ADXL001-500BEZ-R7 [ADI]
High Performance, Wide Bandwidth Accelerometer; 高性能，宽带宽加速度计
| 型号： | ADXL001-500BEZ-R7 |
| 厂家： | 
ADI |
| 描述： | High Performance, Wide Bandwidth Accelerometer |
| 文件： | 总16页 (文件大小：307K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
High Performance,
Wide Bandwidth Accelerometer
ADXL001
Using the Analog Devices, Inc. proprietary fifth-generation
iMEMs® process enables the ADXL001 to provide the desired
dynamic range that extends from 70 g to 500 g in combin-
ation with 22 kHz of bandwidth. The accelerometer output
channel passes through a wide bandwidth differential-to-single-
ended converter, which allows access to the full mechanical
performance of the sensor.
FEATURES
High performance accelerometer
70 g, 2ꢀ0 g, and ꢀ00 g wideband ranges available
22 kHz resonant frequency structure
High linearity: 0.2% of full scale
Low noise: 4 mg/√Hz
Sensitive axis in the plane of the chip
Frequency response down to dc
The part can operate on voltage supplies from 3.3 V to 5 V.
Full differential signal processing
High resistance to EMI/RFI
Complete electromechanical self-test
Output ratiometric to supply
Velocity preservation during acceleration input overload
Low power consumption: 2.ꢀ mA typical
8-terminal, hermetic ceramic, LCC package
The ADXL001 also has a self-test (ST) pin that can be asserted to
verify the full electromechanical signal chain for the accelerometer
channel.
The ADXL001 is available in the industry-standard 8-terminal
LCC and is rated to work over the extended industrial temperature
range (−40°C to +125°C).
15
APPLICATIONS
12
9
Vibration monitoring
Shock detection
6
Sports diagnostic equipment
Medical instrumentation
Industrial monitoring
3
0
–3
–6
–9
–12
–15
GENERAL DESCRIPTION
The ADXL001 is a major advance over previous generations of
accelerometers providing high performance and wide bandwidth.
This part is ideal for industrial, medical, and military applications
where wide bandwidth, small size, low power, and robust
performance are essential.
1
10
100
1k
10k
100k
FREQUENCY (Hz)
Figure 1. Sensor Frequency Response
FUNCTIONAL BLOCK DIAGRAM
V
S
V
DD
ADXL001
TIMING
GENERATOR
V
DD2
OUTPUT
AMPLIFIER
DIFFERENTIAL
SENSOR
DEMOD
AMP
MOD
X
OUT
SELF-TEST
ST
COM
Figure 2.
Rev. A
Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
rights of third parties that may result from its use. Specifications subject to change without notice. No
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.
Trademarks and registeredtrademarks arethe property of their respective owners.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
Tel: 781.329.4700
Fax: 781.461.3113
www.analog.com
©2010 Analog Devices, Inc. All rights reserved.
ADXL001
TABLE OF CONTENTS
Features .............................................................................................. 1
Design Principles........................................................................ 11
Mechanical Sensor ..................................................................... 11
Applications Information.............................................................. 12
Application Circuit..................................................................... 12
Self-Test ....................................................................................... 12
Acceleration Sensitive Axis....................................................... 12
Operating Voltages Other Than 5 V........................................ 12
Layout, Grounding, and Bypassing Considerations .................. 13
Clock Frequency Supply Response .......................................... 13
Power Supply Decoupling ......................................................... 13
Electromagnetic Interference ................................................... 13
Outline Dimensions....................................................................... 14
Ordering Guide .......................................................................... 14
Applications....................................................................................... 1
General Description......................................................................... 1
Functional Block Diagram .............................................................. 1
Revision History ............................................................................... 2
Specifications..................................................................................... 3
Specifications for 3.3 V Operation............................................. 3
Specifications for 5 V Operation................................................ 4
Recommended Soldering Profile ............................................... 5
Absolute Maximum Ratings............................................................ 6
ESD Caution.................................................................................. 6
Pin Configuration and Function Descriptions............................. 7
Typical Performance Characteristics ............................................. 8
Theory of Operation ...................................................................... 11
REVISION HISTORY
2/10—Rev. 0 to Rev. A
Added -250 and -500 models............................................Universal
Changes to Table 1............................................................................ 3
Changes to Table 2............................................................................ 4
Added Figure 9 through Figure 18................................................. 8
Changes to Ordering Guide .......................................................... 14
1/09—Revision 0: Initial Version
Rev. A | Page 2 of 16
ADXL001
SPECIFICATIONS
SPECIFICATIONS FOR 3.3 V OPERATION
TA = −40°C to +125°C, VS = 3.3 V 5ꢀ dc, acceleration = 0 g, unless otherwise noted.
