ESRF-ESF-100NL-01-02-02 [ES]

Resistive MEMS Gas Flow Sensor;


型号：	ESRF-ESF-100NL-01-02-02
厂家：	ES Systems
描述：	Resistive MEMS Gas Flow Sensor
文件：	总14页 (文件大小：900K)
中文：	中文翻译
下载：	下载PDF数据表文档文件

Datasheet ESRF-ESF

Resistive MEMS Gas Flow Sensor

•

State of the art performance due to MEMS resistive technology

High accuracy and resolution

<±1.25% RD Total Error Band

Wide dynamic range

Bidirectional Flow Measurement

Gas Flow sensor: up to ±300 ln/min

Temperature compensation: 0^oC to +50^oC

Calibrated & temperature compensated analog or digital output

Excellent long term stability

Low temperature drift

Compact size

Product Summary

ES Systems has developed ESRF-ESF, an inline gas flow sensor, based on the hot-film

anemometer principle for mass gas flow measurements.

ESRF-ESF is one of the few gas flow sensors featuring bidirectional gas flow sensing of up to

±300 ln/min with a total error band of <±1.25% RD. ESRF-ESF gas flow sensors provide

calibrated and temperature compensated output on an SPI, I²C bus or analog output making

them plug & play for direct interfacing to low voltage MCUs and systems. The user is provided

with a multitude of interface and output options so that the right sensor configuration can be

selected based on the specific requirements for each application.

Calibration gas is air but other non-aggressive gases are available upon request.

Typical Applications

Medical

Ventilation • Anesthesia • Inspiratory flow sensing • Gas mixing • Respiratory measurements •

Drug delivery • Expiratory flow measurement • Metabolic Measurements • Proximal Flow

measurement • Proximal flow measurement for infants / neonates • Expiratory flow

measurement for infants / neonates • Ventilation & Anesthesia for infants / neonates •

Respiratory measurements for infants / neonates • Metabolic Measurements for infants /

neonates • Oxygen concentrators and conservers • Respirators and ventilators • Nebulizers •

Continuous positive airway pressure (CPAP) • Anesthesia machines • Anesthesia delivery

machines, ventilators • ventricular assist devices (heart pumps), spirometers • laparoscopy

Industrial

Mass flow controllers (Telecommunication systems, Environmental climate controls, Fuel cell

controls, Process gas control welding equipment and lasers) • Analytic instrumentation

(spectrometry, chromatography) • Air-to-fuel ratio • Fuel cells • Fume hoods • Gas leak

detection • Process control gas monitoring • Vacuum pump monitoring • Clogging detection •

Flow measurement • Air volume measurement • Process automation • Burner control •

Environment monitoring • Laboratory

v1.6

Datasheet ESRF-ESF

1. Total Error Band

Total Error Band (TEB) is a single specification that includes all possible sources of error in a gas flow measurement.

TEB should not be confused with accuracy, which is actually a component of TEB. TEB is the worst error that the sensor

could experience. The TEB specification on a datasheet may be confusing. ES Systems uses the TEB specification in its

datasheet because it is the most comprehensive measurement of a sensor’s true accuracy. ES Systems also provides

the accuracy specification in order to provide a common comparison with competitors’ literature that does not use the

TEB specification.

All Possible Errors

Offset

Full Scale Span

Flow Non-Linearity

Flow Hysteresis

Accuracy

TEB

Noise

Flow Non-Repeatability

Thermal Effect on Offset

Thermal Effect on Span

Thermal Hysteresis

The figure below, illustrates the accuracy as well as the total error of the flow measurement of ESRF-ESF sensors.

Accuracy Performance

Range: 15, 20, 50, 100, 200, 300 ln/min

- 0% FS to 10%FS = ±0.125%FS

- 10%FS to 100%FS = ±1.0% RD

Total Error Band Performance

Range: 15, 20, 50, 100, 200, 300 ln/min

- 0% FS to 10%FS = ±0.125%FS

- 10%FS to 100%FS = ±1.25% RD

2/14

Datasheet ESRF-ESF

2. Absolute Maximum Ratings¹

Characteristic

Min.

Max.

