MMA7340LT [FREESCALE]
【3g - 12g Three Axis Low-g Micromachined Accelerometer; 【科技3G - 12克三轴低g加速度计微机械型号: | MMA7340LT |
厂家: | Freescale |
描述: | 【3g - 12g Three Axis Low-g Micromachined Accelerometer |
文件: | 总10页 (文件大小:243K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
Document Number: MMA7340L
Rev 0, 1/2007
Freescale Semiconductor
Technical Data
±3g - 12g Three Axis Low-g
Micromachined Accelerometer
MMA7340L
The MMA7340L is a low power, low profile capacitive micromachined
accelerometer featuring signal conditioning, a 1-pole low pass filter,
temperature compensation, self test, 0g-Detect which detects linear freefall,
and g-Select which allows for the selection between 2 sensitivities. Zero-g
offset and sensitivity are factory set and require no external devices. The
MMA7340L includes a Sleep Mode that makes it ideal for handheld battery
powered electronics.
MMA7340L: XYZ AXIS
ACCELEROMETER
3g, 12g
Features
•
•
•
•
•
•
•
•
•
•
•
•
•
3mm x 5mm x 1.0mm LGA-14 Package
Low Current Consumption: 400 µA
Sleep Mode: 3 µA
Bottom View
Low Voltage Operation: 2.2 V – 3.6 V
Selectable Sensitivity (±3g, ±12g)
Fast Turn On Time (0.5 ms Enable Response Time)
Self Test for Freefall Detect Diagnosis
0g-Detect for Freefall Protection
Signal Conditioning with Low Pass Filter
Robust Design, High Shocks Survivability
RoHS Compliant
14 LEAD
LGA
CASE 1935-01
Environmentally Preferred Product
Low Cost
Typical Applications
•
•
•
•
•
•
•
•
3D Gaming: Tilt and Motion Sensing, Event Recorder
HDD MP3 Player: Freefall Detection
Top View
N/C
14
Laptop PC: Freefall Detection, Anti-Theft
Cell Phone: Image Stability, Text Scroll, Motion Dialing, E-Compass
Pedometer: Motion Sensing
N/C
13 Self Test
1
2
3
XOUT
PDA: Text Scroll
12
11
10
9
N/C
Navigation and Dead Reckoning: E-Compass Tilt Compensation
Robotics: Motion Sensing
YOUT
ZOUT
N/C
4
5
6
g-Select
0g-Detect
N/C
VSS
VDD
ORDERING INFORMATION
8
Temperature
Range
Package
Drawing
Part Number
Package
Shipping
7
Sleep
MMA7340LT
–20 to +85°C
–20 to +85°C
1935-01
1935-01
LGA-14
LGA-14
Tray
MMA7340LR2
Tape & Reel
Figure 1. Pin Connections
© Freescale Semiconductor, Inc., 2007. All rights reserved.
VDD
0g-Detect
XOUT
g-Select
CLOCK
GEN
X-TEMP
COMP
OSCILLATOR
GAIN
+
FILTER
G-CELL
SENSOR
C to V
CONVERTER
Y-TEMP
COMP
Sleep
YOUT
CONTROL LOGIC
NVM TRIM
Z-TEMP
COMP
SELFTEST
ZOUT
CIRCUITS
Self Test
VSS
Figure 2. Simplified Accelerometer Functional Block Diagram
Table 1. Maximum Ratings
(Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)
Rating
Maximum Acceleration (all axis)
Symbol
gmax
Value
±5000
Unit
g
Supply Voltage
VDD
–0.3 to +3.6
1.8
V
Drop Test(1)
Ddrop
Tstg
m
Storage Temperature Range
1. Dropped onto concrete surface from any axis.
–40 to +125
°C
ELECTRO STATIC DISCHARGE (ESD)
WARNING: This device is sensitive to electrostatic
discharge.
Although the Freescale accelerometer contains internal
2000 V ESD protection circuitry, extra precaution must be
taken by the user to protect the chip from ESD. A charge of
over 2000 volts can accumulate on the human body or
associated test equipment. A charge of this magnitude can
alter the performance or cause failure of the chip. When
handling the accelerometer, proper ESD precautions should
be followed to avoid exposing the device to discharges which
may be detrimental to its performance.
