ADXRS612BBGZ-RL [ADI]
【250∑/sec Yaw Rate Gyro; ± 250 °/秒偏航角速度陀螺仪
| 型号： | ADXRS612BBGZ-RL |
| 厂家： | 
ADI |
| 描述： | 【250∑/sec Yaw Rate Gyro |
| 文件： | 总12页 (文件大小：699K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
± ±250°/sec YacꢀYꢁscꢂGyr
cc
ADXꢀS61±
FEATURES
GENERAL DESCRIPTION
Complete rate gyroscope on a single chip
Z-axis (yaw rate) response
High vibration rejection over wide frequency
2000 g powered shock survivability
Ratiometric to referenced supply
5 V single-supply operation
The ADXRS612 is a complete angular rate sensor (gyroscope)
that uses the Analog Devices, Inc. surface-micromachining
process to make a functionally complete and low cost angular
rate sensor integrated with all of the required electronics on one
chip. The manufacturing technique for this device is the same
high volume BIMOS process used for high reliability automotive
airbag accelerometers.
105°C operation
Self-test on digital command
Ultrasmall and light (<0.15 cc, <0.5 gram)
Temperature sensor output
The output signal, RATEOUT (1B, 2A), is a voltage propor-
tional to angular rate about the axis normal to the top surface
of the package. The output is ratiometric with respect to a provided
reference supply. A single external resistor can be used to lower
the scale factor. An external capacitor is used to set the bandwidth.
Other external capacitors are required for operation.
RoHS compliant
APPLICATIONS
Vehicle chassis rollover sensing
Inertial measurement units
Platform stabilization
A temperature output is provided for compensation techniques.
Two digital self-test inputs electromechanically excite the sensor
to test proper operation of both the sensor and the signal condi-
tioning circuits. The ADXRS612 is available in a 7 mm × 7 mm ×
3 mm BGA chip-scale package.
FUNCTIONAL BLOCK DIAGRAM
+5V
(ADC REF)
100nF
+5V
ST2 ST1
TEMP
V
RATIO
ADXRS612
AV
CC
100nF
25kΩ
SELF-TEST
25kΩ
@ 25°C
AGND
DEMOD
MECHANICAL
SENSOR
DRIVE
AMP
AC
AMP
VGA
+5V
180kΩ ±1%
V
DD
CHARGE PUMP
AND VOLTAGE
REGULATOR
100nF
PGND
CP1 CP2 CP3 CP4 CP5 SUMJ
RATEOUT
100nF
22nF
22nF
C
OUT
Figure 1.
Rev. 0
Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
rights of third parties that may result from its use. Specifications subject to change without notice. No
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.
Trademarks and registeredtrademarks arethe property of their respective owners.
One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
Tel: 781.329.4700
Fax: 781.461.3113
www.analog.com
©2007 Analog Devices, Inc. All rights reserved.
ADXꢀS61±c
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TABLEcOFcCONTENTSc
Features .............................................................................................. 1
Theory of Operation .........................................................................9
Setting Bandwidth.........................................................................9
Temperature Output and Calibration.........................................9
Calibrated Performance................................................................9
ADXRS612 and Supply Ratiometricity ................................... 10
Null Adjustment ......................................................................... 10
Self-Test Function ...................................................................... 10
Continuous Self-Test.................................................................. 10
Outline Dimensions....................................................................... 11
Ordering Guide .......................................................................... 11
Applications....................................................................................... 1
General Description......................................................................... 1
Functional Block Diagram .............................................................. 1
Revision History ............................................................................... 2
Specifications..................................................................................... 3
Absolute Maximum Ratings............................................................ 4
Rate Sensitive Axis ....................................................................... 4
ESD Caution.................................................................................. 4
Pin Configuration and Function Descriptions............................. 5
Typical Performance Characteristics ............................................. 6
REVISION HISTORY
3/07—Revision 0: Initial Version
Rev. 0 | Page 2 of 12
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ADXꢀS61±
SPECIFICATIONSc
All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed. TA = −40°C to +105°C, VS = AVCC
=
VDD = 5 V, VRATIO = AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (COUT = 0.01 μF), IOUT = 100 μA, 1 g, unless otherwise noted.
Table 1.
