ITG-3200 [TDK]

陀螺仪;
ITG-3200
型号: ITG-3200
厂家: TDK ELECTRONICS    TDK ELECTRONICS
描述:

陀螺仪

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中文:  中文翻译
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InvenSense Inc.  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
1197 Borregas Ave, Sunnyvale, CA 94089 U.S.A.  
Tel: +1 (408) 988-7339 Fax: +1 (408) 988-8104  
Website: www.invensense.com  
ITG-3200  
Product Specification  
Revision 1.7  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
CONTENTS  
1
DOCUMENT INFORMATION.............................................................................................................................. 3  
1.1  
REVISION HISTORY ............................................................................................................................................. 3  
PURPOSE AND SCOPE........................................................................................................................................... 5  
PRODUCT OVERVIEW .......................................................................................................................................... 5  
SOFTWARE SOLUTIONS........................................................................................................................................ 5  
APPLICATIONS..................................................................................................................................................... 6  
1.2  
1.3  
1.4  
1.5  
2
3
FEATURES............................................................................................................................................................... 7  
ELECTRICAL CHARACTERISTICS.................................................................................................................. 8  
3.1  
SENSOR SPECIFICATIONS..................................................................................................................................... 8  
ELECTRICAL SPECIFICATIONS.............................................................................................................................. 9  
ELECTRICAL SPECIFICATIONS, CONTINUED ........................................................................................................10  
ELECTRICAL SPECIFICATIONS, CONTINUED ........................................................................................................11  
I2C TIMING CHARACTERIZATION........................................................................................................................12  
ABSOLUTE MAXIMUM RATINGS.........................................................................................................................13  
3.2  
3.3  
3.4  
3.5  
3.6  
4
5
APPLICATIONS INFORMATION ......................................................................................................................14  
4.1  
PIN OUT AND SIGNAL DESCRIPTION...................................................................................................................14  
TYPICAL OPERATING CIRCUIT............................................................................................................................15  
BILL OF MATERIALS FOR EXTERNAL COMPONENTS ...........................................................................................15  
RECOMMENDED POWER-ON PROCEDURE...........................................................................................................16  
4.2  
4.3  
4.4  
FUNCTIONAL OVERVIEW.................................................................................................................................17  
5.1  
BLOCK DIAGRAM ...............................................................................................................................................17  
OVERVIEW .........................................................................................................................................................17  
THREE-AXIS MEMS GYROSCOPE WITH 16-BIT ADCS AND SIGNAL CONDITIONING..........................................17  
I2C SERIAL COMMUNICATIONS INTERFACE ........................................................................................................18  
CLOCKING ..........................................................................................................................................................18  
SENSOR DATA REGISTERS..................................................................................................................................18  
INTERRUPTS .......................................................................................................................................................18  
DIGITAL-OUTPUT TEMPERATURE SENSOR .........................................................................................................18  
BIAS AND LDO...................................................................................................................................................18  
5.2  
5.3  
5.4  
5.5  
5.6  
5.7  
5.8  
5.9  
5.10 CHARGE PUMP ...................................................................................................................................................18  
6
7
DIGITAL INTERFACE .........................................................................................................................................19  
6.1  
ASSEMBLY.............................................................................................................................................................23  
I2C SERIAL INTERFACE.......................................................................................................................................19  
7.1  
ORIENTATION.....................................................................................................................................................23  
PACKAGE DIMENSIONS.......................................................................................................................................24  
PCB DESIGN GUIDELINES: .................................................................................................................................25  
ASSEMBLY PRECAUTIONS ..................................................................................................................................26  
PACKAGE MARKING SPECIFICATION ..................................................................................................................29  
TAPE & REEL SPECIFICATION.............................................................................................................................30  
LABEL ................................................................................................................................................................31  
PACKAGING........................................................................................................................................................32  
7.2  
7.3  
7.4  
7.5  
7.6  
7.7  
7.8  
8
9
RELIABILITY ........................................................................................................................................................33  
8.1  
8.2  
QUALIFICATION TEST POLICY ............................................................................................................................33  
QUALIFICATION TEST PLAN ...............................................................................................................................33  
ENVIRONMENTAL COMPLIANCE ..................................................................................................................34  
2 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
1
Document Information  
1.1  
Revision History  
Revision  
Date  
Revision Description  
10/23/09  
10/28/09  
1.0  
1.1  
Initial Release  
Edits for readability  
Changed full-scale range and sensitivity scale factor (Sections 2, 3.1, 5.3, and  
8.3)  
Changed sensitivity scale factor variation over temperature (Section 3.1)  
Changed total RMS noise spec (Section 3.1)  
Added range for temperature sensor (Section 3.1)  
Updated VDD Power-Supply Ramp Rate specification (Sections 3.2 and 4.4)  
Added VLOGIC Voltage Range condition (Section 3.2)  
Added VLOGIC Reference Voltage Ramp Rate specification (Sections 3.2 and  
4.4)  
Updated Start-Up Time for Register Read/Write specification (Section 3.2)  
Updated Input logic levels for AD0 and CLKIN (Section 3.2)  
Updated Level IOL specifications for the I2C interface (Section 3.3)  
Updated Frequency Variation Over Temperature specification for internal clock  
source (Section 3.4)  
Updated VLOGIC conditions for I2C Characterization (Section 3.5)  
Updated ESD specification (Section 3.6)  
Added termination requirements for CLKIN if unused (Section 4.1)  
Added recommended power-on procedure diagram (Section 4.4)  
Changed DLPF_CFG setting 7 to reserved (Section 8.3)  
Changed Reflow Specification description (Section 9.12)  
Removed errata specifications  
02/12/2010  
1.2  
Updated temperature sensor linearity spec (Section 3.1)  
Updated VDD Power-Supply Ramp Rate timing figure (Sections 3.2 and 4.4)  
Updated VLOGIC Reference Voltage timing figure (Section 4.4)  
Added default values to registers (all of Section 8)  
Updated FS_SEL description (Section 8.3)  
Updated package outline drawing and dimensions (Section 9.2)  
Updated Reliability (Section 10.1 and 10.2)  
03/05/2010  
03/30/2010  
07/27/2010  
1.3  
1.4  
1.5  
Removed Environmental Compliance (Section 11)  
Removed confidentiality mark  
Changed Clock Frequency Initial Tolerance for CLKSEL=0, 25°C (Section 3.4)  
Created separate document for Register Map and Register Descriptions  
Added section describing InvenSense software solutions (Section 1.4)  
Added specification for CLKOUT Digital Output (Section 3.2)  
Updated specifications for CI (Sections 3.2-3.3)  
Updated specifications for Cb (Section 3.5)  
Updated Digital Input values and pins  
Clarified TVLG-VDD value (Section 4.4)  
Documented inoperable I2C bus when VDD is low and interface pins are low  
impedance (Section 5.4)  
Modified Assembly Rules, packaging images and Moisture Sensitivity Level  
(MSL) label (Section 7)  
06/06/2011  
1.6  
3 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
Modified diagram for clarify (Section 7.3)  
Updated Reliability Testing Policy (Section 8)  
Added Environment Compliance Section (Section 9)  
08/02/2011  
1.7  
Removed Temperature Sensor Initial Accuracy of “TBD” (Section 3.1)  
4 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
1.2 Purpose and Scope  
This document is a preliminary product specification, providing a description, specifications, and design  
related information for the ITG-3200TM  
Electrical characteristics are based upon simulation results and  
.
limited characterization data of advanced samples only. Specifications are subject to change without notice.  
