ZSC31150FEB-R [ETC]
Fast Automotive Sensor Signal Conditioner;型号: | ZSC31150FEB-R |
厂家: | ETC |
描述: | Fast Automotive Sensor Signal Conditioner |
文件: | 总25页 (文件大小:663K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
Data Sheet
Rev. 1.08 / August 2011
ZSC31150
Fast Automotive Sensor Signal Conditioner
ZSC31150
Fast Automotive Sensor Signal Conditioner
Brief Description
Benefits
The ZSC31150 is a CMOS integrated circuit for
highly-accurate amplification and sensor-specific
correction of bridge sensor signals. Digital
compensation of sensor offset, sensitivity,
No external trimming components required
Only a few external protection devices needed
PC-controlled configuration and One-Shot
calibration via I²CTM or ZACwireTM interface:
Simple, cost efficient, quick, and precise
End-of-Line calibration via I²CTM or ZACwireTM
temperature
drift,
and
non-linearity
is
accomplished via an internal 16-bit RISC
microcontroller running a correction algorithm, with
calibration coefficients stored in an EEPROM.
interface
High accuracy (0.25% FSO @ -25 to 85°C;
0.5% FSO @ -40 to 125°C)
The ZSC31150 is adjustable to nearly all bridge
sensor types. Measured values are provided at the
analog voltage output or at the digital ZACwireTM
and I²CTM interface. The digital interface can be
The ZSC31150 is optimized for automotive
environments by its special protection circuitry
and excellent electromagnetic compatibility
used for
a
simple PC-controlled calibration
procedure, in order to program a set of calibration
coefficients into an on-chip EEPROM. Thus, a
specific sensor and a ZSC31150 are mated
digitally: fast, precise, and without the cost
overhead associated with trimming by external
devices or a laser.
Available Support
Evaluation Kits
Application Notes
Mass calibration setup
Physical Characteristics
Features
Supply voltage 4.5 to 5.5 V
Digital compensation of sensor offset,
sensitivity, temperature drift, and non-linearity
Operation temperature: -40°C to 125°C
(-40°C to +150°C derated, depending on
product version)
Adjustable to nearly all bridge sensor types,
analog gain of 420, overall gain up to 2000
Available in SSOP14 or as die
Output options: ratiometric analog voltage
output (5 - 95% in maximum, 12.4 bit
resolution) or ZACwireTM (digital one-wire-
interface)
ZSC31150 Application Circuit
Temperature compensation: internal or external
diode, bridge resistance, thermistor
VCC
Sensor biasing by voltage or constant current
Sample rate up to 7.8 kHz
Sensor
Module
High voltage protection up to 33 V
OUT
Supply current: max. 5.5mA
ZSC
31150
Reverse polarity and short circuit protection
Wide operation temperature up to -40…+150°C
Traceability by user-defined EEPROM entries
Several safety and diagnostic functions
GND
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner.
The information furnished in this publication is subject to changes without notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
ZSC31150 Block Diagram
ZACwireTM
I2C
RAM
EEPROM
Digital
Data I/O
Analog
Out
PGA
TS
ADC
CMC
DAC
BAMP
ROM
Analog Block
Digital Block
ZSC31150
Ordering Information
Product Sales Code
Description
Package
ZSC31150KIT
Evaluation Kit V1.0
Modular evaluation and development boards for
ZSC31150
KIT boards, IC samples, USB cable,
DVD with software and documentation
ZSC31150 Mass
Modular Mass Calibration System (MSC) for
MCS boards, cable, connectors,
Calibration System V1.1 ZSC31150
DVD with software and documentation
Sales and Further Information
www.zmdi.com
SSC@zmdi.com
ZMD Far East, Ltd.
3F, No. 51, Sec. 2,
Keelung Road
11052 Taipei
Taiwan
Zentrum Mikroelektronik
Dresden AG
Grenzstrasse 28
01109 Dresden
ZMD America, Inc.
8413 Excelsior Drive
Suite 200
Zentrum Mikroelektronik
Dresden AG, Japan Office
2nd Floor, Shinbashi Tokyu Bldg.
4-21-3, Shinbashi, Minato-ku
Tokyo, 105-0004
Madison, WI 53717
Germany
USA
Japan
Phone +49 (0)351.8822.7.772
Phone +01 (608) 829-1987
+01 (631) 549-2882
Phone +81.3.6895.7410
Phone +886.2.2377.8189
Fax
+49(0)351.8822.87.772 Fax
Fax
+81.3.6895.7301
Fax
+886.2.2377.8199
DISCLAIMER: This information applies to a product under development. Its characteristics and specifications are subject to change without notice. Zentrum Mikroelektronik Dresden
AG (ZMD AG) assumes no obligation regarding future manufacture unless otherwise agreed to in writing. The information furnished hereby is believed to be true and accurate.
However, under no circumstances shall ZMD AG be liable to any customer, licensee, or any other third party for any special, indirect, incidental, or consequential damages of any
kind or nature whatsoever arising out of or in any way related to the furnishing, performance, or use of this technical data. ZMD AG hereby expressly disclaims any liability of ZMD
AG to any customer, licensee or any other third party, and any such customer, licensee and any other third party hereby waives any liability of ZMD AG for any damages in
connection with or arising out of the furnishing, performance or use of this technical data, whether based on contract, warranty, tort (including negligence), strict liability, or otherwise.
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner.
