ADXL1004BCPZ-RL7 [ADI]

Low Noise, Wide Bandwidth, MEMS Accelerometer;
ADXL1004BCPZ-RL7
型号: ADXL1004BCPZ-RL7
厂家: ADI    ADI
描述:

Low Noise, Wide Bandwidth, MEMS Accelerometer

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中文:  中文翻译
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Low Noise, Wide Bandwidth,  
MEMS Accelerometer  
Data Sheet  
ADXL1004  
FEATURES  
FUNCTIONAL BLOCK DIAGRAM  
V
DD  
STANDBY  
Single, in plane axis accelerometer with analog output  
Full-scale range: 500 g  
Linear frequency response range: dc to 24 kHz typical  
(3 dB point)  
ADXL1004  
TIMING  
GENERATOR  
Resonant frequency: 45 kHz typical  
Ultralow noise density: 125 µg/√Hz  
OUTPUT  
MOD  
SENSOR  
DEMOD  
AMP  
X
OUT  
AMPLIFIER  
Overrange sensing plus dc coupling allows fast recovery time  
Complete electromechanical self test  
Sensitivity performance  
Sensitivity stability over temperature within 5%  
Linearity to 0.25% of full-scale range  
Cross axis sensitivity: 1.5% (Z-axis acceleration affect on  
X-axis; Y-axis acceleration affect on X-axis)  
Single-supply operation  
OVERRANGE  
DETECTION  
OR  
SELF TEST  
V
ST  
SS  
Output voltage ratiometric to supply  
Low power consumption: 1.0 mA typical  
Power saving standby operation mode with fast recovery  
RoHS compliant  
Figure 1.  
−40°C to +125°C operating temperature range  
32-lead, 5 mm × 5 mm × 1.80 mm LFCSP package  
APPLICATIONS  
Condition monitoring  
Predictive maintenance  
Asset health  
Test and measurement  
Health usage monitoring systems (HUMSs)  
Acoustic emissions  
GENERAL DESCRIPTION  
The ADXL1004 delivers ultralow noise density over an  
extended frequency range and is optimized for bearing fault  
detection and diagnostics. The ADXL1004 has typical noise  
density of 125 µg/√Hz across the linear frequency range.  
Microelectronicmechanical systems (MEMS) accelerometers  
have stable and repeatable sensitivity, and are immune to  
external shocks up to 10,000 g.  
The integrated signal conditioning electronics enable such  
features as full electrostatic self test (ST) and an overrange (OR)  
indicator, useful for embedded applications. With low power  
and single-supply operation of 3.3 V to 5.25 V, the ADXL1004  
also enables wireless sensing product design. The ADXL1004 is  
available in a 5 mm × 5 mm × 1.80 mm LFCSP package, and  
operates over the −40°C to +125°C temperature range.  
Rev. 0  
Document Feedback  
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responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other  
rights of third parties that may result fromits use. Specifications subject to change without notice. No  
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.  
Trademarks andregisteredtrademarks are the property of their respective owners.  
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.  
Tel: 781.329.4700  
Technical Support  
©2018 Analog Devices, Inc. All rights reserved.  
www.analog.com  
 
 
 
 
ADXL1004  
Data Sheet  
TABLE OF CONTENTS  
Features .............................................................................................. 1  
Operating Modes...........................................................................9  
Bandwidth ......................................................................................9  
Applications Information .............................................................. 10  
Application Circuit..................................................................... 10  
On Demand Self Test................................................................. 10  
Ratiometric Output Voltage...................................................... 10  
Interfacing Analog Output Below 10 kHz .............................. 11  
Interfacing Analog Output Beyond 10 kHz............................ 12  
Overrange.................................................................................... 12  
Mechanical Considerations for Mounting.............................. 12  
Layout and Design Recommendations ................................... 13  
Outline Dimensions....................................................................... 14  
Ordering Guide .......................................................................... 14  
Applications....................................................................................... 1  
Functional Block Diagram .............................................................. 1  
General Description......................................................................... 1  
Revision History ............................................................................... 2  
Specifications..................................................................................... 3  
Absolute Maximum Ratings............................................................ 4  
Thermal Resistance ...................................................................... 4  
Recommended Soldering Profile ............................................... 4  
ESD Caution.................................................................................. 4  
Pin Configuration and Function Descriptions............................. 5  
Typical Performance Characteristics ............................................. 6  
Theory of Operation ........................................................................ 9  
Mechanical Device Operation .................................................... 9  
REVISION HISTORY  
1/2018—Revision 0: Initial Version  
Rev. 0 | Page 2 of 14  
 
