. All rights reserved.  
Pressure  
Operating Characteristics  
Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted. Decoupling circuit shown in Figure 3  
required to meet electrical specifications.)  
Characteristic  
Symbol  
Min  
Typ  
Max  
Unit  
Pressure Range (Differential mode, Vacuum on metal cap side, Atmospheric  
pressure on back side)  
POP  
–115  
0
kPa  
Supply Voltage(1)  
Supply Current  
VS  
Io  
4.75  
5.0  
6.0  
4.6  
5.25  
10  
Vdc  
mAdc  
Vdc  
Full Scale Output(2)  
(Pdiff = 0 kPa)2  
(0 to 85C)  
(0 to 85C)  
(0 to 85C)  
VFSO  
4.535  
4.665  
Full Scale Span(3)  
@ VS = 5.0 V  
VFSS  
4.4  
Vdc  
Accuracy(4)  
Sensitivity  
1.5%  
%VFSS  
V/P  
tR  
38.26  
1.0  
mV/kPa  
ms  
Response Time(5)  
Output Source Current at Full Scale Output  
Io  
0.1  
20  
mAdc  
ms  
Warm-Up Time(6)  
Offset Stability(7)  
0.5  
%VFSS  
1. Device is ratiometric within this specified excitation range.  
2. Full Scale Output is defined as the output voltage at the maximum or full-rated pressure.  
3. Full Scale Span is defined as the algebraic difference between the output voltage at full-rated pressure and the output voltage at the  
minimum-rated pressure.  
4. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span  
at 25°C due to all sources of errors, including the following:  
Linearity:  
Output deviation from a straight line relationship with pressure over the specified pressure range.  
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to  
and from the minimum or maximum operating temperature points, with zero differential pressure applied.  
Pressure Hysteresis:  
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum  
or maximum rated pressure at 25°C.  
TcSpan:  
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.  
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.  
TcOffset:  
5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a  
specified step change in pressure.  
6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.  
7. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.  
MPXV4115V  
Sensors  
2
Freescale Semiconductor, Inc.  
Pressure  
Maximum Ratings  
Table 2. MAXIMUM RATINGS(1)  
Rating  
Symbol  
Value  
Unit  
Maximum Pressure  
Pmax  
400  
kPa  
Storage Temperature  
Operating Temperature  
Tstg  
TA  
–40 to +125  
–40 to +125  
C  
C  
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.  
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.  
2
VS  
Thin Film  
Gain Stage #2  
and  
Temperature  
Sensing  
Element  
VOUT  
Compensation  
and  
Gain Stage #1  
Ground  
4
Reference  
Shift Circuitry  
GND  
Pins 1, 5, 6, 7, and 8 are NO CONNECTS  
for small outline package devices.  
3
Figure 1. Fully Integrated Pressure Sensor Schematic for Small Outline Package  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
3
Pressure  
On-chip Temperature Compensation, Calibration, and Signal Conditioning  
The performance over temperature is achieved by  
integrating the shear-stress strain gauge, temperature  
compensation, calibration and signal conditioning circuitry  
onto a single monolithic chip.  
Figure 2 illustrates the gauge configuration in the basic  
chip carrier (Case 482). A fluorosilicone gel isolates the die  
surface and wire bonds from the environment, while allowing  
the pressure signal to be transmitted to the silicon diaphragm.  
The MPXV4115V series sensor operating characteristics  
are based on use of dry air as pressure media. Media, other  
than dry air, may have adverse effects on sensor  
from the factory. Contact the factory for information regarding  
media tolerance in your application.  
Figure 3 shows the recommended decoupling circuit for  
interfacing the output of the integrated sensor to the A/D input  
of a microprocessor or microcontroller. Proper decoupling of  
the power supply is recommended.  
Figure 4 shows the sensor output signal relative to  
differential pressure input. Typical, minimum and maximum  
output curves are shown for operation over a temperature  
range of 0C to 85C using the decoupling circuit shown in  
Figure 3. The output will saturate outside of the specified  
pressure range.  
performance and long-term reliability. Internal reliability and  
qualification test for dry air, and other media, are available  
Fluorosilicone  
Gel Die Coat  
Stainless  
Steel Cap  
Die  
P1  
P2  
Wire Bond  
Thermoplastic  
Case  
Lead  
Frame  
Die Bond  
Differential Sensing Element  
Figure 2. Cross-Sectional Diagram (not to scale)  
+5 V  
Output  
Vout  
Vs  
IPS  
1.0 F  
GND  
470 pF  
0.01 F  
Figure 3. Recommended Power Supply Decoupling and Output Filtering  
(For output filtering recommendations, refer to Application Note AN1646.)  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
4
Pressure  
TRANSFER FUNCTION MPXV4115V  
5
4.5  
4
Transfer Function:  
Vout = Vs*[(0.007652*P) + 0.92] ± Pressure error  
*Temp Factor*0.007652*VS)  
VS = 5.0 V ± 0.25 Vdc  
3.5  
3
TEMP = 0-85°C  
2.5  
2
MAX  
MIN  
1.5  
1
0.5  
0
–115  
–95  
–75  
–55  
Vout vs. Vacuum  
–35  
–15  
Figure 4. Applied Vacuum in kPa  
(below atmospheric pressure)  
Transfer Function (MPXV4115V)  
Nominal Transfer Value:  
Vout = VS (P x 0.007652 + 0.92)  
± (Pressure Error x Temp. Factor x 0.007652 x VS)  
VS = 5 V ± 0.25 Vdc  
Temperature Error Band  
MPXV4115V Series  
4.0  
Temp  
Multiplier  
3.0  
- 40  
0 to 85  
+125  
3
1
3
Temperature  
Error  
Factor  
2.0  
1.0  
0.0  
-40  
-20  
0
20  
40  
60  
80  
100  
120  
140  
Temperature in °C  
NOTE: The Temperature Multiplier is a linear response from 0C to-40C and from 85C to 125C.  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
5
Pressure  
Pressure Error Band  
1.950  
1.725  
1.500  
0
Pressure in kPa  
(below atmospheric)  
–115 –100 –85 –60 –45 –30 –15  
0
–1.500  
–1.725  
–1.950  
Pressure  
–115 to 0 kPa  
Error (Max)  
±1.725 kPa  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
6
Pressure  
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE  
The two sides of the pressure sensor are designated as  
the Pressure (P1) side and the Vacuum (P2) side. The  
Pressure (P1) side is the side containing fluorosilicone gel,  
which protects the die from harsh media. The MPX pressure  
sensor is designed to operate with positive differential  
pressure applied, P1 > P2.  