Unit

4.8

5.5

Vdc

Supply voltage (V_supply

Voltage on any pin

Current on any pin

Burst pressure

)

-0.3

5.5

barg

^oC[^oF]

ln/min

-20[-4]

-550

+85[+185]

550

Storage temperature

Maximum flow applied

Absolute maximum ratings are the extreme limits the device will withstand without damage. The electrical and

performance characteristics are not guaranteed as the maximum limits are approached, nor will the device necessarily

operate as specified at absolute maximum ratings. Prolonged operation at absolute maximum ratings will degrade

the device performance

CAUTION

IMPROPER USE

PRODUCT DAMAGE

Do not use these products to sense liquid flow.

Failure to comply with the instructions may

result in product damage.

Do not disassemble these products.

Failure to comply with the instructions may

result in product damage.

3. Operating Specifications

Characteristic

Min.

Typ.

Max.

5.2

Unit

Supply voltage (V_supply

)

4.8

5.0

Supply current

I²C, SPI, Analog

Output

Start-up time²

100

msec

^oC[^oF]

% RH

Operating temp. range

-20[-4]

0[+32]

+85[+185]

+50[+122]

Compensated temp range

Relative humidity (non-condensing)

Pneumatic connection type

Compatible gases

ISO5356-1:2004

Inert non aggressive gases

Gas conversion factor

Air to O₂

Air to N₂

1.0190

0.9997

Update rate

1.6

Digital bus frequency

100

kHz

Analog output loading

Sink

Source

¹The sensor is not reverse polarity protected. Incorrect application of supply voltage or ground to the wrong pin may

cause electrical failure

²After 95% of V_supplyreached

3/14

Datasheet ESRF-ESF

4. Flow Sensor Specifications

Characteristic

Absolute

Typ.

Unit

Min.

Max.

Flow direction

Unidirectional / bidirectional

Full scale ranges

Unidirectional

Bidirectional

10, 15, 20, 50, 100, 200, 300

ln/min¹

±10, ±15, ±20, ±50, ±100, ±200, ±300

1.0

Flow cut²

%FS³

Max measured flow

-330

330

ln/min

Calibration gas

Clean, Dry Air⁴

Operating temp. range⁵

Compensated temp range⁶

-20[-4]

+85[+185]

^oC[^oF]

bara

bits

0[+32]

+50[+122]

Operating pressure

Proof pressure

1.0

1.3

1.7

Effective resolution

Response time

msec

Total error band^7,8(<10%FS)

±0.125

%FS

Total error band⁷(>10%FS)

Accuracy^10,11(<10%FS)

±1.25

±0.125

±1.0

0.001

%RD⁹

%FS

Accuracy¹⁰(>10%FS)

%RD

Orientation sensitivity¹²

%FS/^o

%FSS¹⁴

Long term stability¹³

±0.1

¹In normal liters per minute at 0^oC and 1013 mbar

²Flow measured below this point will always indicate 0 ln/min

³% of the full scale

⁴Other, non-aggressive, gases available upon request

The temperature range over which the sensor will produce an output proportional to flow (Non condensing

humidity)

The temperature range over which the sensor will produce an output proportional to flow within the specified

performance limits. Note that for valid datasheet values, ambient and gas temperatures must be the same

⁷The maximum deviation from ideal transfer function over the entire compensated temperature and flow range.

Includes all errors due to offset, full scale span, accuracy, thermal effect on offset, thermal effect on span and thermal

hysteresis

⁸For the 10 ln/min FS flow option only, TEB for flows <10%FS is ±0.5%FS

⁹% of the reading value

The maximum deviation in output from a Best Fit Straight Line (BFSL) fitted to the output measured over the flow

range at 21^oC [69.8^oF]. Includes all errors due to flow non-linearity, flow hysteresis, non-repeatability and noise

¹¹For the 10 ln/min FS flow option only, accuracy for flows <10%FS is ±0.5%FS

¹²Added measurement error due to orientation deviation from the optimal (calibration) position

¹³Accelerated Life Test Profile: 100hours at 90^oC

¹⁴Full Scale Span (FSS): The algebraic difference between the output signal measured at the maximum (U_max) and the

minimum (U_min) limits of the flow range

4/14

Datasheet ESRF-ESF

5. Flow Range Specifications (ln/min)

Flow Range

Pressure

Flow Range

Unit

Drop @ FS

U_min

U_{max (Digital Output)}

U_{max (Analog Output)}

0.1

16.5

ln/min

0.07

0.15

0.17

mbar

010NL

0.15

0.2

0.5

015NL

020NL

050NL

100NL

200NL

300NL

110

220

330

100

200

300

2.4

8.6

18.4

¹Flows below U_minwill always indicate 0 ln/min

²In order to improve the quality of the flow measurements, the digital output features an extra 10% flow range from

the nominal FS flow.

