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D6F-10A_10

更新时间：2024-09-18 10:40:47
品牌：OMRON
描述：MEMS Airflow Sensor

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D6F-10A_10 概述

MEMS Airflow Sensor MEMS气流传感器

D6F-10A_10 数据手册

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MEMS Airflow Sensor  
D6F-10A, -20A, -50A  
Compact, intelligent sensor featuring  
MEMS technology for precision mass  
airflow measurement  
• Precision mass airflow up to 50 LPM  
• Stable output across full scale  
• Manifold mounting feature with NBR ‘O’ ring option  
• Compact size 78 (L) x 30 (W) x 30 (H) mm  
• Low power consumption  
• RoHS Compliant  
Ordering Information  
Description  
Case  
Applicable Gas  
Flow Range**  
0 – 10 LPM  
0 – 20 LPM  
0 – 50 LPM  
0 – 10 LPM  
0 – 20 LPM  
0 – 50 LPM  
- - -  
Connection Type  
Model  
Mass Flow Sensor  
Thermoplasticresin  
/ Aluminum alloy  
Air*  
Right-angle manifold  
mount connection  
D6F-10A5-000  
D6F-20A5-000  
D6F-50A5-000  
Straight RC1/4 (1/4” BSPT) D6F-10A6-000  
threaded pipe*  
D6F-20A6-000  
D6F-50A6-000  
Cable Connector Assembly  
- - -  
- - -  
- - -  
D6F-CABLE1  
Note: Cable Assembly is sold separately.  
* Contact Omron for other gases or thread types.  
**Mass flow converted to volumetric flow (standard liters per minute) at 0°C and 1 atm.  
■ Application Examples  
• Industrial processes  
• Mass flow controllers  
• Medical Respirators and Ventilators  
• MiG and TiG welding systems  
• Anesthesia Delivery  
• Scientific / test equipment  
• Fuel cell controls  
Rating  
■ Absolute maximum rating  
Item  
Symbol  
Ratings  
Unit  
Power supply  
Output voltage  
VCC  
26.4  
6
VDC  
VDC  
VOUT  
■ Electrical Performance  
Item  
Term  
VCC  
Condition  
MIN  
10.8  
-10  
5
MAX  
Unit  
VDC  
°C  
Power supply  
—
26.4  
60  
Operating temperature  
Output voltage (max.)  
Output voltage (min.)  
TOPR  
VOH  
No condensation or icing  
VCC = 12 to 24VDC IOH = 0.5mA  
VCC = 12 to 24VDC IOL = -0.5mA  
5.7  
1
VDC  
VDC  
VOL  
0
MEMS Airflow Sensor D6F-10A, -20A, -50A  
23  
Characteristics  
Model  
D6F-10A@-000  
D6F-20A@-000  
D6F-50A@-000  
Flow rate @ 0°C and 101.3 kPa  
Joint type*  
0-10 L/min  
0-20 L/min  
0-50 L/min  
Manifold mount with ‘O’ Ring (A5 type) or Rc 1/4 (1/4” BSPT threaded)(A6 type)**  
Case material  
Thermoplastic resin  
Applicable Gas**  
Air  
Electrical Connection  
Withstand Pressure (max.)  
Accuracy  
Connector (3 wire)  
500 kPa (about 72.5 psi)  
3ꢀ F.S. max, 25°C  
Operating Temperature  
Storage Temperature  
Operating Humidity  
Output Signal  
-10 to +60°C (with no icing or condensation)  
-30 to +80°C (with no icing or condensation)  
85ꢀRH max. (with no icing or condensation)  
1 to 5 VDC, Analog Output (non-linear output)  
15 mA max. (No-Load with VCC = 12 to 24 VDC, VSS = 0V and 25°C)  
20MΩ min. at 500 VDC, between lead terminal and case  
500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base  
150 mS, typical  
Current Consumption  
Insulation Resistance  
Dielectric Strength  
Response Time (reference)  
* Contact Omron for other thread types (A6)  
** Contact Omron for other gases.  
Operating Characteristics  
D6F-20A  
D6F-50A  
D6F-10A  
6.0  
5.0  
4.0  
3.0  
2.0  
1.0  
0.0  
6.0  
5.0  
4.0  
3.0  
2.0  
1.0  
0.0  
6.0  
5.0  
4.0  
3.0  
2.0  