ADXRS612BBGZ
Parameter
SENSITIVITY1
Measurement Range2
Initial and Over Temperature
Temperature Drift3
Nonlinearity
Conditions
Unit
°/sec
mV/°/sec
%
Min
Typ
Max
Clockwise rotation is positive output
Full-scale range over specifications range
−40°C to +10ꢀ°C
±2ꢀ0
6.2
±300
7.0
±2
7.8
Best fit straight line
0.1
% of FS
NULL1
Null
−40°C to +10ꢀ°C
Any axis
2.1ꢀ
2.ꢀ
0.1
2.8ꢀ
V
Linear Acceleration Effect
NOISE PERFORMANCE
Rate Noise Density
FREQUENCY RESPONSE
Bandwidth4
°/sec/g
0.06
14.ꢀ
TA ≤ 2ꢀ°C
°/sec/√Hz
0.01
12
2ꢀ00
17
Hz
kHz
Sensor Resonant Frequency
SELF-TEST1
ST1 RATEOUT Response
ST2 RATEOUT Response
ST1 to ST2 Mismatchꢀ
Logic 1 Input Voltage
Logic 0 Input Voltage
Input Impedance
TEMPERATURE SENSOR1
VOUT at 2ꢀ°C
ST1 pin from Logic 0 to Logic 1
ST2 pin from Logic 0 to Logic 1
−7ꢀ0
300
−ꢀ
−ꢀ2ꢀ
ꢀ2ꢀ
−300
7ꢀ0
+ꢀ
mV
mV
%
V
V
3.3
1.7
100
To common
40
ꢀ0
kΩ
Load = 10 MΩ
@ 2ꢀ°C, VRATIO = ꢀ V
2.3ꢀ
2.ꢀ
9
2.6ꢀ
V
Scale Factor6
mV/°C
kΩ
Load to VS
2ꢀ
2ꢀ
Load to Common
TURN-ON TIME
OUTPUT DRIVE CAPABILITY
Current Drive
Capacitive Load Drive
POWER SUPPLY
kΩ
ms
Power on to ±±°/sec of final
For rated specifications
ꢀ0
200
1000
μA
pF
Operating Voltage (VS)
Quiescent Supply Current
TEMPERATURE RANGE
Specified Performance
4.7ꢀ
−40
ꢀ.00
3.ꢀ
ꢀ.2ꢀ
4.ꢀ
V
mA
+10ꢀ
°C
1 Parameter is linearly ratiometric with VRATIO
.
2 Measurement range is the maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at ꢀ V supplies.
3 From +2ꢀ°C to −40°C or +2ꢀ°C to +10ꢀ°C.
4 Adjusted by external capacitor, COUT. Reducing bandwidth below 0.01 Hz does not result in further noise improvement.
ꢀ Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2).
6 Scale factor for a change in temperature from 2ꢀ°C to 26°C. VTEMP is ratiometric to VRATIO. See the Temperature Output and Calibration section for more information.
Rev. 0 | Page 3 of 12
ADXꢀS61±c
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ABSOLUTEcMAXIMUMcꢀATINꢂSc
RATE SENSITIVE AXIS
Table 2.
This is a Z-axis rate-sensing device (also called a yaw rate-
sensing device). It produces a positive going output voltage
for clockwise rotation about the axis normal to the package
top, that is, clockwise when looking down at the package lid.
Parameter
Acceleration (Any Axis, 0.ꢀ ms)
Unpowered
Powered
Rating
2000 g
2000 g
VDD, AVCC
VRATIO
–0.3 V to +6.0 V
AVCC
RATE
AXIS
RATE OUT
ST1, ST2
AVCC
V
= 5V
CC
Output Short-Circuit Duration
(Any Pin to Common)
Operating Temperature Range
Storage Temperature Range
Indefinite
LONGITUDINAL
AXIS
4.75V
+
1
V
/2
RATIO
7
−ꢀꢀ°C to +12ꢀ°C
−6ꢀ°C to +1ꢀ0°C
RATE IN
0.25V
A B C D E F G
LATERAL AXIS
A1
GND
Stresses above those listed under the Absolute Maximum
Ratings may cause permanent damage to the device. This is a
stress rating only; functional operation of the device at these or
any other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
Figure 2. RATEOUT Signal Increases with Clockwise Rotation
ESD CAUTION
Drops onto hard surfaces can cause shocks of greater than
2000 g and can exceed the absolute maximum rating of the
device. Care should be exercised in handling to avoid damage.
Rev. 0 | Page 4 of 12
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ADXꢀS61±
PINcCONFIꢂUꢀATIONcANDcFUNCTIONcDESCꢀIPTIONSc
V
CP5
CP3
DD
CP4
PGND
7
6
5
4
3
2
CP1
ST1
CP2
ST2
AV
TEMP
CC
1
AGND
RATEOUT
V
NC
D
SUMJ
C
RATIO
G
F
E
B
A
Figure 3. Pin Configuration
Table 3. Pin Function Descriptions
Pin No.
