SM5102-060-G [ETC]
OEM Silicon Pressure Die; OEM硅压力模具
| 型号： | SM5102-060-G |
| 厂家： | 
ETC |
| 描述： | OEM Silicon Pressure Die |
| 文件： | 总2页 (文件大小：294K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
SM5102
SILICON
OEM Silicon Pressure Die
MICROSTRUCTURES
I N C O R P O R A T E D
• OEM SILICON PRESSURE SENSOR DIE
Compensated
DESCRIPTION
The SM5102 is a silicon micro-machined,
piezoresistive pressure-sensing chip. These
devices are available in full-scale ranges
from 5 to 300 psi and are ideal for OEM and
high volume applications.
Provided in die form, these sensors can be
mounted on ceramic or PC board substrates
as part of an OEM system. They also may
be packaged into proprietary, or application
specific sensor lines.
Die are probed, inked and diced, and
shipped on tape.
FEATURES
Custom pressure ranges available in high-
volume applications. Field-shield, high
stability parts are also available on a
custom-bases.
•
•
•
High Volume, Low Cost
Gage and Absolute Versions
Constant Current or Constant Voltage
Drive
•
•
Millivolt Output
5, 15, 30, 60, 100 and 300 PSI Ranges
Available
APPLICATIONS
•
•
•
•
•
•
Altimeters
Tire Gauges
Medical Instrumentation
Industrial Sensors
Diving Modules
Home Appliances
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
SM5102
CHARACTERISTICS FOR SM5102 - SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
0
Typ
5
Max
10
Units
V
Notes
Excitation Voltage
Excitation Current
Span (FS Range)
5 psi
1
0
1.5
3
mA
2
75
115
130
130
130
130
-50
-24
-7
100
145
165
180
200
220
0
125
175
195
220
250
275
50
mV
mV
15 psi
30 psi
mV
60 psi
mV
100 psi
mV
300 psi
mV
Offset
mV
TC Span
-19
-1
-15.5
+7
%FS/100 oC
%FS/100 oC
%/100 oC
%FS
3
4
TC Offset
TC Resistance
Linearity
24
27.5
0.05
3.15
33
-0.3
2.70
3X
0.3
Bridge Impedance
Proof Pressure
Burst Pressure
Operating Temperature
4.00
kohm
Rated FS
Rated FS
oC
5X
-40
-55
125
150
Storage Temperature
oC
Notes:
1.80 mm
1.
Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to circuit side of die when bridge is driven with positive voltage.
Measured at 5V constant voltage excitation.
Measured from 0 to 70 C
+V exc.
2.
3.
4.
+ Sig
1.80 mm
Defined as best straight line.
1.38 mm
-V exc.
Vsub
-Sig
Pad size =
0.12 X 0.12 mm
-V exc.
2.00 mm
Positive output for pressure
applied to the top (circuit)
side of the sensor
Die dimensions in mm
SM5102 die (2 mm square as sawn).
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
See separate Application Notes for typical range of variation in Saw
dimensions.
ORDERING INFORMATION:
Pressure Ranges
Model Number
PSI
5
5102
005
015
030
060
100
300
Pressure Type
15
A: Absolute
SM5102- 015 - A
30
G: Gage
60
100
300
Pressure
range
Pressure
Type
Custom ranges available in high volumes
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
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