The information furnished in this publication is subject to changes without notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
Contents
1
Electrical Characteristics...............................................................................................................................6
1.1. Absolute Maximum Ratings....................................................................................................................6
1.2. Operating Conditions..............................................................................................................................6
1.3. Electrical Parameters .............................................................................................................................7
1.3.1. Supply Current and System Operation Conditions..........................................................................7
1.3.2. Analog Front-End (AFE) Characteristics .........................................................................................7
1.3.3. Temperature Measurement (refer chapter 2.4) ...............................................................................7
1.3.4. AD-Conversion.................................................................................................................................7
1.3.5. Sensor Connection Check ...............................................................................................................8
1.3.6. DAC & Analog Output (Pin AOUT) .................................................................................................8
1.3.7. System Response............................................................................................................................8
1.4. Interface Characteristics & EEPROM.....................................................................................................9
1.4.1. I²CTM Interface (refer 'ZSC31150 Functional Description' for timing details) ...................................9
1.4.2. ZACwire™ One Wire Interface (OWI)..............................................................................................9
1.4.3. EEPROM..........................................................................................................................................9
Circuit Description .......................................................................................................................................10
2.1. Signal Flow ...........................................................................................................................................10
2.2. Application Modes ................................................................................................................................11
2.3. Analog Front End (AFE) .......................................................................................................................11
2.3.1. Programmable Gain Amplifier (PGA).............................................................................................11
2.3.2. Offset Compensation .....................................................................................................................12
2.3.3. Measurement Cycle.......................................................................................................................12
2.3.4. Analog-to-Digital Converter............................................................................................................13
2.4. Temperature Measurement..................................................................................................................14
2.5. System Control and Conditioning Calculation......................................................................................15
2.5.1. Operation Modes............................................................................................................................15
2.5.2. Start Up Phase...............................................................................................................................15
2.5.3. Conditioning Calculation ................................................................................................................15
2.6. Analog Output AOUT............................................................................................................................16
2.7. Serial Digital Interface ..........................................................................................................................16
2.8. Failsafe Features, Watchdog and Error Detection...............................................................................16
2.9. High Voltage, Reverse Polarity and Short Circuit Protection ...............................................................17
Application Circuit Examples.......................................................................................................................18
Pin Configuration, Latch-Up and ESD Protection .......................................................................................20
4.1. Pin Configuration and Latch-up Conditions..........................................................................................20
4.2. ESD-Protection.....................................................................................................................................20
Package.......................................................................................................................................................21
Quality and Reliability..................................................................................................................................21
Customization..............................................................................................................................................21
Ordering Information ...................................................................................................................................22
Additional Documents .................................................................................................................................22
2
3
4
5
6
7
8
9
10 Glossary ......................................................................................................................................................23
11 Document Revision History.........................................................................................................................24
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
Data Sheet
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
4 of 24
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
August 16, 2011
notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
List of Figures
Figure 2.1 Block Diagram of the ZSC31150 ...................................................................................................10
Figure 2.2: Measurement Cycle.......................................................................................................................13
Figure 3.1: Bridge in Voltage Mode, External Diode Temperature Sensor .....................................................18
Figure 3.2: Bridge in Voltage Mode, External Thermistor................................................................................19
Figure 3.3: Bridge in Current Mode, Temperature Measurement via Bridge TC.............................................19
Figure 5.1: ZSC31150 Pin Diagram.................................................................................................................21
List of Tables
Table 1.1
Table 1.2
Table 2.1
Table 2.2
Absolute Maximum Ratings.............................................................................................................6
Operating Conditions.......................................................................................................................6
Adjustable Gains, Resulting Sensor Signal Spans and Common Mode Ranges .........................11
Analog Zero Point Shift Ranges (XZC)..........................................................................................12
Table 2.3: Analog Output Resolution Versus Sample Rate............................................................................14
Table 3.1: Application Circuit Parameters ......................................................................................................18
Table 4.1: Pin Configuration and Latch-Up Conditions ..................................................................................20
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
Data Sheet
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
5 of 24
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
August 16, 2011
notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
1
Electrical Characteristics
1.1. Absolute Maximum Ratings
Parameters apply in operation temperature range and without time limitations.
Table 1.1
No.
Absolute Maximum Ratings
Parameter
Symbol
Conditions
Min
Max
Unit
1.1.1
Supply Voltage 1
VDDEAMR To VSSE, refer to chapter
3 for application circuits
-33
33
VDC
1.1.2
1.1.3
Potential at pin AOUT 1
VOUT
VDDAAMR Related to VSSA,
VDDE - VDDA < 0.35 V
Related to VSSA
Related to VSSE
-33
33
VDC
VDC
1
Analog Supply Voltage
-0.3
6.5
1.1.4
1.1.5
Voltage at all analog and
digital IO – Pins
VA_IO
VD_IO
-0.3
-55
VDDA + 0.3
150
VDC
Storage temperature
TSTG
C
1.2. Operating Conditions
All voltages are related to VSSA.
Table 1.2
No.
Operating Conditions
Parameter
Symbol
TAMB
Conditions
TQE
Min
Typ
Max
150
125
Unit
C
2
1.2.1
Ambient temperature
-40
-40
1.2.2.1
Ambient temperature
TAMB_TQA
TQA
C
advanced performance 4
1.2.2.2
Ambient temperature
TAMB_TQI
TQI
-25
85
C
advanced performance 4
1.2.3
1.2.4
1.2.5
Supply Voltage
VDDE
RBR_V
RBR_C
4.5
2
5.0
5.5
25
10
VDC
k
3, 4
Bridge Resistance
Bridge Voltage Mode
Bridge Resistance 3, 4
Bridge Current Excitation,
note IBR_MAX
k
4
1.2.6
Resistor RIBR
RIBR
IBR = VDDA / (16 * RIBR
)
0.07 *
RBR
k
1.2.7
1.2.8
Maximum Bridge Current
IBR_MAX
2
mA
Maximum Bridge Top
Voltage
VBR_TOP
(15/16 * VDDA) - 0.3
V
1.2.9
TC Current Reference
TC RIBR
Behavior influences
generated current
50 ppm/K
4
Resistor
1
Refer to the 'ZSC31150 High Voltage Protection Description' for specification and detailed conditions
2
3
Notice temperature profile description in the 'ZSC31150 Dice Package Document' for operation in temperature range > 125 °C
Symmetric behavior and identical electrical properties (especially with regard to the low pass characteristic) of both sensor inputs of
the ZSC31150 are required. Unsymmetrical conditions of the sensor and/or external components connected to the sensor input pins of
ZSC31150 can generate a failure in signal operation
4
No measurement in mass production, parameter is guaranteed by design and/or quality observation.
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
Data Sheet
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
6 of 24
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
August 16, 2011
notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
1.3. Electrical Parameters
All parameter values are valid on behalf on in chapter 1.2 specified operating conditions (special definitions
excluded). All Voltages related to VSSA.
