SM9D-BCK-T-006S-000 [SMI]
Uncompensated SO-16 Pressure Sensor;
| 型号： | SM9D-BCK-T-006S-000 |
| 厂家： | 
Silicon Microstructures, Inc. |
| 描述： | Uncompensated SO-16 Pressure Sensor |
| 文件： | 总9页 (文件大小：934K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
Uncompensated
SO-16 Pressure Sensor
SM9D, SM9G Series
FEATURES
•
•
•
•
•
•
Uncompensated millivolt analog output
Differential or gage pressure options
Vertical or horizontal porting configurations
Pressure ranges: 0.15, 0.6 & 1.5 PSI
Variable supply voltage
Built in ESD protection
DESCRIPTION
Silicon Microstructures provides its most popular pressure sensor die
in a surface mount small outline package (SO-16) configuration. All
parts in this series are uncompensated high performance die
mounted in a rugged plastic package designed for surface mounting.
The low pressure SM9D/G series incorporates Silicon Microstructures’
unique pressure die to achieve high performance in pressure ranges of
0.15, 0.6 & 1.5 PSI full-scale in gauge and differential configurations.
Industrial
Handheld Meters
Pneumatic Gauges
Pressure Switches
Consumer
Medical
Sports Equipment
Hospital Beds
Wound Therapy
Health Monitoring
Appliances
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 1
www.si-micro.com
SM9G, SM9D Series
ABSOLUTE MAXIMUM RATING TABLE
All parameters are specified at VDD = 5.00 V DC SUPPLY at 25oC, unless otherwise noted.
No.
Characteristic
Supply Voltage(a, c)
Symbol
VDD
Minimum
Typical
Maximum
Units
1
2
3
4
5
-
-
-
-
-
-
-
6.5
V
Supply Current(a, c)
IVDD
1.6
+85
+125
-
mA
°C
Operating Temperature Range(b)
Storage Temperature(b)
ESD Voltage (HBM)
TOP
-40
-40
4
TSTG
°C
VESD
kV
NOTES:
a. The device can only be driven with the supply voltage connected to the pins as shown. The positive output will increase with increasing
pressure applied to the package.
b. Tested on a sample basis.
c. Never exceed 6.5 V supply voltage under any operating conditions.
Proof Pressure Burst Pressure
No.
Product Number
Operating Pressure
(d, e)
(d, f)
(PPROOF
)
(PBURST)
6
8
9
SM9X-BXX-X-001S-000
SM9X-BXX-X-006S-000
SM9X-BXX-X-015S-000
0.15 PSI
0.6 PSI
1.5 PSI
1.5 PSI
4.8 PSI
12.0 PSI
3.0 PSI
6.0 PSI
15.0 PSI
NOTES:
d. Tested on a sample basis.
e. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after returning to
the operating pressure range.
f. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 2
www.si-micro.com
SM9G, SM9D Series
OPERATING CHARACTERISTICS TABLE
All parameters are specified at VDD = 5.0 V DC SUPPLY at 25°C, unless otherwise noted.
No.
Characteristic
Symbol Minimum
Typical
Maximum
Units
10a
10b
11
Span (0.15 PSI) (g)
Span (0.60, 1.5 PSI) (g)
Zero Offset
30
45
90
60
120
+55
VSPAN
mV
50
VZERO
TCS
-55
0
mV
12
TC Span (g, i, j)
-0.24
-0.21
0 to +100
0.20
±0.1
±0.2
5.0
-0.15
%FS/°C
µV/°C
%RB/°C
13
TC Zero Offset (g, i, j)
TC Resistance (h, i, j)
Topside Linearity (g, j)
Backside Linearity (g, j)
Bridge Resistance
TCZ
14
TCR
0.17
-0.15
-0.35
4.0
0.23
0.15
0.35
6.0
15
NL
RB
%FS
16
17
kΩ
Notes:
g. Tested on a sample basis.
h. The device can only be driven with the supply voltage connected to the pins as shown.
i. Determined by measurements taken between -40°C and 85°C.
j. Defined as best fit straight line.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 3
www.si-micro.com
SM9G, SM9D Series
Diagrams & Dimensions
Dual Horizontal Porting Configuration: SM9D-BB
Dual Vertical Porting Configuration: SM9D-BC
Notes:
•
•
•
All dimensions in units of [mm]
Moisture Sensitivity Level (MSL): Level 3
Positive pressure applied to the topside of the die [T] is resulting in a positive change in output.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 4
www.si-micro.com
SM9G, SM9D Series
Single Vertical Porting Configuration: SM9G-BG
Notes:
•
•
•
All dimensions in units of [mm].
Moisture Sensitivity Level (MSL): Level 3
Positive pressure applied to the port is resulting in a positive change in output. Pressure is applied to the backside of the die.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 5
www.si-micro.com
SM9G, SM9D Series
Part & Lot Number Identification
9D-XXX
9D-XXX
9D-XXX
9D-XXX
9G- = Gage, 9D- = Differential
-001 = 0.15 PSI, -006 = 0.6 PSI, -015 = 1.5 PSI
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 6
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SM9G, SM9D Series
SM9D Package Pin-Out (Dual Horizontal & Dual Vertical)
Typical Operation
PIN
Description
Type
Value
3
+Vexc/Vsub
Power
Up to 5 V
5
-Sig
-Vexc
+Sig
Analog Out
Power
-
13
14
Ground
-
Analog Out
NOTES:
•
•
•
Do not connect to NC pins
Applies dual ported vertical and horizontal packages
Positive pressure applied to the topside of the die [T] is resulting in a positive change in output.