Data Sheet  
ADXL1004  
SPECIFICATIONS  
TA = 25°C, VDD = 5.0 V, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are guaranteed. Typical  
specifications may not be guaranteed.  
Table 1.  
Parameter  
Test Conditions/Comments  
Min  
500  
Typ  
Max  
Unit  
SENSOR  
Measurement Range  
Nonlinearity1  
Cross Axis Sensitivity2  
g
Percentage of full-scale  
Z-axis acceleration affect on X-axis  
Y-axis acceleration affect on X-axis  
0.25  
1.5  
1.5  
%
%
%
SENSITIVITY (RATIOMETRIC TO VDD)  
Sensitivity  
DC  
4
mV/g  
Sensitivity Change Due to Temperature3  
ZERO g OFFSET (RATIOMETRIC TO VDD)  
0 g Output Voltage  
TA = −40°C to +125°C  
5
%
VDD/2  
11  
V
g
0 g Output Range over Temperature4  
−40°C to +125°C  
100 Hz to 20 kHz  
NOISE  
Noise Density  
125  
0.1  
µg/√Hz  
Hz  
1/f Frequency Corner  
FREQUENCY RESPONSE  
Sensor Resonant Frequency  
5% Bandwidth5  
41  
45  
10  
24  
kHz  
kHz  
kHz  
3 dB Bandwidth6  
SELF TEST  
Output Change (Ratiometric to VDD)  
Input Voltage Level  
High, VIH  
ST low to ST high  
55  
70  
mV  
VDD × 0.7  
V
Low, VIL  
VDD × 0.3  
V
Input Current  
25  
µA  
OUTPUT AMPLIFIER  
Short-Circuit Current  
Output Impedance  
Maximum Resistive Load  
Maximum Capacitive Load7  
3
<0.1  
20  
100  
22  
mA  
MΩ  
pF  
nF  
No external resistor  
With external resistor  
POWER SUPPLY (VDD)  
Operating Voltage Range  
Quiescent Supply Current  
Standby Current  
Standby Recovery Time (Standby to Measure Mode)  
Turn On Time8  
3.3  
5.0  
1.0  
225  
<50  
<550  
5.25  
1.15  
285  
V
mA  
µA  
µs  
µs  
°C  
Output settled to 1% of final value  
OPERATING TEMPERATURE RANGE  
−40  
+125  
1 Nonlinearity is tested using sine vibration at 13 kHz.  
2 Cross axis sensitivity is defined as the coupling of excitation along a perpendicular axis onto the measured axis output.  
3 Includes package hysteresis from 25°C.  
4 Difference between the maximum and the minimum values in temperature range.  
5 Specified as a frequency range that is within a deviation range relative to dc sensitivity. The range is limited by an increase in response due to response gain at the  
sensor resonant frequency.  
6 Specified as a frequency range that is within a deviation range relative to dc sensitivity. The range is limited by an increase in response due to response gain at the  
sensor resonant frequency.  
7 For capacitive loads larger than 100 pF, an external series resistor must be connected (minimum 8 kΩ). The output capacitance must not exceed 22 nF.  
8 Measured time difference from the instant VDD reaches half its value to the instant at which the output settles to 1% of its final value.  
Rev. 0 | Page 3 of 14  
 
 
ADXL1004  
Data Sheet  
ABSOLUTE MAXIMUM RATINGS  
Table 4. Recommended Soldering Profile  
Table 2.  
Condition  
Parameter  
Rating  
Profile Feature  
Sn63/Pb37  
Pb-Free  
Acceleration  
Average Ramp Rate (TL to TP)  
3°C/sec  
maximum  
3°C/sec  
maximum  
Any Axis, Powered or Unpowered  
Drop Test (Concrete Surface)  
VDD  
Output Short-Circuit Duration  
(Any Pin to Common Ground)  
10,000 g  
1.2 m  
−0.3 V to +5.5 V  
Indefinite  
Preheat  
Minimum Temperature (TSMIN  
Maximum Temperature (TSMAX  
Time (TSMIN to TSMAX)(tS)  
)
100°C  
150°C  
60 sec to  
120 sec  
150°C  
200°C  
60 sec to  
180 sec  
)
Temperature Range (Storage)  
−55°C to +150°C  
TSMAX to TL  
Ramp-Up Rate  
Stresses at or above those listed under Absolute Maximum  
Ratings may cause permanent damage to the product. This is a  
stress rating only; functional operation of the product at these  
or any other conditions above those indicated in the operational  
section of this specification is not implied. Operation beyond  
the maximum operating conditions for extended periods may  
affect product reliability.  
3°C/sec  
maximum  
3°C/sec  
maximum  
Time Maintained Above  
Liquidous (TL)  
Liquidous Temperature (TL)  
Time (tL)  
183°C  
217°C  
60 sec to  
150 sec  
60 sec to  
150 sec  
Peak Temperature (TP)  
Time Within 5°C of Actual Peak  
Temperature (tP)  
240 + 0/−5°C  
10 sec to  
30 sec  
6°C/sec  
maximum  
260 + 0/−5°C  
20 sec to  
40 sec  
6°C/sec  
maximum  
THERMAL RESISTANCE  
Thermal performance is directly linked to printed circuit board  
(PCB) design and operating environment. Careful attention to  
PCB thermal design is required.  
Ramp-Down Rate  
Time 25°C to Peak Temperature  
(t25°C)  
6 min  
maximum  
8 min  
maximum  
θ
JA is the natural convection junction to ambient thermal  
resistance measured in a one cubic foot sealed enclosure.  
JC is the junction to case thermal resistance.  
θ
ESD CAUTION  
Table 3. Package Characteristics  
Package Type  
θJA  
θJC  
Device Weight  
CP-32-261  
48°C/W  
14.1°C/W  
<0.2 g  
1 Thermal impedance simulated values are based on a JEDEC 2S2P thermal  
test board with nine thermal vias. See JEDEC JESD51.  
RECOMMENDED SOLDERING PROFILE  
Figure 2 and Table 4 provide details about the recommended  
soldering profile.  
CRITICAL ZONE  
tP  
T
TO T  
L
P
T
P
L
RAMP-UP  
T
tL  
T
SMAX  
T
SMIN  
tS  
RAMP-DOWN  
PREHEAT  
t25°C TO PEAK  
TIME  
Figure 2. Recommended Soldering Profile  
Rev. 0 | Page 4 of 14  
 
