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Pressure sensors  
C29 series  
Series/Type:  
Ordering code:  
Absolute pressure sensor die for wet media  
Date:  
Version:  
2009-08-03  
3
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Identification/Classification 1  
(header 1 + top left bar):  
Pressure sensors  
Identification/Classification 2  
(header 2 + bottom left header bar):  
C29 series  
Ordering code: (top right header bar)  
Series/Type: (top right header bar)  
Absolute pressure sensor die for wet media  
Preliminary data (optional):  
(if necessary)  
Department:  
Date:  
AS SEN PD  
2009-08-03  
3
Version:  
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information  
contained therein without EPCOS' prior express consent is prohibited  
Pressure sensors  
C29 series  
Absolute pressure sensor die for wet media  
Applications  
ꢀ Medical devices  
ꢀ Automotive  
ꢀ Automation  
Features  
ꢀ Piezoresistive MEMS technology  
ꢀ Small dimensions: 2.2 × 2.7 mm  
ꢀ Square diaphragm  
ꢀ Reference pressure chamber on topside  
ꢀ Measured media (back side):  
Non-aggressive gases and fluids.  
Unsuitable for substances which react with  
glass or silicon.  
ꢀ Whetstone bridge with mV output,  
ratiometric to supply voltage  
ꢀ Rated pressure ranges 1.0 up to 10 bar  
ꢀ Outstanding long-term stability  
Options  
ꢀ Temperature sensing diode  
Delivery mode  
ꢀ Tray  
Dimensional drawings  
ELECTRICAL DIAGRAM:  
X1  
X1 : VDD+  
X9  
X2 : Vout+  
X3 : VDD–  
X5 : Vout–  
X8 : Diode (N)  
X9 : Diode (P)  
X8  
X2  
X5  
p
X3  
note 1: geometrie of diaphragm according costumer  
specification  
note 2: the quality of structured glass angles is influenced  
by machining technologies and is idealised plotted  
note 2  
note 2  
X1  
X9  
X8  
X5  
X3  
X2  
checked bond area (typ. 100µm x 100µm)  
all dimensions in µm  
AS SEN PD  
2009-08-03  
Please read Cautions and warnings and  
Page 2 of 8  
Important notes at the end of this document.  
Pressure sensors  
C29 series  
Absolute pressure sensor die for wet media  
Technical data  
Absolute maximum ratings  
Parameter  
Symbol  
Conditions  
Min.  
Typ.  
Max.  
Units  
Supply voltage  
Maximum supply voltage  
Temperature ranges  
VDD  
Without damage 1)  
10  
V
2)  
–40  
–40  
–40  
135  
140  
150  
°C  
°C  
°C  
Operating temperature range  
Ta  
For t <15 min  
3)  
Storage temperature range  
Pressure ranges  
Tst  
Operating pressure ranges  
Over pressure  
pr  
Absolute pressure 4)  
Absolute pressure 5)  
Absolute pressure 6)  
0 ... 1  
2.5  
3
0 ... 10  
bar  
pr  
pov  
pberst  
Burst pressure  
pr  
Electrical specifications  
Parameter  
Symbol  
Conditions  
Min.  
Typ.  
Max.  
Units  
Supply voltage / bridge resistance  
Operating supply voltage  
Total bridge resistance  
7)  
VDD  
RS  
1.0  
2.1  
1.9  
4
5.0  
3.3  
2.5  
8
V
@ 25 °C 8)  
@ 25 °C 9)  
2.7  
2.2  
6
kΩ  
10–3/K  
10–6/K2  
αRs  
βRs  
Temperature coefficient  
of total bridge resistance  
Output signal @ VDD = 5 V  
Offset  
V0  
@ 25 °C 10)  
@ 25 °C 13)  
See next table  
See next table  
mV  
Sensitivity  
S
mV/bar  
10–3/K  
10–6/K2  
% FS  
–2.5  
3
–2.2  
5
–1.9  
αS  
Temperature coefficient  
of the sensitivity  
@ 25 °C 15)  
8
βS  
16)  
Pressure hysteresis  
pHys  
–0.1  
0.1  
Optional temperature sensing diode  
Forward diode voltage  
VF  
@ 25 °C, IF = 50 µA 17)  
@ 25 °C, IF = 50 µA 18)  
550  
600  
650  
mV  
Temperature coefficient  
of forward diode voltage  
TCVF  
–2.4  
–2.2  
–2.0  
mV/K  
Long-term stability (Full scale normal output FSON = 120 mV)  
19)  
Temperature hysteresis of offset  
Temperature cycle drift of offset  
High temperature drift of offset  
Long term stability of offset  
THV0  
–0.35  
–0.25  
–0.25  
–0.45  
0.2  
0.1  
0.1  
0.3  
0.35  
0.25  
0.25  
0.45  
% FSON  
% FSON  
% FSON  
% FSON  
19)  
19)  
19)  
TCDV0  
HTDV0  
LTSV0  
AS SEN PD  
2009-08-03  
Please read Cautions and warnings and  
Page 3 of 8  
Important notes at the end of this document.  
