X3511-64013 [HP]

Agilent TwisTorr 804 FS;


型号：	X3511-64013
厂家：	HEWLETT-PACKARD
描述：	Agilent TwisTorr 804 FS
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中文：	中文翻译
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Data Sheet

Agilent TwisTorr 804 FS

The new generation Turbo Pump

with Agilent Floating Suspension

The Agilent TwisTorr 804 FS turbomolecular high-vacuum pump combines TwisTorr

drag stage technology and Agilent Floating Suspension to provide high performance,

reliability, and economy.

TwisTorr drag stages create high compression ratios for light gases such as

hydrogen and helium to deliver high throughput and high tolerance of foreline

pressure, thereby permitting the use of smaller and more economical backing

pumps. This technology results in a compact rotor design that is energy-efficient

and maintains a low operating temperature.

The Agilent Floating Suspension system reduces noise and vibration, and ensures

optimal bearing operating conditions to extend operating life, minimize system

downtime, and assure stability over time.

The unique bearing and dry lubrication in the TwisTorr 704 FS eliminate oil and

maintenance, and permit operation of the pump in any orientation. Available with

onboard or rack controllers.

Technical Specification

DS302

IDP10

IDP15

ISO200K-F

ISO250K-F

CFF10

Pumping speed

Recommended forepump

720 L/s

660 L/s

485 L/s

690 L/s

N₂

H₂

Any

Operating position

+5 °C to +35 °C

Oper. ambient temperature

Rel. humidity of air

0 to 90% (not condensing)

Water Cooling

Air Cooling

(15°C Water temperature / 25°C

room temperature)

Max Gas Throughput(*)

ISO pump: 80°C at inlet flange

CFF pump: 120°C at inlet flange

(25°C Air temperature)

Bakeout temperature

4.3 mbarL/s

255 SCCM

6.1 mbar L/s

367 SCCM

Permanent grease lubrication

Lubricant

N₂

Cooling requirements

Air cooling

7.9 mbar L/s

467 SCCM

10.4 mbar L/s

615 SCCM

Air temperature from +5°C to 35°C

Water temperature from +15°C to +25°C

Water flow min. 100L/h

1.5 mbar L/s

89 SCCM

3.3 mbar L/s

195 SCCM

Water cooling

Noise Pressure Level

(at 1m at full speed)

(*) Backing pump 11.6 m3/hr

43dB(A)

Compression ratio and foreline tolerance*

-40 °C to +70 °C

3000 m

Storage temperature

Max altitude

>1E+11

2E+08

3E+06

>1E+11

10 mbar

>4 mbar

8.5 mbar

N₂

H₂

20.7 Kg / 45.5 lbs.

ISO200K

23.6 Kg / 51.9 lbs.

23.3 Kg / 51.2 lbs.

27.6 Kg / 60.9 lbs.

22.1 Kg / 48.6 lbs.

ISO200F

ISO250K

ISO250F

CFF 10"

(*) Foreline Tolerance defined as the pressure at which the turbopump still produce a

compression of 100 and estimated in water cooling mode

Weight kg (lbs)

Base pressure with re-

comm. forepump

< 1 x 10^-10mbar

(< 1 x 10^-10Torr)

Conformity to norms

ISO 200K, ISO 200F, ISO 250K,

ISO 250F, CFF 10”

Inlet flange

EMC (Control Units)

Safety (CE/CSA)

Machinery Directive

Low Voltage Directive

EMC Directive (Control Units)

ROHS

61326-1

61010-1

NW25 or NW40

Auto setting from 40'800 RPM to 49'500 RPM

< 5 minutes

Foreline flange

Rotational speed

Start-up time

DIR 2006/42/CE

DIR 2014/35/EU

DIR 2014/30/EU

DIR 2011/65/EU

Outline Drawing

115.25 [4.54]

117.25 [4.62]

PURGE

SCREW

115.25 [4.54]

117.25 [4.62]

115.25 [4.54]

117.25 [4.62]

FORELINE

FLANGE KF40

PURGE

SCREW

PURGE

SCREW

FORELINE

FLANGE KF25

FORELINE

FLANGE KF25

VENT

SCREW

VENT

SCREW

ELECTRICAL

CONNECTOR

ELECTRICAL

CONNECTOR

ELECTRICAL

CONNECTOR

ISO 200K

CFF 10"

Ø253.24 [9.97]

ISO 250F

Ø334.9 [13.19]

Ø240 [9.45]

Ø207.5 [8.17]

