MMA7340LT [FREESCALE]

【3g - 12g Three Axis Low-g Micromachined Accelerometer; 【科技3G - 12克三轴低g加速度计微机械
MMA7340LT
型号: MMA7340LT
厂家: Freescale    Freescale
描述:

【3g - 12g Three Axis Low-g Micromachined Accelerometer
【科技3G - 12克三轴低g加速度计微机械

机械
文件: 总10页 (文件大小:243K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
Document Number: MMA7340L  
Rev 0, 1/2007  
Freescale Semiconductor  
Technical Data  
±3g - 12g Three Axis Low-g  
Micromachined Accelerometer  
MMA7340L  
The MMA7340L is a low power, low profile capacitive micromachined  
accelerometer featuring signal conditioning, a 1-pole low pass filter,  
temperature compensation, self test, 0g-Detect which detects linear freefall,  
and g-Select which allows for the selection between 2 sensitivities. Zero-g  
offset and sensitivity are factory set and require no external devices. The  
MMA7340L includes a Sleep Mode that makes it ideal for handheld battery  
powered electronics.  
MMA7340L: XYZ AXIS  
ACCELEROMETER  
3g, 12g  
Features  
3mm x 5mm x 1.0mm LGA-14 Package  
Low Current Consumption: 400 µA  
Sleep Mode: 3 µA  
Bottom View  
Low Voltage Operation: 2.2 V – 3.6 V  
Selectable Sensitivity (±3g, ±12g)  
Fast Turn On Time (0.5 ms Enable Response Time)  
Self Test for Freefall Detect Diagnosis  
0g-Detect for Freefall Protection  
Signal Conditioning with Low Pass Filter  
Robust Design, High Shocks Survivability  
RoHS Compliant  
14 LEAD  
LGA  
CASE 1935-01  
Environmentally Preferred Product  
Low Cost  
Typical Applications  
3D Gaming: Tilt and Motion Sensing, Event Recorder  
HDD MP3 Player: Freefall Detection  
Top View  
N/C  
14  
Laptop PC: Freefall Detection, Anti-Theft  
Cell Phone: Image Stability, Text Scroll, Motion Dialing, E-Compass  
Pedometer: Motion Sensing  
N/C  
13 Self Test  
1
2
3
XOUT  
PDA: Text Scroll  
12  
11  
10  
9
N/C  
Navigation and Dead Reckoning: E-Compass Tilt Compensation  
Robotics: Motion Sensing  
YOUT  
ZOUT  
N/C  
4
5
6
g-Select  
0g-Detect  
N/C  
VSS  
VDD  
ORDERING INFORMATION  
8
Temperature  
Range  
Package  
Drawing  
Part Number  
Package  
Shipping  
7
Sleep  
MMA7340LT  
–20 to +85°C  
–20 to +85°C  
1935-01  
1935-01  
LGA-14  
LGA-14  
Tray  
MMA7340LR2  
Tape & Reel  
Figure 1. Pin Connections  
© Freescale Semiconductor, Inc., 2007. All rights reserved.  
VDD  
0g-Detect  
XOUT  
g-Select  
CLOCK  
GEN  
X-TEMP  
COMP  
OSCILLATOR  
GAIN  
+
FILTER  
G-CELL  
SENSOR  
C to V  
CONVERTER  
Y-TEMP  
COMP  
Sleep  
YOUT  
CONTROL LOGIC  
NVM TRIM  
Z-TEMP  
COMP  
SELFTEST  
ZOUT  
CIRCUITS  
Self Test  
VSS  
Figure 2. Simplified Accelerometer Functional Block Diagram  
Table 1. Maximum Ratings  
(Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)  
Rating  
Maximum Acceleration (all axis)  
Symbol  
gmax  
Value  
±5000  
Unit  
g
Supply Voltage  
VDD  
–0.3 to +3.6  
1.8  
V
Drop Test(1)  
Ddrop  
Tstg  
m
Storage Temperature Range  
1. Dropped onto concrete surface from any axis.  
–40 to +125  
°C  
ELECTRO STATIC DISCHARGE (ESD)  
WARNING: This device is sensitive to electrostatic  
discharge.  