Pressure sensors  
C29 series  
Absolute pressure sensor die for wet media  
Operating pressures and ordering codes  
Parameter @ 25 °C, VDD = 5 V  
Symbol  
Typ.  
Typ.  
Typ.  
Typ.  
Units  
Operating pressure 4)  
pr  
1.0  
2.5  
4
10  
bar  
Offset voltage 10)  
[min/typ/max]  
V0  
–65/–20/30  
–55/–10/30  
–45/–5/30  
–35/–3/30  
mV  
–
Temperature coefficient  
of offset voltage (unglued) 11)  
[typ]  
TCV0  
–24  
–12  
–45  
–22  
–12  
–7  
–25  
–13  
–8  
–5  
–18  
–9  
–3  
–2  
–10  
–5  
µV/VK  
µV/VK  
% FS  
+
TCV0  
Nonlinearity 14) [typ/max]  
L
0.2/ 0.3  
0.2/ 0.3  
0.2/ 0.3  
0.2/ 0.3  
9/13/16  
yes  
Sensitivity 13)  
[min/typ/max]  
S
60/85/105  
yes  
35/50/65  
yes  
20/30/40  
yes  
mV/bar  
Temperature sensing diode present  
Glass base on back side  
X
X
X
X
Product type  
Ordering code  
Other operating pressures upon request.  
AS SEN PD  
2009-08-03  
Please read Cautions and warnings and  
Page 4 of 8  
Important notes at the end of this document.  
Pressure sensors  
C29 series  
Absolute pressure sensor die for wet media  
Symbols and terms  
1)  
Maximum power supply VDD  
This is the maximal allowed voltage, which may be applied to the piezoresistive bridge circuit without damage.  
2)  
Operating temperature range Ta  
This is the operating Temperature range Ta,min to Ta,max. Because most of the sensor parameters depend on assembling  
conditions like gluing, wire bonding etc, the die has to be tested over the operating temperature range by the customer  
fully assembled. For design verification and process control samples, mounted in AK transducer package (AK2 series)  
are tested over a reduced measuring temperature range of Tmeas,min to Tmeas,max  
.
3)  
Storage temperature range Tst  
If the pressure sensor dies are stored in the temperature range Tst,min to Tst,max without applied voltage power supply, this  
will not affect the performance of the pressure sensor dies.  
4)  
5)  
6)  
Operating pressure range pr  
In the operating pressure range 0 to pr,max the pressure sensor die output characteristic is as defined in this specification.  
Over pressure pOV  
Pressure cycles in the pressure range 0 to pov do not affect the performance of the pressure sensor dies.  
Burst pressure pberst  
Up to the burst pressure pberst the diaphragm of the sensor die will not be destroyed mechanically. This parameter is  
tested at room temperature on samples mounted on an aluminium socket by applying the specified burst pressure for  
10 minutes. The evaluation of this test is done by optical inspection of the diaphragm.  
7)  
Operating power supply VDD  
The pressure sensor parameters are defined for a power supply voltage of VDD = 5 V. In the operating power supply  
voltage range VDD,min to VDD,max the ratiometric parameters r(VDD) like sensitivity, offset voltage and the temperature  
coefficient of the offset voltage are defined by:  
VDD  
r
VDD = r(5[V])  
( )  
5[V]  
8)  
9)  
Total bridge resistance RS  
The total bridge resistance is defined between pad X5 and X2, (see the dimensional drawing in this data sheet) of the  
closed piezoresistive bridge circuit. The total bridge resistance is in a good approximation the output impedance of the  
piezoresistive bridge circuit. This parameter is tested completely on a wafer (wafer level test measurement).  
