SM9520A-100M-G-D [SMI]

OEM Silicon Pressure Die;


型号：	SM9520A-100M-G-D
厂家：	Silicon Microstructures, Inc.
描述：	OEM Silicon Pressure Die
文件：	总6页 (文件大小：631K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

OEM Silicon Pressure Die

SM9520A Series

FEATURES

•

High volume, cost effective

Gauge configuration

Constant current or constant voltage drive

Millivolt output

Available in 0.15, 0.60 & 1.50 PSIG full-scale

Ratiometric with supply voltage up to 6.5 V

Manufactured according to ISO9001 and ISO/TS 16949

standards

•

RoHS & REACH compliant

DESCRIPTION

Provided in die form, these sensors can be mounted on ceramic or

PC board substrates as part of an OEM system. They also may be

packaged into proprietary or application specific sensor lines.

The SM9520A is a silicon micro-machined, piezoresistive pressure

sensing die. This device is available with a full-scale range of 0.15

to 1.50 PSI (1.0 to 10 kPa) and is ideal for OEM and high-volume

applications.

Dies are electrically probed, diced, inspected, and shipped as

200mm wafers on tape.

Medical

Patient Monitors

Blood Pressure Monitors

Oxygen Concentrators

Fluid Evacuation

Industrial

Industrial Controls

Automotive

Diesel Particulate Filter

Exhaust Gas Recirculation

Automotive Systems

Compressors & Pumps

Pressure Switches

Oil-Filled Packages

Ventilators

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

DOC # 40DS0534.07

Page 1

SM9520A Series

www.si-micro.com

Absolute Maximum Ratings

No.

Characteristic

Excitation Voltage^(a)

Symbol

V_DD

Minimum Typical

Maximum

Units

6.5

Operating Temperature

Storage Temperature^(a)

T_OP

-40

+85

°C

T_STG

+125

Notes:

a. Bridge must be driven with the positive voltage applied to +Vex

Operating

Pressure

Proof Pressure

Burst Pressure

No.

Product Number

(b)

(P_PROOF

)

(P_BURST)

0 to 0.15 PSI

0 to 0.60 PSI

0 to 1.50PSI

1.5 PSI

4.8 PSI

12 PSI

3.0 PSI

6.0 PSI

15 PSI

SM9520A-010M-G-D

SM9520A-040M-G-D

SM9520A-100M-G-D

Notes:

b. Tested on a sample basis.

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

DOC # 40DS0534.07

Page 2

SM9520A Series

www.si-micro.com

OPERATING CHARACTERISTICS FOR SM9520A DIE

The operating characteristics are based on packaged die. The sensor performance may vary depending on the die attach

material and process. The die attach material and process should minimize the stress transferred to the sensor die.

All parameters are specified at VSUPPLY = 5.00 V supply voltage at 25°C, unless otherwise noted.

Operating Characteristics - Specifications

All parameters are specified at Vdd = 5.0 V supply voltage at 25^oC, unless otherwise noted.

No.

Characteristic

Symbol Minimum

Typical

Maximum

Units

0.15 PSIG ^(b)

Span (FS P_RANGE

)

0.60 PSIG ^(b)

V_SPAN

120

1.50 PSIG ^(b)

125

(c)

Zero Offset

V_ZERO

TCS

TCZ

TCR

NL_TS

NL_BS

R_B

-75

%FS/°C

µV/°C

%Rb/°C

%/FS

TC Span ^{(b, d)}

-0.24

-0.21

0 to 100

0.20

±0.1

±0.2

5.2

-0.155

TC Zero Offset ^{(b, d)}

TC Resistance ^{(d, f)}

0.17

-0.15

-0.35

4.0

0.23

0.15

0.35

6.0

(b, e)

Linearity – Topside

Linearity – Backside

Bridge Resistance

(b, e)

(c)

%/FS

kΩ

Notes:

b. Tested on a sample basis

c. Tested 100% at wafer probe

d. Determined by measurements taken over -40 to 85^oC

e. Defined as best fit straight line

f. Tested annually on a sample basis.

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

DOC # 40DS0534.07

Page 3

SM9520A Series

www.si-micro.com

SM9520A Diagrams and Dimensions

Assembly Recommendations

(a) Use soft RTV for die-attachment

(b) A bond line thickness of 180-220 µm is recommended

than 50% of the die thickness.

