SM5421BBES100000 [SMI]

Gauge & Differential Pressure Sensors;


型号：	SM5421BBES100000
厂家：	Silicon Microstructures, Inc.
描述：	Gauge & Differential Pressure Sensors 仪表
文件：	总11页 (文件大小：1086K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

Low Pressure

Digital Sensor

SM5221, SM5321 & SM5421

Gauge & Differential Pressure Sensors

FEATURES

•

Pressure ranges from 0.8 to 2.49 psi; gauge, differential and

asymmetric outputs

•

Accuracy: ±1% full scale

14-bit digital, pressure calibrated and temperature compensated

output

•

I²C Digital Interface

Compensated temperature range: -20^oC to 85^oC

Insensitive to mounting orientation

Robust JEDEC SOIC-16 package for automated assembly

Manufactured according to ISO9001 and ISO/TS 16949 standards

DESCRIPTION

The SM5221, SM5321 & SM5421 Series is a digital, low pressure

MEMS sensor family offering state-of-the-art pressure transducer

technology and CMOS mixed signal processing technology to

produce a digital, fully conditioned, multi-order pressure and

temperature compensated sensor in JEDEC standard SOIC-16

package with a dual vertical porting option. It is available in both

compound gage or differential pressure configurations. With the

dual porting, a vacuum-gage measurement is possible to minimize

altitude errors due to changes in ambient pressure.

Combining the pressure sensor with a signal-conditioning ASIC in a

single package simplifies the use of advanced silicon micro-machined

pressure sensors. The pressure sensor can be mounted directly on a

standard printed circuit board and a high level, calibrated pressure

signal can be acquired from the digital interface. This eliminates the

need for additional circuitry, such as a compensation network or

microcontroller containing a custom correction algorithm.

Customer-specified pressure ranges and supply voltages are

available.

The SM5221, SM5321 & SM5421 is shipped in sticks or tape & reel.

Medical

Industrial

Consumer

Sleep Apnea

Airflow Measurement

Sports Equipment

CPAP

Pneumatic Gauges

Pressure Switches

Safety Cabinets

Appliances

Ventilators

Gas Flow Instrumentation

Air Flow Monitors

Negative Pressure Wound Therapy

Life Sciences

Gas Flow Instrumentation

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SM5221, SM5321 & SM5421 Series

Absolute Maximum Ratings

All parameters are specified at Vdd = 3.3 V supply voltage at 25^oC, unless otherwise noted.

No.

Characteristic

Symbol

V_DD

Minimum

Typical

Maximum

6.00

Units

Supply Voltage

2.7

Supply Current

I_VDD

4.00

°C

Update Period

Compensated Temperature

Operating Temperature^(a)

Storage Temperature^(a)

Media Compatibility^(a,b)

Proof Pressure^{(a, c)}

-20

-40

+85

T_OP

+105

+125

°C

T_STG

°C

P_Proof

P_Burst

psi

Burst Pressure^{(a, d)}

Notes:

a. Tested on a sample basis.

b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.

c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after

returning to the operating pressure range

d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.

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SM5221, SM5321 & SM5421 Series

OPERATING CHARACTERISTICS TABLE All parameters are specified at Vdd = 3.3 V DC supply voltage at 25^oC,

unless otherwise noted.

No.

Characteristic

Symbol

Minimum

3.0

Typical

3.3

Maximum

Units

3.6

Supply Voltage*

V_DD

4.75

5.0

5.25

Pressure Output ^@P_MIN

Pressure Output ^@P_MAX

Full Scale Span

OUT_MIN

OUT_MAX

FSP

1,638

14,745

13,107

Counts

Bits

Resolution

Accuracy ^{(e, f, g)}

ACC

-1

%FS

Calibrated Pressure Ranges

No.

Device Type

SM5221 – Gauge

P_MIN(psi)

P_MAX(psi)

+0.8 to +2.49

-0.8 to +2.49

Comment

SM5321 – Differential

SM5421 -- Asymmetric

-2.49 to -0.8

-2.49 to +0.8

Absolute value of P_MINmust match absolute value of P_MAX

Delta between P_MAXand P_MINmust be at least 0.8 psi

Notes:

e. The accuracy specification applies over all operating conditions. This specification includes the combination of linearity, repeatability, and

hysteresis errors over pressure, temperature, and voltage.

f. Maximum lifetime zero pressure offset shift < ±1%FS based on 1000 hours of HTOL , TC and THB testing.

g. For less demanding applications, devices with relaxed accuracy specifications are available

*Custom calibration pressures and voltages are available to meet specific customer demands.