No.
Parameter
Symbol
Conditions
Min
Typ
Max
Unit
1.3.1. Supply Current and System Operation Conditions
1.3.1.1
1.3.1.2
Supply current
TADV
Without bridge and load
current, fCLK 3 MHz
5.5
4 1
mA
Clock frequency
TAMB_TQA
Guaranteed adjustment
range
2 1
3
MHz
1.3.2. Analog Front-End (AFE) Characteristics
1.3.2.1
1.3.2.2
Input Span
VIN_SP
Analog gain: 420 to 2.8
1
275
300
mV/V
Analog Offset
Compensation Range
Depends on gain adjust,
refer to chapter 2.3.2
-300
% VIN_SP
1.3.2.3
1.3.2.4
Parasitic differential input
offset current 1
IIN_OFF
VIN_CM
Within TAMB;
Within TAMB_TQI
-10
-2
10
2
nA
nA
Common mode input
range
Depends on gain adjust,
no XZC, refer to chapter
2.3.1
0.29 *
VDDA
0.65 *
VDDA
V
1.3.3. Temperature Measurement (refer chapter 2.4)
1.3.3.1
1.3.3.2
1.3.3.3
1.3.3.4
1.3.3.5
External temperature
diode channel gain
ATSED
300
1300
20
ppm FS
/ (mV/V)
External temperature
diode bias current
ITSE
6
10
A
External temperature
diode input range 1
0
1.5
V
External temperature
resistor channel gain
ATSER
VTSER
1200
0
3500
600
ppm FS
/ (mV/V)
External temperature
resistor / input voltage
mV/V
1
range
1.3.3.6 Internal temperature diode
sensitivity
STTSI
raw values – without
conditioning
700
13
2700
ppm FS
/ K
1.3.4. AD-Conversion
1.3.4.1
1.3.4.2
1.3.4.3
1.3.4.4
1.3.4.5
A/D Resolution 1
DNL 1
rADC
16
0.95
4
Bit
LSB
DNLADC
INLADC
INLADC
Range
rADC =13Bit, fCLK=3MHz,
best fit, 2nd order,
complete AFE, 1.3.4.5
INL TQA 1
LSB
INL TQE
5
LSB
ADC Input Range
10
90
%VDDA
1
No measurement in mass production, parameter is guaranteed by design and/or quality observation.
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
notice.
Data Sheet
August 16, 2011
7 of 24
ZSC31150
Fast Automotive Sensor Signal Conditioner
No.
Parameter
Symbol
Conditions
Min
Typ
Max
Unit
1.3.5. Sensor Connection Check
1.3.5.1
1.3.5.2
Sensor connection loss
Sensor input short
RSCC_min
RSSC_short
detection threshold
100
0
k
short detection
guaranteed
50
1.3.5.3
Sensor input no short
RSSC_pass
short is never detected
1000
1.3.6. DAC & Analog Output (Pin AOUT)
1.3.6.1
1.3.6.2
D/A Resolution
rDAC
analog output, 10-90%
12
Bit
Output current sink and
source for VDDE=5V
ISRC/SINK_OUT
VOUT: 5-95%,
RLOAD>=2kΩ
2.5
5
mA
VOUT: 10-90%,
RLOAD>=1kΩ
1.3.6.3
Short circuit current
IOUT_max
to VSSE/VDDE 1
-25
25
mA
1.3.6.4 Addressable output signal
range
VSR_OUT95
VSR_OUT90
0.05
0.1
0.95
0.9
VDDE
@ RLOAD>=2k
@ RLOAD>=1k
2
1.3.6.5
1.3.6.6
Output slew rate
SROUT
CLOAD < 50nF
0.1
V/µs
Output resistance in
diagnostic mode
ROUT_DIA
Diagnostic Range:
<4|96>%, RLOAD>=2k
<8|92>%, RLOAD>=1k
82
1.3.6.7
1.3.6.8
1.3.6.9
1.3.6.10
Load capacitance 2
DNL
CLOAD
DNLOUT
INLOUT
INLOUT
ILEAK_OUT
C3 + CL (refer chapter 3)
150
1.5
5
nF
-1.5
-5
LSB
LSB
LSB
µA
INL TQA 2
best fit, rDAC =12Bit
best fit, rDAC =12Bit
INL TQE
-8
8
1.3.6.11 Output Leakage current @
150grd
in case of power or
ground loss
-25
25
1.3.7. System Response
3
1.3.7.1
Startup time
tSTA
to 1st output, fCLK=3MHz,
no ROM check, ADC:
14bit & 2nd order
5
ms
1.3.7.2
1.3.7.3
1.3.7.4
Response time
(100% jump) 2
tRESP
fCLK=4MHz, 13Bit, 2nd
order, refer Table 2.3
256
512
µs
Bandwidth 2
comparable to analog
SSCs
5
kHz
mV
Analog Output Noise
Peak-to-Peak 2
VNOISE,PP
shorted inputs, gain=
10
3
bandwidth 10kHz
1.3.7.5
Analog Output Noise
RMS 2
VNOISE,RMS
shorted inputs, gain=
mV
bandwidth 10kHz
1
2
3
minimum output voltage to VDDE or maximum output voltage to VSSE
No measurement in mass production, parameter is guaranteed by design and/or quality observation.
Depends on resolution and configuration - start routine begins approximately 0.8ms after power on
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
notice.
Data Sheet
August 16, 2011
8 of 24
ZSC31150
Fast Automotive Sensor Signal Conditioner
No.
Parameter
Symbol
Conditions
Min
Typ
Max
Unit
1.3.7.6
Ratiometricity Error
REOUT_5
maximum error of
1000
ppm
VDDE=5V to 4.5/5.5V
1.3.7.7
Overall failure (deviation
from ideal line including
INL, gain, offset & temp
errors)
FALL TQI
13Bit 2nd order ADC,
0.25 (0.1)
0.5 (0.25)
1.0 (0.5)
% FS
F
ALL TQA
f
CLK<=3MHz,
FALL TQE
XZC=01,
no sensor caused effects;
inside of parenthesis:
digital readout
1.4. Interface Characteristics & EEPROM
No.
