SM5G-GGG-T-005S-000 [SMI]

Small, Gauge Pressure Sensor;


型号：	SM5G-GGG-T-005S-000
厂家：	Silicon Microstructures, Inc.
描述：	Small, Gauge Pressure Sensor 仪表
文件：	总7页 (文件大小：572K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

Small, Gauge Pressure Sensor

SM5G-GG Series

FEATURES

•

Improved stability with integrated field shields

Small SO8 surface-mount package

90 millivolt output

Constant current or constant voltage drive

Ported configuration

Wide operating temperature range (-40° to +125°C)

DESCRIPTION

The SM5G-GG Series is a small outline SO8 packaged pressure

sensor that incorporates SMI’s new SM30G MEMS piezoresistive

pressure sensing die. The SM5G-GG Series has been optimized to

provide the highest possible accuracy for a package of this size.

Performance is achieved through careful resistor placement and

mechanical configuration along with advanced MEMS processing.

The SM5G-GG Series is in a ported package. It can be used to sense

pressure in a manifold configuration with an O-ring seal.

The SM5G-GG Series is available in sticks or in tape & reel.

The packaged sensor is intended for high volume applications where

cost is a critical factor, such as industrial and medical products.

Samples of the SM5G-GG Series are available as a gauge pressure

sensors in several pressure ranges. It is designed to be surface-

mounted on ceramic or PC board substrates by high-volume OEM

manufacturers.

Industrial

Handheld Meters

Pneumatic Gauges

Pressure Switches

Consumer

Medical

Sports Equipment

Wound Therapy

Health Monitoring

Blood Pressure

Bioreactors

Appliances

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DOC # 40DS3008.04

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SM5G-GG Series

ABSOLUTE MAXIMUM RATING TABLE

All parameters are specified at V_DD= 5.00 V DC SUPPLY at 25^oC, unless otherwise noted.

No.

Characteristic

Supply Voltage^(a)

Symbol

V_DD

Minimum

Typical

Maximum

Units

0.0

-40

Operating Temperature Range

Storage Temperature Range

T_OP

+125

°C

T_STG

+125

Notes:

a. If driven with constant current, the maximum supply voltage must not exceed 10 V.

Proof Pressure Burst Pressure

No.

Product

Operating Pressure

(P_PROOF

)

(P_BURST)

SM5G-005S

SM5G-015S

SM5G-030S^(b)

SM5G-080S^(b)

0-5 PSI

0-15 PSI

0-30 PSI

0-80 PSI

15 PSI

45 PSI

TBD

25 PSI

75 PSI

TBD

Notes:

b. This product is in development

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DOC # 40DS3008.04

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SM5G-GG Series

OPERATING CHARACTERISTICS TABLE

All parameters are specified at V_DD= 5.0 V DC SUPPLY at 25°C, unless otherwise noted.

No.

Characteristic

Symbol Minimum

Typical

Maximum

Units

5, 15, 80^(b)PSI

30^(b)PSI

Zero Offset

TC Span ^{(c, e, f)}

120

Span ^{(c, d)}

V_SPAN

105

V_ZERO

TCS

-25

-0.240

-75

-0.19

-0.155

%FS/^oC

μV/^oC

%R_B/°C

TC Zero Offset ^{(c, e, f)}

TC Resistance ^{(c, e, f)}

5 PSI

TCZ

TCR

0.24

-0.35

-0.2

0.275

0.33

0.35

0.2

Linearity ^{(c, f)}

%FS

15, 30^(b), 80^(b)PSI

Bridge Resistance

Pressure Hysteresis^(g)

Thermal Hysteresis^(h)

R_B

4.0

5.0

0.1

0.15

6.0

kOhm

%FS

Phys

Thys

%FS

Notes:

b. This product is in development.

c. Tested on a sample basis.

d. The device can only be driven with the supply voltage connected to the pins as shown.

e. Determined by measurements taken at -40°C and 125°C.

f. Defined using best fit straight line.

g. Pressure hysteresis describes a phenomenon whereby the same applied pressure results in different output signals, depending upon

whether the pressure is approached from a lower or higher pressure. The values shown represent the maximum values over the specified

operating pressure and temperature range.

h. Temperature hysteresis describes a phenomenon whereby the same applied temperature results in different output signals depending

upon whether the temperature is approached from a lower or higher temperature. The values shown represent the maximum change of

zero offset at 25°C when the device is cycled over the specified operating temperature range.

