MPX50GVS [MOTOROLA]
0 to 50 kPa (0-7.25 psi) 60 mV FULL SCALE SPAN (TYPICAL); 0〜50千帕( 0-7.25磅) 60 mV的满量程(典型值)型号: | MPX50GVS |
厂家: | MOTOROLA |
描述: | 0 to 50 kPa (0-7.25 psi) 60 mV FULL SCALE SPAN (TYPICAL) |
文件: | 总10页 (文件大小:190K) |
中文: | 中文翻译 | 下载: | 下载PDF数据表文档文件 |
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by MPX50/D
SEMICONDUCTOR TECHNICAL DATA
The MPX50 silicon piezoresistive pressure sensor provides a very accurate and linear
voltage output — directly proportional to the applied pressure. This standard, low cost,
uncompensated sensor permits manufacturers to design and add their own external
temperature compensating and signal conditioning networks. Compensation techniques
are simplified because of the predictability of Motorola’s single element strain gauge
design.
0 to 50 kPa (0–7.25 psi)
60 mV FULL SCALE SPAN
(TYPICAL)
Features
•
•
•
•
•
•
•
Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Easy to Use Chip Carrier Package Options
60 mV Span (Typ)
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
Differential and Gauge Options
±0.25% (Max) Linearity
Application Examples
•
•
•
•
•
•
•
•
Air Movement Control
Environmental Control Systems
Level Indicators
Leak Detection
Medical Instrumentation
Industrial Controls
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
Pneumatic Control Systems
Robotics
Figure 1 shows a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
NOTE: Pin 1 is the notched pin.
PIN 3
+ V
PIN NUMBER
S
1
2
Gnd
+V
3
4
V
S
PIN 2
+ V
–V
out
out
out
X–ducer
PIN 4
– V
out
PIN 1
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 5
Motorola, Inc. 1997
MAXIMUM RATINGS
Rating
Symbol
Value
200
Unit
kPa
kPa
°C
(8)
Overpressure (P1 > P2)
P
max
(8)
Burst Pressure (P1 > P2)
P
burst
500
Storage Temperature
Operating Temperature
T
stg
–40 to +125
–40 to +125
T
A
°C
OPERATING CHARACTERISTICS (V = 3.0 Vdc, T = 25°C unless otherwise noted, P1 > P2)
S
A
Characteristic
Symbol
Min
0
Typ
—
Max
50
Unit
kPa
Vdc
mAdc
mV
(1)
Pressure Range
P
OP
(2)
Supply Voltage
Supply Current
Full Scale Span
V
S
—
3.0
6.0
60
6.0
—
I
o
—
(3)
V
FSS
45
90
(4)
Offset
V
off
0
20
35
mV
Sensitivity
(5)
∆V/∆P
—
—
1.2
—
—
mV/kPa
Linearity
Pressure Hysteresis (0 to 50 kPa)
(5)
–0.25
—
0.25
—
%V
%V
%V
FSS
FSS
FSS
(5)
—
± 0.1
± 0.5
—
Temperature Hysteresis (– 40°C to +125°C)
—
—
—
(5)
Temperature Coefficient of Full Scale Span
(5)
TCV
FSS
–0.22
—
–0.16
—
%V
/°C
µV/°C
FSS
Temperature Coefficient of Offset
TCV
off
± 15
—
(5)
Temperature Coefficient of Resistance
Input Impedance
TCR
0.21
400
750
—
0.27
550
1800
—
%Z /°C
in
Z
in
—
Ω
Ω
Output Impedance
Z
out
—
(6)
Response Time (10% to 90%)
t
R
1.0
20
ms
ms
Warm–Up
—
—
—
—
(9)
Offset Stability
—
± 0.5
—
%V
FSS
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
—
Typ
2.0
—
Max
—
Unit
Weight (Basic Element Case 344–15)
—
—
Grams
kPa
(7)
Common Mode Line Pressure
—
690
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
FSS
4. Offset (V ) is defined as the output voltage at the minimum rated pressure.
off
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
•
TcSpan:
TcOffset:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
•
TCR:
Z
deviation with minimum rated pressure applied, over the temperature range of –40°C to +125°C,
in
relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
TEMPERATURE COMPENSATION
Figure 2 shows the typical output characteristics of the
MPX50 series over temperature.
or by designing your system using the MPX2050 series
sensors.
Several approaches to external temperature compensa-
tion over both –40 to +125°C and 0 to +80°C ranges are
presented in Motorola Applications Note AN840.