Parameter
Symbol
Conditions
Min
Typ
Max
Unit
1.4.1. I²CTM Interface (refer 'ZSC31150 Functional Description' for timing details)
1.4.1.1
1.4.1.2
1.4.1.3
1.4.1.4
1.4.1.5
1.4.1.6
Input-High-Level 2
Input-Low-Level 2
VI²C_IN_H
VI²C_IN_L
VI²C_OUT_L
CSDA
0.8
VDDA
VDDA
VDDA
pF
0.2
0.15
400
400
100
Output-Low-Level 2
Open Drain, IOL<2mA
SDA load capacitance 2
SCL clock frequency 2
Internal pull-up resistor 2
fSCL
kHz
RI²C
25
k
1.4.2. ZACwire™ One Wire Interface (OWI)
1.4.2.1
1.4.2.2
1.4.2.3
1.4.2.4
Input-Low-Level 2
Input-High-Level 2
Output-Low-Level 2
Start Window 2
VOWI_IN_L
VOWI_IN_H
0.2
VDDA
VDDA
VDDA
ms
0.75
96
VOWI_OUT_L
Open Drain, IOL<2mA
typ: @ fCLK=3MHz
t.b.d.
455
175
1.4.3. EEPROM
1.4.3.1
1.4.3.2
Ambient temperature
TAMB_EEP
nWRI_EEP
-40
150
C
EEPROM programming 2
Write cycles 2
@write <= 85°C
@write up to 150°C
100k
100
2
3
1.4.3.3
1.4.3.4
Read cycles
nREAD_EEP
tRET_EEP
<=175°C
8 * 108
Data retention 2
1300h @ 175°C
15
a
4
(=100000h@55°C &
27000h@125°C &
3000h@150°C)
1.4.3.5
Programming time 2
tWRI_EEP
per written word,
12
ms
f
CLK=3MHz
1
2
3
4
XZC is active: additional overall failure of 25ppm/K for XZC=31 in maximum, failure decreases linear for XZC adjusts lower than 31
No measurement in mass production, parameter is guaranteed by design and/or quality observation.
valid for the dice, notice additional package and temperature version caused restrictions
over lifetime and valid for the dice, use calculation sheet 'ZMDI Temperature Profile Calculation Sheet' for temperature stress
calculation, notice additional package and temperature version caused restrictions
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
Data Sheet
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
9 of 24
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
August 16, 2011
notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
2
Circuit Description
2.1. Signal Flow
The ZSC31150’s signal path is partly analog and partly digital. The analog part is realized differentially – this
means, the differential bridge sensor signal is internally handled via two signal lines, which are rejected
symmetrically around an internal common mode potential (analog ground = VDDA/2).
Consequently, it is possible to amplify positive and negative input signals, which are located within the
common mode range of the signal input.
Figure 2.1
Block Diagram of the ZSC31150
ZACwireTM
I2C
RAM
EEPROM
Digital
Data I/O
Analog
Out
PGA
TS
ADC
CMC
DAC
BAMP
ROM
Analog Block
Digital Block
ZSC31150
PGA
Programmable Gain Amplifier
Multiplexer
MUX
ADC
Analog-to-Digital Converter
Calibration Microcontroller
Digital-to-Analog Converter
CMC
DAC
BAMP
EEPROM
TS
Buffer Amplifier – output buffer OPAMP
Non Volatile Memory for Calibration Parameters and Configuration
On-chip Temperature Sensor (pn-junction)
ROM
RAM
Memory for Correction Formula and –Algorithm
Volatile Memory for Calibration Parameters and Configuration
The differential signal from the bridge sensor is pre-amplified by the Programmable Gain Amplifier (PGA). The
Multiplexer (MUX) transmits the signals from either the bridge sensor, the external diode, or the separate
temperature sensor, to the Analog-to-Digital Converter (ADC) in a certain sequence (instead of the
temperature diode, the internal pn-junction (TS) can be used optionally). Afterwards, the ADC converts these
signals into digital values.
The digital signal correction takes place in the calibration microcontroller (CMC). It is based on a correction
formula located in the ROM and on sensor-specific coefficients stored in the EEPROM during calibration.
Dependent on the programmed output configuration, the corrected sensor signal is output as an analog value
or in a digital format (I²CTM or ZACwireTM). The configuration data and the correction parameters can be
programmed into the EEPROM via the digital interfaces.
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
Data Sheet
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
10 of 24
the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
August 16, 2011
notice.
ZSC31150
Fast Automotive Sensor Signal Conditioner
2.2. Application Modes
For each application, a configuration set has to be established (generally prior to calibration) by programming
the on-chip EEPROM regarding to the following modes:
Sensor Channel
- Sensor Mode: Ratiometric bridge excitation in voltage or current supply mode.
- Input Range: The gain adjustment of the AFE with respect to the maximum sensor signal span and
the zero point of the ADC have to be chosen.
- Additional Offset Compensation (XZC): The extended analog offset compensation has to be enabled,
if required; e.g., if the sensor offset voltage is near to or larger than the sensor span.
- Resolution/Response Time: The A/D converter has to be configured for resolution and converting
scheme or ADC order (first or second order). These settings influence the sampling rate and the
signal integration time, and thus, the noise immunity.
Temperature
- Temperature Measurement: The source for the temperature correction has to be chosen.
2.3. Analog Front End (AFE)
The Analog Front End (AFE) consists of the Programmable Gain Amplifier (PGA), the Multiplexer (MUX), and
the Analog-to-Digital Converter (ADC).
2.3.1.
Programmable Gain Amplifier (PGA)
Table 2.1 shows the adjustable gains, the sensor signal spans, and the allowed common mode range.
Table 2.1
Adjustable Gains, Resulting Sensor Signal Spans and Common Mode Ranges
No.