Final specifications will be updated based upon characterization of final silicon.  
1.3 Product Overview  
The ITG-3200 is the world’s first single-chip, digital-output, 3-axis MEMS gyro IC optimized for gaming, 3D  
mice, and 3D remote control applications. The part features enhanced bias and sensitivity temperature  
stability, reducing the need for user calibration. Low frequency noise is lower than previous generation  
devices, simplifying application development and making for more-responsive remote controls.  
The ITG-3200 features three 16-bit analog-to-digital converters (ADCs) for digitizing the gyro outputs, a user-  
selectable internal low-pass filter bandwidth, and a Fast-Mode I2C (400kHz) interface. Additional features  
include an embedded temperature sensor and a 2% accurate internal oscillator. This breakthrough in  
gyroscope technology provides a dramatic 67% package size reduction, delivers a 50% power reduction,  
and has inherent cost advantages compared to competing multi-chip gyro solutions.  
By leveraging its patented and volume-proven Nasiri-Fabrication platform, which integrates MEMS wafers  
with companion CMOS electronics through wafer-level bonding, InvenSense has driven the ITG-3200  
package size down to a revolutionary footprint of 4x4x0.9mm (QFN), while providing the highest  
performance, lowest noise, and the lowest cost semiconductor packaging required for handheld consumer  
electronic devices. The part features a robust 10,000g shock tolerance, as required by portable consumer  
equipment.  
For power supply flexibility, the ITG-3200 has a separate VLOGIC reference pin, in addition to its analog  
supply pin, VDD, which sets the logic levels of its I2C interface. The VLOGIC voltage may be anywhere from  
1.71V min to VDD max.  
1.4 Software Solutions  
This section describes the MotionApps™ software solutions included with the InvenSense MPU™  
(MotionProcessing Unit™) and IMU (Inertial Measurement Unit) product families. Please note that the  
products within the IDG, IXZ, and ITG families do not include these software solutions.  
The MotionApps Platform is a complete software solution that in combination with the InvenSense IMU and  
MPU MotionProcessor™ families delivers robust, well-calibrated 6-axis and/or 9-axis sensor fusion data  
using its field proven and proprietary MotionFusion™ engine. Solution packages are available for  
smartphones and tablets as well as for embedded microcontroller-based devices.  
The MotionApps Platform provides a turn-key solution for developers and accelerates time-to-market. It  
consists of complex 6/9-axis sensor fusion algorithms, robust multi-sensor calibration, a proven software  
architecture for Android and other leading operating systems, and a flexible power management scheme.  
The MotionApps Platform is integrated within the middleware of the target OS (the sensor framework), and  
also provides a kernel device driver to interface with the physical device. This directly benefits application  
developers by providing a cohesive set of APIs and a well-defined sensor data path in the user-space.  
5 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
The table below describes the MotionApps software solutions included with the InvenSense MPU and IMU  
product families.  
InvenSense MotionProcessor Devices and Included MotionApps Software  
Included Software  
Embedded  
Embedded  
MotionApps  
MotionApps  
Lite  
Feature  
MotionApps  
MotionApps  
Lite  
Notes  
MPU-3050™  
MPU-6050™  
Part Number  
Processor Type  
IMU-3000™  
Mobile  
Application  
Processor  
Mobile  
8/16/32-bit  
8/16/32-bit  
Application  
Processor  
Microcontroller  
Microcontroller  
TV remotes,  
health/fitness,  
toys, other  
TV remotes,  
health/fitness,  
toys, other  
Smartphones,  
tablets  
Smartphones,  
tablets  
Applications  
embedded  
embedded  
< 2% Application Processor  
load using on-chip Digital  
Motion Processor (DMP).  
6-Axis MotionFusion  
Yes  
Yes  
Reduces processing  
requirements for embedded  
applications  
9-Axis MotionFusion  
Gyro Bias Calibration  
Yes  
No  
No-Motion calibration and  
temperature calibration  
Integrates 3rd party compass  
libraries  
Yes  
Yes  
Yes  
Yes  
No  
3rd Party Compass Cal  
API  
Gyro-Assisted Compass  
Calibration (Fast Heading)  
Quick compass calibration  
using gyroscope  
No  
Magnetic Anomaly  
Rejection  
(Improved Heading)  
Uses gyro heading data  
when magnetic anomaly is  
detected  
Yes  
No  
The table below lists recommended documentation for the MotionApps software solutions.  
Software Documentation  
Platform  
MotionApps and MotionApps Lite  
Embedded MotionApps and  
Embedded MotionApps Lite  
Installation Guide for Linux and Android  
MotionApps Platform, v1.9 or later  
Embedded MotionApps Platform  
User Guide, v3.0 or later  
Software  
Documentation  
MPL Functional Specifications  
Embedded MPL Functional  
Specifications  
For more information about the InvenSense MotionApps Platform, please visit the Developer’s Corner or  
consult your local InvenSense Sales Representative.  
1.5  
Applications  
Motion-enabled game controllers  
Motion-based portable gaming  
Motion-based 3D mice and 3D remote controls  
“No Touch” UI  
Health and sports monitoring  
6 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
2
Features  
The ITG-3200 triple-axis MEMS gyroscope includes a wide range of features:  
Digital-output X-, Y-, and Z-Axis angular rate sensors (gyros) on one integrated circuit with a  
sensitivity of 14.375 LSBs per °/sec and a full-scale range of ±2000°/sec  
Three integrated 16-bit ADCs provide simultaneous sampling of gyros while requiring no external  
multiplexer  
Enhanced bias and sensitivity temperature stability reduces the need for user calibration  
Low frequency noise lower than previous generation devices, simplifying application development  
and making for more-responsive motion processing  
Digitally-programmable low-pass filter  
Low 6.5mA operating current consumption for long battery life  
Wide VDD supply voltage range of 2.1V to 3.6V  
Flexible VLOGIC reference voltage allows for I2C interface voltages from 1.71V to VDD  
Standby current: 5µA  
Smallest and thinnest package for portable devices (4x4x0.9mm QFN)  
No high pass filter needed  
Turn on time: 50ms  
Digital-output temperature sensor  
Factory calibrated scale factor  
10,000 g shock tolerant  
Fast Mode I2C (400kHz) serial interface  
On-chip timing generator clock frequency is accurate to +/-2% over full temperature range  
Optional external clock inputs of 32.768kHz or 19.2MHz to synchronize with system clock  
MEMS structure hermetically sealed and bonded at wafer level  
RoHS and Green compliant  
7 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
3
Electrical Characteristics  
3.1  
Sensor Specifications  
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 1.71V to VDD, TA=25°C.  
