MPX2050GVP [MOTOROLA]
Peizoresistive Sensor, Gage, 0Psi Min, 7.25Psi Max, 0.25%, 0-40mV, Round, Through Hole Mount, CASE 344D-01, 4 PIN;型号: | MPX2050GVP |
厂家: | MOTOROLA |
描述: | Peizoresistive Sensor, Gage, 0Psi Min, 7.25Psi Max, 0.25%, 0-40mV, Round, Through Hole Mount, CASE 344D-01, 4 PIN 传感器 换能器 |
文件: | 总8页 (文件大小:208K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
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by MPX2050/D
SEMICONDUCTOR TECHNICAL DATA
Motorola Preferred Device
0 to 50 kPa (0 to 7.25 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
The MPX2050 series device is a silicon piezoresistive pressure sensors providing a
highly accurate and linear voltage output — directly proportional to the applied pressure.
The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Features
•
•
•
•
•
•
Temperature Compensated Over 0°C to +85°C
Unique Silicon Shear Stress Strain Gauge
Easy to Use Chip Carrier Package Options
Ratiometric to Supply Voltage
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
Differential and Gauge Options
±0.25% Linearity (MPX2050)
Application Examples
•
•
•
•
•
•
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Non–Invasive Blood Pressure Measurement
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
V
S
3
NOTE: Pin 1 is the notched pin.
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
PIN NUMBER
2
4
X–ducer
SENSING
ELEMENT
V
out+
1
2
Gnd
3
4
V
S
V
out–
+V
out
–V
out
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
X–ducer is a trademark of Motorola, Inc.
REV 7
Motorola, Inc. 2000
MAXIMUM RATINGS
Rating
Symbol
Value
200
Unit
kPa
kPa
°C
(8)
Overpressure (P1 > P2)
P
max
(8)
Burst Pressure (P1 > P2)
P
burst
500
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
OPERATING CHARACTERISTICS (V = 10 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristic
Symbol
Min
0
Typ
—
Max
50
Unit
kPa
Vdc
mAdc
mV
(1)
Pressure Range
P
OP
(2)
Supply Voltage
Supply Current
Full Scale Span
V
S
—
10
16
I
o
—
6.0
40
—
(3)
MPX2050
MPX2050
V
FSS
38.5
–1.0
—
41.5
1.0
—
(4)
Offset
V
off
—
mV
Sensitivity
∆V/∆P
—
0.8
—
mV/kPa
(5)
Linearity
MPX2050
–0.25
—
0.25
—
%V
%V
%V
%V
FSS
FSS
FSS
FSS
(5)
Pressure Hysteresis (0 to 50 kPa)
—
±0.1
±0.5
—
(5)
Temperature Hysteresis (–40°C to +125°C)
—
—
—
(5)
Temperature Effect on Full Scale Span
TCV
–1.0
–1.0
1000
1400
—
1.0
1.0
2500
3000
—
FSS
(5)
Temperature Effect on Offset
TCV
—
mV
off
Input Impedance
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
t
R
1.0
20
ms
ms
Warm–Up
—
—
—
—
(9)
Offset Stability
—
±0.5
—
%V
FSS
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
Typ
2.0
—
Max
—
Unit
Grams
kPa
Weight (Basic Element Case 344–15)
—
—
—
(7)
Common Mode Line Pressure
—
690
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
LEAST SQUARES FIT
EXAGGERATED
PERFORMANCE
CURVE
STRAIGHT LINE
DEVIATION
LEAST
SQUARE
DEVIATION
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pres-
sure.
END POINT
STRAIGHT LINE FIT
OFFSET
50
PRESSURE (% FULLSCALE)
100
0
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output
characteristics of the MPX2050 series at 25°C. The output is
directly proportional to the differential pressure and is essen-
tially a straight line.
The effects of temperature on Full–Scale Span and Offset
are very small and are shown under Operating Characteris-
tics.
V = 10 Vdc
S
40
T = 25°C
A
35
30
25
20
15
10
MPX2050
P1 > P2
STAINLESS STEEL
METAL COVER
TYP
SPAN
RANGE
(TYP)
SILICONE
DIE COAT
MAX
DIE
EPOXY
CASE
P1
P2
WIRE BOND
LEAD FRAME
MIN
5
0
OFFSET
(TYP)
–5
RTV DIE
BOND
0
12.5
1.8
25
3.6
37.5
5.4
50
7.25
kPa
PSI
Figure 3. Output versus Pressure Differential
Figure 4. Cross–Sectional Diagram (not to scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344–15). A silicone gel iso-
lates the die surface and wire bonds from the environment,
while allowing the pressure signal to be transmitted to the sil-
icon diaphragm.