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SM5221, SM5321 & SM5421 Series

SM5221, SM5321 & SM5421 – I²C Communications

1. SCL Clock frequency:

•

100kHz to 400kHz

2. Slave Address

•

For the Read_DF3 data fetch command (Data Fetch 3

Bytes), the sensor returns three bytes in response to the

master sending the slave address and the READ bit (1): two

bytes of bridge data with the two status bits as the MSBs

and then 1 byte of temperature data (8-bit accuracy). After

receiving the required number of data bytes, the master

sends the NACK and stop condition to terminate the read

operation.

•

The factory setting for the I²C slave address is 28HEX. The

part will only respond to the set address.

3. Read Operations

•

For read operations, the I²C master command starts with

the 7-bit slave address with the 8th bit = 1 (READ). The

sensor as the slave sends an acknowledge (ACK) indicating

success.

•

For the Read_DF4 command, the master delays sending the

NACK and continues reading an additional final byte to

acquire the full corrected 11-bit temperature measurement.

In this case, the last 5 bits of the final byte of the packet are

undetermined and should be masked off in the application.

•

The sensor has four I²C read commands: Read_DF2,

Read_DF3, and Read_DF4. The following figures show the

structure of the measurement packet for three of the four

I²C read commands, which are further explained below.

The Read_DF2 command is used if corrected temperature is

not required. The master terminates the READ operation

after the two bytes of bridge data.

3.1 I²C Read_DF (Data Fetch):

•

For the Data Fetch commands, the number of data bytes

returned by the sensor is determined by when the master

sends the NACK and stop condition.

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SM5221, SM5321 & SM5421 Series

Parameter

Symbol Minimum Typical Maximum Units

SCL Clock Frequency

FSCL

tHDSTA

tLOW

100

0.1

0.6

0.1

0.0

0.1

2.0

400

kHz

µs

Start Condition Hold Time Relative to SCL Edge

Minimum SCL Clock Low Width1

Minimum SCL Clock High Width1

tHIGH

Start Condition Hold Time Relative to SCL Edge

Data Hold Time on SDA Relative to SCL Edge

Data Setup Time on SDA Relative to SCL Edge

Stop Condition Setup Time on SCL

tSUSTA

tHIDDAT

tSUDAT

tSUSTO

tBUS

Bus Free Time Between Stop Condition and Start Condition

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SM5221, SM5321 & SM5421 Series

5. Differences sensor I²C Protocol vs. Original I²C protocol

•

Note: There are three differences in the sensor protocol

compared with the original I²C protocol

•

The restart condition - a falling SDA edge during data

transmission when the CLK clock line is still high

creates the same situation. The next communication

fails, and an additional start condition must be sent

for correct communication.

•

Sending a start-stop condition without any transitions

on the CLK line (no clock pulses in between) created a

communication error for the next communication, even

if the next start condition is correct and the clock pulse

is applied. An additional start condition must be sent,

which results in restoration of proper communication.

A failing SDA edge is not allowed between the start

condition and the first rising SCL edge. If using an I²C

address with the first bit 0, SDA must be held low

from the start condition though the first bit.

6. Diagnostic Features – Status Bits

The sensor offers diagnostic features to ensure robust

system operation. The diagnostic states are indicated by a

transmission of the status of the 2 MSBs of the pressure

high byte data.

Status Bits (2 MSBs of Output Packet)

Symbol

Normal operation, good data packet

Device in Command Mode (not applicable for normal operation)

Stale data: Data that has already been fetched since the last measurement cycle

Diagnostic condition exists

10⁽¹⁾

Note⁽¹⁾: If a data fetch is performed before or during the first measurement after power-on reset, then “stale” will be returned, but this

data is actually invalid because the first measurement has not been completed.

•

When the two MSBs are 11, one of the following faults listed

below is indicated:

•

All diagnostics are detected in the next measurement

cycle and reported in the subsequent data fetch.