Overall Gain
aIN
Max. Span
VIN_SP
[mV/V]
Gain
Amp1
Gain
Amp2
Gain
Amp3
Input common mode range
VIN_CM as % of VDDA 14
13
XZC = Off
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
29 to 65
32 to 57
XZC = On
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
45 to 55
not applicable
1
2
420
280
210
140
105
70
1.8
2.7
30
30
15
15
7.5
7.5
3.75
3.75
3.75
1
7
4.66
7
2
2
2
2
2
2
2
2
2
2
2
2
2
3
3.6
4
5.4
4.66
7
5
7.1
6
10.7
14.3
21.4
28.5
53.75
80
4.66
7
7
52.5
35
8
4.66
3.5
7
9
26.3
14
10
11
12
13
9.3
7
1
4.66
3.5
1.4
107
267
1
2.8
1
13
Recommended internal signal range is 75% of supply voltage in maximum.
Span is calculated by the following formula: Span = 75% / gain
Bridge in voltage mode, containing maximum input signal (with XZC: +300% Offset), 14-bit accuracy. Refer to the 'ZSC31150
Functional Description' for usable input signal/common mode range at bridge in current mode.
14
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ZSC31150
Fast Automotive Sensor Signal Conditioner
2.3.2.
Offset Compensation
The ZSC31150 supports two methods of sensor offset compensation (zero shift):
Digital offset correction
XZC - Analog compensation for large offset values (up to in maximum approximately 300% of span,
depending on gain adjustment)
Digital sensor offset correction will be processed during the digital signal correction/conditioning by the
calibration microcontroller (CMC). Analog sensor offset pre-compensation will be needed for compensation of
large offset values, which would overdrive the analog signal path by uncompensated gaining. For analog
sensor offset pre-compensation, a compensation voltage will be added in the analog pre-gaining signal path
(coarse offset removal). The analog offset compensation in the AFE can be adjusted by 6 EEPROM bits.
Table 2.2
PGA gain
aIN
Analog Zero Point Shift Ranges (XZC)
Max. Span VIN_SP
[mV/V]
Offset shift per step
in % of full span
Approx. maximum
offset shift [mV/V]
Approx. maximum shift
[% VIN_SP] (@ ± 31)
420
280
210
140
105
70
1.8
2.7
12.5 %
7.6 %
12.5 %
7.6 %
12,5 %
7.6 %
7.8
7.1
15.5
14.2
31
388 %
237 %
388 %
237 %
388 %
237 %
388 %
237 %
161 %
388 %
237 %
161 %
26 %
3.6
5.4
7.1
10.7
14.3
21.4
28.5
53.75
80
28
52.5
35
12,5 %
7.6 %
32
57
26.3
14
5.2 %
52
12.5 %
7.6 %
194
189
161
72
9.3
7
107
267
5.2 %
2.8
0.83 %
2.3.3.
Measurement Cycle
The Multiplexer selects, depending on EEPROM settings, the following inputs in a certain sequence.
Temperature measured by external diode or thermistor, internal pn-junction or bridge
Internal offset of the input channel (VOFF
)
Pre-amplified bridge sensor signal
The complete measurement cycle is controlled by the CMC. The cycle diagram at Figure 2.2 shows its
principle structure.
The EEPROM adjustable parameters are:
n=<1,31>: Pressure measurement count
After power on the start routine is called, that contains all needed measurements once.
Remark: The tasks “CMV”, “SSC/SCC+” and “SSC/SCC-“ are contained independent from EEPROM
configuration always in every cycle.
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ZSC31150
Fast Automotive Sensor Signal Conditioner
Figure 2.2: Measurement Cycle
Start routine
1
Temperature Auto Zero
Pressure measurement
Temp measurement
Pressure measurement
Pressure auto zero
Pressure measurement
CMV
n
1
n
1
n
1
n
1
n
1
n
Pressure measurement
SSC/SCC+
Pressure measurement
SSC/SCC-
Pressure measurement
2.3.4.
Analog-to-Digital Converter
The ADC is an integrating AD-Converter in full differential switched capacitor technique.
Programmable ADC-resolutions are rADC=<13, 14> and with segmentation <15, 16> bit.
It can be used as first or second order converter. In the first order mode it is inherently monotone and
insensitive against short and long term instability of the clock frequency. The conversion cycle time depends
on the desired resolution and can be roughly calculated by:
tCYC_1 = 2r / 2 / fCLK
In the second order mode two conversions are stacked with the advantage of much shorter conversion cycle
time and the drawback of a lower noise immunity caused by the shorter signal integration period. The
conversion cycle time at this mode is roughly calculated by:
tCYC_2 = 2(r+3)/2 / 2 / fCLK
The calculation formulas give an overview about conversion time for one AD-conversion. Refer Calculation
sheet 'ZSC31150 Bandwidth Calculation Sheet' for detailed calculation of sampling time and bandwidth.
The result of the AD conversion is a relative counter result corresponding to the following equation:
ZADC = 2r * (VADC_DIFF / VADC_REF - RSADC
)
ZADC
r:
:
number of counts (result of the conversion)
adjusted resolution in bit
VADC/REF_DIFF
RSADC
:
differential input/reference voltage of ADC
digital ADC Range Shift (RSADC = 1/16, 1/8, 1/4, 1/2, controlled by the EEPROM content)
:
With the RSADC value a sensor input signal can be shifted in the optimal input range of the ADC.
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ZSC31150
Fast Automotive Sensor Signal Conditioner
Table 2.3:
Analog Output Resolution Versus Sample Rate
ADC
Adjustment
Approximated Output
Resolution 15
Sample Rate
Averaged
Bandwidth @
16
fCON
Order
OADC
rADC
[Bit]
13
Digital
[Bit]
13
Analog
[Bit]
12
fCLK=3MHz
fCLK=4MHz
[Hz]
fCLK=3MHz
fCLK=4MHz
[Hz]
172
[Hz]
345
[Hz]
130
67
460
14
14
12
178
237
89
1
15
14
12
90
120
34
45
16
14
12
45
61
17
23
13
13
12
5859
3906
2930
1953
7813
5208
3906
2604
2203
1469
1101
734
2937
1958
1468
979
14
14
12
2
15
14
12
16
14
12
Remark: ADCs reference voltage ADCVREF is defined by the potential between <VBR_T> and <VBR_B> (or
<VDDA> to <VSSA>, if CFGAPP:BREF=1). The theoretically input range ADCRANGE_INP of the ADC
is equivalent to ADCs reference voltage.