Although the Freescale accelerometer contains internal  
2000 V ESD protection circuitry, extra precaution must be  
taken by the user to protect the chip from ESD. A charge of  
over 2000 volts can accumulate on the human body or  
associated test equipment. A charge of this magnitude can  
alter the performance or cause failure of the chip. When  
handling the accelerometer, proper ESD precautions should  
be followed to avoid exposing the device to discharges which  
may be detrimental to its performance.  
MMA7340L  
Sensors  
2
Freescale Semiconductor  
Table 2. Operating Characteristics  
Unless otherwise noted: –20°C < TA < 85°C, 2.2 V < VDD < 3.6 V, Acceleration = 0g, Loaded output(1)  
Characteristic  
Symbol  
Min  
Typ  
Max  
Unit  
Operating Range(2)  
Supply Voltage(3)  
Supply Current(4)  
Supply Current at Sleep Mode(4)  
Operating Temperature Range  
Acceleration Range, X-Axis, Y-Axis, Z-Axis  
g-Select: 0  
VDD  
IDD  
IDD  
TA  
2.2  
3.3  
400  
3
3.6  
600  
10  
V
µA  
µA  
°C  
–20  
+85  
gFS  
gFS  
±3  
g
g
g-Select: 1  
±12  
Output Signal  
Zero g (TA = 25°C, VDD = 3.3 V)(5)  
Zero g(4)  
VOFF  
1.551  
1.65  
±2.0  
1.749  
V
VOFF, TA  
mg/°C  
Sensitivity (TA = 25°C, VDD = 3.3 V)  
3g  
S3g  
S12g  
S,TA  
413.6  
103.4  
440  
110  
466.4  
116.6  
mV/g  
mV/g  
%/°C  
12g  
Sensitivity(4)  
±0.03  
Bandwidth Response  
XY  
f-3dBXY  
f-3dBZ  
ZO  
400  
300  
32  
Hz  
Hz  
kΩ  
g
Z
Output Impedance  
0g-Detect  
0gdetect  
-0.4  
0
+0.4  
Self Test  
Output Response  
X
OUT, YOUT  
gSTXY  
gSTZ  
VIL  
-0.1  
+1.0  
g
g
ZOUT  
Input Low  
Input High  
VSS  
0.3 VDD  
VDD  
V
V
VIH  
0.7 VDD  
Noise  
Power Spectral Density RMS (0.1 Hz – 1 kHz)(4)  
nPSD  
350  
µg/  
Hz  
Control Timing  
Power-Up Response Time(6)  
Enable Response Time(7)  
Self Test Response Time(8)  
Sensing Element Resonant Frequency  
XY  
tRESPONSE  
tENABLE  
tST  
1.0  
0.5  
2.0  
2.0  
2.0  
5.0  
ms  
ms  
ms  
fGCELLXY  
fGCELLZ  
fCLK  
6.0  
3.4  
11  
kHz  
kHz  
kHz  
Z
Internal Sampling Frequency  
Output Stage Performance  
Full-Scale Output Range (IOUT = 30 µA)  
VFSO  
VSS+0.25  
–1.0  
VDD–0.25  
+1.0  
V
Nonlinearity, XOUT, YOUT, ZOUT  
Cross-Axis Sensitivity(9)  
NLOUT  
%FSO  
VXY, XZ, YZ  
-5.0  
+5.0  
%
1. For a loaded output, the measurements are observed after an RC filter consisting of an internal 32kresistor and an external 3.3nF capacitor  
on the analog output for each axis and a 0.1µF capacitor on Vdd - GND.  