Temperature coefficients of resistance αRs and βRs  
The temperature coefficients of resistance are tested for design verification on samples, mounted on AK transducer  
package (AK2 series) over a reduced temperature range Tmeas min = –20 °C to Tmeas max = 80 °C with TR = 25 °C.  
:
,
,
The temperature coefficients of first and second order are defined with the polynomial:  
2
R (T)=R (T=25°C ) 1+α  
S
(
Rs T−25°C  
)
+β  
(
Rs T−25°C  
)
S
The coefficients αRs and βRs are calculated using the three measurement points of Rs(T) at Tmeas,min, TR and Tmeas,max  
.
10)  
Offset voltage V0  
The offset voltage V0 is the output voltage Vout(p = 0 bar absolute) at zero absolute pressure and for a bridge voltage  
power supply VDD = 5 V. The high range of the allowed offset voltage is due to the reference pressure in the glass cap  
from 0 to 0.3 bar and to the tolerance of the sensitivity. The typical value of the reference pressure is 0.2 bar.  
Before anodic glass bonding the offset voltage is tested completely on a wafer (wafer level test measurement)  
with limits –25 mV < V0 < 25 mV. For design verification V0 is measured on samples, mounted in AK transducer package  
(AK2 series) by extrapolating the output characteristic to zero bar.  
It should be noted that this parameter may be influenced by assembly.  
Temperature coefficients of offset voltage TCV0+ and TCV0  
11)  
–
The temperature coefficients of offset voltage are defined for a bridge voltage power supply VDD = 5 V.  
These parameters strongly depend on assembly conditions like gluing, wire bonding etc.  
The temperature coefficients of offset voltage are tested for design verification on samples, mounted on AK transducer  
package (AK2 series) over a reduced temperature range Tmeas min  
,
= –20 °C to Tmeas,max = 80 °C with TR = 25 °C.  
Assuming the offset voltage is mainly due to induce stress TCV0 may be calculated by extrapolating using:  
V0(T) =  
(
1+ αs(T − 25°C) + βs(T − 25°C)2
) (
Vo(25°C) + v1(T − 25°C) + v2(T − 25°C)2  
)
AS SEN PD  
2009-08-03  
Please read Cautions and warnings and  
Important notes at the end of this document.  
Page 5 of 8  
Pressure sensors  
C29 series  
Absolute pressure sensor die for wet media  
αs and βs are the linear and nonlinear temperature coefficient of the sensitivity respectively (see 15)).  
Therefore TCV0+ and TCV0– are defined for the measurement temperature range by:  
Vo(Tmin ) − Vo(25°C)  
Tmin − 25°C  
Vo(Tmax ) − Vo(25°C)  
Tmax − 25°C  
TCVo−  
=
TCVo+  
=
12)  
13)  
Full scale value FS  
Sensitivity S  
The sensitivity is defined for a bridge voltage power supply VDD = 5 V. It can be determined by the formula:  
FS = Vout (prmax ) − Vo  
Vout (prmax ) − Vo  
S =  
prmax  
This parameter is tested for process control on samples, mounted on AK transducer package (AK2 series).  
14)  
Nonlinearity L  
This parameter may be influenced by assembly.  
The nonlinearity is measured using the endpoint method. Assuming a characteristic, this can be approximated  
by a polynomial of second order, where the maximum is at px = pr,max/2. The nonlinearity is defined at px = pr,max/2,  
using the equation:  
Vout (px ) − Vo  
px  
L =  
−
Vout (pr,max ) − Vo pr,max  
This parameter is tested for process control on samples, mounted on AK transducer package (AK2 series).  
15)  
Temperature coefficients of sensitivity αRs and βRs  
These parameters may be influenced by assembly.  
:
The temperature coefficients of sensitivity are tested for design verification on samples, mounted on AK transducer  
package (AK2 series) over a reduced temperature range Tmeas min = –20 °C to Tmeas max = 80 °C with TR = 25 °C.  
