L12542_15 [HAMAMATSU]
Ideal for eliminating electrostatic charges in a vacuum;
| 型号： | L12542_15 |
| 厂家： | 
HAMAMATSU CORPORATION |
| 描述： | Ideal for eliminating electrostatic charges in a vacuum |
| 文件： | 总4页 (文件大小：483K) |
| 中文： | 中文翻译 | 下载： | 下载PDF数据表文档文件 |
ELECTROSTATIC
REMOVER
L12542
ELECTROSTATIC CHARGE REMOVER
Ideal for eliminating electrostatic charges in a vacuum
OVERVIEW
The L12542 is a newly developed electrostatic charge re-
mover that makes use of VUV (vacuum ultraviolet) light.
Due to its wide irradiation angle about 3 times larger than
our current VUV light source, the L12542 efficiently re-
moves electrostatic charges over large areas in depressu-
rized or vacuum environments.
Up until now two or more VUV light sources were needed
to neutralize electrostatic charges in large areas due to
their limited irradiation angle. The L12542 solves this prob-
lem and efficiently neutralizes large areas in a vacuum.
Left: Light source, Right: Power supply
FEATURES
Irradiating area
I
i i
about 9 times
larger
GLarge irradiation (neutralizing) area
GHighly efficient ion generation in a vacuum
GNo air flow needed
VACUUM CHAMBER
VACUUM FLANGE
WAFER
G
No overshoot (generates no opposite-polari-
ty static charges)
G
No dust and electromagnetic noise emissions
GLong life
ELECTROSTATIC
CHUCK
L12542
APPLICATIONS
GDechucking of electrostatic chucks
GSemiconductor manufacturing equipment
(vacuum process)
VACUUM CHAMBER
VACUUM FLANGE
WAFER
GLCD manufacturing equipment
GOrganic EL manufacturing equipment
GHard disk manufacturing equipment
GFilm manufacturing equipment
CONVENTIONAL
TYPE
ELECTROSTATIC
CHUCK
TLSZC0015EB
ELECTROSTATIC CHARGE REMOVAL EFFECT
Neutralization time vs. distance
Neutralization time vs. vacuum level
TLSZB0113EA
5
0.7 TLSZB0114EA
Measurement conditions
Charged plate: 25 mm
Charged voltage: 1 kV / 100 V
Vacuum level: 1 × 10-2 Pa
Measurement conditions
Charged plate: 25 mm
Charged voltage: 1 kV / 100 V
Distance between light source output
window and charged plate: 300 mm
4.5
0.6
0.5
0.4
0.3
0.2
0.1
4
3.5
3
Positive charged
Negative charged
Positive charged
Negative charged
2.5
2
1.5
1
0.5
0
0
0
200
400
600
800
1000
1200
1400
0.0001
0.001
0.01
0.1
1
10
DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm)
VACUUM LEVEL (Pa)
SPECIFICATIONS
GGENERAL RATINGS
Parameter
Spectral distribution 1
Window material
Description / Value
115 to 400
Unit
nm
—
—
°C
°C
—
—
MgF2
Cooling method
Air cooling by cooling fan
+10 to +40
0 to +60
Below 80 % (no condensation)
Below 85 % (no condensation)
Operating temperature range
Storage temperature range
Operating humidity range
Storage humidity range
1The ionizer internal lamp emits intense ultraviolet rays harmful to the eyes and skin. Do not look directly at the emitted light and do not expose skin to light emission.
GRECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Parameter
Warm-up time
Description / Value
25
Unit
s
5
230 nm
160 nm
2000 (guaranteed)
500 (expected)
Light source service life 2
h
Input voltage (AC)
Power consumption (Max.)
100 V to 240 V (100 V/200 V auto switching), single phase 50 Hz / 60 Hz
90
—
VA
2The life end is defined as the time when light output falls to 50% of its initial intensity value while operated under our measurement conditions. Note
that the light output attenuation depends greatly on the environment of the vacuum equipment.
* When ordering a replacement light source, please specify the type number "L12565".
SPECTRAL DISTRIBUTION
DIRECTIVITY (LIGHT DISTRIBUTION)
TLSOB0079EB
RELATIVE IRRADIANCE (%)
100
100
80
80
60
40
60
30°
40
20°
20
0
10°
0°
ANGLE
-10°
-20
-40
-20°
-30°
20
0
-60
-80
VUV IONIZER L12542
CONVENTIONAL TYPE
100
120
140
160
180
200
220
240
400
-100
TLSZB0105EB
WAVELENGTH (nm)
DIMENSIONAL OUTLINES (Unit: mm)
GLIGHT SOURCE (Weight: Approx. 530 g)
160
4
42
19
4
ARC POINT
VACUUM FLANGE MOUNT
CONNECTOR
COOLING FAN
(CONNECTION TO POWER SUPPLY)
TLSZA0031EB
GPOWER SUPPLY (Weight: Approx. 1.8 kg)
CONNECTOR
(CONNECTION TO
LIGHT SOURCE)
EXTERNAL CONTROL TERMINALS
TOP VIEW
DEUTERIUM LAMP STATUS SIGNAL
DEUTERIUM LAMP
ON/OFF CONTROL
COOLING FAN
POWER SWITCH
CONT
DEUTERIUM LAMP
POWER SUPPLY
POWER
POWER
LAMP
OUTPUT
LINE INPUT
F1 : T 2A. 250V
117
200
FRONT VIEW
SIDE VIEW
REAR VIEW
LIGHT SOURCE TO POWER SUPPLY CONNECTION CABLE LENGTH: 1800 50
TLSZA0032EB
RELATED PRODUCTS
IVACUUM FLANGE
GOVERVIEW
Various vacuum flanges are available for the L12542 VUV ionizer. The E3444-02 mount flange meets ICF114 flange
specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum flanges
including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best flange that
matches their vacuum vessel.
GSPECIFICATIONS
Parameter
E3444
E3444-01
E3444-02
Sealing method
Flange
Mount flange
Seeling force retention
O-ring
JIS VF50
JIS VG50
Regular
—
ICF114
ICF114
1.33 × 10-4 Pa L/s or less (1 × 10-6 Torr L/s)
GDIMENSIONAL OUTLINE (Unit: mm)
40
10
E3444
4- 8.4
7
O-RING
O-RING
O-RING
20
TLSOA0097EB
40
E3444-01
4- 10
10
7
20
TLSOA0098EB
47.5
E3444-02
17.5
8- 8.4
7
20
TLSOA0053EC
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K.
HAMAMATSU PHOTONICS K.K., Electron Tube Division
314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: info@hamamatsu.de
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 SE-164 40 Kista, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: info@hamamatsu.se
TLSZ1018E03
NOV. 2014 IP
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93581733, Fax: (39)02-93581741 E-mail: info@hamamatsu.it
China: Hamamatsu Photonics (China) Co., Ltd.: B1201 Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, Beijing 100020, China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: hpc@hamamatsu.com.cn
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