2. These limits define the range of operation for which the part will meet specification.  
3. Within the supply range of 2.2 and 3.6 V, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the device  
may operate as a linear device but is not guaranteed to be in calibration.  
4. This value is measured with g-Select in 3g mode.  
5. The device can measure both + and – acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output  
will increase above VDD/2. For negative acceleration, the output will decrease below VDD/2.  
6. The response time between 10% of full scale Vdd input voltage and 90% of the final operating output voltage.  
7. The response time between 10% of full scale Sleep Mode input voltage and 90% of the final operating output voltage.  
8. The response time between 10% of the full scale self test input voltage and 90% of the self test output voltage.  
9. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity.  
MMA7340L  
Sensors  
Freescale Semiconductor  
3
PRINCIPLE OF OPERATION  
The Freescale accelerometer is a surface-micromachined  
protection where system integrity must be ensured over the  
life of the product. Customers can use self test to verify the  
solderability to confirm that the part was mounted to the PCB  
correctly. To use this feature to verify the 0g-Detect function,  
the accelerometer should be held upside down so that the  
z-axis experiences -1g. When the self test function is  
initiated, an electrostatic force is applied to each axis to  
cause it to deflect. The x- and y-axis are deflected slightly  
while the z-axis is trimmed to deflect 1g. This procedure  
assures that both the mechanical (g-cell) and electronic  
sections of the accelerometer are functioning.  
integrated-circuit accelerometer.  
The device consists of a surface micromachined  
capacitive sensing cell (g-cell) and a signal conditioning ASIC  
contained in a single package. The sensing element is sealed  
hermetically at the wafer level using a bulk micromachined  
cap wafer.  
The g-cell is a mechanical structure formed from  
semiconductor materials (polysilicon) using semiconductor  
processes (masking and etching). It can be modeled as a set  
of beams attached to a movable central mass that move  
between fixed beams. The movable beams can be deflected  
from their rest position by subjecting the system to an  
acceleration (Figure 3).  
As the beams attached to the central mass move, the  
distance from them to the fixed beams on one side will  
increase by the same amount that the distance to the fixed  
beams on the other side decreases. The change in distance  
is a measure of acceleration.  
The g-cell beams form two back-to-back capacitors  
(Figure 3). As the center beam moves with acceleration, the  
distance between the beams changes and each capacitor's  
value will change, (C = Aε/D). Where A is the area of the  
beam, ε is the dielectric constant, and D is the distance  
between the beams.  
g-Select  
The g-Select feature allows for the selection between two  
sensitivities. Depending on the logic input placed on pin 10,  
the device internal gain will be changed allowing it to function  
with a 3g or 12g sensitivity (Table 3). This feature is ideal  
when a product has applications requiring two different  
sensitivities for optimum performance. The sensitivity can be  
changed at anytime during the operation of the product. The  
g-Select pin can be left unconnected for applications  
requiring only a 3g sensitivity as the device has an internal  
pull-down to keep it at that sensitivity (440mV/g)).  
Table 3. g-Select Pin Description  
The ASIC uses switched capacitor techniques to measure  
the g-cell capacitors and extract the acceleration data from  
the difference between the two capacitors. The ASIC also  
signal conditions and filters (switched capacitor) the signal,  
providing a high level output voltage that is ratiometric and  
proportional to acceleration.  
g-Select  
g-Range  
3g  
Sensitivity  
440 mV/g  
110 mV/g  
0
1
12g  
Sleep Mode  
The 3 axis accelerometer provides a Sleep Mode that is  
ideal for battery operated products. When Sleep Mode is  
active, the device outputs are turned off, providing significant  
reduction of operating current. A low input signal on pin 7  
(Sleep Mode) will place the device in this mode and reduce  
the current to 3 µA typ. For lower power consumption, it is  
recommended to set g-Select to 3g mode. By placing a high  
input signal on pin 7, the device will resume to normal mode  
of operation.  