SM9G Package Pin-Out (Single Vertical)
Typical Operation
PIN
Description
Type
Value
3
+Vexc/Vsub
Power
Up to 5 V
5
+Sig
-Vexc
-Sig
Analog Out
Power
-
13
14
Ground
-
Analog Out
NOTES:
•
•
•
Do not connect to NC pins
Applies to single ported vertical package
Positive pressure applied to the port results in a positive change in output. Pressure is applied to the backside of the die.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 7
www.si-micro.com
SM9G, SM9D Series
Full-Scale
Ordering Information
Order Code
Cap
Shipping
Pressure Type
Pressure Range
Configuration
Configuration
SM9D-BCK-T-001S-000
SM9D-BCK-T-006S-000
SM9D-BCK-T-015S-000
SM9D-BBK-T-001S-000
SM9D-BBK-T-006S-000
SM9D-BBK-T-015S-000
SM9G-BGK-T-001S-000
SM9G-BGK-T-006S-000
SM9G-BGK-T-015S-000
0.15 PSI
Tape & Reel
350 devices per reel
Differential
0.60 PSI
Dual Vertical
1.50 PSI
0.15 PSI
Tape & Reel
500 devices per reel
Differential
Gage
0.60 PSI
Dual Horizontal
Single Vertical
1.50 PSI
0.15 PSI
Tape & Reel
400 devices per reel
0.60 PSI
1.50 PSI
Part Number Legend
SM9D BCK T 006S 000
Silicon
Microstructures
SO16 Porting Options
BB = dual horizontal
BC = dual vertical
Units = PSI
T: Tape & Reel
S: Stick
Counter
001 = 0.15 PSI
006 = 0.60 PSI
015 = 1.50 PSI
BG = single vertical
Low Pressure Range
Operating
D = Differential
G = Gage
Temp Range:
-40ºC to +85ºC
Qualification Standards
•
REACH compliant
RoHS compliant
PFOS/PFOA compliant
•
•
•
For qualification specifications please contact Sales at sales@si-micro.com
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 8
www.si-micro.com
SM9G, SM9D Series
Silicon Microstructures Warranty and Disclaimer:
Silicon Microstructures, Inc. reserves the right to make changes without further notice to any products herein and to
amend the contents of this data sheet at any time and at its sole discretion.
Information in this document is provided solely to enable software and system implementers to use Silicon
Microstructures, Inc. products and/or services. No express or implied copyright licenses are granted hereunder to
design or fabricate any silicon-based microstructures based on the information in this document.
Silicon Microstructures, Inc. makes no warranty, representation, or guarantee regarding the suitability of its products
for any particular purpose, nor does Silicon Microstructures, Inc. assume any liability arising out of the application or
use of any product or silicon-based microstructure, and specifically disclaims any and all liability, including without
limitation consequential or incidental damages. “Typical” parameters which may be provided in Silicon Microstructure’s
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time.
All operating parameters, including “Typicals”, must be validated for each customer application by customer’s technical
experts. Silicon Microstructures, Inc. does not convey any license under its patent rights nor the rights of others. Silicon
Microstructures, Inc. makes no representation that the circuits are free of patent infringement. Silicon Microstructures,
Inc. products are not designed, intended, or authorized for use as components in systems intended for surgical implant
into the body, or other applications intended to support or sustain life, or for any other application in which the failure
of the Silicon Microstructures, Inc. product could create a situation where personal injury or death may occur. Should
Buyer purchase or use Silicon Microstructures, Inc. products for any such unintended or unauthorized application,
Buyer shall indemnify and hold Silicon Microstructures, Inc. and its officers, employees, subsidiaries, affiliates, and
distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of,
directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even
if such claim alleges that Silicon Microstructures, Inc. was negligent regarding the design or manufacture of the part.
Silicon Microstructures, Inc. warrants goods of its manufacture as being free of defective materials and faulty
workmanship. Silicon Microstructures, Inc. standard product warranty applies unless agreed to otherwise by Silicon
Microstructures, Inc. in writing; please refer to your order acknowledgement or contact Silicon Microstructures, Inc.
directly for specific warranty details. If warranted goods are returned to Silicon Microstructures, Inc. during the period
of coverage, Silicon Microstructures, Inc. will repair or replace, at its option, without charge those items it finds
defective. The foregoing is buyer’s sole remedy and is in lieu of all warranties, expressed or implied, including those of
merchantability and fitness for a particular purpose. In no event shall Silicon Microstructures, Inc. be liable for
consequential, special, or indirect damages.
While Silicon Microstructures, Inc. provides application assistance personally, through its literature and the Silicon
Microstructures, Inc. website, it is up to the customer to determine the suitability of the product for its specific
application. The information supplied by Silicon Microstructures, Inc. is believed to be accurate and reliable as of this
printing. However, Silicon Microstructures, Inc. assumes no responsibility for its use. Silicon Microstructures, Inc.
assumes no responsibility for any inaccuracies and/or errors in this publication and reserves the right to make changes
without further notice to any products or specifications herein
Silicon Microstructures, Inc.TM and the Silicon Microstructures, Inc. logo are trademarks of Silicon Microstructures, Inc.
All other service or product names are the property of their respective owners.
© Silicon Microstructures, Inc. 2001-2018. All rights reserved.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Silicon Microstructures, Inc. 2001-2018. All rights reserved
DOC # 40DS9509.04
Page 9
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