Parameter  
Conditions  
Min  
Typical  
Max  
Unit  
Note  
GYRO SENSITIVITY  
Full-Scale Range  
FS_SEL=3  
±2000  
16  
º/s  
Bits  
4
3
3
1
2
Gyro ADC Word Length  
Sensitivity Scale Factor  
Sensitivity Scale Factor Tolerance  
FS_SEL=3  
25°C  
14.375  
LSB/(º/s)  
%
-6  
+6  
Sensitivity Scale Factor Variation Over  
Temperature  
±10  
%
Nonlinearity  
Best fit straight line; 25°C  
0.2  
2
%
%
6
6
Cross-Axis Sensitivity  
GYRO ZERO-RATE OUTPUT (ZRO)  
Initial ZRO Tolerance  
ZRO Variation Over Temperature  
±40  
±40  
0.2  
0.2  
4
º/s  
º/s  
º/s  
º/s  
º/s  
1
2
5
5
5
-40°C to +85°C  
Power-Supply Sensitivity (1-10Hz)  
Sine wave, 100mVpp; VDD=2.2V  
Sine wave, 100mVpp; VDD=2.2V  
Sine wave, 100mVpp; VDD=2.2V  
Power-Supply Sensitivity (10 - 250Hz)  
Power-Supply Sensitivity (250Hz -  
100kHz)  
Linear Acceleration Sensitivity  
GYRO NOISE PERFORMANCE  
Total RMS noise  
Static  
0.1  
º/s/g  
6
FS_SEL=3  
1
2
100Hz LPF (DLPFCFG=2)  
At 10Hz  
0.38  
0.03  
º/s-rms  
Rate Noise Spectral Density  
GYRO MECHANICAL FREQUENCIES  
X-Axis  
º/s/√Hz  
30  
27  
24  
1.7  
33  
30  
27  
36  
33  
30  
kHz  
kHz  
kHz  
kHz  
1
1
1
1
Y-Axis  
Z-Axis  
Frequency Separation  
GYRO START-UP TIME  
ZRO Settling  
Between any two axes  
DLPFCFG=0  
to ±1º/s of Final  
50  
ms  
ºC  
6
2
TEMPERATURE SENSOR  
Range  
-30 to  
+85  
Sensitivity  
280  
-13,200  
±1  
LSB/ºC  
LSB  
2
1
Temperature Offset  
Linearity  
35oC  
Best fit straight line (-30°C to  
+85°C)  
°C  
2, 5  
TEMPERATURE RANGE  
Specified Temperature Range  
-40  
85  
ºC  
Notes:  
1. Tested in production  
2. Based on characterization of 30 pieces over temperature on evaluation board or in socket  
3. Based on design, through modeling and simulation across PVT  
4. Typical. Randomly selected part measured at room temperature on evaluation board or in socket  
5. Based on characterization of 5 pieces over temperature  
6. Tested on 5 parts at room temperature  
8 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
3.2  
Electrical Specifications  
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 1.71V to VDD, TA=25°C.  
Parameters  
Conditions  
Min  
Typical  
Max  
Units  
Notes  
VDD POWER SUPPLY  
Operating Voltage Range  
Power-Supply Ramp Rate  
2.1  
0
3.6  
5
V
2
2
Monotonic ramp. Ramp  
rate is 10% to 90% of the  
final value (see Figure in  
Section 4.4)  
ms  
Normal Operating Current  
Sleep Mode Current  
6.5  
5
mA  
µA  
1
5
VLOGIC REFERENCE  
VOLTAGE  
Voltage Range  
VLOGIC must be VDD at  
all times  
1.71  
VDD  
1
V
VLOGIC Ramp Rate  
Monotonic ramp. Ramp rate  
is 10% to 90% of the final  
value (see Figure in Section  
4.4)  
ms  
6
Normal Operating Current  
100  
20  
µA  
ms  
START-UP TIME FOR  
REGISTER READ/WRITE  
I2C ADDRESS  
5
AD0 = 0  
AD0 = 1  
1101000  
1101001  
6
6
DIGITAL INPUTS (SDA,  
SCL, AD0, CLKIN)  
VIH, High Level Input Voltage  
VIL, Low Level Input Voltage  
CI, Input Capacitance  
0.7*VLOGIC  
0.9*VLOGIC  
V
V
5
5
7
0.3*VLOGIC  
< 5  
pF  
DIGITAL OUTPUT (INT)  
VOH, High Level Output  
Voltage  
2
OPEN=0, Rload=1MΩ  
OPEN=0, Rload=1MΩ  
V
V
V
VOL, Low Level Output Voltage  
0.1*VLOGIC  
0.1  
2
2
VOL.INT1, INT Low-Level Output  
Voltage  
OPEN=1, 0.3mA sink  
current  
Output Leakage Current  
tINT, INT Pulse Width  
OPEN=1  
100  
50  
nA  
µs  
4
4
LATCH_INT_EN=0  
DIGITAL OUTPUT (CLKOUT)  
VOH, High Level Output  
Voltage  
VOL1, LOW-Level Output  
Voltage  
RLOAD=1MΩ  
RLOAD=1MΩ  
0.9*VDD  
V
V
2
2
0.1*VDD  
Notes:  
1. Tested in production  
2. Based on characterization of 30 pieces over temperature on evaluation board or in socket  
4. Typical. Randomly selected part measured at room temperature on evaluation board or in socket  
5. Based on characterization of 5 pieces over temperature  
6. Guaranteed by design  
9 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
3.3  
Electrical Specifications, continued  
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 1.71V to VDD, TA=25°C.  
Parameters  
I2C I/O (SCL, SDA)  
Conditions  
Typical  
Units  
Notes  
VIL, LOW-Level Input Voltage  
-0.5 to 0.3*VLOGIC  
V
V
2
2
0.7*VLOGIC to VLOGIC +  
0.5V  
VIH, HIGH-Level Input Voltage  
Vhys, Hysteresis  
0.1*VLOGIC  
0 to 0.4  
V
V
2
2
2
2
4
VOL1, LOW-Level Output Voltage  
IOL, LOW-Level Output Current  
3mA sink current  
VOL = 0.4V  
VOL = 0.6V  
3
6
mA  
mA  
Output Leakage Current  
100  
20+0.1Cb to 250  
< 10  
nA  
ns  
pF  
tof, Output Fall Time from VIHmax to  
VILmax  
Cb bus cap. in pF  
2
5
CI, Capacitance for Each I/O pin  
Notes:  
2. Based on characterization of 5 pieces over temperature.  
4. Typical. Randomly selected part measured at room temperature on evaluation board or in socket  
5. Guaranteed by design  
10 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
3.4  
Electrical Specifications, continued  
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 1.71V to VDD, TA=25°C.  