6. Temperature Sensor Specifications

Absolute

Characteristic

Unit

Min.

Typ.

Max.

^oC[^oF]

^oC

Full Scale range

0 [+32]

+50 [+122]

Accuracy

0.5

bits

Resolution

5/14

Datasheet ESRF-ESF

7. Data & Register Description

The ESRF-ESF sensors provide measurement and status data. The measurement data are

flow rate and temperature whilst the status data refer to the sensors factory programed

serial number. The data are stored in specific data registers as described below. The readout

is performed by using multibyte read transactions.

Flow Data Register [0x00]

DEFAULT VALUE

ADDRESS

0x00

Calibrated Flow Byte 1

Calibrated Flow Byte 2

TYPE

MNEMONIC

CAL_DATA[15:8]

CAL_DATA[7:0]

(Hex)

Variable

When performing transaction with the ESRF-ESF sensors the returned data is always MSB

first. Flow is represented as a 16-bit, two’s complement number. The lowest number in the

Flow Data Register is 0x8000 (-32768 in Decimal) and the highest number is 0x7FFF (32767 in

Decimal). In unidirectional ESF sensors output data higher than 0x7FFF must be ignored.

Calibrated flow (in SLPM) can be calculated using the following formula:

Eq. 1

An example of unidirectional flow:

Flow Register Byte [0] = 0x3F

Flow Register Byte [1] = 0xFF

Using the formula (Eq 1) and assuming a full scale flow of 200 ln/min, the calculated output

should be 109.9932 ln/min

An example of bidirectional flow:

Flow Register Byte [0] = 0xFC

Flow Register Byte [1] = 0x18

Using the formula (Eq.1) and assuming a full scale flow of 200 ln/min, the calculated output

should be –6.7139 ln/min

6/14

Datasheet ESRF-ESF

Temperature Data Register [0x01]

ADDRESS

0x01

TYPE DEFAULT VALUE

MNEMONIC

Calibrated Temp Byte 1

Variable

CAL_DATA[15:8]

Calibrated Temp Byte 2

CAL_DATA[7:0]

Temperature is represented as a 16-bit, unsigned integer number. The lowest number in the

Temperature Data Register is 0x0000 (0 in Decimal) and the highest number is 0xFFFF (65535

in Decimal). The full data representation range of this register in C is from –20^oC to +80^oC.

However, the temperature sensor accuracy is defined within the temperature compensation

range of the device which is from 0^oC to +50^oC .

Calibrated Temperature (in ^oC) can be calculated using the following formula:

Eq. 2

An example of Temperature conversion:

Temperature Register Byte [0] = 0x84

Temperature Register Byte [1] = 0x32

Using the formula (Eq. 2) the calculated output should be 31.64^oC

Serial Number Register [0x03]

DEFAULT

VALUE (Hex)

ADDRESS

0x03

TYPE

MNEMONIC

Serial Number Byte 1

Serial Number Byte 2

Serial Number Byte 3

Serial Number Byte 4

Fixed ID

SER_NO[31:24]

SER_NO[23:16]

SER_NO[15:8]

SER_NO[7:0]

Fixed ID

Each ESRF-ESF sensor is uniquely identified by a 32-bit serial number. This number can be

read from the Serial Number Register and is 4 bytes long.

An example of a serial number conversion:

Serial No Register Byte [0] = 0x01

Serial No Register Byte [1] = 0x05

Serial No Register Byte [2] = 0x62

Serial No Register Byte [3] = 0x1F

The serial number 0x0105621F corresponds to 17130015 in decimal.

7/14

Datasheet ESRF-ESF

Software Reset Function [0xFE]

The device has an additional option to perform a software reset via the I2C communication

interface. This option is useful in specific cases depending on the application. For instance,

the user could issue a S/W reset to assure correct initialization after a hot-plug connection.