Once a diagnostic is reported, the diagnostic status

bits will not change unless both the cause of the

diagnostic is fixed and a power-on-reset is performed.

•

Invalid EEPROM signature

Loss of bridge positive or negative

Bridge input short

Loss of bridge source

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SM5221, SM5321 & SM5421 Series

SOIC-16 (C) Vertical Package Dimensions

All dimensions are in mm

Notes:

•

Moisture Sensitivity Level (MSL): Level 3

Wetted materials: Silicon, glass, copper, silicone, epoxy, mold compound.

Tolerance on all dimensions ±0.13 mm unless otherwise specified.

[B] is tube connected to bottom side of sensor die.

[T] is tube connected to top side of sensor die. Topside pressure is positive pressure. An increase in topside pressure will result in an

increase in sensor output

Lot Number Identification

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SM5221, SM5321 & SM5421 Series

SOIC-16 Horizontal (B) Package Dimensions

All dimensions are in mm

Qualification Standards

REACH Compliant

RoHS Compliant

PFOS/PFOA Compliant

For qualification specifications, please contact Sales at sales@si-micro.com

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SM5221, SM5321 & SM5421 Series

SM5221, SM5321 & SM5421 + Family Applications Circuit

Package Labeling

Pin No.

Pin Function

NC (No Connect)

VSS

VDD

SDA

SCL

NOTES:

Do not connect to NC pins

•

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Package Pin-Out

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SM5221, SM5321 & SM5421 Series

Ordering Information: : Specific part number information is provided on a separate tear sheet for each

product. In the event that a tear sheet and the family datasheet do not agree, then the information in

the specific tear sheet shall overrule the family datasheet. The general part number ordering

information is provided below:

Part Number Legend

*Custom calibration pressures and voltages are available to meet specific customer demands. Dual vertical or dual horizontal ports available.

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SM5221, SM5321 & SM5421 Series

Silicon Microstructures Warranty and Disclaimer:

Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to amend

the contents of this data sheet at any time and at its sole discretion.

Information in this document is provided solely to enable software and system implementers to use Silicon Microstructures,

Inc. products and/or services. No express or implied copyright licenses are granted hereunder to design or fabricate any

silicon-based microstructures based on the information in this document.

Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products for any

particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or use of any

product or silicon-based microstructure, and specifically disclaims any and all liability, including without limitation

consequential or incidental damages. “Typical” parameters which may be provided in Silicon Microstructure’s data sheets

and/or specifications can and do vary in different applications and actual performance may vary over time. All operating

parameters, including “Typicals”, must be validated for each customer application by customer’s technical experts. Silicon

Microstructures, Inc. does not convey any license under its patent rights nor the rights of others. Silicon Microstructures,

Inc. makes no representation that the circuits are free of patent infringement. Silicon Microstructures, Inc. products are not

designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other

applications intended to support or sustain life, or for any other application in which the failure of the Silicon

Microstructures, Inc. product could create a situation where personal injury or death may occur. Should Buyer purchase or

use Silicon Microstructures, Inc. products for any such unintended or unauthorized application, Buyer shall indemnify and

hold Silicon Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and distributors harmless against all

claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of

personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Silicon

Microstructures, Inc. was negligent regarding the design or manufacture of the part.

Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty workmanship.

Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon Microstructures, Inc. in

writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc. directly for specific warranty

details. If warranted goods are returned to Silicon Microstructures, Inc. during the period of coverage, Silicon

Microstructures, Inc. will repair or replace, at its option, without charge those items it finds defective. The foregoing is

buyer’s sole remedy and is in lieu of all warranties, expressed or implied, including those of merchantability and fitness for a

particular purpose. In no event shall Silicon Microstructures, Inc. be liable for consequential, special, or indirect damages.

While Silicon Microstructures, Inc. provides application assistance personally, through its literature and the Silicon

Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific application.

The information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this printing. However,

Silicon Microstructures, Inc. assumes no responsibility for its use. Silicon Microstructures, Inc. assumes no responsibility for

any inaccuracies and/or errors in this publication and reserves the right to make changes without further notice to any

products or specifications herein

Silicon Microstructures, Inc.TM and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc. All

other service or product names are the property of their respective owners.

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SM5421BBES100000 [SMI]

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