FMAL001DU [SENSORTECHNICS]
Mass flow sensors for gases; 质量流量传感器，气体
| 型号： | FMAL001DU |
| 厂家： | 
SENSORTECHNICS GMBH |
| 描述： | Mass flow sensors for gases |
| 文件： | 总5页 (文件大小：123K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
FMA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...1000 sccm1 and 0...6 slpm2
· Actual mass flow sensing
· 1...5 V output
· Manifold mount/O-ring sealed
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FMA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
ELECTRICAL CONNECTION
Maximum ratings
P 1
P 2
Supply voltage3
8 to 15 V
typ. 10 ±0.01 V
Power consumption
FMAL001DU
60 mW
75 mW
FMAL006DU
Output load
NPN (Sinking)
PNP (Sourcing)
10 mA
20 mA
1
2 3
Temperature limits
Operating
-25 to 85°C
-40 to 90°C
Pin 1: Vout
Pin 2: +Vs
Pin 3: GND
Storage
Mechanical shock
100 g (5 drops, 6 axes)
Note:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
Output voltage is ratiometric to supply voltage
2
3
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FMA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS4
(VS = 10 ±0.01 V, TA = 25°C)
Flow range
Part no.
Max. flow
Output voltage
@ trim point
(full scale)
change5
FMAL001DU
FMAL006DU
1000 sccm1
6 SLPM2
5.0 l/sec
5.0 l/sec
5 ±0.15 V @ 1000 sccm1
5 ±0.15 V @ 6 SLPM2
PERFORMANCE CHARACTERISTICS
(VS = 10 ±0.01 V, TA = 25°C)
Characteristics
Zero offset
Min.
Typ.
Max.
1.05
±0.5
±1.0
±0.3
Unit
0.95
1.0
V
Repeatability and hysteresis
(combined)
FMAL001DU
FMAL006DU
% reading
V
Ratiometricity error3
Temperature effects6
Offset
Span
-25 to 85 °C
±0.025
-25 to 25 °C FMAL001DU
FMAL006DU
-5.0
-6.0
6.0
6.0
3.0
150
25
% reading
25 to 85 °C FMAL001DU
FMAL006DU
Response time
1.0
ms
psi
Common mode pressure
FMAL001DU
FMAL006DU
Notes:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
Output voltage is ratiometric to supply voltage
2
3
4 A 5 micron filter is recommended for all devices.
5
Maximum allowable rate of flow change to prevent damage.
6 Shift is relative to 25 °C.
E / 11724 / A
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FMA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(VS = 10 ±0.01 V, TA = 25°C)
FMAL001DU
FMAL006DU
Flow
(sccm)7
Flow
(slpm)7
Press.
(mbar)
Nom.
(VDC
Tol.
(± VDC
Press.
(mbar)
Nom.
(VDC
Tol.
(± VDC)
)
)
)
1000
900
800
700
600
500
400
300
200
100
0
6
5
4
3
2
1
0
2.23
1.87
1.52
1.16
0.94
0.71
0.50
0.33
0.19
0.08
0.00
5.00
4.97
4.89
4.78
4.63
4.43
4.15
3.76
3.23
2.49
1.00
0.15
0.16
0.17
0.18
0.19
0.20
0.21
0.19
0.17
0.14
0.05
20.0
14.7
9.07
6.40
3.35
1.17
0.00
5.00
4.89
4.70
4.40
3.80
3.10
1.00
0.15
0.20
0.25
0.35
0.30
0.30
0.05
Note:
7
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FMAL001DU
FMAL006DU
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FMA Series
Mass flow sensors for gases
OUTLINE DRAWING
30.5
(1.20)
27.7
(1.09)
14.0
(0.55)
32.2
(1.19)
3 2 1
7.62
(0.30)
2.5
(0.10)
0.64
(0.025)
34.0
(1.34)
17.3
(0.68)
4.8
(0.19)
3.0
(0.12)
8.4
(0.33)
10.9
(0.43)
Ø 6.2
(Ø 0.24)
Ø 3.0
(Ø 0.12)
Ø 3.51
(Ø 0.138)
Ø 2.0
(Ø 0.08)
P 1
P 2
2.54
(0.10)
1 2 3
7.9
(0.31)
Pin 1: Vout
Pin 2: +Vs
Pin 3: GND
12.7
(0.50)
third angle projection
dimensions in mm (inches)
mass: approx. 11 g
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and
results in positive output.
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FMA Series
Mass flow sensors for gases
GAS CORRECTION FACTORS8
Gas type
Correction factor (approx.)
Helium (He)
Hydrogen (H2)
Argon (Ar)
0.59
0.79,10
0.95
1.0
Nitrogen (N2)
Oxygen (O2)
1.0
Air
1.0
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH4)
Ammonia (NH3)
Nitrous oxide (N2O)
Nitrogen dioxide (NO2)
Carbon dioxide (CO2)
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
8
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
9
10 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION - AVAILABLE LISTINGS
Note:
Preferred listings are highlighted in grey
Flow range
1000 sccm
6 SLPM
Dry gas
Hydrogen gas10
FMAL001HU
---
FMAL001DU
FMAL006DU
Sensortechnics PRO services:
· Extended guarantee period of 2 years
· Improved performance characteristics
· Custom product modifications and adaptations even for small quantities
· Advanced logistics models for supply inventory and short delivery times
· Technical support through application engineers on the phone or at your site
· Fastest possible technical response for design and QA engineers
... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
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