The X–ducer piezoresistive pressure sensor element is a
semiconductor device which gives an electrical output signal
proportional to the pressure applied to the device. This de-
vice uses a unique transverse voltage diffused semiconduc-
tor strain gauge which is sensitive to stresses produced in a
thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differ-
ences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: V
= V + sensitivity x P over the operating
out
off
pressure range (see Figure 3). There are two basic methods
for calculating nonlinearity: (1) end point straight line fit or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components,
70
100
90
LINEARITY
60
–40°C
MPX50
= 3 Vdc
P1 > P2
80
70
60
50
40
30
+25°C
50
V
S
ACTUAL
40
SPAN
RANGE
(TYP)
+125°C
SPAN
(V
)
FSS
30
20
THEORETICAL
20
10
0
PSI
kPa
OFFSET
(TYP)
10
0
OFFSET
(V
)
OFF
0
0
1
2
3
20
4
5
6
7
8
0
MAX
P
10
30
40
50
OP
PRESSURE DIFFERENTIAL
PRESSURE (kPA)
Figure 2. Output versus Pressure Differential
Figure 3. Linearity Specification Comparison
SILICONE
DIE COAT
STAINLESS STEEL
METAL COVER
EPOXY
DIE
P1
P2
WIRE BOND
CASE
RTV DIE
BOND
LEAD FRAME
Figure 4. Cross–Sectional Diagram (not to scale)
Figure 4 illustrates the differential or gauge configuration
in the basic chip carrier (Case 344–15). A silicone gel iso-
lates the die surface and wire bonds from the environment,
while allowing the pressure signal to be transmitted to the sil-
icon diaphragm.
tics and internal reliability and qualification tests are based
on use of dry air as the pressure media. Media other than dry
air may have adverse effects on sensor performance and
long term reliability. Contact the factory for information re-
garding media compatibility in your application.
The MPX50 series pressure sensor operating characteris-
Motorola Sensor Device Data
3
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
pressure sensor is designed to operate with positive differen-
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing silicone gel which
isolates the die from the environment. The Motorola MPX
tial pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Part Number
Case Type
344–15
Pressure (P1) Side Identifier
Stainless Steel Cap
MPX50D
MPX50DP
MPX50GP
344C–01
344B–01
344D–01
344E–01
344A–01
344F–01
344G–01
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
MPX50GVP
MPX50GS
Side with Port Attached
Stainless Steel Cap
MPX50GVS
MPX50GSX
MPX50GVSX
Side with Port Attached
Stainless Steel Cap
ORDERING INFORMATION
MPX50 series pressure sensors are available in differential and gauge configurations. Devices are available with basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
Device Type
Basic Element
Ported Elements
Options
Case Type
Case 344–15
Order Number
MPX50D
Device Marking
MPX50D
Differential
Differential
Gauge
Case 344C–01
Case 344B–01
Case 344D–01
Case 344E–01
Case 344A–01
Case 344F–01
Case 344G–01
MPX50DP
MPX50DP
MPX50GP
MPX50GVP
MPX50D
MPX50D
MPX50D
MPX50D
MPX50GP
MPX50GVP
MPX50GS
MPX50GVS
MPX50GSX
MPX50GVSX
Gauge Vacuum
Gauge Stovepipe
Gauge Vacuum Stovepipe
Gauge Axial
Gauge Vacuum Axial
4
Motorola Sensor Device Data
PACKAGE DIMENSIONS
NOTES:
C
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
POSITIVE
PRESSURE (P1)
R
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
M
INCHES
MILLIMETERS
B
–A–
DIM
A
B
C
D
MIN
MAX
0.630
0.534
0.220
0.020
0.064
MIN
15.11
13.06
5.08
MAX
16.00
13.56
5.59
0.595
0.514
0.200
0.016
0.048
N
L
1
2
3
4
PIN 1
0.41
0.51
–T–
F
1.22
1.63
SEATING
G
J
L
M
N
R
0.100 BSC
2.54 BSC
PLANE
0.014
0.695
0.016
0.725
0.36
0.40
G
POSITIVE
PRESSURE
(P1)
J
17.65
18.42
F
30 NOM
30 NOM
D 4 PL
0.475
0.430
0.495
0.450
12.07
10.92
12.57
11.43
M
M
0.136 (0.005)
T
A
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE W
NOTES:
PORT #2
VACUUM
PRESSURE
(P2)
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
C
A
POSITIVE
PRESSURE
(P1)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
MAX
18.28
6.48
0.690
0.245
0.780
0.016
0.048
PIN 1
–B–
V
19.81
0.41
20.82
0.51
2
3
1
4
1.22
1.63
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
J
V
N
G
F
R
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
0.13 (0.005)
SEATING
–T–
M
M
T
B
PLANE
CASE 344A–01
ISSUE B
Motorola Sensor Device Data
5
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
SEATING
PLANE
–T–
U
L
R
INCHES
MILLIMETERS
H
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
1.145
0.685
0.305