The procedure to reset the device is the same as changing a register, followed by the byte

0xFE. In other words, the user must first send the byte 0x8A (7 bit address plus write bit) and

then the byte 0xFE (I²C Mode) or just 0xFE (SPI Mode). The device will then return its

acknowledge bit and immediately reset itself. After 100 milliseconds, the device will be ready

to give its first valid sample.

8. I²C Interface

VDD

SDA

Master

MCU

FLOW

SCL

At power on reset, the sensor defaults to transmission of the contents of the Flow Data

set, the sensor returns the contents of the Flow Data Register after acknowledging (ACK) by

holding the SDA line low. The master should then provide at least 18 clock pulses on the SCL

line in order to readout the two Flow Data Bytes. An acknowledge bit (ACK) should be provided

by the master on each byte received by holding the SDA line low while providing the 9^thclock

pulse. The same frame structure also applies to a Temperature Data transaction. An example

of such a transaction can be seen below.

SlaveAdd+W

SlaveAdd+R

Data 0

DataN

N P

SCL

...

SDA

Start

Stop

SlaveACK

Master ACK

Master NACK

If in any case the master sends a slave address or a register address that is not recognized a

NACK condition will be returned by the sensor. The sensor supports clock stretching

functionality

8/14

Datasheet ESRF-ESF

9. SPI Interface

MOSI

MISO

SCLK

Master

MCU

FLOW

ESRF-ESF sensors have the option of a serial peripheral interface communication following

the memory mapping as described in section 9. The sensor uses MODE 0 SPI with CPOL = 0

and CPHA = 0.

The SPI communication requires to send, via the MOSI signal, the address to read and then

the following clock pulses will produce the required result on the MISO line. The following

examples describe the SPI transactions for reading the flow and the temperature output of

the sensor.

SCLK

MOSI

0x00

DON T CARE

FLOW BYTE [0]

FLOW BYTE [1]

MISO

SCLK

MOSI

0x01

DON T CARE

TEMPERATURE BYTE [0]

TEMPERATURE BYTE [1]

MISO

9/14

Datasheet ESRF-ESF

10. Analog Interface

PSU

ꢀꢁ5.0VDC

MULTIMETER

FLOW

DATA ACQUISITION

SYSTEM

ESRF-ESF sensors also feature the option of an analog voltage output (+0.5 to +4.5V), which

allows for the readout of flow in an analog way by means of a data acquisition system or a

multimeter. In this case the user needs to ensure that the power supply can sustain the

power requirements of the sensor at full flow as specified in the electrical specifications table.

As this is a voltage output configuration the user must ensure that the cables running from

the sensor to the data acquisition system are as short as possible to prevent errors from

potential voltage drops. It should be noted that the min analog voltage output is 0.5V and the

maximum 4.5V

Eq. 3

Eq. 4

17. Wetted Matterials¹

Component

Flow Port

Glass Reinforced Thermoplastic, Gold, Si, SiN, SiO_x, epoxy,

silicon rubber, FR4, polyurethane, SS316, Fluoropolymer

Ports and covers

Housing

Glass Reinforced thermoplastic

Substrate

Adhesives

Gold, FR4

Epoxy

Weight

50.6g

Directives compliance

RoHS, WEEE, CE

¹Contact ES Systems Customer Service for detailed material information

10/14

Datasheet ESRF-ESF

11. Pinout

Output¹

I²C

PIN1

PIN2

PIN3

PIN4

PIN5

PIN6

VCC

GND

SDA

SCL

MISO

VCC

GND

MOSI

SCLK

SPI

Output +

Output –²

Analog

¹Connector P/N: S6B-PH-K-S, manufacturer: JST

²Analog ground

12. Environmental Specifications

Characteristic

Parameter

IEC IP40 (excluding tubing sections)

Wetted materials degree of protection

15g, 10Hz to 2 kHz

100g, 6ms duration

Vibration

Shock

ESD IEC6100-4-2 air discharge up to 8 kV, or direct

contact discharge up to 4 kV

ESD

level 3 from 80 MHz to 1000 MHz per IEC61000-4-

3, 1m shielded cable with 3cm exposed leads at

connector.