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
The MPX2050 series pressure sensor operating charac-
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
designed to operate with positive differential pressure
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die. The Motorola MPX pressure sensor is
applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Part Number
MPX2050D
Case Type
Pressure (P1) Side Identifier
Stainless Steel Cap
344–15C
344C–01
344B–01
344D–01
344E–01
344F–01
344G–01
MPX2050DP
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
MPX2050GP
MPX2050GVP
MPX2050GS
Side with Port Attached
Side with Port Attached
Stainless Steel Cap
MPX2050GSX
MPX2050GVSX
ORDERING INFORMATION
MPX2050 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
Device Type
Basic Element
Ported Elements
Options
Case Type
344–15C
344C–01
344B–01
Order Number
MPX2050D
Device Marking
MPX2050D
Differential
Differential
Gauge
MPX2050DP
MPX2050DP
MPX2050GP
MPX2051GP
MPX2050GP
MPX2051GP
Gauge Vacuum
Gauge Stove Pipe
Gauge Axial
344D–01
344E–01
344F–01
344G–01
MPX2050GVP
MPX2050GS
MPX2050GVP
MPX2050D
MPX2050D
MPX2050D
MPX2050GSX
MPX2050GVSX
Gauge Vacuum Axial
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
C
R
M
Z
1
4
2
3
INCHES
DIM MIN MAX
0.630
MILLIMETERS
B
–A–
MIN
15.11
MAX
16.00
13.56
5.59
A
B
C
D
F
0.595
0.514
0.200
0.016
0.048
N
0.534 13.06
L
1
2
3
4
0.220
0.020
0.064
5.08
0.41
1.22
PIN 1
0.51
–T–
SEATING
PLANE
1.63
G
J
0.100 BSC
2.54 BSC
F
0.014
0.695
0.016
0.725 17.65
0.36
0.40
G
J
L
M
N
R
Y
Z
18.42
30 NOM
F
Y
30 NOM
D 4 PL
0.475
0.430
0.048
0.106
0.495 12.07
0.450 10.92
0.052
0.118
12.57
11.43
1.32
DAMBAR TRIM ZONE:
THIS IS INCLUDED
WITHIN DIM. “F” 8 PL
M
M
0.136 (0.005)
T A
1.22
2.68
3.00
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE Z
NOTES:
–A–
U
SEATING
PLANE
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
L
R
INCHES
DIM MIN MAX
MILLIMETERS
H
MIN
1.175 29.08
0.715 17.40
MAX
29.85
18.16
8.26
0.51
1.63
A
B
C
D
F
1.145
0.685
0.305
0.016
0.048
N
B
PORT #1
0.325
0.020
0.064
7.75
0.41
1.22
–Q–
POSITIVE
PRESSURE
(P1)
G
H
J
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
4.62
0.36
0.725 17.65
0.300 7.37
0.440 10.67
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
K
L
N
P
1
2
3 4
PIN 1
K
0.159
0.159
0.250
0.240
3.89
3.89
5.84
5.59
–P–
Q
R
S
S
M
S
0.25 (0.010)
T Q
J
F
U
0.910 BSC
23.11 BSC
G
C
D 4 PL
M
S
S
0.13 (0.005)
T S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
V
PORT #1
W
L
R
H
INCHES
DIM MIN MAX
MILLIMETERS
MIN MAX
PORT #2
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
A
B
C
D
F
G
H
J
1.145 1.175 29.08 29.85
0.685 0.715 17.40 18.16
0.405 0.435 10.29
0.016 0.020
0.048 0.064
0.100 BSC
0.182 0.194
0.014 0.016
N
11.05
0.51
1.63
–Q–
0.41
1.22
2.54 BSC
SEATING
PLANE
SEATING
PLANE
B
4.62
0.36
4.93
0.41
1
2 3 4
K
L
0.695 0.725 17.65 18.42
0.290 0.300
PIN 1
K
7.37
7.62
11.18
4.04
4.04
2.11
–P–
N
P
Q
R
S
U
V
W
0.420 0.440 10.67
M
S
0.25 (0.010)
T Q
0.153 0.159
0.153 0.159
0.063 0.083
0.220 0.240
0.910 BSC
3.89
3.89
1.60
5.59
–T–
–T–
S
F
J
6.10
G
C
23.11 BSC
D 4 PL
0.248 0.278
0.310 0.330
6.30
7.87
7.06
8.38
M
S
S
0.13 (0.005)
T S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344C–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