Table 1.
ADXL001-70
Typ Max
ADXL001-2ꢀ0
Typ Max
ADXL001-ꢀ00
Typ Max
Parameter
Conditions
Min
Min
Min
Unit
SENSOR
Nonlinearity
Cross-Axis Sensitivity
0.2
2
2
0.2
2
2
0.2
2
2
%
%
Includes package
alignment
Resonant Frequency
Quality Factor
SENSITIVITY
22
2.5
22
2.5
22
2.5
kHz
Full-Scale Range
Sensitivity
IOUT ≤ 100 ꢀA
100 Hz
−70
1.35
+70
−250
1.35
+250
−500
1.35
+500
g
16.0
4.4
2.2
mV/g
OFFSET
Zero-g Output
NOISE
Ratiometric
1.65 1.95
1.65 1.95
1.65 1.95
V
Noise
10 Hz to 400 Hz
10 Hz to 400 Hz
85
3.3
95
3.65
105
4.25
mg rms
mg/√Hz
Noise Density
FREQUENCY RESPONSE
−3 dB Frequency
−3 dB Frequency Drift
Over Temperature
32
2
32
2
32
2
kHz
%
SELF-TEST
Output Voltage Change
Logic Input High
Logic Input Low
Input Resistance
OUTPUT AMPLIFIER
Output Swing
400
125
62
mV
V
V
2.1
30
2.1
30
2.1
30
0.66
50
0.66
50
0.66
50
To ground
kΩ
IOUT = 100 ꢀA
DC to 1 MHz
0.2
1000
VS − 0.2
0.2
1000
VS − 0.2 0.2
VS − 0.2
V
pF
V/V
Capacitive Load
PSRR (CFSR)
1000
0.9
0.9
0.9
POWER SUPPLY (VS)
Functional Range
ISUPPLY
3.135
6
5
3.135
6
5
3.135
6
5
V
mA
ms
2.5
10
2.5
10
2.5
10
Turn-On Time
Rev. A | Page 3 of 16
ADXL001
SPECIFICATIONS FOR ꢀ V OPERATION
TA = -40°C to +125°C, VS = 5 V 5ꢀ dc, acceleration = 0 g, unless otherwise noted.
Table 2.