MMA7340L
Sensors
2
Freescale Semiconductor
Table 2. Operating Characteristics
Unless otherwise noted: –20°C < TA < 85°C, 2.2 V < VDD < 3.6 V, Acceleration = 0g, Loaded output(1)
Characteristic
Symbol
Min
Typ
Max
Unit
Operating Range(2)
Supply Voltage(3)
Supply Current(4)
Supply Current at Sleep Mode(4)
Operating Temperature Range
Acceleration Range, X-Axis, Y-Axis, Z-Axis
g-Select: 0
VDD
IDD
IDD
TA
2.2
—
3.3
400
3
3.6
600
10
V
µA
µA
°C
—
–20
—
+85
gFS
gFS
—
—
±3
—
—
g
g
g-Select: 1
±12
Output Signal
Zero g (TA = 25°C, VDD = 3.3 V)(5)
Zero g(4)
VOFF
1.551
—
1.65
±2.0
1.749
—
V
VOFF, TA
mg/°C
Sensitivity (TA = 25°C, VDD = 3.3 V)
3g
S3g
S12g
S,TA
413.6
103.4
—
440
110
466.4
116.6
—
mV/g
mV/g
%/°C
12g
Sensitivity(4)
±0.03
Bandwidth Response
XY
f-3dBXY
f-3dBZ
ZO
—
—
400
300
32
—
—
Hz
Hz
kΩ
g
Z
Output Impedance
0g-Detect
—
—
0gdetect
-0.4
0
+0.4
Self Test
Output Response
X
OUT, YOUT
∆gSTXY
∆gSTZ
VIL
—
—
-0.1
+1.0
—
—
—
g
g
ZOUT
Input Low
Input High
VSS
0.3 VDD
VDD
V
V
VIH
0.7 VDD
—
Noise
Power Spectral Density RMS (0.1 Hz – 1 kHz)(4)
nPSD
—
350
—
µg/
Hz
Control Timing
Power-Up Response Time(6)
Enable Response Time(7)
Self Test Response Time(8)
Sensing Element Resonant Frequency
XY
tRESPONSE
tENABLE
tST
—
—
—
1.0
0.5
2.0
2.0
2.0
5.0
ms
ms
ms
fGCELLXY
fGCELLZ
fCLK
—
—
—
6.0
3.4
11
—
—
—
kHz
kHz
kHz
Z
Internal Sampling Frequency
Output Stage Performance
Full-Scale Output Range (IOUT = 30 µA)
VFSO
VSS+0.25
–1.0
—
—
VDD–0.25
+1.0
V
Nonlinearity, XOUT, YOUT, ZOUT
Cross-Axis Sensitivity(9)
NLOUT
%FSO
VXY, XZ, YZ
-5.0
—
+5.0
%
1. For a loaded output, the measurements are observed after an RC filter consisting of an internal 32kΩ resistor and an external 3.3nF capacitor
on the analog output for each axis and a 0.1µF capacitor on Vdd - GND.
2. These limits define the range of operation for which the part will meet specification.
3. Within the supply range of 2.2 and 3.6 V, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the device
may operate as a linear device but is not guaranteed to be in calibration.
4. This value is measured with g-Select in 3g mode.
5. The device can measure both + and – acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output
will increase above VDD/2. For negative acceleration, the output will decrease below VDD/2.
6. The response time between 10% of full scale Vdd input voltage and 90% of the final operating output voltage.
7. The response time between 10% of full scale Sleep Mode input voltage and 90% of the final operating output voltage.
8. The response time between 10% of the full scale self test input voltage and 90% of the self test output voltage.
9. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity.
MMA7340L
Sensors
Freescale Semiconductor
3
PRINCIPLE OF OPERATION
The Freescale accelerometer is a surface-micromachined
protection where system integrity must be ensured over the
life of the product. Customers can use self test to verify the
solderability to confirm that the part was mounted to the PCB
correctly. To use this feature to verify the 0g-Detect function,
the accelerometer should be held upside down so that the
z-axis experiences -1g. When the self test function is
initiated, an electrostatic force is applied to each axis to
cause it to deflect. The x- and y-axis are deflected slightly
while the z-axis is trimmed to deflect 1g. This procedure
assures that both the mechanical (g-cell) and electronic
sections of the accelerometer are functioning.
integrated-circuit accelerometer.