–A–
2. CONTROLLING DIMENSION: INCH.
U
L
SEATING
PLANE
INCHES
DIM MIN MAX
MILLIMETERS
MIN
–T–
MAX
29.85
18.16
8.26
0.51
1.63
PORT #2
VACUUM
(P2)
A
B
C
D
F
1.145
0.685
0.305
0.016
0.048
1.175 29.08
0.715 17.40
H
R
POSITIVE
PRESSURE
(P1)
0.325
0.020
0.064
7.75
0.41
1.22
N
–Q–
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
4.62
0.36
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725 17.65
0.300 7.37
0.440 10.67
0.159
0.158
0.250
0.240
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
3.89
3.89
5.84
5.59
1
2
3 4
K
PIN 1
S
U
0.910 BSC
23.11 BSC
C
F
–P–
G
STYLE 1:
J
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
M
S
0.25 (0.010)
T Q
D 4 PL
M
S
S
0.13 (0.005)
T S
Q
CASE 344D–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
PORT #1
POSITIVE
PRESSURE
(P1)
C
A
BACK SIDE
VACUUM
(P2)
INCHES
DIM MIN MAX
0.720 17.53
0.255 6.22
0.820 19.81
MILLIMETERS
MIN
MAX
18.28
6.48
A
B
C
D
F
0.690
0.245
0.780
0.016
0.048
–B–
V
20.82
0.51
1.63
3
2
1
0.020
0.064
0.41
1.22
4
PIN 1
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
V
J
N
G
STYLE 1:
F
R
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
SEATING
PLANE
M
M
–T–
0.13 (0.005)
T B
CASE 344E–01
ISSUE B
NOTES:
–T–
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
C
A
U
–Q–
E
INCHES
DIM MIN MAX
MILLIMETERS
MIN
MAX
28.45
19.30
16.51
0.51
A
B
C
D
E
F
1.080
0.740
0.630
0.016
0.160
0.048
1.120 27.43
0.760 18.80
0.650 16.00
0.020
0.180
0.064
0.41
4.06
1.22
N
B
R
4.57
V
1.63
G
J
K
N
P
Q
R
S
U
V
0.100 BSC
2.54 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725 17.65
0.860 21.34
0.194
0.36
5.59
1.78
3.81
3.81
11.18
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
M
M
0.25 (0.010)
T Q
4
3
2
1
S
K
4.62
F
J
G
STYLE 1:
D 4 PL
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
M
S
S
0.13 (0.005)
T P
Q
CASE 344F–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
–Q–
E
U
INCHES
DIM MIN MAX
MILLIMETERS
MIN
MAX
28.45
19.30
16.51
0.51
A
B
C
D
E
F
1.080
0.740
0.630
0.016
0.160
0.048
1.120 27.43
0.760 18.80
0.650 16.00
0.020
0.180
0.064
POSITIVE
PRESSURE
(P1)
0.41
4.06
1.22
4.57
N
S
B
1.63
V
G
J
K
N
P
Q
R
S
U
V
0.100 BSC
2.54 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725 17.65
0.860 21.34
0.194
0.36
5.59
1.78
3.81
3.81
11.18
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
R
PIN 1
PORT #2
VACUUM
(P2)
–P–
M
M
0.25 (0.010)
T Q
1
2
3
4
K
4.62
F
J
STYLE 1:
G
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
D 4 PL
M
S
S
0.13 (0.005)
T P
Q
CASE 344G–01
ISSUE B
Mfax is a trademark of Motorola, Inc.
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or
guaranteeregardingthesuitabilityofitsproductsforanyparticularpurpose, nordoesMotorolaassumeanyliabilityarisingoutoftheapplication
or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages.
“Typical” parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual
performancemay vary over time. All operating parameters, including“Typicals” must be validated for each customer applicationbycustomer’s
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or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death
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and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or
unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and
are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
How to reach us:
USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217.
1–303–675–2140 or 1–800–441–2447
JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3–20–1, Minami–Azabu. Minato–ku, Tokyo 106–8573 Japan.
81–3–3440–3569
ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po,
N.T., Hong Kong. 852–26668334
Customer Focus Center: 1–800–521–6274
Mfax : RMFAX0@email.sps.mot.com
Motorola Fax Back System
– TOUCHTONE 1–602–244–6609
– US & Canada ONLY 1–800–774–1848
– http://sps.motorola.com/mfax/
HOME PAGE: http://motorola.com/sps/
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