SM5323BBET100000 [SMI]
Gauge & Differential Pressure Sensors;型号: | SM5323BBET100000 |
厂家: | Silicon Microstructures, Inc. |
描述: | Gauge & Differential Pressure Sensors 仪表 |
文件: | 总11页 (文件大小:1086K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
Low Pressure
Digital Sensor
SM5221, SM5321 & SM5421
Gauge & Differential Pressure Sensors
FEATURES
•
Pressure ranges from 0.8 to 2.49 psi; gauge, differential and
asymmetric outputs
•
•
Accuracy: ±1% full scale
14-bit digital, pressure calibrated and temperature compensated
output
•
•
•
•
•
I2C Digital Interface
Compensated temperature range: -20oC to 85oC
Insensitive to mounting orientation
Robust JEDEC SOIC-16 package for automated assembly
Manufactured according to ISO9001 and ISO/TS 16949 standards
DESCRIPTION
The SM5221, SM5321 & SM5421 Series is a digital, low pressure
MEMS sensor family offering state-of-the-art pressure transducer
technology and CMOS mixed signal processing technology to
produce a digital, fully conditioned, multi-order pressure and
temperature compensated sensor in JEDEC standard SOIC-16
package with a dual vertical porting option. It is available in both
compound gage or differential pressure configurations. With the
dual porting, a vacuum-gage measurement is possible to minimize
altitude errors due to changes in ambient pressure.
Combining the pressure sensor with a signal-conditioning ASIC in a
single package simplifies the use of advanced silicon micro-machined
pressure sensors. The pressure sensor can be mounted directly on a
standard printed circuit board and a high level, calibrated pressure
signal can be acquired from the digital interface. This eliminates the
need for additional circuitry, such as a compensation network or
microcontroller containing a custom correction algorithm.
Customer-specified pressure ranges and supply voltages are
available.
The SM5221, SM5321 & SM5421 is shipped in sticks or tape & reel.
Medical
Industrial
Consumer
Sleep Apnea
Airflow Measurement
Sports Equipment
CPAP
Pneumatic Gauges
Pressure Switches
Safety Cabinets
Appliances
Ventilators
Gas Flow Instrumentation
Air Flow Monitors
Negative Pressure Wound Therapy
Life Sciences
Gas Flow Instrumentation
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DOC # 40DS5960.05
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SM5221, SM5321 & SM5421 Series
Absolute Maximum Ratings
All parameters are specified at Vdd = 3.3 V supply voltage at 25oC, unless otherwise noted.
No.
1
Characteristic
Symbol
VDD
Minimum
Typical
Maximum
6.00
Units
V
Supply Voltage
2.7
2
Supply Current
IVDD
4.00
mA
mS
°C
3
Update Period
2
4
Compensated Temperature
Operating Temperature(a)
Storage Temperature(a)
Media Compatibility(a,b)
Proof Pressure(a, c)
-20
-40
-40
+85
5
TOP
+105
+125
°C
6
TSTG
-
°C
7
8
PProof
PBurst
12
15
psi
psi
9
Burst Pressure(a, d)
Notes:
a. Tested on a sample basis.
b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
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SM5221, SM5321 & SM5421 Series
OPERATING CHARACTERISTICS TABLE All parameters are specified at Vdd = 3.3 V DC supply voltage at 25oC,
unless otherwise noted.
No.
Characteristic
Symbol
Minimum
3.0
Typical
3.3
Maximum
Units
3.6
10
Supply Voltage*
VDD
V
4.75
5.0
5.25
11
12
13
14
15
Pressure Output @ PMIN
Pressure Output @ PMAX
Full Scale Span
OUTMIN
OUTMAX
FSP
1,638
14,745
13,107
14
Counts
Counts
Counts
Bits
Resolution
Accuracy (e, f, g)
ACC
-1
+1
%FS
Calibrated Pressure Ranges
No.
16
Device Type
SM5221 – Gauge
PMIN (psi)
PMAX (psi)
+0.8 to +2.49
+0.8 to +2.49
-0.8 to +2.49
Comment
0
17
SM5321 – Differential
SM5421 -- Asymmetric
-2.49 to -0.8
-2.49 to +0.8
Absolute value of PMIN must match absolute value of PMAX
Delta between PMAX and PMIN must be at least 0.8 psi
18
Notes:
e. The accuracy specification applies over all operating conditions. This specification includes the combination of linearity, repeatability, and
hysteresis errors over pressure, temperature, and voltage.
f. Maximum lifetime zero pressure offset shift < ±1%FS based on 1000 hours of HTOL , TC and THB testing.
g. For less demanding applications, devices with relaxed accuracy specifications are available
*Custom calibration pressures and voltages are available to meet specific customer demands.
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SM5221, SM5321 & SM5421 Series
SM5221, SM5321 & SM5421 – I2C Communications
1. SCL Clock frequency:
•
100kHz to 400kHz
2. Slave Address
•
For the Read_DF3 data fetch command (Data Fetch 3
Bytes), the sensor returns three bytes in response to the
master sending the slave address and the READ bit (1): two
bytes of bridge data with the two status bits as the MSBs
and then 1 byte of temperature data (8-bit accuracy). After
receiving the required number of data bytes, the master
sends the NACK and stop condition to terminate the read
operation.
•
The factory setting for the I2C slave address is 28HEX. The
part will only respond to the set address.