In practice ADCs input range should be used in maximum from 10% to 90% of ADCRANGE_INP - a necessary
condition for abiding specified accuracy, stability and nonlinearity parameters of AFE. This condition is also
valid for whole temperature range and all applicable sensor tolerances. Inside of ZSC31150 is no failsafe task
implemented, which verifies abiding of this condition.
2.4. Temperature Measurement
The ZSC31150 supports four different methods for temperature data acquiring needed for calibration of the
sensor signal in temperature range. Temperature data can be acquired using:
an internal pn-junction temperature sensor,
an external pn-junction temperature sensor connected to sensor top potential (VBRTOP),
an external resistive half bridge temperature sensor and
the temperature coefficient of the sensor bridge at bridge current excitation.
Refer 'ZSC31150 Functional Description' for a detailed explanation of temperature sensor adaptation and
adjustment.
15
ADC resolution should be one bit higher then applied output resolution, if AFE gain is adjusted in such manner, that input range is
used more than 50%. Otherwise ADC resolution should be more than one bit higher than applied output resolution.
The sampling rate (AD conversion time) is only a part of the whole cycle, refer “ZSC31150 bandwidth calculation sheet” for detailed
16
information
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Fast Automotive Sensor Signal Conditioner
2.5. System Control and Conditioning Calculation
The system control supports the following tasks/features:
control the measurement cycle regarding to the EEPROM-stored configuration data
16 bit correction calculation for each measurement signal using the EEPROM stored calibration
coefficients and ROM-based algorithms = signal conditioning
manage start up sequence and start signal conditioning
handle communication requests received by the digital interface
failsafe tasks for the functions of ZSC31150 and message detected errors with diagnostic states
Refer 'ZSC31150 Functional Description' for a detailed description.
2.5.1. Operation Modes
The internal state machine represents three main states:
the continuous running signal conditioning mode – called Normal Operation Mode: NOM
the calibration mode with access to all internal registers and states – called Command Mode: CM
the failure messaging mode – called Diagnostic Mode: DM
2.5.2.
Start Up Phase17
The start up phase consists of following parts:
1. internal supply voltage settling phase (=potential VDDA-VSSA) – finished by disabling the reset signal
through the power on clear block (POC). Refer 'ZSC31150 High Voltage Protection Description',
chapter 4 for power on/off thresholds.
Time (for beginning with VDDA-VSSA=0V): 500µs to 2000µs, AOUT: tristate
2. system start, EEPROM read out and signature check (and ROM-check, if CFGAPP:CHKROM=1).
Time: ~200µs (~9000µs with ROM-check – 28180clocks ), AOUT: LOW (DM)
3. processing the start routine of signal conditioning (all measures & conditioning calculation).
Time: 5x AD conversion time, AOUT behavior depending on adjusted OWI mode (refer 2.6):
- OWIANA & OWIDIS => AOUT: LOW (DM)
- OWIWIN & OWIENA => AOUT: tristate
The analog output AOUT will be activated at the end of start up phase depending on adjusted output and
communication mode (refer chapter 2.6). In case of detected errors Diagnostic Mode (DM) is activated and
diagnostic output signal is driven at the output.
After the start up phase the continuous running measurement and calibration cycle is started. Refer
'ZSC31150 Bandwidth Calculation Sheet' for detailed information about output update rate.
2.5.3.
Conditioning Calculation
The digitalized value for pressure (acquired raw data) is processed with the correction formula to remove
offset and temperature dependency and to compensate non-linearity up to 3rd order. The result of the
correction calculation is a non-negative 15 Bit value for pressure (P) in the range [0; 1). This value P is clipped
with programmed limitation coefficients and continuously written to the output register of the digital serial
interface and the output DAC.
Note:
The conditioning includes up to third order nonlinearity sensor input correction. The available
adjustment ranges depend on the specific calibration parameters, for a detailed description refer to
'ZSC31150 Functional Description'. To give a rough idea: Offset compensation and linear
correction are only limited by the loose of resolution it will cause, the second order correction is
possible up to about 30% full scale difference to straight line, third order up to about 20% (ADC
resolution = 13bit). The used calibration principle is able to reduce present nonlinearity errors of
17
All described timings are roughly estimated values and correlates with internal clock frequency. Timings estimated for fclk=3MHz.
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Fast Automotive Sensor Signal Conditioner
the sensor up to 90%. The temperature calibration includes first and second order correction and
should be fairly sufficient in all relevant cases. ADC resolution influences also calibration
possibilities – 1 bit more resolution reduces calibration range by approximately 50%. Calculation
input data width is in maximum 14bit. 15 & 16bit ADC resolution mode uses only a 14 bit segment
of ADC range.
2.6. Analog Output AOUT
The analog output is used for output the analog signal conditioning result and for “End of Line” communication
via the ZACwireTM interface (one wire communication interface - OWI). The ZSC31150 supports four different
modes of the analog output in combination with OWI behavior:
OWIENA:
OWIDIS:
OWIWIN:
analog output is deactivated, OWI communication is enabled
analog output is active (~2ms after power on), OWI communication is disabled
analog output will be activated after time window,
OWI communication is enabled in time window of ~500ms in maximum,
transmission of “START_CM” command has to be finished during time window
analog output will be activated after ~2ms power on time,
OWIANA:
OWI communication is enabled in time window of ~500ms in maximum,
transmission of “START_CM” command has to be finished during time window,
to communicate the internal driven potential at AOUT has to be overwritten
by the external communication master (AOUT drive capability is current limited)
The analog output potential is driven by a unity gain output buffer, those input signal is generated by a 12.4bit
resistor string DAC. The output buffer (BAMP) – a rail-to-rail OPAMP - is offset compensated and current
limited. So a short circuit of analog output to ground or power supply does not damage the ZSC31150.