All dimensions are in micron.

Pad Coordinate

Typical Operation

PAD #

PAD DESCRIPTION

PAD LABEL

TYPE

VALUE Coordinate X-Axis (µm)

Coordinate Y-Axis (µm)

VSIG+2

-VEXC2

+VEXC2

VSIG+1

+VEXC1

-VEXC1

VSIG-1

VSIG-2

-VEXC3

Positive Analog Out

Negative Power

0 V

+5 V

1760

1360

Positive Power

350

700

1050

1400

1760

Positive Analog Out

Positive Power

5 V

0 V

Negative Power

Negative Analog Out

Negative Power

0 V

Bond pad opening size = 100x100 µm

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

DOC # 40DS0534.07

Page 4

SM9520A Series

www.si-micro.com

Ordering Information

Order Code

Full-Scale Pressure Range Pressure Type

Minimum Order Quantity

SM9520A-010M-G-D

SM9520A-040M-G-D

SM9520A-100M-G-D

0.15 PSI

Gauge

1 Wafer (1 wafer = 5,500 ±10%)

0.60 PSI

1.50 PSI

Part Number Legend

Qualification Standards

REACH Compliant

RoHS Compliant

PFOS/PFOA Compliant

For qualification specifications, please contact Sales at sales@si-micro.com

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

DOC # 40DS0534.07

Page 5

SM9520A Series

www.si-micro.com

Silicon Microstructures Warranty and Disclaimer:

Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to amend

the contents of this data sheet at any time and at its sole discretion.

Information in this document is provided solely to enable software and system implementers to use Silicon Microstructures,

Inc. products and/or services. No express or implied copyright licenses are granted hereunder to design or fabricate any silicon-

based microstructures based on the information in this document.

Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products for any

particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or use of any

product or silicon-based microstructure, and specifically disclaims any and all liability, including without limitation

consequential or incidental damages. “Typical” parameters which may be provided in Silicon Microstructure’s data sheets

and/or specifications can and do vary in different applications and actual performance may vary over time. All operating

parameters, including “Typicals”, must be validated for each customer application by customer’s technical experts. Silicon

Microstructures, Inc. does not convey any license under its patent rights nor the rights of others. Silicon Microstructures, Inc.

makes no representation that the circuits are free of patent infringement. Silicon Microstructures, Inc. products are not

designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other

applications intended to support or sustain life, or for any other application in which the failure of the Silicon Microstructures,

Inc. product could create a situation where personal injury or death may occur. Should Buyer purchase or use Silicon

Microstructures, Inc. products for any such unintended or unauthorized application, Buyer shall indemnify and hold Silicon

Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs,

damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death

associated with such unintended or unauthorized use, even if such claim alleges that Silicon Microstructures, Inc. was negligent

regarding the design or manufacture of the part.

Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty workmanship.

Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon Microstructures, Inc. in

writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc. directly for specific warranty

details. If warranted goods are returned to Silicon Microstructures, Inc. during the period of coverage, Silicon Microstructures,

Inc. will repair or replace, at its option, without charge those items it finds defective. The foregoing is buyer’s sole remedy and

is in lieu of all warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no

event shall Silicon Microstructures, Inc. be liable for consequential, special, or indirect damages.

While Silicon Microstructures, Inc. provides application assistance personally, through its literature and the Silicon

Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific application. The

information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this printing. However, Silicon

Microstructures, Inc. assumes no responsibility for its use. Silicon Microstructures, Inc. assumes no responsibility for any

inaccuracies and/or errors in this publication and reserves the right to make changes without further notice to any products or

specifications herein

Silicon Microstructures, Inc.TM and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc. All

other service or product names are the property of their respective owners.

+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com

DOC # 40DS0534.07

Page 6

SM9520A-100M-G-D [SMI]

相关型号：

SM9524104J5J390

SM9524104J5L390

SM9524104J5N390

SM9524104J6J390

SM9524104J6L390

SM9524104J6N390

SM9524104JAJ390

SM9524104JAL390

SM9524104JAN390

SM9524104JBJ390

SM9524104JBL390

SM9524104JBN390