ADXL001-70
ADXL001-2ꢀ0
ADXL001-ꢀ00
Parameter
Conditions
Min
Typ
Max
Min
Typ
Max
Min
Typ
Max
Unit
SENSOR
Nonlinearity
Cross-Axis Sensitivity
0.2
2
2
0.2
2
2
0.2
2
2
%
%
Includes package
alignment
Resonant Frequency
Quality Factor
SENSITIVITY
22
2.5
22
2.5
22
2.5
kHz
Full-Scale Range
Sensitivity
IOUT ≤ 100 ꢀA
100 Hz
−70
2.00
+70
3.00
−250
2.00
+250
3.00
−500
2.00
+500
3.00
g
24.2
2.5
6.7
2.5
3.3
2.5
mV/g
OFFSET
Zero-g Output
NOISE
Ratiometric
V
Noise
10 Hz to 400 Hz
10 Hz to 400 Hz
55
2.15
60
2.35
70
2.76
mg rms
mg/√Hz
Noise Density
FREQUENCY RESPONSE
−3 dB Frequency
−3 dB Frequency Drift
Over Temperature
32
2
32
2
32
2
kHz
%
SELF-TEST
Output Voltage Change
Logic Input High
Logic Input Low
Input Resistance
OUTPUT AMPLIFIER
Output Swing
Capacitive Load
PSRR (CFSR)
1435
50
445
50
217
50
mV
V
V
3.3
30
3.3
30
3.3
30
0.66
0.66
0.66
To ground
kΩ
IOUT = 100 ꢀA
DC to 1 MHz
0.2
1000
VS − 0.2
0.2
1000
VS − 0.2
0.2
1000
VS − 0.2
V
pF
V/V
0.9
0.9
0.9
POWER SUPPLY (VS)
Functional Range
ISUPPLY
3.135
6
9
3.135
6
9
3.135
6
9
V
mA
ms
4.5
10
4.5
10
4.5
10
Turn-On Time
Rev. A | Page 4 of 16
ADXL001
RECOMMENDED SOLDERING PROFILE
Table 3. Soldering Profile Parameters
Profile Feature
Sn63/Pb37
Pb-Free
Average Ramp Rate (TL to TP)
Preheat
3°C/sec maximum
3°C/sec maximum
Minimum Temperature (TSMIN
)
100°C
150°C
Maximum Temperature (TSMAX
Time (TSMIN to TSMAX), ts
TSMAX to TL
)
150°C
60 sec to 120 sec
200°C
60 sec to 150 sec
Ramp-Up Rate
3°C/sec
3°C/sec
Time Maintained Above Liquidous (tL)
Liquidous Temperature (TL)
Liquidous Time (tL)
Peak Temperature (TP)
Time Within 5°C of Actual Peak Temperature (tP)
Ramp-Down Rate
183°C
217°C
60 sec to 150 sec
240°C + 0°C/−5°C
10 sec to 30 sec
6°C/sec maximum
6 minute maximum
60 sec to 150 sec
260°C + 0°C/−5°C
20 sec to 40 sec
6°C/sec maximum
8 minute maximum
Time 25°C to Peak Temperature (tPEAK
)
Soldering Profile Diagram
CRITICAL ZONE
T
TO T
tP
L
P
T
P
RAMP-UP
T
L
tL
T
SMAX
T
SMIN
tS
RAMP-DOWN
PREHEAT
tPEAK
TIME (t)
Figure 3. Soldering Profile Diagram
Rev. A | Page 5 of 16
ADXL001
ABSOLUTE MAXIMUM RATINGS
Table 4.
Parameter
Drops onto hard surfaces can cause shocks of greater than
4000 g and can exceed the absolute maximum rating of the
device. Exercise care during handling to avoid damage.
Rating
Acceleration (Any Axis, Unpowered and
Powered)
4000 g
Supply Voltage, VS
Output Short-Circuit Duration (VOUT to GND)
Storage Temperature Range
Operating Temperature Range
Soldering Temperature (Soldering, 10 sec)
−0.3 V to +7.0 V
Indefinite
−65°C to +150°C
−55°C to +125°C
245°C
ESD CAUTION
Stresses above those listed under Absolute Maximum Ratings
may cause permanent damage to the device. This is a stress
rating only; functional operation of the device at these or any
other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
Rev. A | Page 6 of 16
ADXL001
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
V
DD2
8
1
2
3
7
6
5
DNC
DNC
COM
V
X
DD
OUT
DNC
4
ST
DNC = DO NOT CONNECT
ADXL001
TOP VIEW
(Not to Scale)
Figure 4. Pin Configuration
Table 5. Pin Function Descriptions
Pin No. Mnemonic Description
1, 2, 5
DNC
COM
ST
XOUT
VDD
Do Not Connect.
Common.
Self-Test Control (Logic Input).
X-Axis Acceleration Output.
3.135 V to 6 V. Connect to VDD2
3
4
6
7
8
.