The temperature coefficients of first and second order are defined with the polynomial:  
,
,
2
S(T)=S(T=25°C) 1+αS  
(
T−25°C  
)
+βS  
(
T−25°C  
)
The coefficients αS and βS are calculated using the three measurement points of S(T) at Tmeas,min, TR and Tmeas,max  
.
16)  
Pressure hysteresis pHys  
The pressure hysteresis is the difference between output voltages at constant pressure and constant temperature while  
applying a pressure cycle with pressure steps of pr, min, p1, p2, p3, pr,max, p3, p2, p1, pr, min  
:
Vout,2(pk )− Vout,1(pk )  
pHys =  
FS  
With k = min, 1, 2, 3, max. The pressure steps are: prmin = 0, p1 = 0.25·pr,max, p2 = 0.5·pr,max, p3 = 0.75·pr, max, pr,max  
This parameter is tested for design verification on samples, mounted on AK transducer package (AK2 series).  
.
17)  
18)  
Forward diode voltage VF  
The voltage drop is measured across anode and cathode by a forward current of 47 µA.  
This parameter is tested completely on a wafer (wafer level test measurement).  
Temperature coefficient of forward diode voltage TCVF  
The temperature sensitivity of diode voltage drop is defined by the measured values at –20 °C and 80 °C  
using the equation:  
VF (Tmeas,max ) − VF(Tmeas,min  
)
TCVF =  
Tmeas,max − Tmeas,min  
With Tmeas,min = –20 °C and Tmeas,max = 80 °C and the measurement is done with a constant current of 50 µA.  
The estimated temperature coefficient is also valid at temperatures between –40 °C and 135 °C.  
This parameter is tested for design verification on samples, mounted on AK transducer package (AK2 series).  
19)  
Reliability data  
For long-term stability of offset voltage LTSV0 please refer to the defined Aktiv Sensor’s standard AS100001 in chapter  
“Reliability data” on the internet.  
AS SEN PD  
2009-08-03  
Please read Cautions and warnings and  
Page 6 of 8  
Important notes at the end of this document.  
Pressure sensors  
C29 series  
Absolute pressure sensor die for wet media  
Cautions and warnings  
Storage (general)  
All pressure sensors should be stored in their original packaging. They should not be placed in harmful environments such  
as corrosive gases nor exposed to heat or direct sunlight, which may cause deformations. Similar effects may result from  
extreme storage temperatures and climatic conditions. Avoid storing the sensor dies in an environment where condensation  
may form or in a location exposed to corrosive gases, which will adversely affect their performance. Plastic materials should  
not be used for wrapping/packing when storing or transporting these dies, as they may become charged. Pressure sensor  
dies should be used soon after opening their seal and packaging.  
Operation (general)  
Media compatibility with the pressure sensors must be ensured to prevent their failure. The use of other media can cause  
damage and malfunction. Never use pressure sensors in atmospheres containing explosive liquids or gases.  
Ensure pressure equalization to the environment, if gauge pressure sensors are used. Avoid operating the pressure sensors  
in an environment where condensation may form or in a location exposed to corrosive gases. These environments adversely  
affect their performance.  
If the operating pressure is not within the rated pressure range, it may change the output characteristics. This may also  
happen with pressure sensor dies if an incorrect mounting method is used. Be sure that the applicable pressure does not  
exceed the overpressure, as it may damage the pressure sensor.  
Do not exceed the maximum rated supply voltage nor the rated storage temperature range, as it may damage the pressure  
sensor.  
Temperature variations in both the ambient conditions and the media (liquid or gas) can affect the accuracy of the output  
signal from the pressure sensors. Be sure to check the operating temperature range and thermal error specification of the  
pressure sensors to determine their suitability for the application.  
Connections must be wired in accordance with the terminal assignment specified in the data sheets. Care should be taken  
as reversed pin connections can damage the pressure transmitters or degrade their performance. Contact between the  
pressure sensor terminals and metals or other materials may cause errors in the output characteristics.  
Design notes (dies)  
This specification describes the mechanical, electrical and physical requirements of a piezoresistive sensor die for  
measuring pressure. The specified parameters are valid for the pressure sensor die with pressure application either to the  
front or back side of the diaphragm as described in the data sheet. Pressure application to the other side may result in  
differing data. Most of the parameters are influenced by assembly conditions. Hence these parameters and the reliability  
have to be specified for each specific application and tested over its temperature range by the customer.  
