FMAL001DU [SENSORTECHNICS]

Mass flow sensors for gases; 质量流量传感器,气体
FMAL001DU
型号: FMAL001DU
厂家: SENSORTECHNICS GMBH    SENSORTECHNICS GMBH
描述:

Mass flow sensors for gases
质量流量传感器,气体

传感器
文件: 总5页 (文件大小:123K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
FMA Series  
Mass flow sensors for gases  
FEATURES  
· Ranges 0...1000 sccm1 and 0...6 slpm2  
· Actual mass flow sensing  
· 1...5 V output  
· Manifold mount/O-ring sealed  
· Sensortechnics PRO services  
MEDIA COMPATIBILITY  
To be used with dry gases only  
The FMA series is NOT designed for liquid  
flow and will be damaged by liquid flow through  
the sensor  
SPECIFICATIONS  
ELECTRICAL CONNECTION  
Maximum ratings  
P 1  
P 2  
Supply voltage3  
8 to 15 V  
typ. 10 ±0.01 V  
Power consumption  
FMAL001DU  
60 mW  
75 mW  
FMAL006DU  
Output load  
NPN (Sinking)  
PNP (Sourcing)  
10 mA  
20 mA  
1
2 3  
Temperature limits  
Operating  
-25 to 85°C  
-40 to 90°C  
Pin 1: Vout  
Pin 2: +Vs  
Pin 3: GND  
Storage  
Mechanical shock  
100 g (5 drops, 6 axes)  
Note:  
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm  
slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.  
Output voltage is ratiometric to supply voltage  
2
3
E / 11724 / A  
1/5  
www.sensortechnics.com  
FMA Series  
Mass flow sensors for gases  
FLOW SENSOR CHARACTERISTICS4  
(VS = 10 ±0.01 V, TA = 25°C)  
Flow range  
Part no.  
Max. flow  
Output voltage  
@ trim point  
(full scale)  
change5  
FMAL001DU  
FMAL006DU  
1000 sccm1  
6 SLPM2  
5.0 l/sec  
5.0 l/sec  
5 ±0.15 V @ 1000 sccm1  
5 ±0.15 V @ 6 SLPM2  
PERFORMANCE CHARACTERISTICS  
(VS = 10 ±0.01 V, TA = 25°C)  
Characteristics  
Zero offset  
Min.  
Typ.  
Max.  
1.05  
±0.5  
±1.0  
±0.3  
Unit  
0.95  
1.0  
V
Repeatability and hysteresis  
(combined)  
FMAL001DU  
FMAL006DU  
% reading  
V
Ratiometricity error3  
Temperature effects6  
Offset  
Span  
-25 to 85 °C  
±0.025  
-25 to 25 °C FMAL001DU  
FMAL006DU  
-5.0  
-6.0  
6.0  
6.0  
3.0  
150  
25  
% reading  
25 to 85 °C FMAL001DU  
FMAL006DU  
Response time  
1.0  
ms  
psi  
Common mode pressure  
FMAL001DU  
FMAL006DU  
Notes:  
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm  
SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.  
Output voltage is ratiometric to supply voltage  
2
3
4 A 5 micron filter is recommended for all devices.  
5
Maximum allowable rate of flow change to prevent damage.  
6 Shift is relative to 25 °C.  
E / 11724 / A  
2/5  
www.sensortechnics.com  
FMA Series  
Mass flow sensors for gases  
FLOW SPECIFICATIONS  
(VS = 10 ±0.01 V, TA = 25°C)  
FMAL001DU  
FMAL006DU  
Flow  
(sccm)7  
Flow  
(slpm)7  
Press.  
(mbar)  
Nom.  
(VDC  
Tol.  
(± VDC  
Press.  
(mbar)  
Nom.  
(VDC  
Tol.  
(± VDC)  
)
)
)
1000  
900  
800  
700  
600  
500  
400  
300  
200  
100  
0
6
5
4
3
2
1
0
2.23  
1.87  
1.52  
1.16  
0.94  
0.71  
0.50  
0.33  
0.19  
0.08  
0.00  
5.00  
4.97  
4.89  
4.78  
4.63  
4.43  
4.15  
3.76  
3.23  
2.49  
1.00  
0.15  
0.16  
0.17  
0.18  
0.19  
0.20  
0.21  
0.19  
0.17  
0.14  
0.05  
20.0  
14.7  
9.07  
6.40  
3.35  
1.17  
0.00  
5.00  
4.89  
4.70  
4.40  
3.80  
3.10  
1.00  
0.15  
0.20  
0.25  
0.35  
0.30  
0.30  
0.05  
Note:  
7
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.  
OUTPUT VS. FLOW CURVES  
FMAL001DU  
FMAL006DU  
E / 11724 / A  
3/5  
www.sensortechnics.com  
FMA Series  
Mass flow sensors for gases  
OUTLINE DRAWING  
30.5  
(1.20)  
27.7  
(1.09)  
14.0  
(0.55)  
32.2  
(1.19)  
3 2 1  
7.62  
(0.30)  
2.5  
(0.10)  
0.64  
(0.025)  
34.0  
(1.34)  
17.3  
(0.68)  
4.8  
(0.19)  
3.0  
(0.12)  
8.4  
(0.33)  
10.9  
(0.43)  
Ø 6.2  
(Ø 0.24)  
Ø 3.0  
(Ø 0.12)  
Ø 3.51  
(Ø 0.138)  
Ø 2.0  
(Ø 0.08)  
P 1  
P 2  
2.54  
(0.10)  
1 2 3  
7.9  
(0.31)  
Pin 1: Vout  
Pin 2: +Vs  
Pin 3: GND  
12.7  
(0.50)  
third angle projection  
dimensions in mm (inches)  
mass: approx. 11 g  
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and  
results in positive output.  
E / 11724 / A  
4/5  
www.sensortechnics.com  
FMA Series  
Mass flow sensors for gases  
GAS CORRECTION FACTORS8  
Gas type  
Correction factor (approx.)  
Helium (He)  
Hydrogen (H2)  
Argon (Ar)  
0.59  
0.79,10  
0.95  
1.0  
Nitrogen (N2)  
Oxygen (O2)  
1.0  
Air  
1.0  
Nitric oxide (NO)  
Carbon monoxide (CO)  
Methane (CH4)  
Ammonia (NH3)  
Nitrous oxide (N2O)  
Nitrogen dioxide (NO2)  
Carbon dioxide (CO2)  
1.0  
1.0  
1.1  
1.1  
1.35  
1.35  
1.35  
Notes:  
8
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided  
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.  
When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:  
Hydrogen typ. 12 V, Helium typ. 15 V  
9
10 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing  
hydrogen flow and are designated with an "H" at the end of the order number.  
ORDERING INFORMATION - AVAILABLE LISTINGS  
Note:  
Preferred listings are highlighted in grey  
Flow range  
1000 sccm  
6 SLPM  
Dry gas  
Hydrogen gas10  
FMAL001HU  
---  
FMAL001DU  
FMAL006DU  
Sensortechnics PRO services:  
· Extended guarantee period of 2 years  
· Improved performance characteristics  
· Custom product modifications and adaptations even for small quantities  
· Advanced logistics models for supply inventory and short delivery times  
· Technical support through application engineers on the phone or at your site  
· Fastest possible technical response for design and QA engineers  
... plus other services on request  
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the  
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.  
E / 11724 / A  
5/5  
www.sensortechnics.com  

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