Acceleration  
Filtering  
The 3 axis accelerometer contains an onboard single-pole  
switched capacitor filter. Because the filter is realized using  
switched capacitor techniques, there is no requirement for  
external passive components (resistors and capacitors) to set  
the cut-off frequency.  
Figure 3. Simplified Transducer Physical Model  
SPECIAL FEATURES  
0g-Detect  
Ratiometricity  
Ratiometricity simply means the output offset voltage and  
sensitivity will scale linearly with applied supply voltage. That  
is, as supply voltage is increased, the sensitivity and offset  
increase linearly; as supply voltage decreases, offset and  
sensitivity decrease linearly. This is a key feature when  
interfacing to a microcontroller or an A/D converter because  
it provides system level cancellation of supply induced errors  
in the analog to digital conversion process.  
The sensor offers a 0g-Detect feature that provides a logic  
high signal when all three axes are at 0g. This feature  
enables the application of Linear Freefall protection if the  
signal is connected to an interrupt pin or a poled I/O pin on a  
microcontroller.  
Self Test  
The sensor provides a self test feature that allows the  
verification of the mechanical and electrical integrity of the  
accelerometer at any time before or after installation. This  
feature is critical in applications such as hard disk drive  
MMA7340L  
Sensors  
4
Freescale Semiconductor  
BASIC CONNECTIONS  
PCB Layout  
Pin Descriptions  
Top View  
POWER SUPPLY  
N/C  
14  
N/C  
13 Self Test  
1
VDD  
VRH  
VDD  
VSS  
XOUT  
C
2
3
4
5
6
12  
11  
10  
9
N/C  
C
VSS  
C
YOUT  
ZOUT  
N/C  
P0  
P1  
Sleep  
g-Select  
g-Select  
0g-Detect  
N/C  
0g-Detect  
Self Test  
XOUT  
P2  
VSS  
VDD  
P3  
8
A/DIN  
7
C
C
C
Sleep  
YOUT  
ZOUT  
A/DIN  
A/DIN  
Figure 4. Pinout Description  
Table 4. Pin Descriptions  
Pin No. Pin Name  
Description  
1
N/C  
No internal connection  
Leave unconnected  
Figure 6. Recommended PCB Layout for Interfacing  
Accelerometer to Microcontroller  
2
3
4
5
6
7
8
XOUT  
YOUT  
ZOUT  
VSS  
X direction output voltage  
Y direction output voltage  
Z direction output voltage  
Power Supply Ground  
NOTES:  
1. Use 0.1 µF capacitor on VDD to decouple the power  
source.  
VDD  
Power Supply Input  
2. Physical coupling distance of the accelerometer to  
the microcontroller should be minimal.  
Sleep  
NC  
Logic input pin to enable product or Sleep Mode  
No internal connection  
Leave unconnected  
3. Place a ground plane beneath the accelerometer to  
reduce noise, the ground plane should be attached to  
all of the open ended terminals shown in Figure 6.  
9
0g-Detect Linear Freefall digital logic output signal  
10  
11  
g-Select  
N/C  
Logic input pin to select g level  
4. Use a 3.3nF capacitor on the outputs of the  
accelerometer to minimize clock noise (from the  
switched capacitor filter circuit).  
Unused for factory trim  
Leave unconnected  
12  
N/C  
Unused for factory trim  
Leave unconnected  
5. PCB layout of power and ground should not couple  
power supply noise.  
13  
14  
Self Test  
N/C  
Input pin to initiate Self Test  
6. Accelerometer and microcontroller should not be a  
high current path.  
Unused for factory trim  
Leave unconnected  
7. A/D sampling rate and any external power supply  
switching frequency should be selected such that  
they do not interfere with the internal accelerometer  
sampling frequency (11 kHz for the sampling  
frequency). This will prevent aliasing errors.  