Handling/Mounting (dies)  
Pressure sensor dies should be handled appropriately and not be touched with bare hands. They should only be picked up  
manually by the sides using tweezers. Their top surface should never be touched with tweezers. Latex gloves should not be  
used for handling them, as this will inhibit the curing of the adhesive used to bond the die to the carrier. When handling, be  
careful to avoid cuts caused by the sharp-edged terminals. The sensor die must not be contaminated during manufacturing  
processes (gluing, soldering, silk-screen process).  
The package of pressure sensor dies should not to be opened until the die is mounted and should be closed after use. The  
sensor die must not be cleaned. The sensor die must not be damaged during the assembly process (especially scratches on  
the diaphragm).  
Soldering (transducers, transmitters)  
The thermal capacity of pressure sensors is normally low, so steps should be taken to minimize the effects of external heat.  
High temperatures may lead to damage or changes in characteristics.  
A non-corrosive type of flux resin should normally be used and complete removal of the flux is recommended.  
Avoid rapid cooling due to dipping in solvent. Note that the output signal may change if pressure is applied to the terminals  
during soldering.  
This listing does not claim to be complete, but merely reflects the experience of EPCOS AG.  
AS SEN PD  
2009-08-03  
Please read Cautions and warnings and  
Important notes at the end of this document  
Page 7 of 8  
.
Important notes  
The following applies to all products named in this publication:  
1. Some parts of this publication contain statements about the suitability of our products for  
certain areas of application. These statements are based on our knowledge of typical  
requirements that are often placed on our products in the areas of application concerned. We  
nevertheless expressly point out that such statements cannot be regarded as binding  
statements about the suitability of our products for a particular customer application. As a  
rule, EPCOS is either unfamiliar with individual customer applications or less familiar with them  
than the customers themselves. For these reasons, it is always ultimately incumbent on the  
customer to check and decide whether an EPCOS product with the properties described in the  
product specification is suitable for use in a particular customer application.  
2. We also point out that in individual cases, a malfunction of electronic components or failure  
before the end of their usual service life cannot be completely ruled out in the current state  
of the art, even if they are operated as specified. In customer applications requiring a very high  
level of operational safety and especially in customer applications in which the malfunction or  
failure of an electronic component could endanger human life or health (e.g. in accident  
prevention or life-saving systems), it must therefore be ensured by means of suitable design of the  
customer application or other action taken by the customer (e.g. installation of protective circuitry  
or redundancy) that no injury or damage is sustained by third parties in the event of malfunction or  
failure of an electronic component.  
3. The warnings, cautions and product-specific notes must be observed.  
4. In order to satisfy certain technical requirements, some of the products described in this  
publication may contain substances subject to restrictions in certain jurisdictions (e.g.  
because they are classed as hazardous). Useful information on this will be found in our Material  
Data Sheets on the Internet (www.epcos.com/material). Should you have any more detailed  
questions, please contact our sales offices.  
5. We constantly strive to improve our products. Consequently, the products described in this  
publication may change from time to time. The same is true of the corresponding product  
specifications. Please check therefore to what extent product descriptions and specifications  
contained in this publication are still applicable before or when you place an order.  
We also reserve the right to discontinue production and delivery of products. Consequently,  
we cannot guarantee that all products named in this publication will always be available.  
The aforementioned does not apply in the case of individual agreements deviating from the  
foregoing for customer-specific products.  
6. Unless otherwise agreed in individual contracts, all orders are subject to the current version of  
the “General Terms of Delivery for Products and Services in the Electrical Industry”  
published by the German Electrical and Electronics Industry Association (ZVEI).  
7. The trade names EPCOS, BAOKE, Alu-X, CeraDiode, CSMP, CSSP, CTVS, DSSP, MiniBlue,  
MiniCell, MKK, MLSC, MotorCap, PCC, PhaseCap, PhaseCube, PhaseMod, PhiCap, SIFERRIT,  
SIFI, SIKOREL, SilverCap, SIMDAD, SIMID, SineFormer, SIOV, SIP5D, SIP5K, ThermoFuse,  
WindCap are trademarks registered or pending in Europe and in other countries. Further  
information will be found on the Internet at www.epcos.com/trademarks.  
Page 8 of 8