Parameters  
Conditions  
Min  
Typical  
Max  
Units  
Notes  
INTERNAL CLOCK SOURCE  
CLKSEL=0, 1, 2, or 3  
Sample Rate, Fast  
DLPFCFG=0  
SAMPLERATEDIV = 0  
8
1
kHz  
kHz  
4
4
Sample Rate, Slow  
DLPFCFG=1,2,3,4,5, or 6  
SAMPLERATEDIV = 0  
Clock Frequency Initial Tolerance  
Frequency Variation over Temperature  
CLKSEL=0, 25°C  
CLKSEL=1,2,3; 25°C  
CLKSEL=0  
-5  
-1  
+5  
+1  
%
%
%
1
1
2
-15 to  
+10  
CLKSEL=1,2,3  
CLKSEL=1,2,3  
+/-1  
%
2
3
PLL Settling Time  
1
ms  
EXTERNAL 32.768kHz CLOCK  
External Clock Frequency  
External Clock Jitter  
CLKSEL=4  
32.768  
1 to 2  
8.192  
kHz  
µs  
3
3
3
Cycle-to-cycle rms  
Sample Rate, Fast  
DLPFCFG=0  
kHz  
SAMPLERATEDIV = 0  
Sample Rate, Slow  
DLPFCFG=1,2,3,4,5, or 6  
SAMPLERATEDIV = 0  
1.024  
1
kHz  
ms  
3
3
PLL Settling Time  
EXTERNAL 19.2MHz CLOCK  
External Clock Frequency  
Sample Rate, Fast  
CLKSEL=5  
19.2  
8
MHz  
kHz  
3
3
DLPFCFG=0  
SAMPLERATEDIV = 0  
Sample Rate, Slow  
PLL Settling Time  
DLPFCFG=1,2,3,4,5, or 6  
SAMPLERATEDIV = 0  
1
1
kHz  
ms  
3
3
Charge Pump Clock Frequency  
Frequency  
1st Stage, 25°C  
2nd Stage, 25°C  
Over temperature  
8.5  
68  
MHz  
MHz  
%
5
5
5
+/-15  
Notes:  
1. Tested in production  
2. Based on characterization of 30 pieces over temperature on evaluation board or in socket  
3. Based on design, through modeling and simulation across PVT  
4. Typical. Randomly selected part measured at room temperature on evaluation board or in socket  
5. Based on characterization of 5 pieces over temperature.  
11 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
3.5  
I2C Timing Characterization  
Typical Operating Circuit of Section 4.2, VDD = 2.5V, VLOGIC = 1.8V±5%, 2.5V±5%, 3.0V±5%, or 3.3V±5%,  
TA=25°C.  
Parameters  
I2C TIMING  
Conditions  
I2C FAST-MODE  
Min  
Typical  
Max  
Units  
Notes  
fSCL, SCL Clock Frequency  
0
400  
kHz  
us  
1
1
tHD.STA, (Repeated) START Condition Hold  
Time  
0.6  
tLOW, SCL Low Period  
tHIGH, SCL High Period  
1.3  
0.6  
0.6  
us  
us  
us  
1
1
1
tSU.STA, Repeated START Condition Setup  
Time  
tHD.DAT, SDA Data Hold Time  
tSU.DAT, SDA Data Setup Time  
tr, SDA and SCL Rise Time  
0
us  
ns  
ns  
1
1
1
100  
Cb bus cap. from 10 to  
400pF  
Cb bus cap. from 10 to  
400pF  
20+0.1Cb  
300  
300  
tf, SDA and SCL Fall Time  
20+0.1Cb  
ns  
1
tSU.STO, STOP Condition Setup Time  
0.6  
1.3  
us  
us  
1
1
tBUF, Bus Free Time Between STOP and  
START Condition  
Cb, Capacitive Load for each Bus Line  
tVD.DAT, Data Valid Time  
< 400  
pF  
us  
us  
2
1
1
0.9  
0.9  
tVD.ACK, Data Valid Acknowledge Time  
Notes:  
1. Based on characterization of 5 pieces over temperature on evaluation board or in socket  
2. Guaranteed by design  
I2C Bus Timing Diagram  
12 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
3.6  
Absolute Maximum Ratings  
Stresses above those listed as “Absolute Maximum Ratings” may cause permanent damage to the device.  
These are stress ratings only and functional operation of the device at these conditions is not implied.  
Exposure to the absolute maximum ratings conditions for extended periods may affect device reliability.  
Absolute Maximum Ratings  
Parameter  
Rating  
Supply Voltage, VDD  
-0.5V to +6V  
VLOGIC Input Voltage Level  
REGOUT  
-0.5V to VDD + 0.5V  
-0.5V to 2V  
Input Voltage Level (CLKIN, AD0)  
SCL, SDA, INT  
-0.5V to VDD + 0.5V  
-0.5V to VLOGIC + 0.5V  
-0.5V to 30V  
CPOUT (2.1V ≤ VDD ≤ 3.6V )  
Acceleration (Any Axis, unpowered)  
Operating Temperature Range  
Storage Temperature Range  
10,000g for 0.3ms  
-40°C to +105°C  
-40°C to +125°C  
Electrostatic Discharge (ESD)  
Protection  
1.5kV (HBM); 200V  
(MM)  
13 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
4
Applications Information  
4.1  
Pin Out and Signal Description  
Number  
Pin  
CLKIN  
VLOGIC  
AD0  
Pin Description  
1
Optional external reference clock input. Connect to GND if unused.  
Digital IO supply voltage. VLOGIC must be ≤ VDD at all times.  
I2C Slave Address LSB  
8
9
10  
REGOUT  
INT  
Regulator filter capacitor connection  
Interrupt digital output (totem pole or open-drain)  
Power supply voltage  
12  
13  
VDD  
18  
GND  
Power supply ground  
11  
RESV-G  
RESV  
CPOUT  
SCL  
Reserved - Connect to ground.  
6, 7, 19, 21, 22  
Reserved. Do not connect.  
20  
23  
24  
Charge pump capacitor connection  
I2C serial clock  
I2C serial data  
SDA  
2, 3, 4, 5, 14, 15, 16, 17  
NC  
Not internally connected. May be used for PCB trace routing.  
Top View  
24 23 22 21 20 19  
CLKIN  
NC  
1
2
3
4
5
6
18 GND  
17 NC  
16 NC  
15 NC  
14 NC  
13 VDD  
+Z  
+Y  
I
T
NC  
G
-
3
2
0
ITG-3200  
0
NC  
NC  
+X  
RESV  
7
8
9
10 11 12  
QFN Package  
24-pin, 4mm x 4mm x 0.9mm  
Orientation of Axes of Sensitivity  
and Polarity of Rotation  
14 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
4.2  
Typical Operating Circuit  
GND  
C1  
2.2nF  
24 23 22 21 20 19  
1
2
3
4
5
6
18  
CLKIN  
17  
16  
15  
14  
13  
GND  
ITG-3200  
VDD  
7
8
9
10 11 12  
GND  
C2  
0.1µF  
VLOGIC  
GND  
C4  
10nF  
C3  
0.1µF  
GND  
GND  
Typical Operating Circuit  
Bill of Materials for External Components  
4.3  
Component  
Label Specification  
Quantity  
Charge Pump Capacitor  
VDD Bypass Capacitor  
Regulator Filter Capacitor  
VLOGIC Bypass Capacitor  
C1  
C2  
C3  
C4  
Ceramic, X7R, 2.2nF ±10%, 50V  
Ceramic, X7R, 0.1µF ±10%, 4V  
Ceramic, X7R, 0.1µF ±10%, 2V  
Ceramic, X7R, 10nF ±10%, 4V  
1
1
1
1
15 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
4.4  
Recommended Power-On Procedure  
Power-Up Sequencing  
1. TVDDR is VDD rise time: Time for VDD to  
rise from 10% to 90% of its final value  
TVDDR  
2. TVDDR is ≤5msec  
90%  
10%  
3. TVLGR is VLOGIC rise time: Time for  
VLOGIC to rise from 10% to 90% of its  
final value  
10%  
VDD  
TVLGR  
90%  
4. TVLGR is ≤1msec  
5. TVLG-VDD is the delay from the start of  
VDD ramp to the start of VLOGIC rise  
6. TVLG-VDD is 0; VLOGIC amplitude must  
VLOGIC  
always be ≤VDD amplitude  
7. VDD and VLOGIC must be monotonic  
ramps  
TVLG - VDD  
16 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
5
Functional Overview  
5.1  
Block Diagram  
Optional  
ITG-3200  
1
Clock  
CLKIN  
CLOCK  
X Gyro  
Y Gyro  
Interrupt  
Status  
Register  
12  
Interrupt  
INT  
Signal  
Conditioning  
ADC  
ADC  
9
23  
24  
Config  
Register  
AD0  
SCL  
SDA  
I2C Serial  
Interface  
Signal  
Conditioning  
Sensor  
Register  
Signal  
Conditioning  
Z Gyro  
ADC  
FIFO  
Temp  
Sensor  
ADC  
Factory Cal  
Charge  
Pump  
Bias & LDO  
18  
VLOGIC GND  
20  
13  
VDD  
8
10  
CPOUT  
REGOUT  
5.2  
Overview  
The ITG-3200 consists of the following key blocks and functions:  
Three-axis MEMS rate gyroscope sensors with individual 16-bit ADCs and signal conditioning  
I2C serial communications interface  
Clocking  
Sensor Data Registers  
Interrupts  
Digital-Output Temperature Sensor  
Bias and LDO  
Charge Pump  
5.3  
Three-Axis MEMS Gyroscope with 16-bit ADCs and Signal Conditioning  
The ITG-3200 consists of three independent vibratory MEMS gyroscopes, which detect rotational rate about  
the X (roll), Y (pitch), and Z (yaw) axes. When the gyros are rotated about any of the sense axes, the  
Coriolis Effect causes a deflection that is detected by a capacitive pickoff. The resulting signal is amplified,  
demodulated, and filtered to produce a voltage that is proportional to the angular rate. This voltage is  
digitized using individual on-chip 16-bit Analog-to-Digital Converters (ADCs) to sample each axis.  