 
 
 
 
 
Data Sheet  
ADXL1004  
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS  
NIC  
NIC  
NIC  
NIC  
NIC  
NIC  
NIC  
NIC  
1
2
3
4
5
6
7
8
24 DNC  
23  
22 DNC  
21 DNC  
+
DNC  
AXIS OF SENSITIVITY  
ADXL1004  
20  
19  
OR  
DNC  
TOP VIEW  
(Not to Scale)  
18 DNC  
17 DNC  
NOTES  
1. NIC = NOT INTERNALLY CONNECTED.  
2. DNC = DO NOT CONNECT. LEAVE THIS PIN UNCONNECTED.  
3. EXPOSED PAD. THE EXPOSED PAD ON THE BOTTOM OF  
THE PACKAGE MUST BE CONNECTED TO GROUND AND  
IS REQUIRED FOR BOTH ELECTRICAL AND  
MECHANICAL PERFORMANCE.  
4. AXIS OF SENSITIVITY IS IN PLANE TO THE PACKAGE  
AND HORIZONTAL AS SHOWN.  
Figure 3. Pin Configuration  
Table 5. Pin Function Descriptions  
Pin No.  
Mnemonic Description  
1 to 9, 31, 32  
NIC  
Not Internally Connected.  
10, 11, 17 to 19, 21 to  
26, 29  
DNC  
Do Not Connect. Leave this pin unconnected.  
12  
VDD  
VSS  
3.3 V to 5.25 V Supply Voltage.  
Supply Ground.  
13, 14, 27, 28  
15  
16  
20  
STANDBY  
ST  
OR  
Standby Mode Input, Active High.  
Self Test Input, Active High.  
Overrange Output. This pin instantaneously indicates when the overrange detection circuit  
identifies significant overrange activity. This pin is not latched.  
30  
XOUT  
Analog Output Voltage.  
EPAD  
Exposed Pad. The exposed pad on the bottom of the package must be connected to ground and is  
required for both electrical and mechanical performance.  
Rev. 0 | Page 5 of 14  
 
ADXL1004  
Data Sheet  
TYPICAL PERFORMANCE CHARACTERISTICS  
8
40  
35  
30  
25  
20  
15  
10  
5
7
6
5
4
3
2
1
0
0
100  
1k  
10k  
FREQUENCY (Hz)  
100k  
3.80 3.84 3.88 3.92 3.96 4.00 4.04 4.08 4.12 4.16 4.20  
SENSITIVITY DISTRIBUTION (mV/g)  
Figure 4. Frequency Response, High Frequency (>5 kHz) Vibration Response;  
a Laser Vibrometer Controller Referencing the ADXL1004 Package Used for  
Accuracy  
Figure 7. Sensitivity Distribution at 25°C  
1000000  
DUT 1  
10000  
1000  
100  
10  
DUT 2  
100000  
10000  
1000  
100  
10  
1
1
0.01  
0.1  
FREQUENCY (Hz)  
1
10  
100  
1k  
10k  
FREQUENCY (Hz)  
100k  
Figure 5. Noise Power Spectral Density (PSD) below 10 Hz vs. Frequency  
Figure 8. Noise PSD above 100 Hz  
1.0  
0.5  
0
–0.5  
–1.0  
–60 –40 –20  
0
20  
40  
60  
80  
100 120 140  
0
100  
200  
300  
400  
500  
TEMPERATURE (°C)  
INPUT ACCELERATION (g)  
Figure 6. Sensitivity vs. Temperature  
Figure 9. Sensitivity Nonlinearity vs. Input Acceleration  
Rev. 0 | Page 6 of 14  
 