6D, 7D
6A, 7B
6C, 7C
ꢀA, ꢀB
4A, 4B
3A, 3B
1B, 2A
1C, 2C
1D, 2D
1E, 2E
1F, 2G
3F, 3G
4F, 4G
ꢀF, ꢀG
6G, 7F
6E, 7E
Mnemonic
Description
CPꢀ
CP4
CP3
CP1
CP2
AVCC
RATEOUT
SUMJ
NC
VRATIO
AGND
TEMP
ST2
ST1
PGND
VDD
HV Filter Capacitor, 0.1 μF.
Charge Pump Capacitor, 22 nF.
Charge Pump Capacitor, 22 nF.
Charge Pump Capacitor, 22 nF.
Charge Pump Capacitor, 22 nF.
Positive Analog Supply.
Rate Signal Output.
Output Amp Summing Junction.
No Connection.
Reference Supply for Ratiometric Output.
Analog Supply Return.
Temperature Voltage Output.
Self-Test for Sensor 2.
Self-Test for Sensor 1.
Charge Pump Supply Return.
Positive Charge Pump Supply.
Rev. 0 | Page ꢀ of 12
ADXꢀS61±c
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T PICALcPEꢀFOꢀMANCEcCHAꢀACTEꢀISTICSc
N > 1000 for all typical performance plots, unless otherwise noted.
16
25
20
15
10
5
14
12
10
8
6
4
2
0
0
–7 –6 –5 –4 –3 –2 –1
0
1
2
3
4
5
6
7
% DRIFT
VOLTS
Figure 7. Sensitivity Drift over Temperature
Figure 4. Null Output at 25°C (VRATIO = 5 V)
45
40
35
30
25
20
15
10
5
25
20
15
10
5
0
0
–675
–625
–575
–525
(mV)
–475
–425
–375
(°/sec/°C)
Figure 5. Null Drift over Temperature (VRATIO = 5 V)
Figure 8. ST1 Output Change at 25°C (VRATIO = 5 V)
30
25
20
15
10
5
45
40
35
30
25
20
15
10
5
0
0
375 400 425 450 475 500 525 550 575 600 625 650 675
(mV)
6.3 6.4 6.5 6.6 6.7 6.8 6.9 7.0 7.1 7.2 7.3 7.4 7.5 7.6 7.7
(mV/°/sec)
Figure 6. Sensitivity at 25°C (VRATIO = 5 V)
Figure 9. ST2 Output Change at 25°C (VRATIO = 5 V)
Rev. 0 | Page 6 of 12
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ADXꢀS61±
50
45
40
35
30
25
20
15
10
5
40
35
30
25
20
15
10
5
0
0
2.40 2.42 2.44 2.46 2.48 2.50 2.52 2.54 2.56 2.58 2.60
–5
–4
–3
–2
–1
0
1
2
3
4
5
% MISMATCH
VOLTS
Figure 13. VTEMP Output at 25°C (VRATIO = 5 V)
Figure 10. Self-Test Mismatch at 25°C (VRATIO = 5 V)
3.3
800
3.1
2.9
2.7
2.5
2.3
2.1
1.9
1.7
1.5
600
400
ST2
200
0
–200
–400
–600
–800
ST1
256 PARTS
100 120
–40
–20
0
20
40
60
80
–40
–20
0
20
40
60
80
100
120
TEMPERATURE (°C)
TEMPERATURE (°C)
Figure 11. Typical Self-Test Change over Temperature
Figure 14. VTEMP Output over Temperature, 256 Parts (VRATIO = 5 V)
60
40
REF
50
40
Y
35
30
25
20
15
10
5
X
+45°
–45°
30
20
10
0
–10
–20
0
750
770
790
TIME (ms)
810
830
850
3.0 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 3.9 4.0 4.1
(mA)
Figure 12. Current Consumption at 25°C (VRATIO = 5 V)
Figure 15. g and g × g Sensitivity for a 50 g, 10 ms Pulse
Rev. 0 | Page 7 of 12
ADXꢀS61±c
c
1.6
1.4
1.2
1.0
0.8
0.6
0.4
0.2
0.10
0.05
0
–0.05
LAT
LONG
RATE
0
100
–0.10
1k
10k
0
20
40
60
80
100
120
140
(Hz)
TIME (Hours)
Figure 16. Typical Response to 10 g Sinusoidal Vibration
Figure 19. Typical Shift in 90 sec Null Averages Accumulated over 140 Hours
(Sensor Bandwidth = 2 kHz)
0.10
400
300
200
100
DUT1 OFFSET BY +200°/sec
0.05
0
0
–100
–200
–300
–400
DUT2 OFFSET BY –200°/sec
–0.05
–0.10
0
600
1200
1800
2400
3000
3600
0
50
100
150
200
250
TIME (Seconds)
(ms)
Figure 17. Typical High g (2500 g) Shock Response
Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz)
(Sensor Bandwidth = 40 Hz)
1
0.1
0.1
0.01
0.01
0.001
0.001
0.0001
0.01
0.1
1
10
100
1k
10k
100k
10
100
1k
10k
100k
AVERAGING TIME (Seconds)
(Hz)
Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time
Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz)
Rev. 0 | Page 8 of 12
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ADXꢀS61±
THEOꢀ cOFcOPEꢀATIONc
0.1
0.01
The ADXRS612 operates on the principle of a resonator gyro.