The full-scale range of the gyro sensors is preset to ±2000 degrees per second (°/s). The ADC output rate is  
programmable up to a maximum of 8,000 samples per second down to 3.9 samples per second, and user-  
selectable low-pass filters enable a wide range of cut-off frequencies.  
17 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
5.4  
I2C Serial Communications Interface  
The ITG-3200 communicates to a system processor using the I2C serial interface, and the device always  
acts as a slave when communicating to the system processor. The logic level for communications to the  
master is set by the voltage on the VLOGIC pin. The LSB of the of the I2C slave address is set by pin 9  
(AD0).  
Note: When VDD is low, the I2C interface pins become low impedance and thus can load the serial bus. This  
is a concern if other devices are active on the bus during this time.  
5.5  
Clocking  
The ITG-3200 has a flexible clocking scheme, allowing for a variety of internal or external clock sources for  
the internal synchronous circuitry. This synchronous circuitry includes the signal conditioning, ADCs, and  
various control circuits and registers. An on-chip PLL provides flexibility in the allowable inputs for  
generating this clock.  
Allowable internal sources for generating the internal clock are:  
An internal relaxation oscillator (less accurate)  
Any of the X, Y, or Z gyrosMEMS oscillators (with an accuracy of ±2% over temperature)  
Allowable external clocking sources are:  
32.768kHz square wave  
19.2MHz square wave  
Which source to select for generating the internal synchronous clock depends on the availability of external  
sources and the requirements for clock accuracy. There are also start-up conditions to consider. When the  
ITG-3200 first starts up, the device operates off of its internal clock until programmed to operate from another  
source. This allows the user, for example, to wait for the MEMS oscillators to stabilize before they are  
selected as the clock source.  
5.6  
Sensor Data Registers  
The sensor data registers contain the latest gyro and temperature data. They are read-only registers, and  
are accessed via the Serial Interface. Data from these registers may be read at any time, however, the  
interrupt function may be used to determine when new data is available.  
5.7  
Interrupts  
Interrupt functionality is configured via the Interrupt Configuration register. Items that are configurable  
include the INT pin configuration, the interrupt latching and clearing method, and triggers for the interrupt.  
Items that can trigger an interrupt are (1) Clock generator locked to new reference oscillator (used when  
switching clock sources); and (2) new data is available to be read from the Data registers. The interrupt  
status can be read from the Interrupt Status register.  
5.8  
Digital-Output Temperature Sensor  
An on-chip temperature sensor and ADC are used to measure the ITG-3200 die temperature. The readings  
from the ADC can be read from the Sensor Data registers.  
5.9  
Bias and LDO  
The bias and LDO sections take in an unregulated VDD supply from 2.1V to 3.6V and generate the internal  
supply and the references voltages and currents required by the ITG-3200. The LDO output is bypassed by  
a capacitor at REGOUT. Additionally, the part has a VLOGIC reference voltage which sets the logic levels  
for its I2C interface.  
5.10 Charge Pump  
An on-board charge pump generates the high voltage (25V) required to drive the MEMS oscillators. Its  
output is bypassed by a capacitor at CPOUT.  
18 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
6
Digital Interface  
I2C Serial Interface  
6.1  
The internal registers and memory of the ITG-3200 can be accessed using I2C at up to 400kHz.  
Serial Interface  
Pin Number  
Pin Name  
VLOGIC  
AD0  
Pin Description  
8
9
Digital IO supply voltage. VLOGIC must be ≤ VDD at all times.  
I2C Slave Address LSB  
I2C serial clock  
I2C serial data  
23  
24  
SCL  
SDA  
6.1.1 I2C Interface  
I2C is a two wire interface comprised of the signals serial data (SDA) and serial clock (SCL). In general, the  
lines are open-drain and bi-directional. In a generalized I2C interface implementation, attached devices can  
be a master or a slave. The master device puts the slave address on the bus, and the slave device with the  
matching address acknowledges the master.  
The ITG-3200 always operates as a slave device when communicating to the system processor, which thus  
acts as the master. SDA and SCL lines typically need pull-up resistors to VDD. The maximum bus speed is  
400kHz.  
The slave address of the ITG-3200 devices is b110100X which is 7 bits long. The LSB bit of the 7 bit address  
is determined by the logic level on pin 9. This allows two ITG-3200 devices to be connected to the same I2C  
bus. When used in this configuration, the address of the one of the devices should be b1101000 (pin 9 is  
logic low) and the address of the other should be b1101001 (pin 9 is logic high). The I2C address is stored in  
register 0 (WHO_AM_I register).  
I2C Communications Protocol  
START (S) and STOP (P) Conditions  
Communication on the I2C bus starts when the master puts the START condition (S) on the bus, which is  
defined as a HIGH-to-LOW transition of the SDA line while SCL line is HIGH (see figure below). The bus is  
considered to be busy until the master puts a STOP condition (P) on the bus, which is defined as a LOW to  
HIGH transition on the SDA line while SCL is HIGH (see figure below).  
Additionally, the bus remains busy if a repeated START (Sr) is generated instead of a STOP condition.  
SDA  
SCL  
S
P
START condition  
STOP condition  
START and STOP Conditions  
19 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
Data Format / Acknowledge  
I2C data bytes are defined to be 8 bits long. There is no restriction to the number of bytes transmitted per  
data transfer. Each byte transferred must be followed by an acknowledge (ACK) signal. The clock for the  
acknowledge signal is generated by the master, while the receiver generates the actual acknowledge signal  
by pulling down SDA and holding it low during the HIGH portion of the acknowledge clock pulse.  