 
Data Sheet  
ADXL1004  
10  
40  
35  
30  
25  
20  
15  
10  
5
8
6
4
2
0
–2  
–4  
–6  
–8  
–10  
0
40  
20  
0
20  
40  
60  
80  
100  
120  
2.48  
2.49  
2.49  
2.50  
2.51  
2.52  
2.53  
TEMPERATURE (°C)  
0g OUTPUT DISTRIBUTION (V)  
Figure 10. Normalized Offset vs. Temperature  
Figure 13. 0 g Offset Histogram at 25°C  
1100  
1050  
1000  
950  
900  
850  
800  
750  
700  
650  
600  
280  
260  
240  
220  
200  
180  
160  
140  
3.3  
3.5  
3.7  
3.9  
4.1  
4.3  
4.5  
4.7  
4.9  
5.1  
5.3  
3.3  
3.5  
3.7  
3.9  
4.1  
4.3  
4.5  
4.7  
4.9  
5.1  
5.3  
SUPPLY VOLTAGE (V)  
SUPPLY VOLTAGE (V)  
Figure 14. Standby Current vs. Supply Voltage  
Figure 11. Measure Mode Supply Current vs. Supply Voltage  
45  
40  
35  
30  
25  
20  
15  
10  
5
40  
35  
30  
25  
20  
15  
10  
5
0
0
920  
940  
960  
980 1000 1020 1040 1060 1080  
212 216 220 224 228 232 236 240 244 248  
STANDBY CURRENT (µA)  
MEASURE MODE CURRENT (µA)  
Figure 12. Measure Mode Current Histogram at 25°C  
Figure 15. Standby Current Histogram at 25°C  
Rev. 0 | Page 7 of 14  
ADXL1004  
Data Sheet  
2500  
2000  
1500  
1000  
500  
10  
6
REFERENCE  
DELTA  
OVERRANGE  
X
OUT  
5
8
4
6
3
X
OUT  
(V)  
T
4
2
PU  
T
U
O
1
2
STANDBY  
0
0
0
–1  
–2  
–2  
6.5  
–500  
4.0  
4.5  
5.0  
5.5  
TIME (ms)  
6.0  
0
5
10  
15  
20  
25  
30  
35  
40  
TIME (µs)  
Figure 18. Response to Overload Condition, XOUT Delta is Difference from  
Midscale Voltage  
Figure 16. XOUT Output Recovery from Standby Mode to Measure Mode  
200.5  
200.0  
199.5  
199.0  
198.5  
198.0  
197.5  
197.0  
196.5  
196.0  
195.5  
204  
203  
202  
201  
200  
199  
198  
197  
196  
195  
194  
–50  
0
50  
100  
150  
3.3  
3.8  
4.3  
4.8  
5.3  
TEMPERATURE (°C)  
SUPPLY VOLTAGE (V)  
Figure 19. Internal Clock Frequency vs. Supply Voltage at 25°C  
Figure 17. Internal Clock Frequency vs. Temperature at 5.0 V Supply Voltage (VDD  
)
Rev. 0 | Page 8 of 14  
 