3. Read Operations
•
For read operations, the I2C master command starts with
the 7-bit slave address with the 8th bit = 1 (READ). The
sensor as the slave sends an acknowledge (ACK) indicating
success.
•
•
For the Read_DF4 command, the master delays sending the
NACK and continues reading an additional final byte to
acquire the full corrected 11-bit temperature measurement.
In this case, the last 5 bits of the final byte of the packet are
undetermined and should be masked off in the application.
•
The sensor has four I2C read commands: Read_DF2,
Read_DF3, and Read_DF4. The following figures show the
structure of the measurement packet for three of the four
I2C read commands, which are further explained below.
The Read_DF2 command is used if corrected temperature is
not required. The master terminates the READ operation
after the two bytes of bridge data.
3.1 I2C Read_DF (Data Fetch):
•
For the Data Fetch commands, the number of data bytes
returned by the sensor is determined by when the master
sends the NACK and stop condition.
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SM5221, SM5321 & SM5421 Series
Parameter
Symbol Minimum Typical Maximum Units
SCL Clock Frequency
FSCL
tHDSTA
tLOW
100
0.1
0.6
0.6
0.1
0.0
0.1
0.1
2.0
400
kHz
µs
µs
µs
µs
µs
µs
µs
µs
Start Condition Hold Time Relative to SCL Edge
Minimum SCL Clock Low Width1
Minimum SCL Clock High Width1
tHIGH
Start Condition Hold Time Relative to SCL Edge
Data Hold Time on SDA Relative to SCL Edge
Data Setup Time on SDA Relative to SCL Edge
Stop Condition Setup Time on SCL
tSUSTA
tHIDDAT
tSUDAT
tSUSTO
tBUS
Bus Free Time Between Stop Condition and Start Condition
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SM5221, SM5321 & SM5421 Series
5. Differences sensor I2C Protocol vs. Original I2C protocol
•
Note: There are three differences in the sensor protocol
compared with the original I2C protocol
•
•
The restart condition - a falling SDA edge during data
transmission when the CLK clock line is still high
creates the same situation. The next communication
fails, and an additional start condition must be sent
for correct communication.
-
•
Sending a start-stop condition without any transitions
on the CLK line (no clock pulses in between) created a
communication error for the next communication, even
if the next start condition is correct and the clock pulse
is applied. An additional start condition must be sent,
which results in restoration of proper communication.
A failing SDA edge is not allowed between the start
condition and the first rising SCL edge. If using an I2C
address with the first bit 0, SDA must be held low
from the start condition though the first bit.
6. Diagnostic Features – Status Bits
The sensor offers diagnostic features to ensure robust
system operation. The diagnostic states are indicated by a
transmission of the status of the 2 MSBs of the pressure
high byte data.
Status Bits (2 MSBs of Output Packet)
Symbol
Normal operation, good data packet
00
Device in Command Mode (not applicable for normal operation)
Stale data: Data that has already been fetched since the last measurement cycle
Diagnostic condition exists
01
10(1)
11
Note(1): If a data fetch is performed before or during the first measurement after power-on reset, then “stale” will be returned, but this
data is actually invalid because the first measurement has not been completed.
•
When the two MSBs are 11, one of the following faults listed
below is indicated:
•
All diagnostics are detected in the next measurement
cycle and reported in the subsequent data fetch.
Once a diagnostic is reported, the diagnostic status
bits will not change unless both the cause of the
diagnostic is fixed and a power-on-reset is performed.
•
•
•
•
Invalid EEPROM signature
Loss of bridge positive or negative
Bridge input short
Loss of bridge source
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SM5221, SM5321 & SM5421 Series
SOIC-16 (C) Vertical Package Dimensions
All dimensions are in mm
Notes:
•
•
•
•
•
Moisture Sensitivity Level (MSL): Level 3
Wetted materials: Silicon, glass, copper, silicone, epoxy, mold compound.
Tolerance on all dimensions ±0.13 mm unless otherwise specified.
[B] is tube connected to bottom side of sensor die.
[T] is tube connected to top side of sensor die. Topside pressure is positive pressure. An increase in topside pressure will result in an
increase in sensor output
Lot Number Identification
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SM5221, SM5321 & SM5421 Series
SOIC-16 Horizontal (B) Package Dimensions
All dimensions are in mm
Qualification Standards
REACH Compliant
RoHS Compliant
PFOS/PFOA Compliant
For qualification specifications, please contact Sales at sales@si-micro.com
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SM5221, SM5321 & SM5421 Series
SM5221, SM5321 & SM5421 + Family Applications Circuit
Package Labeling
Pin No.
1
Pin Function
NC (No Connect)
2
3
NC
NC
4
NC
5
NC
6
VSS
VDD
NC
7
8
9
NC
10
11
12
13
14
15
16
SDA
SCL
NC
NC
NC
NC
NC
NOTES:
Do not connect to NC pins
•
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Package Pin-Out
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SM5221, SM5321 & SM5421 Series
Ordering Information: : Specific part number information is provided on a separate tear sheet for each
product. In the event that a tear sheet and the family datasheet do not agree, then the information in
the specific tear sheet shall overrule the family datasheet. The general part number ordering
information is provided below:
Part Number Legend
*Custom calibration pressures and voltages are available to meet specific customer demands. Dual vertical or dual horizontal ports available.
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SM5221, SM5321 & SM5421 Series
Silicon Microstructures Warranty and Disclaimer:
Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to amend
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