VDD2
3.135 V to 6 V. Connect to VDD.
Rev. A | Page 7 of 16
ADXL001
TYPICAL PERFORMANCE CHARACTERISTICS
VS = 3.3 V, TA = 25°C, unless otherwise noted.
60
25
20
15
10
5
50
40
30
20
10
0
0
(mV/g)
VOLTS
Figure 8. ADXL001-70, Sensitivity Distribution (TA = 125°C)
Figure 5. Zero-g Bias Deviation from Ideal
35
30
25
20
15
10
5
45
40
35
30
25
20
15
10
5
0
0
(mV/g)
VOLTS
Figure 6. Zero-g Bias Deviation from Ideal (TA = 125°C)
Figure 9: ADXL001-250, Sensitivity Distribution
25
20
15
10
5
30
25
20
15
10
5
0
0
(mV/g)
(mV/g)
Figure 7. ADXL001-70, Sensitivity Distribution
Figure 10: ADXL001-250, Sensitivity Distribution (TA = 125°C)
Rev. A | Page 8 of 16
ADXL001
30
25
20
15
10
5
30
25
20
15
10
5
0
0
(mV)
(mV/g)
Figure 14. ADXL001-250, Self-Test Delta
Figure 11. ADXL001-500, Sensitivity Distribution
40
35
30
25
20
15
10
5
30
25
20
15
10
5
0
0
55 56 57 58 59 60 61 62 63 64 65 66 67
(mV)
(mV/g)
Figure 12. ADXL001-500, Sensitivity Distribution (TA = 125°C)
Figure 15. ADXL001-500, Self-Test Delta
25
20
15
10
5
30
25
20
15
10
5
0
0
(mV)
(mA)
Figure 16. ISUPPLY Distribution
Figure 13. ADXL001-70, Self-Test Delta
Rev. A | Page 9 of 16
ADXL001
40
35
30
25
20
15
10
5
0
B
B
W
CH1 500mV
CH2 500mV
M10.0µs
42.80%
A
CH2
1.38V
W
T
(mA)
Figure 18. Turn-On Characteristic (10 μs per DIV)
Figure 17. ISUPPLY at 125°C
Rev. A | Page 10 of 16
ADXL001
THEORY OF OPERATION
DESIGN PRINCIPLES
MECHANICAL SENSOR
The ADXL001 accelerometer provides a fully differential sensor
structure and circuit path for excellent resistance to EMI/RFI
interference.
The ADXL001 is built using the Analog Devices SOI MEMS
sensor process. The sensor device is micromachined in-plane
in the SOI device layer. Trench isolation is used to electrically
isolate, but mechanically couple, the differential sensing elements.
Single-crystal silicon springs suspend the structure over the
handle wafer and provide resistance against acceleration forces.
This latest generation SOI MEMS device takes advantage
of mechanically coupled but electrically isolated differential
sensing cells. This improves sensor performance and size
because a single proof mass generates the fully differential
signal. The sensor signal conditioning also uses electrical
feedback with zero-force feedback for improved accuracy
and stability. This force feedback cancels out the electrostatic
forces contributed by the sensor circuitry.
ANCHOR
MOVABLE
FRAME
PLATE
CAPACITORS
UNIT
SENSING
CELL
FIXED
PLATES
Figure 19 is a simplified view of one of the differential sensor
cell blocks. Each sensor block includes several differential
capacitor unit cells. Each cell is composed of fixed plates attached
to the device layer and movable plates attached to the sensor
frame. Displacement of the sensor frame changes the differential
capacitance. On-chip circuitry measures the capacitive change.
UNIT
FORCING
CELL
MOVING
PLATE
ANCHOR
Figure 19. Simplified View of Sensor Under Acceleration
Rev. A | Page 11 of 16
ADXL001
APPLICATIONS INFORMATION
APPLICATION CIRCUIT
ACCELERATION SENSITIVE AXIS
Figure 20 shows the standard application circuit for the ADXL001.