Two polysilicon sensing structures each contain a dither frame
that is electrostatically driven to resonance, producing the neces-
sary velocity element to produce a Coriolis force during angular
rate. At two of the outer extremes of each frame, orthogonal to
the dither motion, are movable fingers that are placed between
fixed pickoff fingers to form a capacitive pickoff structure that
senses Coriolis motion. The resulting signal is fed to a series of
gain and demodulation stages that produce the electrical rate
signal output. The dual-sensor design rejects external g-forces and
vibration. Fabricating the sensor with the signal conditioning
electronics preserves signal integrity in noisy environments.
0.001
0.0001
0.00001
0.000001
10
100
1k
10k
100k
The electrostatic resonator requires 18 V to 20 V for operation.
Because only 5 V are typically available in most applications,
a charge pump is included on-chip. If an external 18 V to 20 V
supply is available, the two capacitors on CP1 to CP4 can be
omitted, and this supply can be connected to CP5 (Pin 6 D,
Pin 7D). CP5 should not be grounded when power is applied to
the ADXRS612. No damage occurs, but under certain conditions
the charge pump may fail to start up after the ground is removed
without first removing power from the ADXRS612.
(Hz)
Figure 22. Noise Spectral Density with Additional 250 Hz Filter
TEMPERATURE OUTPUT AND CALIBRATION
It is common practice to temperature-calibrate gyros to improve
their overall accuracy. The ADXRS612 has a temperature propor-
tional voltage output that provides input to such a calibration
method. The temperature sensor structure is shown in Figure 23.
The temperature output is characteristically nonlinear, and any
load resistance connected to the TEMP output results in decreasing
the TEMP output and its temperature coefficient. Therefore,
buffering the output is recommended.
SETTING BANDWIDTH
External Capacitor COUT is used in combination with the on-
chip ROUT resistor to create a low-pass filter to limit the bandwidth
of the ADXRS612 rate response. The −3 dB frequency set by
The voltage at TEMP (3F, 3G) is nominally 2.5 V at 25°C, and
VRATIO = 5 V. The temperature coefficient is ~9 mV/°C at 25°C.
Although the TEMP output is highly repeatable, it has only
modest absolute accuracy.
ROUT and COUT is
fOUT = 1/ 2 × π × ROUT × COUT
and can be well controlled because ROUT has been trimmed
during manufacturing to be 180 kΩ 1ꢀ. Any external resistor
applied between the RATEOUT pin (1B, 2A) and SUMJ pin
(1C, 2C) results in
V
RATIO
V
TEMP
R
R
FIXED
TEMP
Figure 23. ADXRS612 Temperature Sensor Structure
ROUT
=
180 kꢁ × REXT
/
180 kꢁ + REXT
CALIBRATED PERFORMANCE
In general, an additional filter (in either hardware or software)
is added to attenuate high frequency noise arising from demodu-
lation spikes at the 14 kHz resonant frequency of the gyro. The
noise spikes at 14 kHz can be clearly seen in the power spectral
density curve, shown in Figure 21. Normally, this additional
filter corner frequency is set to greater than five times the
required bandwidth to preserve good phase response.
Using a 3-point calibration technique, it is possible to calibrate
the ADXRS612 null and sensitivity drift to an overall accuracy
of nearly 200°/hour. An overall accuracy of 40°/hour or better
is possible using more points. Limiting the bandwidth of the
device reduces the flat-band noise during the calibration process,
improving the measurement accuracy at each calibration point.
Figure 22 shows the effect of adding a 250 Hz filter to the
output of an ADXRS612 set to 40 Hz bandwidth (as shown
in Figure 21). High frequency demodulation artifacts are
attenuated by approximately 18 dB.
