SPD030G [ETC]

Smartec Pressure Sensor; SMARTEC压力传感器
SPD030G
型号: SPD030G
厂家: ETC    ETC
描述:

Smartec Pressure Sensor
SMARTEC压力传感器

传感器 压力传感器
文件: 总4页 (文件大小:51K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
Specifications  
SPD series  
Version 1.0  
SPD series Performance Characteristic at Vcc =5V excitation @ 25° C.  
Parameter  
Min  
Typ  
Max  
Units.  
ExcitationVoltage  
0
5
10  
Volts  
ExcitationCurrent  
Offset  
0
-50  
1.5  
0
3.0  
50  
mA  
mV  
Temp Coeff Span  
-27  
-7  
-22  
-17  
+7  
33  
%FS/100°C  
%FS/100°C  
%FS/100°C  
Temp Coeff Offset  
Temp Coeff Resistance  
23  
28  
Linearity  
-0.3  
± 0.1  
+0.3  
0.15  
%FS  
Hysteresis  
% of Range  
1
Repeatability )  
± 0.2  
1
±0.5  
FSO  
ms  
Response time (10-90%)  
Bridge resistance  
Pressure overload  
2.7  
3.3  
4.0  
1.35  
KW  
Bar  
Operatingtemperature  
Storage temperature  
-20  
-30  
85  
°C  
°C  
125  
1
6
) measured after 1,000 temp. cycles 0– 70°C, 10 pressure cycles (10-90%FS)  
Type Range (Bar) Min  
Typ(FS)  
Max  
Unit  
005G  
015G  
030G  
100G  
0 - 0.350  
0 - 1  
70  
100  
140  
160  
190  
130  
175  
200  
240  
mV  
mV  
mV  
mV  
100  
120  
120  
0 - 2  
0 - 6.5  
1 Pa = 0.145. 10 –3 PSI or 1 PSI = 6.89476*103 Pa  
1 Bar = 105 Pa = 105 N/m2  
Understanding the specifications  
The available range of SPD series pressure sensors allows for a wide  
range of applications. In order to get good results, it is very important to  
fully understand the meaning of the various specifications and their  
effects on accuracy, especially the ones that deal with temperature  
coefficients. (Silicon resistors are very temperature dependent).  
-2 –  
SMARTEC BV, Delpratsingel 26  
4811 AP Breda, The Netherlands  
WWW.SMARTEC.NL  
Tel: +31 76 5205353  
Specifications  
SPD series  
Version 1.0  
Excitation voltage  
The excitation of the sensor can be AC or DC. Specifications are given  
with a DC excitation of 5V. In order to avoid electrical breakdown it is  
advised not to exceed the maximum values given.  
Offset  
The offset value is the electrical output voltage (imbalance) of the  
pressure sensor when zero pressure is applied. The offset value for the  
absolute type is determined by extrapolating the measured values at  
two different pressures (atmospheric air and 0.05 Bar). The pressure in  
reference chamber is about 25 mTorr (3.33 Pa).  
Temperature coefficients  
Silicon resistors are very temperature dependent. The overall drift of the  
resistors is not of interest to most users (The bridge resistors are  
located on the same die). The temperature coefficients of the offset and  
span, however, are very important. All the temperature coefficients are  
given in percentage of full-scale range (FS) and over a temperature  
range of 100 °C.  
The maximum value of the temperature coefficient of the span is minus  
27%, which means that worst case the span becomes 27% smaller  
over the full temperature range of 100 °C. The offset will vary no more  
than ±7% of the span over the same temperature range.  
Calculation example (please refer to the parameter table above)  
Suppose the use of a pressure sensor of type SPD 015G over a  
temperature range of 100 °C. The typical full scale span is 140 mV. The  
offset (at a fixed temperature) will be between -50 and +50 mV.  
Offset  
When the static part of the offset has been nulled, the offset can still  
vary ±7% of 140 mV (± 9.8 mV), over the temperature range of 100°C.  
Span  
The typical full-scale span is 140 mV and the typical temperature  
coefficient of the span equals –22 %FS/100 °C.  
Typically, you would therefore have a span, which varies between 140  
mV and 109 mV (140 mV minus 22%), over the full temperature range  
of 100 °C.  
-3 –  
SMARTEC BV, Delpratsingel 26  
4811 AP Breda, The Netherlands  
WWW.SMARTEC.NL  
Tel: +31 76 5205353  
Specifications  
SPD series  
Version 1.0  
In the worst case scenario the minimum value of the span is 100 mV,  
which means that the sensor has a span of 100 mV, whichcould drop  
to 63mV (100 minus 27%) over the full temperature range of 100 °C.  
Linearity  
The linearity is defined as the maximum deviation from the best fitted  
straight line.  
Outline drawings and dimensions.  
4 out +  
5 exc  
12  
0.5C- Æ 3  
6
5
4
R=1  
pressure port ( Æ 0.8)  
8
1 out -  
4
2.8  
6.8  
14  
2.54(2x)  
vent hole  
Æ 0.8  
2 exc  
1
2
3
Gauge type sensor  
Connection diagram  
(Top View)  
0.5  
0.25  
0.15±0.1  
7
11±0.5  
4
3.5  
Atmospheric  
Pressure inlet  
@bottom  
0.8±0.2  
7
2.54  
Absolute type sensor  
1
All sizes in mm.  
Wetted materials: glass, ryton, silicon, fluorosilicon  
and gold  
Other encapsulations on request.  
Ordering information  
Part no.  
Pressure range  
SPD005G  
SPD015G  
SPD030G  
SPD100G  
SPD015A  
0 – 0.35 Bar (Gauge)  
0 – 1.0 Bar  
0 – 2.0 Bar  
0 – 6.5 Bar  
-
-
-
0 – 1.0 Bar (Absolute)  
-4 –  
SMARTEC BV, Delpratsingel 26  
WWW.SMARTEC.NL  
4811 AP Breda, The Netherlands  
Tel: +31 76 5205353  

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