概述
数据手册HSH1000NEO 概述
Lamps for Photolithography 灯光刻
HSH1000NEO 数据手册
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Mercury Short Arc Lamps
HSH1000NEO
Lamps for Photolithography
Description
Applications
hours to more than two thousand hours.
The HSH Series provides longer lifetimes,
outstanding uniformity, and excellent
spectral quality which results in increased
throughput, reduced downtime and an
overall reduction in the cost of ownership.
PerkinElmer Optoelectronics is a leading
manufacturer of mercury short arc lamps
ranging in output power from 1000 to
8000 watts. These lamps are used in the
production of printed circuit boards, liquid
crystal displays and semiconductors. The
HSH Series lamps are used worldwide in
microlithography systems manufactured
by ASML, Canon, GCA, Nikon, Karl
Suss, Ultratech Stepper, and SVG. With
extremely high stability, uniform output
distribution and extended lamp lifetimes,
the HSH Series has become the lamp
choice of many of the world’s leading
semiconductor manufacturers.
• Microlithography
PerkinElmer has been a leading manufac-
turer of high intensity arc lamps for more
than 30 years and is a premier lamp sup-
plier for solid state lasers, medical equip-
ment, NASA space systems and
microlithography. PerkinElmer has
steadily advanced lamp performance from
1000 watts to 8000 watts. With the intro-
duction of new materials and proprietary
manufacturing processes, we have extend-
ed lamp lifetimes form several hundred
.
www.perkinelmer.com/opto
HSH1000NEO
Physical Specifications
Operational Specifications
Description
Nominal
Range
Description
Arc Gap
Specification
Power (idling mode)
Power (flash mode)
Current (idling mode)
Current (flash mode)
Voltage (idling mode)
Voltage (flash mode)
Current Ripple
700 watts
650-750 watts
3.0 mm (max)
1000 watts
16 amps (DC)
21.3 amps (DC)
44 volts (DC)
47 volts (DC)
3%
1050 watts (max)
14.2-17.8 amps (DC)
19-23.6 amps (DC)
39-49 volts (DC)
42-52 volts (DC)
Anode Base
Cathode Base
Cooling Fins and Cable
15 mm Dia
Spectral Output
100
90
80
70
60
50
40
30
20
10
0
Temperature (at base)
Lifetime
220ºC (max)
2500 hours
Dimensions
CATHODE (-)
END UP
250
300
350
400
450
500
550
600
650
700
750
Wavelength (nm)
Ø29 MAX
Typical Performance Graph
100
90
80
70
60
50
40
30
20
10
0
166
187 MAX
86
ANODE (+)
END DOWN
0
500
1000
1500
2000
2500
All dimensions are in millimeters.
Notes
Hours of Operation
Part Number References
Used In
Nikon NSR-1505 G3, G4
1. Lamp must be operated with cathode end up and
anode end down. Inclination of lamp axis to vertical
must not exceed 10º.
Replaces
USH1000FNL (2&3)
HBO1000W/NL
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
USA:
Europe:
Asia:
PerkinElmer Optoelectronics
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
PerkinElmer Optoelectronics GmbH
Wenzel-Jaksch-Str. 31
65199 Wiesbaden
Germany
Phone: +49 611 492 0
Fax: +49 611 492 177
PerkinElmer Optoelectronics
47 Ayer Rajah Crescent #06-12
Singapore 139947
Phone: +65 775 2022
Fax: +65 775 1008
.
© 2000 PerkinElmer inc. All rights reserved.
DS-176 Rev B 1101
www.perkinelmer.com/opto
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