The Pressure (P1) side may be identified by using the  
following table:  
Part Number  
MPXV4115V6U  
Case Type  
Pressure (P1) Side Identifier  
Side with Part Marking  
482  
MPXV4115VC6U  
Side with Port Attached  
482A  
INFORMATION FOR USING THE SMALL OUTLINE PACKAGE (CASE 482)  
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS  
Surface mount board layout is a critical portion of the total  
design. The footprint for the surface mount packages must be  
the correct size to ensure proper solder connection interface  
between the board and the package. With the correct  
footprint, the packages will self align when subjected to a  
solder reflow process. It is always recommended to design  
boards with a solder mask layer to avoid bridging and  
shorting between solder pads.  
0.100 TYP 8X  
2.54  
0.660  
16.76  
0.060 TYP 8X  
1.52  
0.300  
7.62  
inch  
0.100 TYP 8X  
2.54  
mm SCALE 2:1  
Figure 5. SOP Footprint (Case 482)  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
7
Pressure  
PACKAGE DIMENSIONS  
-A-  
D
8 PL  
4
1
M
S
S
A
0.25 (0.010)  
T
B
5
-B-  
8
NOTES:  
1. DIMENSIONING AND TOLERANCING PER ANSI  
Y14.5M, 1982.  
2. CONTROLLING DIMENSION: INCH.  
3. DIMENSION A AND B DO NOT INCLUDE MOLD  
PROTRUSION.  
G
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).  
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.  
INCHES  
MIN MAX  
MILLIMETERS  
S
N
DIM  
A
B
C
D
G
H
J
K
M
N
MIN  
10.54  
10.54  
5.38  
MAX  
10.79  
10.79  
5.84  
0.415 0.425  
0.415 0.425  
0.212 0.230  
0.038 0.042  
0.100 BSC  
0.96  
1.07  
2.54 BSC  
0.002 0.010  
0.009 0.011  
0.061 0.071  
0.05  
0.23  
1.55  
0˚  
0.25  
0.28  
1.80  
7˚  
H
C
J
0˚  
7˚  
-T-  
0.405 0.415  
0.709 0.725  
10.29  
18.01  
10.54  
18.41  
SEATING  
PLANE  
S
PIN 1 IDENTIFIER  
K
M
CASE 482-01  
ISSUE O  
SMALL OUTLINE PACKAGE  
-A-  
D
8 PL  
4
1
M
S
S
A
NOTES:  
1. DIMENSIONING AND TOLERANCING PER ANSI  
Y14.5M, 1982.  
2. CONTROLLING DIMENSION: INCH.  
3. DIMENSION A AND B DO NOT INCLUDE MOLD  
PROTRUSION.  
0.25 (0.010)  
T
B
5
-B-  
8
N
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).  
5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.  
G
INCHES  
MIN MAX  
MILLIMETERS  
DIM  
A
B
C
D
G
H
J
K
M
N
MIN  
10.54  
10.54  
12.70  
0.96  
MAX  
10.79  
10.79  
13.21  
1.07  
S
0.415 0.425  
0.415 0.425  
0.500 0.520  
0.038 0.042  
0.100 BSC  
W
2.54 BSC  
0.002 0.010  
0.009 0.011  
0.061 0.071  
0.05  
0.23  
1.55  
0˚  
0.25  
0.28  
1.80  
7˚  
V
0˚  
7˚  
C
0.444 0.448  
0.709 0.725  
0.245 0.255  
0.115 0.125  
11.28  
18.01  
6.22  
2.92  
11.38  
18.41  
6.48  
3.17  
S
V
W
H
J
-T-  
SEATING  
PLANE  
PIN 1 IDENTIFIER  
M
K
CASE 482A-01  
ISSUE A  
SMALL OUTLINE PACKAGE  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
8
Pressure  
Table 3. Revision History  
Revision Revision  
Description of changes  
• Deleted references to device number MPXV4115V6T1 throughout the document  
number  
date  
4
10/2012  
MPXV4115V  
Sensors  
Freescale Semiconductor, Inc.  
9
Information in this document is provided solely to enable system and software  
implementers to use Freescale products. There are no express or implied copyright  
licenses granted hereunder to design or fabricate any integrated circuits based on the  
information in this document.  
How to Reach Us:  
Home Page:  
freescale.com  
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freescale.com/support  
Freescale reserves the right to make changes without further notice to any products  
herein. Freescale makes no warranty, representation, or guarantee regarding the  
suitability of its products for any particular purpose, nor does Freescale assume any  
liability arising out of the application or use of any product or circuit, and specifically  
disclaims any and all liability, including without limitation consequential or incidental  
damages. “Typical” parameters that may be provided in Freescale data sheets and/or  
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vary over time. All operating parameters, including “typicals,” must be validated for each  
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their respective owners.  
© 2012 Freescale Semiconductor, Inc.  
MPXV4115V  
Rev. 4  
10/2012  

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