 
Data Sheet  
ADXL1004  
THEORY OF OPERATION  
The ADXL1004 is a low noise, single-axis, MEMS accelerometer,  
with a 45 kHz resonant frequency that provides an analog output  
proportional to mechanical vibration. The ADXL1004 has a high  
g range of 500 g, suitable for vibration measurements in high  
bandwidth applications. Such applications include vibration  
analysis systems for monitoring and diagnosing machines or  
system health.  
MECHANICAL DEVICE OPERATION  
The moving component of the sensor is a polysilicon surface-  
micromachined structure built on top of a silicon wafer. Polysilicon  
springs suspend the structure over the surface of the wafer and  
provide a resistance against acceleration forces.  
Differential capacitors that consist of independent fixed plates  
and plates attached to the moving mass measure the deflection  
of the structure. Acceleration deflects the structure and unbalances  
the differential capacitor, resulting in a sensor output with amp-  
litude proportional to acceleration. Phase sensitive demodulation  
determines the magnitude and polarity of the acceleration.  
The low noise and high frequency bandwidth allows the  
measurement of vibration patterns caused by small moving  
components, such as internal bearings. The high g range  
provides the dynamic range necessary for in high vibration  
environments such as heating, ventilation, and air conditioning  
(HVAC) and heavy machine equipment. To achieve proper  
performance, be aware of system noise, mounting, and signal  
conditioning.  
OPERATING MODES  
The ADXL1004 has two operating modes: measurement mode  
and standby mode. Measurement mode provides a continuous  
analog output for active monitoring. Standby mode is a  
nonoperational, low power mode.  
System noise is affected by supply voltage noise. The analog  
output of the ADXL1004 is a ratiometric output; therefore,  
supply voltage modulation affects the output. Use a properly  
decoupled, stable supply voltage to power the ADXL1004 and to  
provide a reference voltage for the digitizing system.  
Measurement Mode  
Measurement mode is the normal operating mode of the  
ADXL1004. In this mode, the accelerometer actively measures  
acceleration along the axis of sensitivity and consumes 1.0 mA  
(typical) using a 5.0 V supply.  
The output signal is impacted by an overrange stimulus. An  
overload indicator output feature indicates a condition that is  
critical for an intelligent measurement system. For more infor-  
mation about the overrange features, see the Overrange section.  
Standby Mode  
Placing the ADXL1004 in standby mode suspends the measure-  
ment with internal reduction of current consumption to 225 µA  
(typical for 5.0 V supply). The transition time from standby to  
measurement mode is <50 µs. Figure 16 shows the transition  
from standby to measure mode.  
Proper mounting ensures full mechanical transfer of vibration  
to accurately measure the desired vibration rather than vibration  
of the measurement system, including the sensor. A common  
technique for high frequency mechanical coupling is to use a  
sensor stud mount system while considering the mechanical  
interface of fixing the ADXL1004 in the stud. For lower frequencies  
(below the full capable bandwidth of the sensor), it may be possible  
to use magnetic or adhesive mounting. Proper mounting technique  
ensures proper and repeatable results that are not influenced by  
measurement system mechanical resonances and/or damping at  
the desired frequency, and represents an efficient and proper  
mechanical transfer to the system being monitored.  
BANDWIDTH  
The ADXL1004 circuitry supports an output signal bandwidth  
beyond the resonant frequency of the sensor, measuring accel-  
eration over a bandwidth comparable to the resonant frequency  
of the sensor. The output response is a combination of the sensor  
response and the output amplifier response. Therefore, external  
band limiting or filtering is required; see the Interfacing Analog  
Output Below 10 kHz section and the Interfacing Analog  
Output Beyond 10 kHz section for more information.  
Proper application specific signal conditioning is required to  
achieve optimal results. Understanding the measurement  
frequency range and managing overload conditions is  
important to achieve accurate results. The electrical output  
signal of the ADXL1004 requires some band limiting and a  
proper digitization bandwidth. See the Interfacing Analog  
Output Below 10 kHz section and the Interfacing Analog  
Output Beyond 10 kHz section for more information.  
When using the ADXL1004 beyond 10 kHz, consider the  
nonlinearity due to the resonance frequency of the sensor, the  
additional noise due to the wideband output of the amplifier,  
and the discrete frequency spurious tone due to coupling of the  
internal 200 kHz clock. Aliased interferers in the desired band  
cannot be removed, and observed performance degrades. A  
combination of high speed sampling and appropriate band  
limiting filtering is required for optimal performance.  
Rev. 0 | Page 9 of 14  
 
 
 