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DOC # 40DS3008.04

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SM5G-GG Series

Diagrams & Dimensions

All dimensions are for reference only

All dimensions are in mm

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DOC # 40DS3008.04

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SM5G-GG Series

Pin 1

Pin 2

Pin 3

Pin 4

Pin 8

Pin 7

Pin 6

Pin 5

Pin-Out

Description

+Sig

Gnd

-Sig

+Vexc

Typical Operation

Pin No.

Description

Type

Value

+Sig

Analog Out

Gnd

-Sig

0 V

Analog Out

Power

+Vexc

+5 V

Page 5

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DOC # 40DS3008.04

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SM5G-GG Series

Ordering Information

Full-Scale

Pressure Range

Cap

Configuration

Shipping

Configuration

Order Code

Pressure Type

SM5G-GGG-T-005S-000

SM5G-GGG-T-015S-000

5 PSI

Sticks or

Tape & Reel

Gauge

Port

15 PSI

Part Number Legend

Qualification Standards

•

REACH compliant

RoHS compliant

PFOS/PFOA compliant

For qualification specifications please contact Sales at sales@si-micro.com

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SM5G-GG Series

Silicon Microstructures Warranty and Disclaimer:

Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to

amend the contents of this data sheet at any time and at its sole discretion.

Information in this document is provided solely to enable software and system implementers to use Silicon

Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to

design or fabricate any silicon-based microstructures based on the information in this document.

Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products

for any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or

use of any product or silicon-based microstructure, and specifically disclaims any and all liability, including without

limitation consequential or incidental damages. “Typical” parameters which may be provided in Silicon Microstructure’s

data sheets and/or specifications can and do vary in different applications and actual performance may vary over time.

All operating parameters, including “Typicals”, must be validated for each customer application by customer’s technical

experts. Silicon Microstructures, Inc. does not convey any license under its patent rights nor the rights of others. Silicon

Microstructures, Inc. makes no representation that the circuits are free of patent infringement. Silicon Microstructures,

Inc. products are not designed, intended, or authorized for use as components in systems intended for surgical implant

into the body, or other applications intended to support or sustain life, or for any other application in which the failure

of the Silicon Microstructures, Inc. product could create a situation where personal injury or death may occur. Should

Buyer purchase or use Silicon Microstructures, Inc. products for any such unintended or unauthorized application,

Buyer shall indemnify and hold Silicon Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and

distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of,

directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even

if such claim alleges that Silicon Microstructures, Inc. was negligent regarding the design or manufacture of the part.

Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty

workmanship. Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon

Microstructures, Inc. in writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc.

directly for specific warranty details. If warranted goods are returned to Silicon Microstructures, Inc. during the period

of coverage, Silicon Microstructures, Inc. will repair or replace, at its option, without charge those items it finds

defective. The foregoing is buyer’s sole remedy and is in lieu of all warranties, expressed or implied, including those of

merchantability and fitness for a particular purpose. In no event shall Silicon Microstructures, Inc. be liable for

consequential, special, or indirect damages.

While Silicon Microstructures, Inc. provides application assistance personally, through its literature and the Silicon

Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific

application. The information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this

printing. However, Silicon Microstructures, Inc. assumes no responsibility for its use. Silicon Microstructures, Inc.

assumes no responsibility for any inaccuracies and/or errors in this publication and reserves the right to make changes

without further notice to any products or specifications herein

Silicon Microstructures, Inc.TM and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc.

All other service or product names are the property of their respective owners.

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DOC # 40DS3008.04

Page 7

SM5G-GGG-T-005S-000 [SMI]

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