Note that VDD and VDD2 should always be connected together.
The output is shown connected to a 1000 pF output capacitor
for improved EMI performance and can be connected directly
to an ADC input. Use standard best practices for interfacing
with an ADC and do not omit an appropriate antialiasing filter.
The ADXL001 is an x-axis acceleration and vibration-sensing
device. It produces a positive-going output voltage for vibration
toward its Pin 8 marking.
PIN 8
V
S
C
VDD
0.1µF
V
DD2
V
X
8
DD
Figure 21. XOUT Increases with Acceleration in the Positive X-Axis Direction
1
2
3
7
6
5
DNC
ADXL001
TOP VIEW
(Not to Scale)
OUT
OPERATING VOLTAGES OTHER THAN ꢀ V
DNC
COM
X
OUT
C
OUT
1nF
The ADXL001 is specified at VS = 3.3 V and VS = 5 V. Note that
some performance parameters change as the voltage is varied.
DNC
4
In particular, the XOUT output exhibits ratiometric offset and
sensitivity with supply. The output sensitivity (or scale factor) scales
proportionally to the supply voltage. At VS = 3.3 V, the output
sensitivity is typically 16 mV/g. At VS = 5 V, the output sensitivity
is nominally 24.2 mV/g. XOUT zero-g bias is nominally equal to
VS/2 at all supply voltages.
ST
ST
DNC = DO NOT CONNECT
Figure 20. Application Circuit
SELF-TEST
3.5
The fixed fingers in the forcing cells are normally kept at the
same potential as that of the movable frame. When the digital
self-test input is activated, the ADXL001 changes the voltage on
the fixed fingers in these forcing cells on one side of the moving
plate. This potential creates an attractive electrostatic force, causing
the sensor to move toward those fixed fingers. The entire signal
channel is active; therefore, the sensor displacement causes a
change in XOUT. The ADXL001 self-test function verifies proper
operation of the sensor, interface electronics, and accelerometer
channel electronics.
3.0
NOMINAL ZERO-g
HIGH LIMIT
2.5
2.0
LOW LIMIT
1.5
Do not expose the ST pin to voltages greater than VS + 0.3 V. If
this cannot be guaranteed due to the system design (for instance, if
there are multiple supply voltages), then a low VF clamping
diode between ST and VS is recommended.
1.0
3.2
3.7
4.2
4.7
5.2
5.7
SUPPLY VOLTAGE (V)
Figure 22. Typical Zero-g Bias Levels Across Varying Supply Voltages
Self-test response in gravity is roughly proportional to the cube
of the supply voltage. For example, the self-test response for the
ADXL001-70 at VS = 5 V is approximately 1.4 V. At VS = 3.3 V,
the self-test response for the ADXL001-70 is approximately
400 mV. To calculate the self-test value at any operating voltage
other than 3.3 V or 5 V, the following formula can be applied:
(STΔ @ VX) = (STΔ @ VS) × (VX/VS)3
where:
VX is the desired supply voltage.
VS is 3.3 V or 5 V.
Rev. A | Page 12 of 16
ADXL001
LAYOUT, GROUNDING, AND BYPASSING CONSIDERATIONS
The clock frequency supply response (CFSR) is the ratio of the
response at the output to the noise on the power supply near the
accelerometer clock frequency or its harmonics. A CFSR of 0.9 V/V
means that the signal at the output is half the amplitude of the
supply noise. This is analogous to the power supply rejection
ratio (PSRR), except that the stimulus and the response are at
different frequencies.
CLOCK FREQUENCY SUPPLY RESPONSE
In any clocked system, power supply noise near the clock
frequency may have consequences at other frequencies. An
internal clock typically controls the sensor excitation and the
signal demodulator for micromachined accelerometers.