The device consists of a surface micromachined
capacitive sensing cell (g-cell) and a signal conditioning ASIC
contained in a single package. The sensing element is sealed
hermetically at the wafer level using a bulk micromachined
cap wafer.
The g-cell is a mechanical structure formed from
semiconductor materials (polysilicon) using semiconductor
processes (masking and etching). It can be modeled as a set
of beams attached to a movable central mass that move
between fixed beams. The movable beams can be deflected
from their rest position by subjecting the system to an
acceleration (Figure 3).
As the beams attached to the central mass move, the
distance from them to the fixed beams on one side will
increase by the same amount that the distance to the fixed
beams on the other side decreases. The change in distance
is a measure of acceleration.
The g-cell beams form two back-to-back capacitors
(Figure 3). As the center beam moves with acceleration, the
distance between the beams changes and each capacitor's
value will change, (C = Aε/D). Where A is the area of the
beam, ε is the dielectric constant, and D is the distance
between the beams.
g-Select
The g-Select feature allows for the selection between two
sensitivities. Depending on the logic input placed on pin 10,
the device internal gain will be changed allowing it to function
with a 3g or 12g sensitivity (Table 3). This feature is ideal
when a product has applications requiring two different
sensitivities for optimum performance. The sensitivity can be
changed at anytime during the operation of the product. The
g-Select pin can be left unconnected for applications
requiring only a 3g sensitivity as the device has an internal
pull-down to keep it at that sensitivity (440mV/g)).
Table 3. g-Select Pin Description
The ASIC uses switched capacitor techniques to measure
the g-cell capacitors and extract the acceleration data from
the difference between the two capacitors. The ASIC also
signal conditions and filters (switched capacitor) the signal,
providing a high level output voltage that is ratiometric and
proportional to acceleration.
g-Select
g-Range
3g
Sensitivity
440 mV/g
110 mV/g
0
1
12g
Sleep Mode
The 3 axis accelerometer provides a Sleep Mode that is
ideal for battery operated products. When Sleep Mode is
active, the device outputs are turned off, providing significant
reduction of operating current. A low input signal on pin 7
(Sleep Mode) will place the device in this mode and reduce
the current to 3 µA typ. For lower power consumption, it is
recommended to set g-Select to 3g mode. By placing a high
input signal on pin 7, the device will resume to normal mode
of operation.
Acceleration
Filtering
The 3 axis accelerometer contains an onboard single-pole
switched capacitor filter. Because the filter is realized using
switched capacitor techniques, there is no requirement for
external passive components (resistors and capacitors) to set
the cut-off frequency.
Figure 3. Simplified Transducer Physical Model
SPECIAL FEATURES
0g-Detect
Ratiometricity
Ratiometricity simply means the output offset voltage and
sensitivity will scale linearly with applied supply voltage. That
is, as supply voltage is increased, the sensitivity and offset
increase linearly; as supply voltage decreases, offset and
sensitivity decrease linearly. This is a key feature when
interfacing to a microcontroller or an A/D converter because
it provides system level cancellation of supply induced errors
in the analog to digital conversion process.
The sensor offers a 0g-Detect feature that provides a logic
high signal when all three axes are at 0g. This feature
enables the application of Linear Freefall protection if the
signal is connected to an interrupt pin or a poled I/O pin on a
microcontroller.
Self Test
The sensor provides a self test feature that allows the
verification of the mechanical and electrical integrity of the
accelerometer at any time before or after installation. This
feature is critical in applications such as hard disk drive
MMA7340L
Sensors
4
Freescale Semiconductor
BASIC CONNECTIONS
PCB Layout
Pin Descriptions
Top View
POWER SUPPLY
N/C
14
N/C
13 Self Test
1
VDD
VRH
VDD
VSS
XOUT
C
2
3
4
5
6
12
11
10
9
N/C
C
VSS
C
YOUT
ZOUT
N/C
P0
P1
Sleep
g-Select
g-Select
0g-Detect
N/C
0g-Detect
Self Test
XOUT
P2
VSS
VDD
P3
8
A/DIN
7
C
C
C
Sleep
YOUT
ZOUT
A/DIN
A/DIN
Figure 4. Pinout Description
Table 4. Pin Descriptions
Pin No. Pin Name
Description
1
N/C
No internal connection
Leave unconnected
Figure 6. Recommended PCB Layout for Interfacing
Accelerometer to Microcontroller
2
3
4
5
6
7
8
XOUT
YOUT
ZOUT
VSS
X direction output voltage
Y direction output voltage
Z direction output voltage
Power Supply Ground
NOTES:
1. Use 0.1 µF capacitor on VDD to decouple the power
source.