 
ADXL1004  
Data Sheet  
APPLICATIONS INFORMATION  
4. Subtract the two readings and compare the result to the  
expected value from Table 1, while factoring in the  
response curve due to supply voltage, if necessary, from  
Figure 21.  
APPLICATION CIRCUIT  
For most applications, a single 1 µF capacitor adequately  
decouples the accelerometer from noise on the power supply. A  
band limiting filter at the output provides suppression of out of  
band noise and signal. A capacitive load between 100 pF and  
22 nF is recommended.  
The self test function can be activated at any point during  
normal operation by setting the ST pin to VDD. Self test takes  
approximately 300 µs from the assertion of the ST pin to a  
result. Acceleration outputs return approximately 300 µs after  
the release of the ST pin. While performing the self test  
measurement, do not use the accelerometer output to measure  
external acceleration.  
The output amplifier can drive resistive loads up to 2 mA of  
source current, for example a load greater than 2.5 kΩ for 5 V  
operation. If the output is to drive a capacitive load greater than  
or equal to 100 pF, a series resistor of at least 8 kΩ is required to  
maintain the amplifier stability.  
100  
When inactive, the ST and STANDBY pins are forced low. The  
overrange indicator is an output that can be monitored to  
identify the status of the system.  
90  
80  
70  
60  
50  
40  
30  
20  
10  
0
OPTIONAL  
LOW-PASS FILTER  
R
V
OUT  
C
V
SS  
3.3  
3.5  
3.7  
3.9  
4.1  
4.3  
4.5  
4.7  
4.9  
5.1  
5.3  
SUPPLY VOLTAGE (V)  
Figure 21. Typical Self Test Delta vs. Supply Voltage  
ADXL1004  
RATIOMETRIC OUTPUT VOLTAGE  
OR  
The ADXL1004 was tested and specified at VDD = 5.0 V; however, it  
can be powered with VDD as low as 3.3 V or as high as 5.25 V. Some  
performance parameters change as the supply voltage is varied.  
The ADXL1004 output is ratiometric to the supply voltage, VDD  
therefore, the output sensitivity (or scale factor) varies propor-  
tionally to the supply voltage. At VDD = 5.0 V, the output sensitivity  
is typically 4 mV/g for the ADXL1004. The zero g bias output is  
ratiometric also and is nominally midscale relative to the supply  
voltage (VDD/2).  
;
V
DD  
(3.3V TO 5.25V  
SUPPLY VOLTAGE)  
ST (ACTIVE HIGH)  
1µF  
STANDBY (ACTIVE HIGH)  
Figure 20. Application Circuit Change  
ON DEMAND SELF TEST  
4.5  
A fully integrated electromechanical self test function is designed  
into the ADXL1004. This function electrostatically actuates the  
accelerometer proof mass, resulting in a displacement of the  
capacitive sense fingers. This displacement is equivalent to the  
displacement that occurs as a result of external acceleration input.  
The proof mass displacement is processed by the same signal  
processing circuitry as a true acceleration output signal,  
providing complete coverage of both the electrical and mechanical  
responses of the sensor system.  
4.0  
3.5  
3.0  
2.5  
2.0  
The self test feature can be exercised by the user with the  
following steps:  
3.0  
3.5  
4.0  
4.5  
5.0  
1. Measure the output voltage.  
2. Turn on self test by setting the ST pin to VDD  
3. Measure the output again.  
SUPPLY VOLTAGE (V)  
.
Figure 22. Sensitivity vs. Supply Voltage  
Rev. 0 | Page 10 of 14  
 
 
 
 
 
Data Sheet  
ADXL1004  
The ADXL1004 output amplifier is stable while driving capacitive  
loads up to 100 pF directly without a series resistor. At loads greater  
than 100 pF, an 8 kΩ series resistor or greater must be used.  
INTERFACING ANALOG OUTPUT BELOW 10 kHz  
The ADXL1004 senses mechanical motion along a single axis and  
produces a voltage output. The system performance depends on  
the output response resulting from sense mechanical vibration and  
signal processing of the electrical output.  
See Figure 23 for an example of the interface, including compo-  
nents when measuring mechanical vibration from 0 kHz to  
5 kHz. For a 5 kHz pass band, a single-pole resistor capacitor  
(RC) filter is acceptable; however, in some applications, use of a  
more aggressive filter and lower sample ADC sample rate is  
possible. The following components are recommended to form  
a 5 kHz low-pass RC filter at the output of the ADXL1004 when  
interfacing to an ADC, such as the ADAQ7980: R1 = 91 kΩ, C1 =  
330 pF, R2 = 0 Ω, and C2 = not required. A minimum ADC  
sample rate of 16 kHz is recommended to avoid aliasing. When  
using sampling rates less than the resonance frequency (typically  
45 kHz), be aware and account for the effective gain at the output of  
the sensor due to the resonance to ensure out of band signals  
are properly attenuated and do not alias in band.  
The sensor must be effectively mechanically coupled. Mechanical  
coupling can be a complex integration of multiple components,  
typically unique for each application. Consideration must be  
made for all mechanical interfaces including the mounting of  
the MEMS to the PCB (the location on the PCB as well as the  
solder chemistry), the size of the PCB (both thickness and active  
surface area), and the mounting of the PCB to the system being  
monitored (either in a module or directly mounted).  
In general, the following guidelines for effective mechanical  
interface must be used to support up to 10 kHz bandwidth:  
Keep the ADXL1004 near a stable mechanical mounting on  
the PCB.  
See Figure 23 for an example of the interface, including compo-  
nents when measuring mechanical vibration from 0 kHz to 10 kHz.  
The following components are recommended to form a two-pole  
RC filter at the output of the ADXL1004: R1 = 500 Ω, C1 =  
10,000 pF, R2 = 1 kΩ, and C2 = 10,000 pF. A minimum ADC  
sample rate of 200 kHz is recommended to avoid aliasing.  
Provide multiple hard mounting points.  
Keep the PCB thick and avoid a large surface area PCB that  
induces higher magnitude and lower frequency resonances.  
Ensure the mechanical connection is sufficiently stiff to  
transfer mechanical forces up to the desired frequency.  
Below 10 kHz, magnetic and adhesive mounting is possible  
with proper attention. The EVAL-ADXL1004Z evaluation  
boards can be used as a reference.  
V
DD  
3.3V TO 5.0V*  
AD4000 V  
1.8V  
DD  
0.1µF  
(+1µF, OPTIONAL)  
The ADXL1004 electrical output supports a bandwidth beyond the  
resonance of the sensor. The small signal bandwidth of the output  
amplifier in the ADXL1004 is 70 kHz. During the digitization  
process, aliasing, which is the folding of higher frequency noise  
and signals into the desired band, can occur. To avoid aliasing  
noise from the amplifier and other internal circuits (for example,  
coupling of the internal 200 kHz clock), it is recommended that  
an external filter be implemented at the desired bandwidth and  
the chosen analog-to-digital converter (ADC) sampling rate be  
faster than the amplifier bandwidth.  
10µF  
V
DD  
R1  
R2  
REF  
VDD  
X
IN+  
OUT  
C1  
C2  
ADAQ7980  
IN–  
ADXL1004  
GND  
V
SS  
*3.3V LIMITED BY ADXL1004; 5.0V LIMITED BY AD4000.  
Figure 23. Application Circuit for the ADXL1004  
The output amplifier is ratiometric to the supply voltage, and  
there are two distinct cases regarding digital conversion, as  
follows:  
The user has an ADC downstream of the accelerometer  
that can use the VDD voltage as a reference. In this case, the  
voltage supply tolerance and voltage temperature  
coefficient (commonly associated with external regulators)  
tracks between the sensor and the ADC. Therefore, the  
supply and reference voltage induced error cancels out.  
This design approach is recommended.  
If the ADC cannot reference the same 5 V supply as the  
sensor for any reason, the sensitivity of the digitized sensor  
output reflects the regulator tolerance and temperature  
coefficient.  
Rev. 0 | Page 11 of 14  
 