If a slave is busy and cannot transmit or receive another byte of data until some other task has been  
performed, it can hold SCL LOW, thus forcing the master into a wait state. Normal data transfer resumes  
when the slave is ready, and releases the clock line (see figure below).  
DATA OUTPUT BY  
TRANSMITTER (SDA)  
not acknowledge  
DATA OUTPUT BY  
RECEIVER (SDA)  
acknowledge  
SCL FROM  
MASTER  
1
2
8
9
clock pulse for  
acknowledgement  
START  
condition  
Acknowledge on the I2C Bus  
Communications  
After beginning communications with the START condition (S), the master sends a 7-bit slave address  
followed by an 8th bit, the read/write bit. The read/write bit indicates whether the master is receiving data from  
or is writing to the slave device. Then, the master releases the SDA line and waits for the acknowledge  
signal (ACK) from the slave device. Each byte transferred must be followed by an acknowledge bit. To  
acknowledge, the slave device pulls the SDA line LOW and keeps it LOW for the high period of the SCL line.  
Data transmission is always terminated by the master with a STOP condition (P), thus freeing the  
communications line. However, the master can generate a repeated START condition (Sr), and address  
another slave without first generating a STOP condition (P). A LOW to HIGH transition on the SDA line while  
SCL is HIGH defines the stop condition. All SDA changes should take place when SCL is low, with the  
exception of start and stop conditions.  
SDA  
SCL  
1 7  
8
9
1 7  
8
9
1 7  
8
9
S
P
START  
STOP  
ADDRESS  
R/W  
ACK  
DATA  
ACK  
DATA  
ACK  
condition  
condition  
Complete I2C Data Transfer  
20 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
To write the internal ITG-3200 device registers, the master transmits the start condition (S), followed by the  
I2C address and the write bit (0). At the 9th clock cycle (when the clock is high), the ITG-3200 device  
acknowledges the transfer. Then the master puts the register address (RA) on the bus. After the ITG-3200  
acknowledges the reception of the register address, the master puts the register data onto the bus. This is  
followed by the ACK signal, and data transfer may be concluded by the stop condition (P). To write multiple  
bytes after the last ACK signal, the master can continue outputting data rather than transmitting a stop  
signal. In this case, the ITG-3200 device automatically increments the register address and loads the data to  
the appropriate register. The following figures show single and two-byte write sequences.  
Single-Byte Write Sequence  
Master  
Slave  
S
AD+W  
RA  
RA  
DATA  
DATA  
P
ACK  
ACK  
ACK  
Burst Write Sequence  
Master  
Slave  
S
AD+W  
DATA  
P
ACK  
ACK  
ACK  
ACK  
To read the internal ITG-3200 device registers, the master first transmits the start condition (S), followed by  
the I2C address and the write bit (0). At the 9th clock cycle (when clock is high), the ITG acknowledges the  
transfer. The master then writes the register address that is going to be read. Upon receiving the ACK signal  
from the ITG-3200, the master transmits a start signal followed by the slave address and read bit. As a  
result, the ITG-3200 sends an ACK signal and the data. The communication ends with a not acknowledge  
(NACK) signal and a stop bit from master. The NACK condition is defined such that the SDA line remains  
high at the 9th clock cycle. To read multiple bytes of data, the master can output an acknowledge signal  
(ACK) instead of a not acknowledge (NACK) signal. In this case, the ITG-3200 automatically increments the  
register address and outputs data from the appropriate register. The following figures show single and two-  
byte read sequences.  
Single-Byte Read Sequence  
Master  
Slave  
S
AD+W  
RA  
RA  
S
S
AD+R  
AD+R  
NACK  
ACK  
P
ACK  
ACK  
ACK  
ACK DATA  
ACK DATA  
Burst Read Sequence  
Master  
Slave  
S
AD+W  
NACK  
P
ACK  
DATA  
21 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
I2C Terms  
Signal  
S
Description  
Start Condition: SDA goes from high to low while SCL is high  
AD  
Slave I2C address  
W
Write bit (0)  
R
Read bit (1)  
ACK  
NACK  
RA  
Acknowledge: SDA line is low while the SCL line is high at the 9th clock cycle  
Not-Acknowledge: SDA line stays high at the 9th clock cycle  
ITG-3200 internal register address  
DATA  
P
Transmit or received data  
Stop condition: SDA going from low to high while SCL is high  
22 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7
Assembly  
This section provides general guidelines for assembling InvenSense Micro Electro-Mechanical Systems  
(MEMS) gyros packaged in Quad Flat No leads package (QFN) surface mount integrated circuits.  
7.1  
Orientation  
The diagram below shows the orientation of the axes of sensitivity and the polarity of rotation. Note the pin 1  
identifier () in the figure.  
+Z  
I
T
G
-
3
2
0
0
+Y  
+X  
Orientation of Axes of Sensitivity and Polarity of Rotation  
23 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.2  
Package Dimensions  
I
PIN 1 IDENTIFIER IS A LASER  
MARKED FEATURE ON TOP  
c
PIN 1 IDENTIFIER  
S1  
24  
19  
19  
24  
1
18  
I
18  
1
S1  
C 0.16  
f
b
E
E2  
e
13  
6
6
13  
L1 (12x)  
12  
7
7
12  
A1  
D
D2  
L(12x)  
A
On 4 corner lead dim.  
SYMBOLS  
DIMENSIONS IN MILLIMETERS  
MIN  
NOM  
MAX  
A
A1  
b
c
D
D2  
E
E2  
e
f (e-b)  
L
L1  
I
0.85  
0.00  
0.18  
---  
3.90  
2.95  
3.90  
2.75  
---  
0.20  
0.30  
0.35  
0.20  
0.05  
0.05  
0.15  
0.90  
0.02  
0.25  
0.20 REF.  
4.00  
3.00  
4.00  
2.80  
0.50  
0.25  
0.35  
0.40  
0.25  
---  
0.95  
0.05  
0.30  
---  
4.10  
3.05  
4.10  
2.85  
---  
0.32  
0.40  
0.45  
0.30  
0.10  
0.15  
0.25  
S
S
R
R
s
S1  
---  
0.20  
24 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.3  
PCB Design Guidelines:  
The Pad Diagram using a JEDEC type extension with solder rising on the outer edge is shown below. The  
Pad Dimensions Table shows pad sizing (mean dimensions) recommended for the MPU-30X0 product.  