0.016
0.048
N
B
PORT #1
–Q–
POSITIVE
PRESSURE
(P1)
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
1
2
3
4
PIN 1
K
–P–
S
M
S
0.25 (0.010)
T
Q
J
F
U
0.910 BSC
23.11 BSC
G
C
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344B–01
ISSUE B
NOTES:
–A–
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
V
U
PORT #1
W
L
R
H
INCHES
MILLIMETERS
PORT #2
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.435
0.020
0.064
MIN
29.08
17.40
10.29
0.41
MAX
29.85
18.16
11.05
0.51
PORT #1
POSITIVE PRESSURE
(P1)
PORT #2
VACUUM
(P2)
1.145
0.685
0.405
0.016
0.048
N
–Q–
1.22
1.63
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
SEATING
PLANE
SEATING
PLANE
B
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.063
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.159
0.083
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
1.60
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
2.11
1
2
3 4
PIN 1
K
–P–
M
S
0.25 (0.010)
T
Q
–T–
–T–
S
F
J
6.10
G
C
U
V
W
0.910 BSC
23.11 BSC
D 4 PL
0.248
0.310
0.278
0.330
6.30
7.87
7.06
8.38
M
S
S
0.13 (0.005)
T
S
Q
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344C–01
ISSUE B
6
Motorola Sensor Device Data
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
–A–
U
SEATING
PLANE
INCHES
MILLIMETERS
–T–
L
DIM
A
B
C
D
F
MIN
MAX
1.175
0.715
0.325
0.020
0.064
MIN
29.08
17.40
7.75
0.41
1.22
MAX
29.85
18.16
8.26
0.51
1.63
PORT #2
VACUUM
(P2)
1.145
0.685
0.305
0.016
0.048
H
R
POSITIVE
PRESSURE
(P1)
N
–Q–
G
H
J
K
L
N
P
Q
R
S
0.100 BSC
2.54 BSC
0.182
0.014
0.695
0.290
0.420
0.153
0.153
0.230
0.220
0.194
0.016
0.725
0.300
0.440
0.159
0.158
0.250
0.240
4.62
0.36
17.65
7.37
10.67
3.89
3.89
5.84
5.59
4.93
0.41
18.42
7.62
11.18
4.04
4.04
6.35
6.10
B
1
2
3
4
K
PIN 1
S
U
0.910 BSC
23.11 BSC
C
F
–P–
G
STYLE 1:
J
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
M
S
0.25 (0.010)
T
Q
D 4 PL
M
S
S
0.13 (0.005)
T
S
Q
CASE 344D–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
PORT #1
POSITIVE
PRESSURE
(P1)
C
A
BACK SIDE
VACUUM
(P2)
INCHES
MILLIMETERS
DIM
A
B
C
D
F
MIN
MAX
0.720
0.255
0.820
0.020
0.064
MIN
17.53
6.22
19.81
0.41
MAX
18.28
6.48
20.82
0.51
0.690
0.245
0.780
0.016
0.048
–B–
V
3
2
4
1
1.22
1.63
PIN 1
G
J
K
N
R
S
0.100 BSC
2.54 BSC
0.014
0.345
0.300
0.178
0.220
0.182
0.016
0.375
0.310
0.186
0.240
0.194
0.36
8.76
7.62
4.52
5.59
4.62
0.41
9.53
7.87
4.72
6.10
4.93
K
S
V
J
N
G
STYLE 1:
F
R
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
D 4 PL
SEATING
PLANE
M
M
–T–
0.13 (0.005)
T B
CASE 344E–01
ISSUE B
Motorola Sensor Device Data
7
PACKAGE DIMENSIONS — CONTINUED
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
–Q–
E
U
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
N
S
B
4.57
1.63
V
0.100 BSC
R
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PORT #1
POSITIVE
PRESSURE
(P1)
PIN 1
–P–
M
M
0.25 (0.010)
T Q
4
3
2
1
K
U
V
F
J
G
STYLE 1:
D 4 PL
0.13 (0.005)
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
M
S
S
T
P
Q
CASE 344F–01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
–T–
C
A
U
–Q–
E
INCHES
MILLIMETERS
DIM
A
B
C
D
E
F
G
J
K
N
P
Q
R
S
MIN
MAX
1.120
0.760
0.650
0.020
0.180
0.064
MIN
27.43
18.80
16.00
0.41
4.06
1.22
2.54 BSC
0.36
5.59
1.78
3.81
3.81
11.18
17.65
21.34
4.62
MAX
28.45
19.30
16.51
0.51
1.080
0.740
0.630
0.016
0.160
0.048
POSITIVE
PRESSURE
(P1)
4.57
1.63
N
B
R
V
0.100 BSC
0.014
0.220
0.070
0.150
0.150
0.440
0.695
0.840
0.182
0.016
0.240
0.080
0.160
0.160
0.460
0.725
0.860
0.194
0.41
6.10
2.03
4.06
4.06
11.68
18.42
21.84
4.92
PIN 1
PORT #2
VACUUM
(P2)
–P–
M
M
0.25 (0.010)
T Q
1
2
3
4
S
U
V
K
F
J
STYLE 1:
G
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
D 4 PL
0.13 (0.005)
M
S
S
T
P
Q
CASE 344G–01
ISSUE B
8
Motorola Sensor Device Data
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specificallydisclaims any and all liability, including without limitation consequential or incidental damages. “Typical” parameters which may be provided in Motorola
datasheetsand/orspecificationscananddovaryindifferentapplicationsandactualperformancemayvaryovertime. Alloperatingparameters,including“Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
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arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and
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are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Motorola Sensor Device Data
9
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