9
2
10  
13  
Logic  
Input  
g-Select  
Self Test  
0g-Detect  
Logic  
Input  
X
V
OUT  
DD  
MMA7340L  
3.3 nF  
3.3 nF  
3.3 nF  
6
V
V
DD  
3
4
Y
0.1 µF  
OUT  
5
7
SS  
Logic  
Input  
Z
Sleep  
OUT  
Figure 5. Accelerometer with Recommended  
Connection Diagram  
MMA7340L  
Sensors  
Freescale Semiconductor  
5
DYNAMIC ACCELERATION  
Top View  
+Y  
Side View  
6
5
4
3
2
1
-X  
+X  
+Z  
-Z  
14  
7
8
9
10 11 12 13  
-Y  
: Arrow indicates direction of package movement.  
14-Pin LGA Package  
STATIC ACCELERATION  
Direction of Earth's gravity field.*  
Top View  
6
8
5
9
4
3
2
1
7
14  
Side View  
Top  
10 11 12 13  
X
Y
Z
@ 0g = 1.65 V  
@ +1g = 2.09 V  
@ 0g = 1.65 V  
OUT  
OUT  
Bottom  
X
Y
Z
@ 0g = 1.65 V  
@ 0g = 1.65 V  
@ +1g = 2.09 V  
OUT  
OUT  
OUT  
OUT  
Bottom  
Top  
13 12 11 10  
9
5
8
6
X
Y
Z
@ +1g = 2.09 V  
@ 0g = 1.65 V  
@ 0g = 1.65 V  
X
Y
Z
@ -1g = 1.21 V  
@ 0g = 1.65 V  
@ 0g = 1.65 V  
OUT  
OUT  
OUT  
OUT  
X
@ 0g = 1.65 V  
@ 0g = 1.65 V  
@ -1g = 1.21 V  
OUT  
OUT  
Y
Z
14  
7
OUT  
OUT  
OUT  
1
2
3
4
X
Y
Z
@ 0g = 1.65 V  
@ -1g = 1.21 V  
@ 0g = 1.65 V  
OUT  
OUT  
OUT  
* When positioned as shown, the Earth’s gravity will result in a positive 1g output.  
MMA7340L  
Sensors  
Freescale Semiconductor  
6
MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS  
Surface mount board layout is a critical portion of the total  
design. The footprint for the surface mount packages must be  
the correct size to ensure proper solder connection interface  
between the board and the package.  
With the correct footprint, the packages will self-align when  
subjected to a solder reflow process. It is always  
recommended to design boards with a solder mask layer to  
avoid bridging and shorting between solder pads.  
MMA7340L  
Sensors  
Freescale Semiconductor  
7
PACKAGE DIMENSIONS  
CASE 1935-01  
ISSUE 0  
14-LEAD LGA  
MMA7340L  
Sensors  
8
Freescale Semiconductor  
PACKAGE DIMENSIONS  
CASE 1935-01  
ISSUE 0  
14-LEAD LGA  
MMA7340L  
Sensors  
Freescale Semiconductor  
9
How to Reach Us:  
Home Page:  
www.freescale.com  
Web Support:  
http://www.freescale.com/support  
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Technical Information Center, EL516  
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www.freescale.com/support  
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+44 1296 380 456 (English)  
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www.freescale.com/support  
Information in this document is provided solely to enable system and software  
implementers to use Freescale Semiconductor products. There are no express or  
implied copyright licenses granted hereunder to design or fabricate any integrated  
circuits or integrated circuits based on the information in this document.  
Freescale Semiconductor reserves the right to make changes without further notice to  
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limitation consequential or incidental damages. “Typical” parameters that may be  
provided in Freescale Semiconductor data sheets and/or specifications can and do vary  
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Freescale Semiconductor Japan Ltd.  
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Semiconductor was negligent regarding the design or manufacture of the part.  
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Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc.  
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© Freescale Semiconductor, Inc. 2007. All rights reserved.  
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For information on Freescale’s Environmental Products program, go to http://www.freescale.com/epp.  
MMA7340L  
Rev. 0  
1/2007  

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