JEDEC type extension with solder rising on outer edge  
PCB Lay-out Diagram  
SYMBOLS  
DIMENSIONS IN MILLIMETERS  
NOM  
Nominal Package I/O Pad Dimensions  
e
b
L
L1  
D
E
Pad Pitch  
Pad Width  
Pad Length  
Pad Length  
0.50  
0.25  
0.35  
0.40  
4.00  
4.00  
3.00  
2.80  
Package Width  
Package Length  
Exposed Pad Width  
Exposed Pad Length  
I/O Land Design Dimensions (Guidelines )  
I/O Pad Extent Width  
I/O Pad Extent Length  
Land Width  
Outward Extension  
Inward Extension  
Land Length  
D2  
E2  
D3  
E3  
c
Tout  
Tin  
L2  
4.80  
4.80  
0.35  
0.40  
0.05  
0.80  
0.85  
L3  
Land Length  
PCB Dimensions Table (for PCB Lay-out Diagram)  
25 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.4  
Assembly Precautions  
7.4.1 Gyroscope Surface Mount Guidelines  
InvenSense MEMS Gyros sense rate of rotation. In addition, gyroscopes sense mechanical stress coming  
from the printed circuit board (PCB). This PCB stress can be minimized by adhering to certain design rules:  
When using MEMS gyroscope components in plastic packages, PCB mounting and assembly can cause  
package stress. This package stress in turn can affect the output offset and its value over a wide range of  
temperatures. This stress is caused by the mismatch between the Coefficient of Linear Thermal Expansion  
(CTE) of the package material and the PCB. Care must be taken to avoid package stress due to mounting.  
Traces connected to pads should be as symmetric as possible. Maximizing symmetry and balance for pad  
connection will help component self alignment and will lead to better control of solder paste reduction after  
reflow.  
Any material used in the surface mount assembly process of the MEMS gyroscope should be free of  
restricted RoHS elements or compounds. Pb-free solders should be used for assembly.  
7.4.2 Exposed Die Pad Precautions  
The ITG-3200 has very low active and standby current consumption. The exposed die pad is not required for  
heat sinking, and should not be soldered to the PCB. Failure to adhere to this rule can induce performance  
changes due to package thermo-mechanical stress. There is no electrical connection between the pad and  
the CMOS.  
7.4.3 Trace Routing  
Routing traces or vias under the gyro package such that they run under the exposed die pad is prohibited.  
Routed active signals may harmonically couple with the gyro MEMS devices, compromising gyro response.  
These devices are designed with the drive frequencies as follows: X = 33±3kHz, Y = 30±3kHz, and  
Z=27±3kHz. To avoid harmonic coupling don’t route active signals in non-shielded signal planes directly  
below, or above the gyro package. Note: For best performance, design a ground plane under the e-pad to  
reduce PCB signal noise from the board on which the gyro device is mounted. If the gyro device is stacked  
under an adjacent PCB board, design a ground plane directly above the gyro device to shield active signals  
from the adjacent PCB board.  
7.4.4 Component Placement  
Do not place large insertion components such as keyboard or similar buttons, connectors, or shielding boxes  
at a distance of less than 6 mm from the MEMS gyro. Maintain generally accepted industry design practices  
for component placement near the ITG-3200 to prevent noise coupling and thermo-mechanical stress.  
7.4.5 PCB Mounting and Cross-Axis Sensitivity  
Orientation errors of the gyroscope mounted to the printed circuit board can cause cross-axis sensitivity in  
which one gyro responds to rotation about another axis. For example, the X-axis gyroscope may respond to  
rotation about the Y or Z axes. The orientation mounting errors are illustrated in the figure below.  
26 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
Z
Φ
Y
M
P
M
U
-
P
3
U
0
0
0
-
3
0
0
5
X
Θ
Package Gyro Axes (  
) Relative to PCB Axes (  
) with Orientation Errors (Θ and Φ)  
The table below shows the cross-axis sensitivity of the gyroscope for a given orientation error.  
Cross-Axis Sensitivity vs. Orientation Error  
Orientation Error  
Cross-Axis Sensitivity  
(θ or Φ)  
(sinθ or sinΦ)  
0º  
0.5º  
1º  
0%  
0.87%  
1.75%  
The specification for cross-axis sensitivity in Section Error! Reference source not found. includes the effect  
f the die orientation error with respect to the package.  
7.4.6 MEMS Handling Instructions  
MEMS (Micro Electro-Mechanical Systems) are a time-proven, robust technology used in hundreds of  
millions of consumer, automotive and industrial products. MEMS devices consist of microscopic moving  
mechanical structures. They differ from conventional IC products, even though they can be found in similar  
packages. Therefore, MEMS devices require different handling precautions than conventional ICs prior to  
mounting onto printed circuit boards (PCBs).  
The ITG-3200 gyroscope has been qualified to a shock tolerance of 10,000g. InvenSense packages its  
gyroscopes as it deems proper for protection against normal handling and shipping. It recommends the  
following handling precautions to prevent potential damage.  
Do not drop individually packaged gyroscopes, or trays of gyroscopes onto hard surfaces. Components  
placed in trays could be subject to g-forces in excess of 10,000g if dropped.  
Printed circuit boards that incorporate mounted gyroscopes should not be separated by manually  
snapping apart. This could also create g-forces in excess of 10,000g.  
7.4.7 ESD Considerations  
Establish and use ESD-safe handling precautions when unpacking and handling ESD-sensitive devices.  
Store ESD sensitive devices in ESD safe containers until ready for use. The Tape-and-Reel moisture-  
sealed bag is an ESD approved barrier. The best practice is to keep the units in the original moisture  
sealed bags until ready for assembly.  
Restrict all device handling to ESD protected work areas that measure less than 200V static charge.  
Ensure that all workstations and personnel are properly grounded to prevent ESD.  
27 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.4.8 Reflow Specification  
Qualification Reflow: The ITG-3200 gyroscope was qualified in accordance with IPC/JEDEC J-STD-020D.01.  
This standard classifies proper packaging, storage and handling in order to avoid subsequent thermal and  
mechanical damage during the solder reflow attachment phase of assembly. The classification specifies a  
sequence consisting of a bake cycle, a moisture soak cycle in a temperature humidity oven, followed by  
three solder reflow cycles and functional testing for qualification. All temperatures refer to the topside of the  
QFN package, as measured on the package body surface. The peak solder reflow classification temperature  
requirement is (260 +5/-0°C) for lead-free soldering of components measuring less than 1.6 mm in thickness.  
Production Reflow: Check the recommendations of your solder manufacturer. For optimum results,  
production solder reflow processes should reduce exposure to high temperatures, and use lower ramp-up  
and ramp-down rates than those used in the component qualification profile shown for reference below.  
Production reflow should never exceed the maximum constraints listed in the table and shown in the figure  
below. These constraints were used for the qualification profile, and represent the maximum tolerable ratings  
for the device.  
Maximum Temperature IR / Convection Solder Reflow Curve Used for Qualification  
Temperature Set Points for IR / Convection Reflow Corresponding to Figure Above  
CONSTRAINTS  
Step Setting  
Temp (°C) Time (sec) Rate (°C/sec)  
A
B
C
D
E
F
G
H
I
Troom  
25  
TSmin  
150  
200  
217  
255  
260  
255  
217  
25  
TSmax  
TLiquidus  
TPmin  
60 < tBC < 120  
r(TLiquidus-TPmax) < 3  
r(TLiquidus-TPmax) < 3  
r(TLiquidus-TPmax) < 3  
r(TPmax-TLiquidus) < 4  
[255°C, 260°C]  
TPmax  
TPmin  
tAF < 480  
[ 260°C, 265°C]  
10< tEG < 30  
60 < tDH < 120  
[255°C, 260°C]  
TLiquidus  
Troom  
Note: For users TPmax must not exceed the classification temperature (260°C).  
For suppliers TPmax must equal or exceed the classification temperature.  
