Q62705-K178 [INFINEON]

Silicon Piezoresistive Relative Pressure Sensor; 硅压阻相对压力传感器
Q62705-K178
型号: Q62705-K178
厂家: Infineon    Infineon
描述:

Silicon Piezoresistive Relative Pressure Sensor
硅压阻相对压力传感器

传感器 压力传感器
文件: 总4页 (文件大小:123K)
中文:  中文翻译
下载:  下载PDF数据表文档文件
Silicon Piezoresistive  
Relative Pressure Sensor  
KPY 51-R  
KPY 56-R  
Features  
• Low pressure and temperature hysteresis  
• Fast response  
• High sensitivity and linearity  
• Fatigue free monocrystaline silicon diaphragm  
giving high load cycle stability  
• High long term stability  
• Built in silicon temperature sensor  
• Media compatible stainless housing  
Stainless Steel Package  
Ordering Code  
Type and  
Marking  
Symbol  
Pressure Range Unit  
KPY 51 R  
KPY 52 R  
KPY 53 R  
KPY 54 R  
KPY 55 R  
KPY 56 R  
P0 PN  
0 0.25  
0 0.6  
0 1.6  
0 4  
bar  
Q62705-K174  
Q62705-K171  
Q62705-K176  
Q62705-K178  
Q62705-K180  
Q62705-K182  
0 10  
0 25  
Pin Configuration  
1
2
3
4
Capillary tube  
+ VIN  
VOUT  
Temperature sensor  
(typ. R25 = 2 k)  
5
6
7
8
Temperature sensor  
VIN  
+ VOUT  
Not connected  
Semiconductor Group  
1
02.97  
KPY 51-R  
KPY 56-R  
Absolute Maximum Ratings  
Parameter  
Symbol  
Limit Values1)  
Frontside Rearside  
Unit  
Pressure overload  
PMAX  
bar  
KPY 51 R  
2
2
KPY 52 R  
KPY 53 R  
KPY 54 R  
KPY 55 R  
KPY 56 R  
6
6
10  
16  
30  
75  
10  
16  
30  
40  
Operating temperature range  
TA  
40 … + 125  
50 … + 130  
12  
˚C  
˚C  
V
Storage temperature range  
Supply voltage  
Tstg  
VIN  
1) Frontside coupling applies pressure onto chip face.  
Rearside coupling applies pressure through Kovar centre tube.  
Electrical Characteristics  
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.  
Parameter  
Symbol  
Limit Values  
Unit  
min.  
typ.  
max.  
Bridge resistance  
Sensitivity  
RB  
s
4
8
kΩ  
mV/  
KPY 51 R  
KPY 52 R  
KPY 53 R  
KPY 54 R  
KPY 55 R  
KPY 56 R  
16.8  
11.0  
5.6  
4.0  
1.8  
24.0  
15.0  
8.8  
6.0  
2.6  
32.0  
24.0  
12.5  
9.0  
4.0  
2.0  
Vbar  
0.88  
1.2  
Output voltage  
Vfin  
mV  
mV  
KPY 51 R  
KPY 52 R  
KPY 53 R  
KPY 54 R  
KPY 55 R  
KPY 56 R  
21  
33  
45  
80  
90  
110  
30  
45  
70  
120  
130  
150  
40  
72  
100  
180  
200  
250  
Offset voltage  
V0  
P = P0  
25  
+ 25  
Semiconductor Group  
2
KPY 51-R  
KPY 56-R  
Electrical Characteristics (cont’d)  
at TA = 25 ˚C and VIN = 5 V, unless otherwise specified.  
Parameter  
Symbol  
Limit Values  
typ. max.  
Unit  
min.  
Linearity error (Best fit straight line)  
FL  
% Vfin  
P0 = P0 PN  
KPY 51 55 R  
KPY 56 R  
± 0.15 ± 0.35  
± 0.15 −  
Pressure hysteresis  
PH  
% Vfin  
P1 = P0, P2 = PN, P3 = P0  
KPY 51 56 R  
± 0.1  
Electrical Characteristics  
at T1 = 25 ˚C, T2 = 80 ˚C, T3 = 25 ˚C and VIN = 5 V, unless otherwise specified.  
Parameter  
Symbol  
Limit Values  
typ. max.  
Unit  
min.  
Temperature coefficient of Vfin  
TCVfin  
%/K  
KPY 51 R  
0.20 −  
0.20 −  
0.20 −  
0.20 −  
0.20 −  
0.20 −  
0.09  
0.12  
0.13  
0.14  
0.15  
0.15  
KPY 52 R  
KPY 53 R  
KPY 54 R  
KPY 55 R  
KPY 56 R  
Temperature coefficient of V0  
TCV0  
%/K  
KPY 51 R  
KPY 52 R  
KPY 53 R  
KPY 54 R  
KPY 55 R  
KPY 56 R  
0.03 −  
0.03 −  
0.03 −  
0.03 −  
0.03 −  
0.03 −  
+ 0.08  
+ 0.08  
+ 0.05  
+ 0.05  
+ 0.05  
+ 0.05  
Temperature coefficient of RB  
KPY 51 56 R  
Temperature hysteresis of V0; Vfin  
KPY 51 56 R  
TCRB  
TH  
%/K  
+ 0.095 −  
% v. Vfin  
± 0.2  
Semiconductor Group  
3
KPY 51-R  
KPY 56-R  
Package Outline  
Stainless Steel Package  
Weight 15.5 g  
Dimension in mm  
Exterior Packaging  
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.  
Semiconductor Group  
4

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