Rev. 0 | Page 9 of 12
ADXꢀS61±c
c
ADXRS612 AND SUPPLY RATIOMETRICITY
SELF-TEST FUNCTION
The ADXRS612 RATEOUT and TEMP signals are ratiometric
to the VRATIO voltage; that is, the null voltage, rate sensitivity, and
temperature outputs are proportional to VRATIO. So the ADXRS612
is most easily used with a supply-ratiometric analog-to-digital
converter, which results in self-cancellation of errors due to minor
supply variations. There is some small error due to nonratiometric
behavior. Typical ratiometricity error for null, sensitivity, self-test,
and temperature output is outlined in Table 4.
The ADXRS612 includes a self-test feature that actuates each of
the sensing structures and associated electronics in the same
manner, as if subjected to angular rate. It is activated by standard
Logic High levels applied to Input ST1 (5F, 5G), Input ST2
(4F, 4G), or both. ST1 causes the voltage at RATEOUT to change
about −0.5 V, and ST2 causes an opposite change of +0.5 V. The
self-test response follows the viscosity temperature dependence
of the package atmosphere, approximately 0.25ꢀ/°C.
Note that VRATIO must never be greater than AVCC.
Activating both ST1 and ST2 simultaneously is not damaging.
ST1 and ST2 are fairly closely matched ( 5ꢀ), but actuating
both simultaneously may result in a small apparent null bias
shift proportional to the degree of self-test mismatch.
Table 4. Ratiometricity Error for Various Parameters
Parameter
VS = VRATIO = 4.75 V
VS = VRATIO = 5.25 V
ST1
ST1 and ST2 are activated by applying a voltage equal to VRATIO
to the ST1 pin and the ST2 pin. The voltage applied to ST1 and
ST2 must never be greater than AVCC.
Mean
Sigma
ST2
−0.4%
0.6%
−0.3%
0.6%
CONTINUOUS SELF-TEST
Mean
Sigma
Null
Mean
Sigma
Sensitivity
Mean
Sigma
VTEMP
−0.4%
0.6%
−0.3%
0.6%
The on-chip integration of the ADXRS612 gives it higher reliability
than is obtainable with any other high volume manufacturing
method. Also, it is manufactured under a mature BIMOS process
that has field-proven reliability. As an additional failure detection
measure, power-on self-test can be performed. However, some
applications may warrant continuous self-test while sensing rate.
Details outlining continuous self-test techniques are also
available in a separate application note.
−0.04%
0.3%
−0.02%
0.2%
0.03%
0.1%
0.1%
0.1%
Mean
Sigma
−0.3%
0.1%
−0.ꢀ%
0.1%
NULL ADJUSTMENT
The nominal 2.5 V null is for a symmetrical swing range at
RATEOUT (1B, 2A). However, a nonsymmetric output swing
may be suitable in some applications. Null adjustment is possible
by injecting a suitable current to SUMJ (1C, 2C). Note that supply
disturbances may reflect some null instability. Digital supply noise
should be avoided, particularly in this case.
Rev. 0 | Page 10 of 12
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ADXꢀS61±
OUTLINEcDIMENSIONSc
*
7.05
6.85 SQ
6.70
A1 CORNER
INDEX AREA
7
6
5
4
3
2
1
A
A1 BALL PAD
INDICATOR
B
C
D
E
F
4.80
BSC SQ
BOTTOM
VIEW
TOP VIEW
G
0.80 BSC
(BALL PITCH)
DETAIL A
3.80 MAX
DETAIL A
3.30 MAX
2.50 MIN
0.60
0.25
COPLANARITY
0.15
0.60
0.55
SEATING
PLANE
0.50
BALL DIAMETER
*
BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED
TO THE D/A PAD INTERNALLY VIA HOLES.
Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA]
(BG-32-3)
Dimensions shown in millimeters
ORDERING GUIDE
Model
ADXRS612BBGZ1
ADXRS612BBGZ-RL1
Temperature Range
–40°C to +10ꢀ°C
–40°C to +10ꢀ°C
Package Description
Package Option
32-Lead Ceramic Ball Grid Array [CBGA]
32-Lead Ceramic Ball Grid Array [CBGA]
BG-32-3
BG-32-3
1 Z = RoHS Compliant Part.
Rev. 0 | Page 11 of 12
ADXꢀS61±c
NOTESc
c
©2007 Analog Devices, Inc. All rights reserved. Trademarks and
registered trademarks are the property of their respective owners.
D06521-0-3/07(0)
Rev. 0 | Page 12 of 12
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