28 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.4.9 Storage Specifications  
The storage specification of the ITG-3200 gyroscope conforms to IPC/JEDEC J-STD-020D.01 Moisture  
Sensitivity Level (MSL) 3.  
Calculated shelf-life in moisture-sealed bag 12 months -- Storage conditions: <40°C and <90% RH  
After opening moisture-sealed bag  
168hours -- Storage conditions: ambient ≤30°C at 60%RH  
7.5  
Package Marking Specification  
TOP VIEW  
InvenSense  
ITG-3200  
Lot traceability code  
XXXXXX-XX  
XX YYWW X  
Foundry code  
Rev Code  
YY = Year Code  
Package Vendor Code  
WW = Work Week  
Package Marking Specification  
29 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.6  
Tape & Reel Specification  
Tape Dimensions  
Reel Outline Drawing  
Reel Dimensions and Package Size  
REEL (mm)  
PKG  
SIZE  
L
V
W
Z
4x4  
330  
100  
13.2  
2.2  
30 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
User Direction of  
Feed  
Package Orientation  
Cover Tape  
(Anti-Static)  
Carrier Tape  
(Anti-Static)  
Label  
Pin 1  
Terminal Tape  
Reel  
Tape and Reel Specification  
Reel Specifications  
Quantity Per Reel  
5,000  
1
Reels per Box  
Boxes Per Carton (max)  
3 full pizza boxes packed in the center of the  
carton, buffered by two empty pizza boxes (front  
and back).  
Pcs/Carton (max)  
15,000  
7.7  
Label  
Location of Label  
31 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
7.8  
Packaging  
ESD Anti-static Label  
Moisture-Sensitivity  
Caution Label  
Tape & Reel  
Barcode Label  
Moisture Barrier Bag  
With Labels  
Moisture-Sensitive Caution Label  
Reel in Box  
Box with Tape & Reel Label  
32 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
8
Reliability  
8.1  
Qualification Test Policy  
Before InvenSense products are released for production, they complete a series of qualification tests. The  
Qualification Test Plan for the ITG-3200 followed the JEDEC JESD47G.01 Standard, “Stress-Test-Driven  
Qualification of Integrated Circuits.” The individual tests are described below.  
8.2  
Qualification Test Plan  
Accelerated Life Tests  
Method/Condition  
TEST  
Lot  
Quantity  
Sample  
/ Lot  
Acc /  
Reject  
Criteria  
High Temperature  
Operating Life (HTOL/LFR)  
JEDEC JESD22-A108C, Dynamic,  
3.63V biased, Tj>125°C  
[read-points 168, 500, 1000 hours]  
3
3
77  
77  
(0/1)  
Highly Accelerated Stress  
Test (1) (HAST)  
(0/1)  
JEDEC JESD22-A118  
Condition A, 130°C, 85%RH, 33.3 psia.,  
unbiased, [read-point 96 hours]  
High Temperature Storage  
Life (HTS)  
JEDEC JESD22-A103C, Cond. A, 125°C,  
Non-Biased Bake  
3
77  
(0/1)  
[read-points 168, 500, 1000 hours]  
Device Component Level Tests  
Method/Condition  
TEST  
Lot  
Quantity  
Sample  
/ Lot  
Acc /  
Reject  
Criteria  
ESD-HBM  
ESD-MM  
JEDEC JESD22-A114F, (1.5KV)  
JEDEC JESD22-A115-A, (200V)  
1
1
3
3
(0/1)  
(0/1)  
Latch Up  
JEDEC JESD78B Class II (2), 125°C;  
Level B ±60mA  
1
3
6
(0/1)  
(0/1)  
Mechanical Shock  
JEDEC JESD22-B104C,  
30  
Mil-Std-883H, method 2002.5,  
Cond. E, 10,000g’s, 0.2ms,  
±X, Y, Z 6 directions, 5 times/direction  
Vibration  
JEDEC JESD22-B103B, Variable Frequency  
(random), Cond. B, 5-500Hz,  
X, Y, Z 4 times/direction  
3
3
5
(0/1)  
(0/1)  
Temperature Cycling (TC) (1)  
JEDEC JESD22-A104D Condition N,  
77  
[-40°C to +85°C], Soak Mode 2 [5’], 100 cycles  
Board Level Tests  
Method/Condition  
TEST  
Lot  
Quantity  
Sample  
/ Lot  
Acc /  
Reject  
Criteria  
Board Mechanical Shock  
JEDEC JESD22-B104C,  
Mil-Std-883H, method 2002.5,  
Cond. E, 10000g’s, 0.2ms,  
1
1
5
(0/1)  
+-X, Y, Z 6 directions, 5 times/direction  
Board  
JEDEC JESD22-A104D Condition N,  
[ -40°C to +85°C], Soak Mode 2 [5’], 100 cycles  
40  
(0/1)  
Temperature Cycling (TC) (1)  
(1) Tests are preceded by MSL3 Preconditioning in accordance with JEDEC JESD22-A113F  
33 of 34  
Document Number: PS-ITG-3200A-00  
Revision: 1.7  
Release Date: 08/02/2011  
ITG-3200 Product Specification  
9
Environmental Compliance  
The ITG-3200 is RoHS and Green Compliant.  
The ITG-3200 is in full environmental compliance as evidenced in report HS-ITG-3200A, Materials  
Declaration Data Sheet.  
Environmental Declaration Disclaimer:  
InvenSense believes this environmental information to be correct but cannot guarantee accuracy or completeness. Conformity  
documents for the above component constitutes are on file. InvenSense subcontracts manufacturing and the information contained  
herein is based on data received from vendors and suppliers, which has not been validated by InvenSense.  
This information furnished by InvenSense is believed to be accurate and reliable. However, no responsibility is assumed by InvenSense  
for its use, or for any infringements of patents or other rights of third parties that may result from its use. Specifications are subject to  
change without notice. InvenSense reserves the right to make changes to this product, including its circuits and software, in order to  
improve its design and/or performance, without prior notice. InvenSense makes no warranties, neither expressed nor implied, regarding  
the information and specifications contained in this document. InvenSense assumes no responsibility for any claims or damages arising  
from information contained in this document, or from the use of products and services detailed therein. This includes, but is not limited  
to, claims or damages based on the infringement of patents, copyrights, mask work and/or other intellectual property rights.  
Certain intellectual property owned by InvenSense and described in this document is patent protected. No license is granted by  
implication or otherwise under any patent or patent rights of InvenSense. This publication supersedes and replaces all information  
previously supplied. Trademarks that are registered trademarks are the property of their respective companies. InvenSense sensors  
should not be used or sold in the development, storage, production or utilization of any conventional or mass-destructive weapons or for  
any other weapons or life threatening applications, as well as in any other life critical applications such as medical equipment,  
transportation, aerospace and nuclear instruments, undersea equipment, power plant equipment, disaster prevention and crime  
prevention equipment.  
InvenSense® is a registered trademark of InvenSense, Inc. ITG™, ITG-3200™, MotionApps™, MPU™, MotionProcessing Unit™,  
MotionProcessor™, MotionProcessing™, MotionFusion™, MPU-3050™, MPU-6050™, IMU-3000™ are trademarks of InvenSense,  
Inc.  
©2011 InvenSense, Inc. All rights reserved.  
34 of 34  

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