If the power supply contains high frequency spikes, they may be
demodulated and interpreted as acceleration signals. A signal
appears at the difference between the noise frequency and the
demodulator frequency. If the power supply noise is 100 Hz
away from the demodulator clock, there is an output term at
100 Hz. If the power supply clock is at exactly the same frequency
as the accelerometer clock, the term appears as an offset. If the
difference frequency is outside the signal bandwidth, the output
filter attenuates it. However, both the power supply clock and
the accelerometer clock may vary with time or temperature,
which can cause the interference signal to appear in the output
filter bandwidth.
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 μF capacitor, CDC, adequately
decouples the accelerometer from noise on the power supply.
However, in some cases, particularly where noise is present at
the 1 MHz internal clock frequency (or any harmonic thereof),
noise on the supply can cause interference on the ADXL001
output. If additional decoupling is needed, a 50 Ω (or smaller)
resistor or ferrite bead can be inserted in the supply line.
Additionally, a larger bulk bypass capacitor (in the 1 μF to
4.7 μF range) can be added in parallel to CDC
.
The ADXL001 addresses this issue in two ways. First, the high
clock frequency, 125 kHz for the output stage, eases the task of
choosing a power supply clock frequency such that the difference
between it and the accelerometer clock remains well outside the
filter bandwidth. Second, the ADXL001 has a fully differential
signal path, including a pair of electrically isolated, mechanically
coupled sensors. The differential sensors eliminate most of the
power supply noise before it reaches the demodulator. Good
high frequency supply bypassing, such as a ceramic capacitor
close to the supply pins, also minimizes the amount of interference.
ELECTROMAGNETIC INTERFERENCE
The ADXL001 can be used in areas and applications with high
amounts of EMI or with components susceptible to EMI emissions.
The fully differential circuitry of the ADXL001 is designed to be
robust to such interference. For improved EMI performance,
especially in automotive applications, a 1000 pF output capacitor is
recommended on the XOUT output.
Rev. A | Page 13 of 16
ADXL001
OUTLINE DIMENSIONS
0.031
0.025
0.019
(PLATING OPTION 1,
SEE DETAIL A
FOR OPTION 2)
0.094
0.078
0.062
0.030
0.020 DIA
0.010
0.208
0.197 SQ
0.188
0.055
0.050
0.045
0.22
0.15
0.08
(R 4 PLCS)
1
3
7
5
0.183
0.177 SQ
0.171
0.108
0.100
0.092
0.075 REF
R 0.008
(8 PLCS)
0.010
0.006
0.002
TOP VIEW
BOTTOM VIEW
R 0.008
(4 PLCS)
0.082
0.070
0.058
0.019 SQ
DETAIL A
(OPTION 2)
Figure 23. 8-Terminal Ceramic Leadless Chip Carrier [LCC]
(E-8-1)
Dimensions shown in inches
ORDERING GUIDE
Model1
Temperature Range
g Range
70 g
70 g
250 g
250 g
500 g
500 g
Package Description
8-Terminal LCC
8-Terminal LCC
8-Terminal LCC
8-Terminal LCC
8-Terminal LCC
8-Terminal LCC
Evaluation Board
Evaluation Board
Evaluation Board
Package Option
E-8-1
E-8-1
E-8-1
E-8-1
ADXL001-70BEZ
−40°C to +125°C
−40°C to +125°C
−40°C to +125°C
−40°C to +125°C
−40°C to +125°C
−40°C to +125°C
ADXL001-70BEZ-R7
ADXL001-250BEZ
ADXL001-250BEZ-R7
ADXL001-500BEZ
ADXL001-500BEZ-R7
EVAL-ADXL001-250Z
EVAL-ADXL001-500Z
EVAL-ADXL001-70Z
E-8-1
E-8-1
1 Z = RoHS Compliant Part.
Rev. A | Page 14 of 16
ADXL001
NOTES
Rev. A | Page 15 of 16
ADXL001
NOTES
©2010 Analog Devices, Inc. All rights reserved. Trademarks and
registered trademarks are the property of their respective owners.
D07ꢀ10-0-2/10(A)
Rev. A | Page 16 of 16
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SI9137LG
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SI9122E
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