 
ADXL1004  
Data Sheet  
The sampling rate must be at least 220 kHz. This sample rate  
addresses reducing broadband noise due to the amplifier from  
folding back (aliasing) in-band, but does not prevent out of  
band signals from aliasing in-band. To prevent out of band  
responses, additional external low-pass filtering is required.  
INTERFACING ANALOG OUTPUT BEYOND 10 kHz  
The ADXL1004 is a high frequency, single-axis MEMS  
accelerometer that provides an output signal pass band beyond  
the resonance frequency range of the sensor. Although the output  
3 dB frequency response bandwidth is approximately 24 kHz  
(note that this is a 3 dB response, meaning there is a gain in  
sensitivity at this frequency), in some cases, it is desirable to  
observe frequency beyond this range. To accommodate this, the  
ADXL1004 output amplifier supports a 70 kHz small signal  
bandwidth, which is well beyond the resonant frequency of the  
sensor.  
Another artifact that must be addressed is the coupling of the  
internal clock signal at 200 kHz onto the output signal. This  
clock spur must be filtered by analog or digital filtering so as  
not to affect the analysis of results.  
To achieve the lowest rms noise and noise density for extended  
bandwidth applications, it is recommended to use at least a  
multiple order low-pass filter at the output of the ADXL1004 and  
a digitization sample rate of at least 4× the desired bandwidth,  
assuming sufficient filtering of the 200 kHz internal clock signal.  
Use an ADC sample rate of 1 MSPS or greater along with digital  
low-pass filtering to achieve similar performance.  
Although a mechanical interface is always important to achieve  
accurate and repeatable results in MEMS applications, it is  
critical in cases when measuring greater than a few kilohertz.  
Typically, magnetic and adhesive mounting are not sufficient to  
maintain proper mechanical transfer of vibration through these  
frequencies. Mechanical system analysis is required for these  
applications.  
OVERRANGE  
The ADXL1004 has an output (OR pin) to signal when an  
overrange event (when acceleration is greater than 2× the full-scale  
range) occurs. Built in overrange detection circuitry provides an  
alert to indicate a significant overrange event occurred that is  
larger than approximately 2× the specified g range. When an  
overrange is detected, the internal clock is disabled to the sensor  
for 200 µs to maximize protection of the sensor element during an  
overrange event. If a sustained overrange event is encountered, the  
overrange detection circuitry triggers periodically,  
When using the ADXL1004 beyond 10 kHz, consider the  
nonlinearity due to the resonance frequency of the sensor, the  
additional noise due to the wideband output of the amplifier,  
and the discrete frequency spurious tone due to coupling of the  
internal 200 kHz clock. If any of these interferers alias in the  
desired band, it cannot be removed and observed performance  
degrades. A combination of high speed sampling and  
appropriate filtering is required for optimal performance.  
The first consideration is the effect of the sensor resonance  
frequency at 45 kHz. Approaching and above this frequency, the  
output response to an input stimulus peaks, as shown in Figure 4.  
When frequencies are near or above the resonance, the output  
response is outside the linear response range and the sensitivity is  
different than observed at lower frequencies. In these frequency  
ranges, the relative response (as opposed to absolute value) over  
time is typically observed.  
approximately every 500 µs (see Figure 18).  
MECHANICAL CONSIDERATIONS FOR MOUNTING  
Mount the ADXL1004 on the PCB in a location close to a hard  
mounting point of the PCB. Mounting the ADXL1004 at an  
unsupported PCB location, as shown in Figure 24 may result  
in large, apparent measurement errors due to undamped PCB  
vibration. Placing the accelerometer near a hard mounting point  
ensures that any PCB vibration at the accelerometer is above the  
mechanical sensor resonant frequency of the accelerometer and  
effectively invisible to the accelerometer. Multiple mounting  
points, close to the sensor, and a thicker PCB help reduce the  
effect of system resonance on the performance of the sensor.  
The ADXL1004 output amplifier small signal bandwidth is  
70 kHz. The user must properly interface to the device with  
proper signal filtering to avoid issues with out of band noise  
aliasing into the desired band. The amplifier frequency response  
roll-off can be modeled as a single-pole, low-pass filter, at  
70 kHz. In the absence of additional external low-pass filtering,  
to avoid aliasing of high frequency noise, choose a sampling  
rate of at 2× the equivalent noise bandwidth (ENBW) for a  
single-pole, low-pass filter, as follows:  
ACCELEROMETERS  
PCB  
MOUNTING POINTS  
ENBW = (π/2) × 70 kHz ≈ 110 kHz  
Figure 24. Incorrectly Placed Accelerometers  
Rev. 0 | Page 12 of 14  
 