2.7. Serial Digital Interface
The ZSC31150 includes a serial digital interface (SIF), which is used for communication with the circuit to
realize calibration of the sensor module. The serial interface is able to communicate with two communication
protocols – I²CTM and ZACwireTM (a one wire communication interface – also called OWI). The OWI can be
used to realize an “End of Line” calibration via the analog output AOUT of the complete assembled sensor
module.
Refer 'ZSC31150 Functional Description' for a detailed description of the serial interfaces and communication
protocols.
2.8. Failsafe Features, Watchdog and Error Detection
The ZSC31150 detects various possible errors. A detected error is signalized by changing the internal status
in diagnostic mode (DM). In this case the analog output is set to LOW (minimum possible output value = lower
diagnostic range – LDR) and the output registers of the digital serial interface are set to a significant error
code.
A watchdog oversees the continuous working of the CMC and the running measurement loop. The operation
of the internal clock oscillator is verified continuously by oscillator fail detection.
A check of the sensor bridge for broken wires is done permanently by two comparators watching the input
voltage of each input (sensor connection and short check). Additionally the common mode voltage of the
sensor and sensor input short is watched permanently (sensor aging).
Different functions and blocks in digital part - like RAM-, ROM-, EEPROM- and register content - are watched
continuously. Refer 'ZSC31150 Functional Description' for a detailed description of safety features and
methods of error messaging.
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Fast Automotive Sensor Signal Conditioner
2.9. High Voltage, Reverse Polarity and Short Circuit Protection
The ZSC31150 is designed for 5V power supply operation.
The ZSC31150 and the connected sensor are protected from overvoltage and reverse polarity damage by an
internal supply voltage limiter. The analog output AOUT can be connected (short circuit, overvoltage and
reverse) with all potentials in protection range under all potential conditions at the pins VDDE and VSSE.
All external components – explained in application circuit in chapter 3 – are required to guarantee this
operation. The protection is no time limited. Refer 'ZSC31150 High Voltage Protection Description' for a
detailed description of protection cases and conditions.
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ZSC31150
Fast Automotive Sensor Signal Conditioner
3
Application Circuit Examples
The application circuits contain external components, which are needed for overvoltage, reverse polarity, and
short circuit protection.
Note:
Table 3.1:
Symbol
C1
Check also the available 'ZSC31150 Application Notes' for application examples and board layout.
Application Circuit Parameters
Parameter
Min
100
100
4
Typ
Max
Unit
nF
Notes
C
C
C
470
C2
nF
18, 2
C3
47
160
10
nF
The value of C3 is the sum of the load
capacitor and the cable capacitance
19
C4, C5
C
0
nF
Recommended to increase EMC immunity.
The value of C4, C5 is the sum of the load
capacitor and the cable capacitance
R1
10
kꢀ
RIBR
R
Refer to chapter 1.2
ꢀ
Figure 3.1: Bridge in Voltage Mode, External Diode Temperature Sensor
18
value of C3 summarizes load capacitor and cable capacity
higher values for C3, C4 and C5 increase EMC immunity
19
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ZSC31150
Fast Automotive Sensor Signal Conditioner
Figure 3.2: Bridge in Voltage Mode, External Thermistor
Figure 3.3: Bridge in Current Mode, Temperature Measurement via Bridge TC
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ZSC31150
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4
Pin Configuration, Latch-Up and ESD Protection
4.1. Pin Configuration and Latch-up Conditions
Table 4.1:
Pin Configuration and Latch-Up Conditions
Pin
Name
VDDA
VSSA
SDA
Description
Remarks
Usage/
Latch-up Related Application
Connection 20 Circuit Restrictions and/or Remarks
1
2
Positive analogue supply
voltage
Analog IO Required/-
Analog IO Required/-
Negative analogue supply
voltage
3
I²CTM data IO
Digital IO, -/VDDA
pull-up
Trigger Current/Voltage to
VDDA/VSSA:
+/-100mA or 8/-4V
4
SCL
I²CTM clock
Digital IN, -/VDDA
pull-up
6
VDD
Positive digital supply
voltage
Analog IO Required or
open/-
only capacitor to VSSA is allowed,
otherwise no application access
7
VDDE
VSSE
AOUT
VBN
Positive external supply
voltage
Supply
Ground
IO
Required/-
Required/-
Required/-
Trigger Current/Voltage: -100mA/33V
Trigger Current/Voltage: -100mA/33V
8
Negative external supply
voltage
9
Analog output & one wire
IF IO
10
Negative input sensor
bridge
Analog IN Required/-
11
13
12
14
VBR_B
VBR_T
VBP
Bridge bottom potential
Bridge top potential
Analog IO Required/VSSA
Analog IO Required/VDDA
Depending on application circuit,
short to VDDA/VSSA possible
Positive input sensor bridge Analog IN Required/-
IRTEMP Temp sensor & current
source resistor
Analog IO -/VDDA, VSSA
Depending on application circuit
4.2. ESD-Protection
All pins have an ESD Protection of >2000V. Additionally the pins VDDE, VSSE and AOUT have an ESD
Protection of >4000V.
ESD Protection referred to the human body model is tested with devices in SSOP14 packages during product
qualification. The ESD test follows the human body model with 1.5kOhm/100pF based on MIL 883, Method
3015.7.
20
Usage: If “Required” is specified, an electrical connection is necessary – refer to the application circuits
Connection: To be connected to this potential, if not used or no application/configuration related constraints are given
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Data Sheet
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ZSC31150
Fast Automotive Sensor Signal Conditioner
5
Package
The standard package of the ZSC31150 is an SSOP14 green package (5.3mm body width) with a lead pitch
of 0.65 mm.
Figure 5.1: ZSC31150 Pin Diagram
6
Quality and Reliability
The ZSC31150 is qualified according to the AEC-Q100 standard, operating temperature grade 0. A fit rate
<5fit (temp=55°C, S=60%) is guaranteed. A typical fit rate of the C7D-technologie, which is used for
ZSC31150, is 2.5fit.
7
Customization
For high-volume applications, which require an up- or downgraded functionality compared to the ZSC31150,
ZMDI can customize the circuit design by adding or removing certain functional blocks.
For it ZMDI has a considerable library of sensor-dedicated circuitry blocks.
Thus ZMDI can provide a custom solution quickly. Please contact ZMDI for further information.