1.0  
0.0  
0.0  
4.0  
8.0  
12.0  
16.0  
20.0  
0.0  
10.0  
20.0  
30.0  
40.0  
50.0  
0.0  
2.0  
4.0  
6.0  
8.0  
10.0  
Flow rate(L/min)  
Flow rate(L/min)  
Flow rate(L/min)  
D6F-10A  
Flow Rate L/min (normal)  
Output Voltage (VDC)  
0
2
4
6
8
10  
1.00 0.12  
1.75 0.12  
2.60 0.12  
3.45 0.12  
4.25 0.12  
5.00 0.12  
D6F-20A  
Flow Rate L/min (normal)  
Output Voltage (VDC)  
0
4
8
12  
16  
20  
1.00 0.12  
1.93 0.12  
2.87 0.12  
3.70 0.12  
4.41 0.12  
5.00 0.12  
D6F-50A  
Flow Rate L/min (normal)  
Output Voltage (VDC)  
0
10  
20  
30  
40  
50  
1.00 0.12  
2.45 0.12  
3.51 0.12  
4.20 0.12  
4.66 0.12  
5.00 0.12  
24  
MEMS Airflow Sensor D6F-10A, -20A, -50A  
Test Results (typical performance)  
D6F-20A@  
(5 samples, repeated 10 times each)  
1.0  
0.8  
0.6  
0.4  
0.2  
0.0  
-0.2  
-0.4  
-0.6  
-0.8  
-1.0  
0
2
4
6
8
10  
12  
14  
16  
18  
20  
Flow Rate (lpm)  
Installation: D6F-@A5-000  
Recommendation for right-angle, manifold mount connection;  
Recommended ‘O’ ring for sealing inlet and outlet orifice;  
Use M3 panhead screws for mounting, and tighten them to a maximum  
torque of 0.59 N•m. Please seal INLET and OUTLET with ‘O’ rings.  
Please install the product as shown below. Incorrect mounting may  
cause product failure and make it impossible to obtain correct measure-  
ments.  
• Material: NBR70 (recommended for all applications including  
medical and food processing.)  
• Example part number: JASO part number: CO 0003  
• Alternative manufacturers with similar DO and W dimensions may  
be used  
Outlet  
O ring  
5.8  
1.9 0.07  
Inlet  
MEMS Airflow Sensor D6F-10A, -20A, -50A  
25  
Dimensions  
Unit: mm  
D6F-10A5-000, D6F-20A5-000, D6F-50A5-000  
Mounting Hole  
Dimensions  
14 0.1  
Four, 3.2-dia. holes  
Four, M3  
2: Vout  
3: GND  
1: Vcc  
3.4  
66 0.2  
66 0.05  
78 0.5  
Enlarged view  
5.7  
30.4  
14 0.05  
Two, 5-dia holes  
6
30 0.5  
30 0.5  
D6F-10A6-000, D6F-20A6-000, and D6F-50A6-000  
Mounting Hole  
Dimensions  
Two, M3  
12 0.2  
2: Vout  
3: GND  
1: Vcc  
3.4  
66 0.2  
66 0.05  
78 0.5  
Enlarged view  
5.7  
30.4  
6
12 0.05  
Two, M3 screws  
(Effective depth: 4.5)  
Tapered pipe thread  
Two, Rc1/4  
(1/4” BPST - British  
Standard Pipe, Threaded)  
30 0.5  
30 0.5  
Applicable Cable for D6F-@A@-000 (Optional - sold separately)  
part number: D6F-CABLE1  
35  
200  
Housing: Molex - 51021  
Brown wire  
Black wire  
15  
100  
1. Vcc  
Terminal: Molex - 50079  
Wire: 26-28 AWG  
2. Vout  
3. GND  
Blue wire  
Note: Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information”  
for correct use.  
26  
MEMS Airflow Sensor D6F-10A, -20A, -50A  
MEMO  
MEMS Airflow Sensor D6F-10A, -20A, -50A  
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which  
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html  
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.  
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.  
OMRON ON-LINE  
Global - http://www.omron.com  
USA - http://www.components.omron.com  
OMRON ELECTRONIC  
COMPONENTS LLC  
55 E. Commerce Drive, Suite B  
Schaumburg, IL 60173  
847-882-2288  
10/10  
Specifications subject to change without notice  
Printed in USA  
Cat. No. X305-E-1  
MEMS Airflow Sensor D6F-10A, -20A, -50A  

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