 
 
 
Data Sheet  
ADXL1004  
LAYOUT AND DESIGN RECOMMENDATIONS  
Figure 25 shows the recommended PCB land pattern.  
0.03″/0.755mm  
0.02″/0.5mm  
32 31 30 29 28 27 26 25  
1
2
3
4
5
6
7
8
24  
23  
22  
21  
20  
19  
18  
17  
0.146″/3.7mm 0.191″/4.855mm  
9
10 11 12 13 14 15 16  
0.012″/0.305mm  
0.146″/3.7mm  
0.191″/4.855mm  
Figure 25. Recommended Printed Wiring Board Land Pattern  
Rev. 0 | Page 13 of 14  
 
 
ADXL1004  
Data Sheet  
OUTLINE DIMENSIONS  
DETAIL A  
(JEDEC 95)  
5.10  
5.00 SQ  
4.90  
0.30  
0.25  
0.20  
PIN 1  
PIN 1  
INDICATOR  
INDIC ATOR AREA OPTIONS  
(SEE DETAIL A)  
25  
32  
24  
1
0.50  
BSC  
3.80  
3.70 SQ  
3.60  
EXPOSED  
PAD  
8
17  
16  
9
0.45  
0.40  
0.35  
0.20 MIN  
TOP VIEW  
BOTTOM VIEW  
3.50 REF  
*
1.85  
1.80  
1.75  
FOR PROPER CONNECTION OF  
THE EXPOSED PAD, REFER TO  
THE PIN CONFIGURATION AND  
FUNCTION DESCRIPTIONS  
0.05 MAX  
0.02 NOM  
COPLANARITY  
0.08  
SEATING  
PLANE  
SECTION OF THIS DATA SHEET.  
0.203 REF  
*
COMPLIANT TO JEDEC STANDARDS MO-220-VHHD-4  
WITH EXCEPTION TO PACKAGE HEIGHT.  
Figure 26. 32-Lead Lead Frame Chip Scale Package [LFCSP]  
5 mm × 5 mm Body and 1.8 mm Package Height  
(CP-32-26)  
Dimensions shown in millimeters  
ORDERING GUIDE  
Model1  
Temperature Range  
−40°C to +125°C  
−40°C to +125°C  
−40°C to +125°C  
g Range  
500 g  
500 g  
Package Description  
Package Option  
CP-32-26  
CP-32-26  
ADXL1004BCPZ  
ADXL1004BCPZ-RL  
ADXL1004BCPZ-RL7  
EVAL-ADXL1004Z  
32-Lead Lead Frame Chip Scale Package [LFCSP]  
32-Lead Lead Frame Chip Scale Package [LFCSP]  
32-Lead Lead Frame Chip Scale Package [LFCSP]  
ADXL1004 Evaluation Board  
500 g  
CP-32-26  
1 Z = RoHS Compliant Part.  
©2018 Analog Devices, Inc. All rights reserved. Trademarks and  
registered trademarks are the property of their respective owners.  
D16508-0-1/18(0)  
Rev. 0 | Page 14 of 14  
 
 

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