3D Drawings available for download

Ordering Information

9699347

9699337

Pumps

Configuration Options

X3511-64007

X3511-64008

X3511-64009

X3511-64010

X3511-64011

X3511-64012

X3511-64013

X3511-64014

X3511-64022

X3511-64023

X3511-64024

X3511-64025

X3511-64026

X3511-64027

X3511-64028

X3511-64029

Part Numbers

X3501-64016

X3512-64016

Part Numbers

9699958

Plastic Water cooling Kit

TwisTorr 804 FS ISO200K KF25 air cooling

TwisTorr 804 FS ISO200K KF40 air cooling

TwisTorr 804 FS ISO200F KF25 air cooling

TwisTorr 804 FS ISO200F KF40 air cooling

TwisTorr 804 FS CFF10" KF25 air cooling

TwisTorr 804 FS CFF10" KF40 air cooling

TwisTorr 804 FS ISO250K KF40 air cooling

TwisTorr 804 FS ISO250F KF40 air cooling

TwisTorr 804 FS ISO200K KF25 water cooling

TwisTorr 804 FS ISO200K KF40 water cooling

TwisTorr 804 FS ISO200F KF25 water cooling

TwisTorr 804 FS ISO200F KF40 water cooling

TwisTorr 804 FS CFF10" KF25 water cooling

TwisTorr 804 FS CFF10" KF40 water cooling

TwisTorr 804 FS ISO250K KF40 water cooling

TwisTorr 804 FS ISO250F KF40 water cooling

Controllers

Metal Water cooling Kit

X3501-68101

X3501-68051

X3501-68061

X3501-68021

X3501-68011

X3501-68071

X3501-68081

X3501-68091

Part Numbers

X3501-68002

9699834

Air Cooling Kit Extension Cable 5m

Air Cooling Kit Extension Cable 10m

Air Cooling Kit Extension Cable 15m

Air Cooling Kit Extension Cable 20m

Air Cooling Kit Extension Cable 30m

Air Cooling Kit Extension Cable 50m

Air Cooling Kit Extension Cable 75m

Air Cooling Kit Extension Cable 100m

Venting

Vent valve driven by Rack Controller

Vent valve driven by onboard Controller

Vent flange, NW 10 KF / M8

9699108

X3511-68000

Spare Vent Screw

X3501-68004 (5 m)

X3501-68054 (10 m)

X3501-68064 (15 m)

X3501-68074 (20 m)

X3501-68084 (30 m)

X3501-68034 (50 m)

X3501-68094 (75 m)

X3501-68104 (100 m)

Vent valve Rack Extension Cable

TwisTorr Medium-TMP Rack Controller

TwisTorr Medium-TMP on board Controller

Cables

Mains cable NEMA plug 3 m long

Purge

Purge 10SCCM M12-NW16KF

Purge 10SCCM M12-1/4Swagelok

Purge 20SCCM M12-NW16KF

Purge 20SCCM M12-1/4Swagelok

Spare Purge Screw

Part Numbers

9699239

9699957

Mains cable EU plug 3 m long

X3501-68005

9699883

Mains cable UK plug 2.5 m long

9699240

Serial Cable & T-plus Software

9699241

9699242

9699948M001 (5 m)

9699948M003 (10 m)

9699948M004 (15 m)

9699948M002 (20 m)

9699948M005 (30 m)

9699948M006 (50 m)

9699948M009 (75 m)

9699948M010 (100 m)

X3502-68004

Part Numbers

Mounting

Medium-TMP Extension Cable

Medium-TMP onboard Controller side-mounting

bracket

X3511-68003

X3511-68001

X3511-68002

Medium-TMP KF25 foreline flange

Medium-TMP KF40 foreline flange

Active Gauges

Inlet Screen

Inlet Screen ISO100/CFF6

Part Numbers

9699302

Part Numbers

FRG 700 Full Range Gauge

Cooling

Part Numbers

X3501-68001

9699297

PVG 500 Pirani Vacuum Gauge

PCG 750 Pirani Capacitance Gauge

CDG-500 Capacitance Diaphragm Gauge

Ask Agilent for details

Medium-TMP Air Cooling Kit for Rack Controller

Medium-TMP Air Cooling Kit for on board Controller

Compression Ratio

Pumping Speed

800

700

600

500

400

300

200

100

Hydrogen

Helium

Nitrogen

Argon

Hydrogen

Helium

Nitrogen

Argon

-3

-2

-1

-9

-8

-7

-6

-5

-4

-3

-2

-1

Inlet Pressure (mbar)

Foreline Pressure (mbar)

www.agilent.com/chem/vacuum

United States

Agilent Technologies

121 Hartwell Avenue, Lexington MA 02421, USA

Tel: +1 781 861 7200

Toll free: +1 800 882 7426

vpl-customercare@agilent.com

Europe and other countries

Agilent Technologies Italia SpA

via F.lli Varian 54, 10040 Leini, (Torino), Italy

Tel: +39 011 9979 111

Toll free: 00 800 234 234 00

vpt-customercare@agilent.com

This information is subject to change without notice.

Printed in the USA, October, 2017

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