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ZSC31150
Fast Automotive Sensor Signal Conditioner
8
Ordering Information
Product Sales Code
Description
Package
ZSC31150KIT
Evaluation Kit V1.0
Modular evaluation and development boards for
ZSC31150
KIT boards, IC samples, USB cable,
DVD with software and documentation
ZSC31150 Mass
Modular Mass Calibration System (MSC) for
MCS boards, cable, connectors,
Calibration System V1.1 ZSC31150
DVD with software and documentation
9
Additional Documents
Document
File Name
ZSC31150 Feature Sheet
ZSC31150_FeatureSheet_Rev_*.PDF
ZSC31150_FunctionalDescription_Rev_*.PDF
ZSC31150_HV_PROT_Rev_*.PDF
ZSC31150_DicePackagePin_Rev_*.PDF
ZSC31150_Bandwidth_Calculation_Rev*.xls
ZMDI_Temperature_Profile_Rev_*.xls
ZSC31150_APPLKIT_Rev_*.pdf
ZSC31150 Functional Description
ZSC31150 High Voltage Protection Description
ZSC31150 Dice Package
ZSC31150 Bandwidth Calculation Sheet
ZMDI Temperature Profile Calculation Sheet
ZSC31150 Application Kit Description
ZSC31150 Application Notes
ZSC31150_AN*.pdf
Visit ZMDI’s website www.zmdi.com or contact your nearest sales office for the latest version of these
documents.
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Data Sheet
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ZSC31150
Fast Automotive Sensor Signal Conditioner
10 Glossary
Term
ADC
AEC
AFE
Description
Analog-to-Digital Converter
Automotive Electronics Council
Analog Front End
AOUT
BAMP
CM
Analog Output
Buffer Amplifier
Command Mode
CMC
CMV
CMOS
DAC
DM
Calibration Microcontroller
Common Mode Voltage
Complementary Metal Oxide Semiconductor
Digital-to-Analog Converter
Diagnostic Mode
EEPROM
ESD
LDR
MUX
NOM
OWI
P
Electrically Erasable Programmable Read Only Memory
Electrostatic Device
Lower Diagnostic Range
Multiplexer
Normal Operation Mode
One Wire Interface
Pressure
PGA
POC
RAM
RISC
ROM
SCC
SIF
Programmable Gain Amplifier
Power on Clear
Random-Access Memory
Reduced Instruction Set Computer
Read Only Memory
Sensor Connection Check
Serial Interface
SSC+
SSC-
TS
Positive-biased Sensor Short Check
Negative-biased Sensor Short Check
Temperature Sensor
XZC
eXtended Zero Compensation
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the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
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ZSC31150
Fast Automotive Sensor Signal Conditioner
11 Document Revision History
Revision
0.46
Date
June 12, 2008
July 20, 2008
Description
First release after format update
Update after review
0.47
1.01
September 20, 2008 “6.” – fit rate added
”1.5.2” – ROM check time revised/corrected
”5.3.4.3” – SSC – no detection limit added
1.02
1.03
1.04
1.05
September 20, 2009 adjust to new ZMDI template
October 2, 2009
October 22, 2009
February 26, 2010
change to ZMDI denotation
formatting and linking issues solved
adjust to new ZMDI template
include 'ZSC31150 Feature Sheet' at page 2&3
add ordering codes for ZSC31150 and evaluation kits
extend glossary
add new phone number for ZMD FAR EAST, Ltd. and ZMDA America Office
Madison
1.06
July 29, 2010
correct “Offset shift per step” and “Approx. maximum offset shift” in Table 2.2 for
PGA gain = 105 and 52.5
move 1.4.1.6 “Internal pull-up resistor” into chapter 1.4.1 in Table 1.2
redrawing of Sensor Bridge in Figure 3.1, Figure 3.2 and Figure 3.3
add comment for C4 and C5 in Figure 3.3
rename ZMD31150 to ZSC31150
1.07
1.08
August 31, 2010
August 15, 2011
Connection of RIBR in Figure 3.3 corrected
Update ordering information with “Long Life Automotive”
(refer Ordering Information and chapter 8)
Sales and Further Information
www.zmdi.com
SSC@zmdi.com
Zentrum Mikroelektronik
ZMD America, Inc.
8413 Excelsior Drive
Suite 200
Zentrum Mikroelektronik
Dresden AG, Japan Office
ZMD Far East, Ltd.
3F, No. 51, Sec. 2,
2nd Floor, Shinbashi Tokyu Bldg. Keelung Road
Dresden AG
Grenzstrasse 28
01109 Dresden
Germany
Madison, WI 53717
4-21-3, Shinbashi, Minato-ku
Tokyo, 105-0004
Japan
11052 Taipei
Taiwan
USA
Phone +49 (0)351.8822.7.772
Phone +01 (608) 829-1987
+01 (631) 549-2882
Phone +81.3.6895.7410
Phone +886.2.2377.8189
Fax
+49(0)351.8822.87.772 Fax
Fax
+81.3.6895.7301
Fax
+886.2.2377.8199
DISCLAIMER: This information applies to a product under development. Its characteristics and specifications are subject to change without notice. Zentrum Mikroelektronik Dresden
AG (ZMD AG) assumes no obligation regarding future manufacture unless otherwise agreed to in writing. The information furnished hereby is believed to be true and accurate.
However, under no circumstances shall ZMD AG be liable to any customer, licensee, or any other third party for any special, indirect, incidental, or consequential damages of any
kind or nature whatsoever arising out of or in any way related to the furnishing, performance, or use of this technical data. ZMD AG hereby expressly disclaims any liability of ZMD
AG to any customer, licensee or any other third party, and any such customer, licensee and any other third party hereby waives any liability of ZMD AG for any damages in
connection with or arising out of the furnishing, performance or use of this technical data, whether based on contract, warranty, tort (including negligence), strict liability, or otherwise.
© 2011 Zentrum Mikroelektronik Dresden AG — Rev. 1.08
Data Sheet
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without
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the prior written consent of the copyright owner. The information furnished in this publication is subject to changes without
August 16, 2011
notice.
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