VDD
Power Supply Input
2. Physical coupling distance of the accelerometer to
the microcontroller should be minimal.
Sleep
NC
Logic input pin to enable product or Sleep Mode
No internal connection
Leave unconnected
3. Place a ground plane beneath the accelerometer to
reduce noise, the ground plane should be attached to
all of the open ended terminals shown in Figure 6.
9
0g-Detect Linear Freefall digital logic output signal
10
11
g-Select
N/C
Logic input pin to select g level
4. Use a 3.3nF capacitor on the outputs of the
accelerometer to minimize clock noise (from the
switched capacitor filter circuit).
Unused for factory trim
Leave unconnected
12
N/C
Unused for factory trim
Leave unconnected
5. PCB layout of power and ground should not couple
power supply noise.
13
14
Self Test
N/C
Input pin to initiate Self Test
6. Accelerometer and microcontroller should not be a
high current path.
Unused for factory trim
Leave unconnected
7. A/D sampling rate and any external power supply
switching frequency should be selected such that
they do not interfere with the internal accelerometer
sampling frequency (11 kHz for the sampling
frequency). This will prevent aliasing errors.
9
2
10
13
Logic
Input
g-Select
Self Test
0g-Detect
Logic
Input
X
V
OUT
DD
MMA7340L
3.3 nF
3.3 nF
3.3 nF
6
V
V
DD
3
4
Y
0.1 µF
OUT
5
7
SS
Logic
Input
Z
Sleep
OUT
Figure 5. Accelerometer with Recommended
Connection Diagram
MMA7340L
Sensors
Freescale Semiconductor
5
DYNAMIC ACCELERATION
Top View
+Y
Side View
6
5
4
3
2
1
-X
+X
+Z
-Z
14
7
8
9
10 11 12 13
-Y
: Arrow indicates direction of package movement.
14-Pin LGA Package
STATIC ACCELERATION
Direction of Earth's gravity field.*
Top View
6
8
5
9
4
3
2
1
7
14
Side View
Top
10 11 12 13
X
Y
Z
@ 0g = 1.65 V
@ +1g = 2.09 V
@ 0g = 1.65 V
OUT
OUT
Bottom
X
Y
Z
@ 0g = 1.65 V
@ 0g = 1.65 V
@ +1g = 2.09 V
OUT
OUT
OUT
OUT
Bottom
Top
13 12 11 10
9
5
8
6
X
Y
Z
@ +1g = 2.09 V
@ 0g = 1.65 V
@ 0g = 1.65 V
X
Y
Z
@ -1g = 1.21 V
@ 0g = 1.65 V
@ 0g = 1.65 V
OUT
OUT
OUT
OUT
X
@ 0g = 1.65 V
@ 0g = 1.65 V
@ -1g = 1.21 V
OUT
OUT
Y
Z
14
7
OUT
OUT
OUT
1
2
3
4
X
Y
Z
@ 0g = 1.65 V
@ -1g = 1.21 V
@ 0g = 1.65 V
OUT
OUT
OUT
* When positioned as shown, the Earth’s gravity will result in a positive 1g output.
MMA7340L
Sensors
Freescale Semiconductor
6
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS
Surface mount board layout is a critical portion of the total
design. The footprint for the surface mount packages must be
the correct size to ensure proper solder connection interface
between the board and the package.
With the correct footprint, the packages will self-align when
subjected to a solder reflow process. It is always
recommended to design boards with a solder mask layer to
avoid bridging and shorting between solder pads.
MMA7340L
Sensors
Freescale Semiconductor
7
PACKAGE DIMENSIONS
CASE 1935-01
ISSUE 0
14-LEAD LGA
MMA7340L
Sensors
8
Freescale Semiconductor
PACKAGE DIMENSIONS
CASE 1935-01
ISSUE 0
14-LEAD LGA
MMA7340L
Sensors
Freescale Semiconductor
9
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MMA7340L
Rev. 0
1/2007
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