EMC/EMI

Life¹

1 million flow cycles minimum

¹Life may vary depending on specific application in which the sensor is used

15. Mechanical Specifications (all dimensions in mm)

11/14

Datasheet ESRF-ESF

13. Instructions of Use

Calibration orientation

The ESRF-ESF sensors are calibrated in a horizontal position. As depicted in the following

graph.

For optimal performance, the sensor requires at least 20x ID of laminarizing pipe length in the

flow inlet and another 20x ID in the outlet. ESRF-ESF sensors are calibrated using 20mm ID

pipe diameter. The diameter of the inlet and outlet flow pipes should be as close to the

calibration diameter as possible. It is also possible to insert O-rings in the grooves and attach

tubes with an inner diameter of 23 mm to the ESRF-ESF. The dimensions of the O-ring are

illustrated bellow.

Temperature compensation

The ESRF-ESF sensor features digital temperature compensation. The temperature is

measured on the MEMS element by an on-chip temperature sensor. This data is fed to a

compensation circuit that is also integrated on the microprocessor. Thus, no external

temperature compensation is necessary.

Sensor Handling

The ESRF-ESF sensor is designed to be robust and shock resistant. Nevertheless, the accuracy

of the high-precision ESRF-ESF can be degraded by rough handling. ES Systems does not

guarantee proper operation in case of improper handling.

12/14

Datasheet ESRF-ESF

14. Ordering Information

ESRF-ESF-NNNNN-NN-NN-NN-N

Temperature Sensor

Flow Range¹

FS (ln/min)

Directionality

Yes

010NL

Unidirectional

015NL

020NL

050NL

100NL

200NL

300NL

Bidirectional

Gas

Output Type

Air

I²C

100

200

300

Other

SPI

0.5-4.5V

¹Custom calibration ranges are available upon request

13/14

Datasheet ESRF-ESF

Important Notes

No warranty applies to any party other than the original

Customer. The remedies of the Customer set forth

herein are exclusive and the total liability of ES Systems

with respect to this order, whether based on contract,

warranty, negligence, indemnification, strict liability or

otherwise, shall not exceed the purchase price of the

component upon which liability is based.

PERSONAL INJURY

DO NOT USE these products as safety or emergency

stop devices, or in any other application where

failure of the product could result in personal injury.

Failure to comply with these instructions could result in

death or serious injury.

In no event shall ES Systems be liable for consequential,

incidental or special damages.

WARRANTY

ES Systems warrants this Product to be free of defects in

materials and workmanship for a period of one (1) year

from the date of purchase.

Specifications may change without notice. The

information supplied is believed to be accurate and

reliable as of this issue; however, ES Systems assumes no

responsibility for its use.

Upon examination by ES Systems, if the unit is found to

be defective it will be repaired or replaced at no charge.

ES Systems' WARRANTY does not apply to defects

resulting from any action of the purchaser, including but

not limited to mishandling, improper interfacing,

operation outside of design limits, improper repair, or

unauthorized modification. This WARRANTY is VOID if the

unit shows evidence of having been tampered with or

Contact Information

ES Systems S.A.

Head Office:

7, Stratigi St., GR-154 51

Neo Psychico, Greece

Tel: (+30) 210 672 8610,

Fax (+30) 210 672 8624

shows evidence of being damaged as

excessive corrosion; or current, heat, moisture or

vibration;

a result of

Factory:

57, I.Metaxa str., GR-194 41

Koropi, Greece

Tel: (+30) 216 2000 500,

Fax (+30) 216 2000 555

improper specification; misapplication; misuse or other

operating conditions outside of ES Systems' control.

Components which wear are not warranted.

ES Systems neither assumes responsibility for any

omissions or errors nor assumes liability for any

damages that result from the use of its Product in

accordance with information provided by ES Systems,

either verbal or written. ES Systems warrants only that

the parts manufactured by it will be as specified and free

of defects.

ES SYSTEMS MAKES NO OTHER WARRANTIES OR

REPRESENTATIONS OF ANY KIND WHATSOEVER,

EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND

ALL

IMPLIED

WARRANTIES

INCLUDING

ANY

WARRANTY OF MERCHANTABILITY AND FITNESS FOR

A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED.

No representative of ES Systems is authorized to extend

this Warranty or to change it in any manner whatsoever.

14/14

ESRF-ESF-100NL-01-02-02 [ES]

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